JPH0142741B2 - - Google Patents
Info
- Publication number
- JPH0142741B2 JPH0142741B2 JP16126884A JP16126884A JPH0142741B2 JP H0142741 B2 JPH0142741 B2 JP H0142741B2 JP 16126884 A JP16126884 A JP 16126884A JP 16126884 A JP16126884 A JP 16126884A JP H0142741 B2 JPH0142741 B2 JP H0142741B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- crucible
- collector
- container
- molten metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 48
- 239000011882 ultra-fine particle Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000001603 reducing effect Effects 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- -1 H2 Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
- B01J10/005—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out at high temperatures in the presence of a molten material
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、磁性材料、触媒、その他特殊なセ
ラミツクスなどの素材として重要な超微粒子の製
造技術に関する。超微粒子は単位重量当たりの表
面積を極めて大きくすることができるため各種の
分野で注目されており、各種成分の超微粒子の量
産が望まれている。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a technology for producing ultrafine particles, which are important as materials for magnetic materials, catalysts, and other special ceramics. Ultrafine particles have attracted attention in various fields because they can have an extremely large surface area per unit weight, and mass production of ultrafine particles of various components is desired.
（従来技術）
これまで、この種の微粒子を製造するために、
塩化物、有機金属蒸気の水素還元、金属塩溶液か
らの析出法、及びガス蒸発法が知られている。析
出法は化学反応を伴うため純度の高い微粒子を得
ることが困難であつた。ガス蒸発法は、試料を高
温に熱し、発生する蒸気を雰囲気のガスで冷却し
て微粒子を得る方法であり、数Torrから＋数
TorrのHe、Ar等の不活性ガスの雰囲気中で粒子
の素材となる金属をルツボに入れて加熱溶解し、
溶湯表面から発生する蒸気を雰囲気のガスで冷却
して超微粒子を得る。(Prior art) Until now, in order to produce this kind of fine particles,
Hydrogen reduction of chlorides, organometallic vapors, precipitation from metal salt solutions, and gas evaporation methods are known. Since the precipitation method involves chemical reactions, it has been difficult to obtain fine particles with high purity. The gas evaporation method is a method of heating a sample to a high temperature and cooling the generated vapor with atmospheric gas to obtain fine particles.
In an atmosphere of inert gas such as Torr He or Ar, the metal that will become the material of the particles is placed in a crucible and heated and melted.
Ultrafine particles are obtained by cooling the steam generated from the surface of the molten metal with atmospheric gas.
しかし、このガス蒸発法は溶湯表面から自然発
生する蒸気の量により超微粒子の生産量が制限さ
れ、かつ、得られる微粒子の単位量当たりの消費
エネルギーは莫大なものとなつていた。また、製
造条件の設定もかなりの試行錯誤を要するもので
あつた。このため、この方法は純度の高いものが
得られる反面、生産コストが高くなり、超微粒子
の量産に必ずしも適したものとは言えなかつた。 However, in this gas evaporation method, the amount of ultrafine particles produced is limited by the amount of steam naturally generated from the surface of the molten metal, and the energy consumption per unit amount of fine particles obtained is enormous. Furthermore, setting the manufacturing conditions also required considerable trial and error. For this reason, although this method can yield highly pure particles, it increases the production cost and is not necessarily suitable for mass production of ultrafine particles.
（解決すべき問題点）
公知のガス蒸発法による超微粒子製造方法にお
ける最大の欠陥であつた単位時間当たりの収量
（生産効率）の制限を、素材（試料）の蒸発方法
を改良することにより、大幅に改善することをこ
の出願の発明の課題とする。(Problems to be solved) By improving the method of evaporating the material (sample), we have solved the limitation of yield per unit time (production efficiency), which was the biggest defect in the known method of producing ultrafine particles using the gas evaporation method. It is an object of the invention of this application to achieve a significant improvement.
そして、この発明は前記問題点を解決したガス
蒸発法による超微粒子の製造方法、及びこの方法
を実施するのに好適な超微粒子製造装置を提供す
る。 The present invention also provides a method for producing ultrafine particles by a gas evaporation method that solves the above problems, and an apparatus for producing ultrafine particles suitable for carrying out this method.
