JPH0147751B2 - - Google Patents

Info

Publication number
JPH0147751B2
JPH0147751B2 JP56049544A JP4954481A JPH0147751B2 JP H0147751 B2 JPH0147751 B2 JP H0147751B2 JP 56049544 A JP56049544 A JP 56049544A JP 4954481 A JP4954481 A JP 4954481A JP H0147751 B2 JPH0147751 B2 JP H0147751B2
Authority
JP
Japan
Prior art keywords
latch
voltage
capacitor
resistance
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56049544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57163876A (en
Inventor
Tsutomu Hata
Taiji Nishiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56049544A priority Critical patent/JPS57163876A/ja
Publication of JPS57163876A publication Critical patent/JPS57163876A/ja
Publication of JPH0147751B2 publication Critical patent/JPH0147751B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP56049544A 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device Granted JPS57163876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56049544A JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56049544A JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63196741A Division JPH01180472A (ja) 1988-08-05 1988-08-05 半導体集積回路装置のラッチアップ耐量の測定方法及び測定装置

Publications (2)

Publication Number Publication Date
JPS57163876A JPS57163876A (en) 1982-10-08
JPH0147751B2 true JPH0147751B2 (enrdf_load_html_response) 1989-10-16

Family

ID=12834128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56049544A Granted JPS57163876A (en) 1981-03-31 1981-03-31 Measuring method for latch-up dielectric strength of complementary mos integrated-circuit device

Country Status (1)

Country Link
JP (1) JPS57163876A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144370A (ja) * 1984-08-07 1986-03-04 Mitsubishi Electric Corp 静電気破壊試験方法
JPH0721528B2 (ja) * 1985-05-09 1995-03-08 ロ−ム株式会社 Ｃｍｏｓ素子のラツチアツプ現象測定方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644866A (en) * 1979-09-21 1981-04-24 Hitachi Ltd Measurement of breakdown strength of latch circuit

Also Published As

Publication number Publication date
JPS57163876A (en) 1982-10-08

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