JPH0148346B2 - - Google Patents

Info

Publication number
JPH0148346B2
JPH0148346B2 JP58078675A JP7867583A JPH0148346B2 JP H0148346 B2 JPH0148346 B2 JP H0148346B2 JP 58078675 A JP58078675 A JP 58078675A JP 7867583 A JP7867583 A JP 7867583A JP H0148346 B2 JPH0148346 B2 JP H0148346B2
Authority
JP
Japan
Prior art keywords
vapor deposition
film
deposition material
ultraviolet light
tin oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58078675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59205474A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP7867583A priority Critical patent/JPS59205474A/ja
Publication of JPS59205474A publication Critical patent/JPS59205474A/ja
Publication of JPH0148346B2 publication Critical patent/JPH0148346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7867583A 1983-05-04 1983-05-04 蒸着方法 Granted JPS59205474A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7867583A JPS59205474A (ja) 1983-05-04 1983-05-04 蒸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7867583A JPS59205474A (ja) 1983-05-04 1983-05-04 蒸着方法

Publications (2)

Publication Number Publication Date
JPS59205474A JPS59205474A (ja) 1984-11-21
JPH0148346B2 true JPH0148346B2 (enExample) 1989-10-18

Family

ID=13668439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7867583A Granted JPS59205474A (ja) 1983-05-04 1983-05-04 蒸着方法

Country Status (1)

Country Link
JP (1) JPS59205474A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6289861A (ja) * 1985-10-15 1987-04-24 Showa Shinku:Kk 薄膜衝撃蒸着方法とその装置
JPH02194161A (ja) * 1989-01-20 1990-07-31 Sanyo Electric Co Ltd 金属酸化物薄膜の形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948939A (ja) * 1982-09-14 1984-03-21 Victor Co Of Japan Ltd 膜形成法及び膜形成装置

Also Published As

Publication number Publication date
JPS59205474A (ja) 1984-11-21

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