JPH0150132B2 - - Google Patents
Info
- Publication number
- JPH0150132B2 JPH0150132B2 JP5794681A JP5794681A JPH0150132B2 JP H0150132 B2 JPH0150132 B2 JP H0150132B2 JP 5794681 A JP5794681 A JP 5794681A JP 5794681 A JP5794681 A JP 5794681A JP H0150132 B2 JPH0150132 B2 JP H0150132B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- vibration mode
- present
- order
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 238000005452 bending Methods 0.000 description 13
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は３本の振動枝を有し、長さたて１次振
動モードで動作する圧電振動子（以下簡単のため
Ｅ型振動子と称する）の共振周波数温度特性の改
良に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is a piezoelectric vibrator (hereinafter referred to as an E-type vibrator for simplicity) that has three vibrating branches and operates in a longitudinal primary vibration mode. This invention relates to improvements in the resonant frequency temperature characteristics of
第１図は従来及び本発明に係るＥ型振動子の外
形を示す斜視図である。第１図において３本の振
動枝１，２，３の長さ寸法は、ほぼ等しく、幅寸
法については振動枝１，３が互にほぼ等しく、振
動枝２の幅寸法は任意に選べる。従来のＥ型振動
子は、利用しようとしている長さたて１次振動モ
ードの他の各種の振動モードが高次振動を含めて
無数に存在しており、これらの振動モードは利用
しようとしている振動モードに対しては不要なも
のと考え、長さたて１次振動モードが他の振動モ
ードと出来るだけ結合しないようにすることが行
われてきた。
FIG. 1 is a perspective view showing the external shape of an E-type vibrator according to the conventional technology and the present invention. In FIG. 1, the length dimensions of the three vibrating branches 1, 2, and 3 are approximately equal, and the width dimensions of the vibrating branches 1 and 3 are approximately equal, and the width dimension of the vibrating branch 2 can be arbitrarily selected. In the conventional E-type vibrator, in addition to the longitudinal primary vibration mode that is intended to be used, there are countless other vibration modes including higher-order vibrations, and these vibration modes are intended to be used. It has been considered that vibration modes are unnecessary, and efforts have been made to prevent the longitudinal primary vibration mode from coupling with other vibration modes as much as possible.
そのため従来のＥ型振動子は共振周波数の温度
特性を良くするのには限界があつた。
Therefore, the conventional E-type vibrator has a limit in improving the temperature characteristics of the resonance frequency.
本発明の目的は、共振周波数の温度特性が常温
付近で比較的フラツトになるＥ型振動子を提案す
ることにある。 An object of the present invention is to propose an E-type vibrator whose temperature characteristic of resonance frequency is relatively flat near room temperature.
この目的を達成するために、本発明では、水晶
からなる圧電振動子のカツト方位はＺカツトの状
態からＸ軸のまわりで角度θだけ回転されており
３本の振動枝の各側面は励振用の金属薄膜電極が
固着され、中央の振動枝と両側の振動枝は互に逆
位相で振動を行う圧電振動子において、長さたて
１次振動モードと該圧電振動子に存在する面内屈
曲高次振動モードのうちの１つとが結合するよう
に構成することを特徴としている。
In order to achieve this purpose, in the present invention, the cut direction of the piezoelectric vibrator made of crystal is rotated by an angle θ around the X axis from the Z cut state, and each side of the three vibrating branches is used for excitation. In a piezoelectric vibrator in which a metal thin film electrode is fixed, and the vibrating branch in the center and the vibrating branches on both sides vibrate in opposite phases, the longitudinal primary vibration mode and the in-plane bending that exists in the piezoelectric vibrator are It is characterized by being configured so that it is coupled with one of the higher-order vibration modes.
以下本発明を詳細に説明する。第２図Ａ，Ｂは
それぞれＥ型振動子の長さたて１次振動モード及
び面内屈曲１次振動モードの説明図である。矢印
４は振動変位のおおよその方向と大きさを示し、
点線５は振動変位零の時刻から（1/4）周期後の
時刻における振動変位を示す。面内屈曲振動モー
ドは簡単のため１次振動モードだけを示し、高次
振動モードは省略した。
The present invention will be explained in detail below. FIGS. 2A and 2B are explanatory views of the longitudinal primary vibration mode and the in-plane bending primary vibration mode of the E-type vibrator, respectively. Arrow 4 indicates the approximate direction and magnitude of the vibration displacement;
A dotted line 5 indicates the vibration displacement at a time (1/4) period after the time of zero vibration displacement. For the sake of simplicity, only the first-order vibration mode is shown for the in-plane bending vibration mode, and the higher-order vibration mode is omitted.
