JPH0144861Y2 - - Google Patents

Info

Publication number
JPH0144861Y2
JPH0144861Y2 JP1984160422U JP16042284U JPH0144861Y2 JP H0144861 Y2 JPH0144861 Y2 JP H0144861Y2 JP 1984160422 U JP1984160422 U JP 1984160422U JP 16042284 U JP16042284 U JP 16042284U JP H0144861 Y2 JPH0144861 Y2 JP H0144861Y2
Authority
JP
Japan
Prior art keywords
diaphragm
gas
silicon wafer
glass plate
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984160422U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6175565U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984160422U priority Critical patent/JPH0144861Y2/ja
Publication of JPS6175565U publication Critical patent/JPS6175565U/ja
Application granted granted Critical
Publication of JPH0144861Y2 publication Critical patent/JPH0144861Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Check Valves (AREA)
JP1984160422U 1984-10-25 1984-10-25 Expired JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984160422U JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-25 1984-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984160422U JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-25 1984-10-25

Publications (2)

Publication Number Publication Date
JPS6175565U JPS6175565U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-21
JPH0144861Y2 true JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-25

Family

ID=30718344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984160422U Expired JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-10-25 1984-10-25

Country Status (1)

Country Link
JP (1) JPH0144861Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864449U (ja) * 1981-10-26 1983-04-30 日本電気株式会社 マイクロ弁
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法

Also Published As

Publication number Publication date
JPS6175565U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-21

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