（問題点を解決するための手段及びその作用）
この発明は、超微粒子の素材となる物質の溶湯
中に気体を送り込むことにより、素材（試料）の
蒸発を促進し超微粒子の生産効率を高くする。素
材（試料）を不活性ガス、還元性ガス、またはそ
れらの混合ガスからなる雰囲気中で溶解し、溶湯
中に不活性ガス、還元性ガス、またはそれらの混
合ガスを好ましくは微細な気泡にして送り込む
と、溶湯（素材が加熱されて溶融したもの）の表
面積が増加し、さらに素材の蒸気を含まないガス
が次々と供給され、蒸気で飽和したガスが搬送さ
れるため蒸発が促進される。素材となる物質は
Ni、Co、Fe、Pb、等の金属、非金属が用いられ
る。蒸発した素材の蒸は、冷却された、または室
温の雰囲気に触れて超微粒子として固化する。雰
囲気の圧力は高いと冷却効率は高いが試料の蒸発
が妨げられる。逆に雰囲気の圧力が低いと試料の
蒸発は妨げられないが冷却効率が低くなる。した
がつて、実験的に最適雰囲気圧力を求め、それを
一定に保つ必要がある。(Means for Solving the Problems and Their Effects) This invention promotes evaporation of the material (sample) by sending gas into the molten metal of the substance that becomes the material of the ultrafine particles, thereby increasing the production efficiency of the ultrafine particles. do. The material (sample) is dissolved in an atmosphere consisting of an inert gas, a reducing gas, or a mixture thereof, and the inert gas, reducing gas, or a mixture thereof is preferably made into fine bubbles in the molten metal. When the molten metal is fed, the surface area of the molten metal (material heated and melted) increases, gas that does not contain the vapor of the material is successively supplied, and the gas saturated with steam is transported, promoting evaporation. The material is
Metals and non-metals such as Ni, Co, Fe, Pb, etc. are used. The evaporated material solidifies into ultrafine particles when exposed to a cooled or room temperature atmosphere. If the atmospheric pressure is high, cooling efficiency is high, but evaporation of the sample is hindered. On the other hand, if the pressure of the atmosphere is low, the evaporation of the sample is not hindered, but the cooling efficiency becomes low. Therefore, it is necessary to experimentally find the optimum atmospheric pressure and keep it constant.
また、この発明の超微粒子製造装置は、前記の
方法を実施するために、超微粒子の素材を溶融す
るためのルツボ、ルツボを加熱する手段、捕集器
及びこれらを内部に収納し、一定の圧力の雰囲気
を満たした容器からなり、ガスを素材の溶湯中に
分配するためのガス分配器をルツボに設けること
により素材の蒸発を促進している。 Further, in order to carry out the method described above, the ultrafine particle manufacturing apparatus of the present invention includes a crucible for melting the ultrafine particle material, a means for heating the crucible, a collector, and a collector, and a certain amount of It consists of a container filled with a pressurized atmosphere, and the crucible is equipped with a gas distributor to distribute gas into the molten material to promote evaporation of the material.
（実施例）
この発明の方法を実施するための装置を第１図
に示す。装置は気密性のある容器１、ルツボ２、
加熱手段３、及び捕集器４からなる。容器１は例
えばステンレスなどからなる円筒状の容器であ
り、ルツボ２、捕集器４などの操作のため開閉で
きるように２つの部分、すなわち容器蓋部１１及
び容器本体１２からなる。また容器１には、排気
及び雰囲気ガス注入のための導管１３、ルツボ２
に結合された熱電対用アルミナ管２４、ガス分配
器２２に結合された導管２３、加熱手段３に結合
された電線、捕集器４を強制的に冷却するために
銅パイプ４４に水等の冷却媒体を循環させる導管
４１，４２などを容器内の気密を保つて外部へ取
り出す手段が設けられている。容器底部に配置さ
れるルツボ２は、第２図ａに示すように、耐熱性
を有し、素材と反応しないアルミナ等の円筒状ル
ツボ容器２１からなり、円筒の底部にアルミナセ
メント等からなる多孔質のガス分配器２２が固着
されている。ガス分配器２２には導管２３が結合
され、また素材の温度を検出するための熱電体を
納めたアルミナ管２４が貫通して取り付けられて
いる。分配器２２の底面には、導管２３から供給
される気体が下方に漏出しないよう気密層２５が
設けられている。このガス分配器２２の形状は任
意であり、この実施例においてはルツボの一部を
兼ねているが、第２図ｂに示すように、ガス分配
器２２をルツボ容器２１とは別体として、ルツボ
容器の底部に載置するようにしてもよい。場合に
よつては、単に複数の導管２３から直接、溶湯中
に気体を吹き込んでもよい。また、材質も、アル
ミナに限らず、溶湯温度に耐え、溶湯との非反応
性があればよく、粗粒を焼結して多孔体を得る方
法によつて作られる。ルツボは黒鉛パイプ等の加
熱手段３に通電することにより加熱される。超微
粒子を付着させる捕集器４は銅円筒４３及び銅パ
イプ４４からなり導管４１，４２を介して流れる
水等の冷却媒体により強制的に冷却するのが好ま
しい。捕集器の形状は任意であり、円筒の上部を