上記２種類の振動モードの共振周波数は、振動
枝１の長さ寸法をｌ、幅寸法をｈ、厚さ寸法をｔ
として、第３図のような片持はりで近似すると次
のように表わせる。 The resonance frequencies of the above two types of vibration modes are as follows: the length of the vibrating branch 1 is l, the width is h, and the thickness is t.
When approximated by a cantilever beam as shown in Figure 3, it can be expressed as follows.
長さたて振動の場合
ここでfL：長さたて振動の共振周波数
Ｅ：振動子材料のヤング率
ｐ：振動子材料の密度
ｎ：振動の次数（ｎ＝１、２、３……）
面内屈曲振動の場合
ここでfF：面内屈曲振動の共振周波数
ｉ：振動の次数（ｉ＝１、２、３……）
m1：1.875
m2：4.694
m3：7.855
m4：11.00
………………
上記(1)、(2)式で示される共振周波数の公式は、
それぞれの振動モードが単独に存在している場
合、即ち振動モードの結合がない場合のものであ
る。しかし２つの振動モードの結合がある場合に
は、fLとfFが非常に接近しているため、(1)、(2)式
から
fL＝fF ……(3)
として、たて振動モードと面内屈曲振動モードが
結合を起すための振動枝寸法比のおおよその関係
式が得られる。(1)、(2)、(3)式からこの関係式は次
のようになる。 For longitudinal vibration Here, f L : Resonance frequency of longitudinal vibration E: Young's modulus of the vibrator material p: Density of the vibrator material n: Order of vibration (n=1, 2, 3...) In the case of in-plane bending vibration Here, f F : Resonance frequency of in-plane bending vibration i: Order of vibration (i=1, 2, 3...) m 1 : 1.875 m 2 : 4.694 m 3 : 7.855 m 4 : 11.00...... The formula for the resonant frequency shown in equations (1) and (2) above is:
This is a case where each vibration mode exists independently, that is, when there is no combination of vibration modes. However, when there is a coupling of two vibrational modes, f L and f F are very close to each other, so from equations (1) and (2), f L = f F ...(3), An approximate relational expression of the vibration branch size ratio for coupling between the vibration mode and the in-plane bending vibration mode is obtained. From equations (1), (2), and (3), this relational expression is as follows.
(4)式から（ｈ／ｌ）の具体的数値を求めてみ
る。長さたて振動モードは１次振動（ｎ＝１）と
しておき面内屈曲振動モードは１次振動から４次
振動まで（ｉ＝１〜４）変えたときの（ｈ／ｌ）
の値は(4)式から次のように求められる。 Let's try to find the specific value of (h/l) from equation (4). The longitudinal vibration mode is set to 1st order vibration (n = 1), and the in-plane bending vibration mode is changed from 1st order vibration to 4th order vibration (i = 1 to 4) (h/l)
The value of is obtained from equation (4) as follows.
ｎ＝１、ｉ＝１のとき （ｈ／ｌ）＝1.55
ｎ＝１、ｉ＝２のとき （ｈ／ｌ）＝0.247
ｎ＝１、ｉ＝３のとき （ｈ／ｌ）＝0.088
ｎ＝１、ｉ＝４のとき （ｈ／ｌ）＝0.045
上記の結果から長さたて１次振動モードに結合
させる面内屈曲振動モードの次数が１次（ｉ＝
１）の場合は、振動枝の幅寸法が長さ寸法にくら
べて大きな値になり、この場合は実現は無理であ
る。面内屈曲振動モードの次数は２次（ｉ＝２）
以上であれば、振動枝の形状に無理がなくなる。
上記（ｈ／ｌ）の値は、あくまでも目安にすぎ
ず、実際には上記で見積もられた（ｈ／ｌ）の値
とは若干ずれた値を中心にして、ある幅をもつて
２つの振動モードは結合し、２つの振動モードの
共振周波数は接近して存在している。このとき長
さたて１次振動モードの共振周波数温度特性は改
善される。 When n=1, i=1 (h/l)=1.55 When n=1, i=2 (h/l)=0.247 When n=1, i=3 (h/l)=0.088 n= 1, when i=4 (h/l)=0.045 From the above results, the order of the in-plane bending vibration mode to be coupled to the longitudinal first-order vibration mode is first-order (i=
In case 1), the width dimension of the vibrating branch becomes a larger value than the length dimension, and in this case, it is impossible to realize. The order of the in-plane bending vibration mode is 2nd order (i=2)
If the above is the case, the shape of the vibrating branch will be reasonable.
