JPH0143455Y2 - - Google Patents

Info

Publication number
JPH0143455Y2
JPH0143455Y2 JP17281384U JP17281384U JPH0143455Y2 JP H0143455 Y2 JPH0143455 Y2 JP H0143455Y2 JP 17281384 U JP17281384 U JP 17281384U JP 17281384 U JP17281384 U JP 17281384U JP H0143455 Y2 JPH0143455 Y2 JP H0143455Y2
Authority
JP
Japan
Prior art keywords
pipe
gas
plate
chamber
ventilation pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17281384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6186514U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17281384U priority Critical patent/JPH0143455Y2/ja
Publication of JPS6186514U publication Critical patent/JPS6186514U/ja
Application granted granted Critical
Publication of JPH0143455Y2 publication Critical patent/JPH0143455Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP17281384U 1984-11-13 1984-11-13 Expired JPH0143455Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17281384U JPH0143455Y2 (pm) 1984-11-13 1984-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17281384U JPH0143455Y2 (pm) 1984-11-13 1984-11-13

Publications (2)

Publication Number Publication Date
JPS6186514U JPS6186514U (pm) 1986-06-06
JPH0143455Y2 true JPH0143455Y2 (pm) 1989-12-18

Family

ID=30730472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17281384U Expired JPH0143455Y2 (pm) 1984-11-13 1984-11-13

Country Status (1)

Country Link
JP (1) JPH0143455Y2 (pm)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009028632A (ja) * 2007-07-26 2009-02-12 Tokyo Electron Ltd 気体清浄化装置及び気体清浄化方法
JP2013039565A (ja) * 2012-09-03 2013-02-28 Tokyo Electron Ltd 気体清浄化装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009028632A (ja) * 2007-07-26 2009-02-12 Tokyo Electron Ltd 気体清浄化装置及び気体清浄化方法
JP2013039565A (ja) * 2012-09-03 2013-02-28 Tokyo Electron Ltd 気体清浄化装置

Also Published As

Publication number Publication date
JPS6186514U (pm) 1986-06-06

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