覆つた形状とすることもできる。また加熱手段３
と捕集器４との間には、円筒形の強制的に冷却す
る手段を備えた熱遮蔽体５を配置するのが好まし
い。(Example) An apparatus for carrying out the method of this invention is shown in FIG. The equipment includes an airtight container 1, a crucible 2,
It consists of a heating means 3 and a collector 4. The container 1 is a cylindrical container made of stainless steel, for example, and consists of two parts, namely a container lid 11 and a container body 12, so that the crucible 2, collector 4, etc. can be opened and closed for operation. The container 1 also includes a conduit 13 for exhausting and injecting atmospheric gas, and a crucible 2.
A thermocouple alumina tube 24 connected to the gas distributor 22, a conduit 23 connected to the gas distributor 22, an electric wire connected to the heating means 3, and a copper pipe 44 for forcibly cooling the collector 4. Means is provided for taking out the conduits 41, 42, etc. for circulating the cooling medium to the outside while keeping the inside of the container airtight. The crucible 2 placed at the bottom of the container is, as shown in FIG. A quality gas distributor 22 is fixed. A conduit 23 is connected to the gas distributor 22, and an alumina tube 24 containing a thermoelectric body for detecting the temperature of the material is installed through the gas distributor 22. An airtight layer 25 is provided on the bottom surface of the distributor 22 to prevent the gas supplied from the conduit 23 from leaking downward. The shape of this gas distributor 22 is arbitrary, and in this embodiment it also serves as a part of the crucible, but as shown in FIG. It may also be placed on the bottom of the crucible container. In some cases, the gas may simply be blown directly into the molten metal through the plurality of conduits 23. Further, the material is not limited to alumina, as long as it can withstand the temperature of the molten metal and is non-reactive with the molten metal, and is made by sintering coarse particles to obtain a porous body. The crucible is heated by energizing heating means 3 such as a graphite pipe. The collector 4 to which the ultrafine particles are attached is preferably composed of a copper cylinder 43 and a copper pipe 44, and is preferably forcibly cooled by a cooling medium such as water flowing through conduits 41 and 42. The shape of the collector is arbitrary, and it can also be shaped to cover the top of a cylinder. Also heating means 3
A heat shield 5 having a cylindrical shape and provided with forced cooling means is preferably arranged between the collector 4 and the collector 4 .
次に第１図の装置の作動を説明する。図のよう
に配置したルツボに超微粒子の素材を充填し、容
器１を気密に保つて導管１３から10-5Torrまで
排気し、O2、H2Oなどの活性ガスを除去する。
その後Ar、He等の不活性ガス、H2などの還元性
ガス、またはそれらの混合ガスを、素材の蒸気圧
に応じて定めた所定の圧力（数Torrから数＋
Torr）となるように導管１３を介して注入する。
次にルツボ２に密着した加熱手段３に通電し、熱
電対で試料の温度を監視しながら、試料を溶融し
一定の温度に保つ。このとき、ルツボのガス分配
器２２に前記不活性ガス、還元性ガス、または、
これらの混合ガスを導管２３を介して供給して試
料の蒸発を促進する。蒸発した気体状の素材は、
捕集器４により冷却された雰囲気に触れて数十か
ら数百Åの径の超微粒子となつて固化し、捕集器
４の銅円筒４３の内壁に付着する。こうして蒸発
した素材のほぼ100％が捕集器４により回収され
る。 Next, the operation of the apparatus shown in FIG. 1 will be explained. A crucible arranged as shown in the figure is filled with ultrafine particle material, and the container 1 is kept airtight and evacuated from the conduit 13 to 10 -5 Torr to remove active gases such as O 2 and H 2 O.