The above (h/l) value is just a guideline, and in reality, two values with a certain width are used, centered on a value that is slightly different from the (h/l) value estimated above. The vibration modes are coupled and the resonance frequencies of the two vibration modes are close to each other. At this time, the resonance frequency temperature characteristics of the longitudinal primary vibration mode are improved.
第４図は水晶からなる本発明実施例のカツト方
位を説明する図である。Ｘ軸、Ｙ軸及びＺ軸はそ
れぞれ水晶の電気軸、機械軸及び光軸を示す。振
動子１１はＺカツトの状態からＸ軸のまわりで、
角度θ（θの正の方向は反時計方向とする）だけ
回転されている。第５図は本発明実施例及び従来
例における共振周波数温度特性を示すグラフであ
る。曲線Ａは長さたて１次振動モード（ｎ＝１）
と面内屈曲３次振動モード（ｉ＝３）が結合して
おり、共振周波数は約500KHz、（ｈ／ｌ）＝0.10、
θ＝−5゜である。曲線Ｂは従来のＥ型振動子の場
合で、長さたて１次振動モードは面内屈曲振動モ
ードとほとんど結合していない。この場合の共振
周波数は約510KHzで（ｈ／ｌ）＝0.075、θ＝1゜で
ある。第５図からわかるように、温度０℃〜40℃
間における周波数偏差（Δf／ｆ）は本発明実施
例の方が従来のＥ型振動子よりも半分位に小さく
なつている。第６図Ａは本発明実施例の電極配置
を示す斜視図である。水晶からなる振動枝１，
２，３の表面には、金属薄膜電極６，７が蒸着等
によつて固着されている。振動枝１，２，３の先
端には、周波数調整用の付加質量として、金属膜
８が固着されている。第６図Ｂは振動枝１，２，
３の長さ方向から見た電極の接続状態を示す。矢
印は電界の方向を示す。電極端子９，１０に振動
子１１の長さたて１次振動モードの共振周波数に
等しい周波数の電圧を印加すれば、振動子１１は
第７図に示すように長さたて１次振動モードと面
内屈曲３次振動モードとが混りあつた形の振動モ
ードで振動する。第８図は本発明実施例の支持構
造を示す斜視図である。振動子１１の電極端子
９，１０は円筒形の気密端子１２のステム１３，
１４に導電接着剤１５で固着されている。
FIG. 4 is a diagram illustrating the cut direction of an embodiment of the present invention made of quartz. The X, Y, and Z axes indicate the electrical, mechanical, and optical axes of the crystal, respectively. The vibrator 11 moves around the X-axis from the Z-cut state,
It is rotated by an angle θ (the positive direction of θ is counterclockwise). FIG. 5 is a graph showing the resonant frequency temperature characteristics in the embodiment of the present invention and the conventional example. Curve A is the longitudinal first-order vibration mode (n=1)
and in-plane bending third-order vibration mode (i = 3) are coupled, the resonance frequency is approximately 500KHz, (h/l) = 0.10,
θ=-5°. Curve B is for a conventional E-type vibrator, and the longitudinal primary vibration mode is hardly coupled with the in-plane bending vibration mode. The resonance frequency in this case is approximately 510 KHz, (h/l)=0.075, and θ=1°. As can be seen from Figure 5, the temperature ranges from 0°C to 40°C.
The frequency deviation (Δf/f) between them is about half smaller in the embodiment of the present invention than in the conventional E-type vibrator. FIG. 6A is a perspective view showing the electrode arrangement according to the embodiment of the present invention. Vibrating branch 1 made of crystal,
Metal thin film electrodes 6 and 7 are fixed to the surfaces of 2 and 3 by vapor deposition or the like. A metal film 8 is fixed to the tips of the vibrating branches 1, 2, and 3 as an additional mass for frequency adjustment. Figure 6B shows vibration branches 1, 2,
3 shows the connection state of the electrodes viewed from the length direction. Arrows indicate the direction of the electric field. If a voltage with a frequency equal to the resonance frequency of the longitudinal primary vibration mode of the vibrator 11 is applied to the electrode terminals 9 and 10, the vibrator 11 will be in the vertical primary vibration mode as shown in FIG. It vibrates in a mixed vibration mode of the 3rd order vibration mode and the in-plane bending vibration mode. FIG. 8 is a perspective view showing a support structure according to an embodiment of the present invention. The electrode terminals 9 and 10 of the vibrator 11 are connected to the stem 13 of the cylindrical airtight terminal 12,
14 with a conductive adhesive 15.
以上説明したように本発明は中周波で比較的
周波数温度特性がよいこと。振動子のベース部
（支持部）の振動変位が小さくなるので支持が極
めて容易であること。ホトリソグラフイー技術
によつて作れるため量産性があることなどから本
発明は高精度電子時計の時間基準振動子として大
きなメリツトを有する。
As explained above, the present invention has relatively good frequency temperature characteristics at medium frequencies. The vibration displacement of the base part (supporting part) of the vibrator is small, so it is extremely easy to support it. The present invention has great merits as a time reference oscillator for high-precision electronic watches because it can be manufactured using photolithography technology and can be mass-produced.
第１図は従来及び本発明に係るＥ型振動子の形
状を示す斜視図、第２図Ａは従来のＥ型振動子に
存在する長さたて１次振動モードの説明図、第２
図Ｂは従来のＥ型振動子に存在する面内屈曲３次
振動モードの説明図、第３図は一般的な片持はり
の斜視図、第４図は本発明のカツト方位の説明
図、第５図は本発明実施例及び従来例の共振周波
数温度特性を示すグラフ、第６図Ａは本発明実施
例の金属薄膜電極の配置を示す斜視図、第６図Ｂ
は金属薄膜電極の接続状態の説明図、第７図は本
発明実施例の振動モードの説明図、第８図は本発
明実施例の支持構造を示す斜視図である。
１，２，３……振動枝、４……振動変位の方向
と大きさ、５……振動モード、６，７……金属薄
膜電極、９，１０……電極端子、１１……本発明
実施例の振動子、１２……気密端子、１３，１４
……ステム、１５……導電接着剤。
FIG. 1 is a perspective view showing the shape of the conventional E-type vibrator and the present invention, FIG.
Figure B is an explanatory diagram of the in-plane bending third-order vibration mode existing in a conventional E-type vibrator, Figure 3 is a perspective view of a general cantilever beam, and Figure 4 is an explanatory diagram of the cut orientation of the present invention. FIG. 5 is a graph showing the resonant frequency temperature characteristics of the embodiment of the present invention and the conventional example, FIG. 6A is a perspective view showing the arrangement of the metal thin film electrode of the embodiment of the present invention, and FIG. 6B
7 is an explanatory diagram of the connection state of metal thin film electrodes, FIG. 7 is an explanatory diagram of the vibration mode of the embodiment of the present invention, and FIG. 8 is a perspective view of the support structure of the embodiment of the present invention. 1, 2, 3... Vibration branch, 4... Direction and magnitude of vibration displacement, 5... Vibration mode, 6, 7... Metal thin film electrode, 9, 10... Electrode terminal, 11... Implementation of the present invention Example vibrator, 12... Airtight terminal, 13, 14
... Stem, 15 ... Conductive adhesive.
Claims (1)
りに角度θ（θの正の方向は反時計方向とする）
だけ回転した３本の振動枝を有する水晶からなる
圧電振動子にあつて、３本の該振動枝の各側面に
は励振用の金属薄膜電極が固着され、中央の振動
枝と両側の振動枝とは互に逆位相で振動を行う圧
電振動子において、 長さたて１次振動モード（ｎ＝１）と該圧電振
動子に存在する面内屈曲高次振動モード（ｎ＝
２、３、４）のうちの１つとが結合するように構
成することを特徴とする圧電振動子。[Claims] 1. Angle θ around the X axis from the state where the cut direction is Z cut (the positive direction of θ is counterclockwise)
In a piezoelectric vibrator made of quartz crystal, which has three vibrating branches rotated by In a piezoelectric vibrator that vibrates in phase opposite to
A piezoelectric vibrator characterized in that it is configured to be coupled with one of 2, 3, and 4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5794681A JPS57173218A (en) | 1981-04-17 | 1981-04-17 | Piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5794681A JPS57173218A (en) | 1981-04-17 | 1981-04-17 | Piezoelectric oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57173218A JPS57173218A (en) | 1982-10-25 |
| JPH0150132B2 true JPH0150132B2 (en) | 1989-10-27 |
Family
ID=13070193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5794681A Granted JPS57173218A (en) | 1981-04-17 | 1981-04-17 | Piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57173218A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002031975A1 (en) * | 2000-10-10 | 2002-04-18 | Citizen Watch Co., Ltd. | Torsional vibrator |
-
1981
- 1981-04-17 JP JP5794681A patent/JPS57173218A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002031975A1 (en) * | 2000-10-10 | 2002-04-18 | Citizen Watch Co., Ltd. | Torsional vibrator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57173218A (en) | 1982-10-25 |
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