After that, inert gas such as Ar and He, reducing gas such as H2 , or a mixture thereof is heated to a predetermined pressure (several Torr to several +
Torr) through conduit 13.
Next, the heating means 3 in close contact with the crucible 2 is energized, and the sample is melted and kept at a constant temperature while the temperature of the sample is monitored with a thermocouple. At this time, the inert gas, reducing gas, or
A mixture of these gases is supplied via conduit 23 to facilitate evaporation of the sample. The evaporated gaseous material is
When exposed to the atmosphere cooled by the collector 4, the particles solidify into ultrafine particles with a diameter of several tens to hundreds of angstroms, and adhere to the inner wall of the copper cylinder 43 of the collector 4. Almost 100% of the material evaporated in this way is collected by the collector 4.
なお、長時間、蒸発を持続させる場合、雰囲気
の圧力が上昇して生産効率が低下する場合には、
容積の大きい容器を用いたり、ガス分配器２２か
らの給気量と同量の雰囲気を導管１３から排気
し、排気を導管２３へ循環させれば良い。また雰
囲気及びガス分配器への給気成分として、還元性
ガスを用いる場合は、還元作用により酸化物の少
ない純度の高い超微粒子を得ることができる。さ
らに捕集器と容器とを兼用させることも可能であ
り、その場合、半体１２の外側から冷却し、その
内壁に超微粒子を付着せしめる。 In addition, if evaporation is continued for a long time, the pressure of the atmosphere increases and production efficiency decreases.
A container with a large capacity may be used, or the same amount of atmosphere as the amount of air supplied from the gas distributor 22 may be exhausted from the conduit 13 and the exhaust gas may be circulated to the conduit 23. Further, when a reducing gas is used as the atmosphere and the gas supply component to the gas distributor, ultrafine particles with high purity and less oxide can be obtained due to the reducing action. Furthermore, it is possible to use both the collector and the container, in which case the half body 12 is cooled from the outside and the ultrafine particles are adhered to its inner wall.
次に素材としてPbを用いた場合の具体的デー
タを示す。 Next, we will show specific data when using Pb as the material.
ルツボ：内径20mmの高密度アルミナ管
容器：容積70
Pb溶融温度：1300℃
雰囲気：60TorrのHe及びH2の混合ガス
ルツボへの導管２３からの給気量が０〜3.8
ml／分の場合の捕集量ｇを図３に示す。ただし蒸
発時間はそれぞれ１時間とし、試料表面からルツ
ボの口までの距離を８mmとする。Crucible: High-density alumina tube container with inner diameter of 20 mm: Volume: 70 Pb melting temperature: 1300°C Atmosphere: 60 Torr mixed gas of He and H 2 The amount of air supplied from the conduit 23 to the crucible is 0 to 3.8
Figure 3 shows the amount of collected g at ml/min. However, the evaporation time is 1 hour for each, and the distance from the sample surface to the mouth of the crucible is 8 mm.
捕集器４で捕集した粒子はアセトン中で超音波
分散させ、沈降速度の差から粒径毎に選別するこ
とができる。 The particles collected by the collector 4 are ultrasonically dispersed in acetone, and can be sorted by particle size based on the difference in sedimentation speed.
（効果）
この発明の方法及び、製造装置によれば、従来
のガス蒸発法に比べて単位時間当りの捕集量が
1.4倍以上に向上し超微粒子の生産効率が飛躍的
に増大する。また製造条件の設定も簡単であり、
従来のガス蒸発法に比べて給気量と温度の制御と
が独立にできるので蒸発状態を長時間安定に保つ
ことができる。さらに還元性の気体を試料に吹き
込むことができるので高純度の超微粒子を得るこ
ともできる。(Effects) According to the method and manufacturing apparatus of the present invention, the amount collected per unit time can be reduced compared to the conventional gas evaporation method.
The production efficiency of ultrafine particles is increased dramatically by more than 1.4 times. It is also easy to set manufacturing conditions,
Compared to conventional gas evaporation methods, the air supply amount and temperature can be controlled independently, so the evaporation state can be kept stable for a long time. Furthermore, since reducing gas can be blown into the sample, highly pure ultrafine particles can be obtained.
第１図は、この発明の超微粒子製造装置の縦断
面を示す。第２図ａ，ｂは、ルツボ及びガス分配
器の実施例を示す図である。第３図は、素材とし
てPbを用いた場合の、ガス分配器への給気量と
捕集量との関係を示すグラフである。
FIG. 1 shows a longitudinal section of the ultrafine particle manufacturing apparatus of the present invention. Figures 2a and 2b are diagrams showing an embodiment of the crucible and gas distributor. FIG. 3 is a graph showing the relationship between the amount of air supplied to the gas distributor and the amount of collected air when Pb is used as the material.
Claims (1)
を送り込み、前記物質の蒸発を促進させ、この蒸
気を冷却させることを特徴とする超微粒子の製造
方法。 ２ 前記気体は、不活性ガス、還元性ガス、また
はこれらの混合ガスである特許請求の範囲第１項
の方法。 ３ 前記気体は微細な気泡として溶湯中に送り込
まれる特許請求の範囲第１または２項の方法。 ４ 前記気体の送り込む量だけ雰囲気を排気する
特許請求の範囲第１，２、または３項記載の方
法。 ５ 気体を溶湯中に送り込むガス分配器を有する
ルツボ、加熱手段、超微粒子の補集器、及びこれ
らを内部に収容する気密な容器からなる超微粒子
製造装置。 ６ 前記ガス分配器はルツボ容器の１部をなす多
孔質の部材からなる特許請求の範囲第５項記載の
装置。 ７ 前記ガス分配器はルツボ容器と別体に設けら
れている特許請求の範囲第５項記載の装置。 ８ 前記捕集器は強制的に冷却されている特許請
求の範囲第５，６、または７項記載の装置。 ９ 前記捕集器は容器の一部を兼ねている特許請
求の範囲第５，６，７、または８項記載の装置。[Scope of Claims] 1. A method for producing ultrafine particles, which comprises feeding gas into a molten metal of a substance that is a material for ultrafine particles, promoting evaporation of the substance, and cooling the vapor. 2. The method according to claim 1, wherein the gas is an inert gas, a reducing gas, or a mixed gas thereof. 3. The method according to claim 1 or 2, wherein the gas is fed into the molten metal as fine bubbles. 4. The method according to claim 1, 2, or 3, wherein the atmosphere is evacuated by the amount of the gas to be fed. 5. An ultrafine particle production device consisting of a crucible having a gas distributor for feeding gas into the molten metal, a heating means, an ultrafine particle collector, and an airtight container housing these inside. 6. The apparatus according to claim 5, wherein the gas distributor comprises a porous member forming a part of a crucible container. 7. The apparatus according to claim 5, wherein the gas distributor is provided separately from the crucible container. 8. The device according to claim 5, 6, or 7, wherein the collector is forcibly cooled. 9. The device according to claim 5, 6, 7, or 8, wherein the collector also serves as a part of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16126884A JPS6138625A (en) | 1984-07-31 | 1984-07-31 | Method and apparatus for producing ultrafine particle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16126884A JPS6138625A (en) | 1984-07-31 | 1984-07-31 | Method and apparatus for producing ultrafine particle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6138625A JPS6138625A (en) | 1986-02-24 |
| JPH0142741B2 true JPH0142741B2 (en) | 1989-09-14 |
Family
ID=15731874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16126884A Granted JPS6138625A (en) | 1984-07-31 | 1984-07-31 | Method and apparatus for producing ultrafine particle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6138625A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2637442B2 (en) * | 1987-12-03 | 1997-08-06 | 三菱重工業株式会社 | Thermoelectric converter |
| JPH01254241A (en) * | 1988-04-01 | 1989-10-11 | Shinagawa Refract Co Ltd | Electric resistance heating type fusion-gasification furnace |
| KR101122219B1 (en) * | 2003-08-28 | 2012-04-18 | 테크나 플라즈마 시스템 인코포레이티드 | Process for the synthesis, separation and purification of powder materials |
-
1984
- 1984-07-31 JP JP16126884A patent/JPS6138625A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138625A (en) | 1986-02-24 |
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