CN2712505Y - Device for preparing nano metal powder by plasma - Google Patents

Device for preparing nano metal powder by plasma Download PDF

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Publication number
CN2712505Y
CN2712505Y CN 200320109952 CN200320109952U CN2712505Y CN 2712505 Y CN2712505 Y CN 2712505Y CN 200320109952 CN200320109952 CN 200320109952 CN 200320109952 U CN200320109952 U CN 200320109952U CN 2712505 Y CN2712505 Y CN 2712505Y
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CN
China
Prior art keywords
plasma
metal powder
vacuum chamber
nano metal
preparing nano
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Expired - Fee Related
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CN 200320109952
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Chinese (zh)
Inventor
阎鹏勋
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Plasma & Metal Material Inst Lanzhou Univ
Jinchang Lingyun Nanometer Material Co Ltd
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Plasma & Metal Material Inst Lanzhou Univ
Jinchang Lingyun Nanometer Material Co Ltd
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Priority to CN 200320109952 priority Critical patent/CN2712505Y/en
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Publication of CN2712505Y publication Critical patent/CN2712505Y/en
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Abstract

The utility model relates to a device for preparing nano metal powder by plasma, comprising a vacuum chamber, a plasma generating device, a power collecting device, a circulation cold-water system, a controlling system, etc. The device for preparing nano metal powder by plasma conducts space constraint for plasma arc produced by high-frequency direct-current discharging by a plasma gun body having special structure, a compressive electric arc with high temperature, high ionicity and high-energy density is formed, and the compressive electric arc is served as a high temperature heat source to prepare the metal nano particles; two extreme parameters of a superhigh temperature evaporating heat source and a shock-chilling device can realize continuous adjustable temperature-field distribution and temperature gradient, which is favourable for forming the metal nono particles with high performance. The device for preparing nano metal powder by plasma has simple structure, convenient operation, no limit in the geometric figure of metal raw materials and no waste materials.

Description

The device for preparing nano metal powder with plasma
Technical field
The utility model relates to a kind of device of producing nano metal powder, relates in particular to a kind of device for preparing nano metal powder with plasma.
Background technology
New material is one of the most active field of current development in science and technology, and the developmental research of new material has become an emphasis of scientific and technological progress and economic development, is subjected to global extensive concern.Nano metal material has performance that other materials is beyond one's reach because particle is small, in fields such as powder metallurgy, fine chemistry industry, electronic information wide prospect is arranged.The method of producing nano metal powder at present mainly contains chemical method (as electrolysis and hydroxyl thermal decomposition method water slurry pressurised oxygen reducing process etc.) and physical method (laser method and plasma method), wherein plasma method production nano metal powder is to utilize high frequency electric source discharge generation plasma arcs to be thermal source, make metal vaporization evaporation, again through gatherer cooling cohesion, thereby generation nano metal powder, because the nano metal powder output with the plasma method preparation is big, granularity is controlled easily, advantages such as powder characteristic is good, be used widely industrial, also give birth to the equipment of plasma production nano metal powder accordingly with regard to application.A kind of device of producing nano metal with plasma is provided in the Chinese patent 02110837.4, this device is to be provided with plasma gun on the housing top of high-temperature resistant material of inner lining, the bottom is provided with the crucible that contains metal liquid accordingly, shell nozzle connects ion controller and ion trap simultaneously, ion trap has discharging opening and gaseous phase outlet, and gaseous phase outlet is connected the loop head of housing and ion controller respectively by pipeline and pump; In housing, also be provided with the Medium frequency induction coil.This apparatus structure is simple, output is big, granularity is controlled easily, and be fit to commercial Application, but also there is following shortcoming in this device: 1, the relative position between this device plasma gun and the crucible can not be regulated; The particle of the metal-powder of 2, producing is bigger, more than 100um, is not the technology of preparing of proper nano-powder mostly.
Summary of the invention
The purpose of this utility model provides a kind of device for preparing nano metal powder with plasma, relative position between this device plasma gun and the crucible is adjustable, and the nano metal powder particle grain size distribution is below 100um, and particle diameter is even, no cluster phenomenon.
Purpose of the present invention can realize by following measure:
A kind of device for preparing nano metal powder with plasma, comprise vacuum chamber, be located at crucible, plasma generating device, particle collection device and the cold water circulatory system etc. in the vacuum chamber, described plasma generating device is external high-frequency arc strike device, and its plasma spraying gun extend into crucible top in the vacuum chamber by vacuum-chamber wall.
Described particle collection device comprises double layer sleeve barrel and is located at the negative pressure extracting device of double layer sleeve barrel bottom; Described two layered cylinder places around the interior crucible of described vacuum chamber, and described negative pressure extracting device is positioned at outside the vacuum chamber; The cavity of described two layered cylinder is communicated with cooling fluid, and its outer wall is provided with condenser pipe.
In order to produce the low-melting-point nano metal-powder, also be provided with negative electrode moving up and down at the top of above-mentioned vacuum chamber.
The gaseous phase outlet of described particle collection device is by circulating pump and vacuum chamber.
Operation principle of the present utility model is as follows: in the indoor low pressure inert protective atmosphere that charges into of vacuum reaction, utilize high frequency electric source and dc source, produce stable inert mixed gas hot plasma between plasma gun and cold-crucible.The mechanical compress that this plasma produces when being subjected to through the inner chamber of plasma spraying gun water-cooled nozzle simultaneously, the three kinds of pinch effects of electromagnetism compression that produce when the cold compression of recirculated water and gas and discharge, make the free electric arc between anode and cathode be compressed into high temperature, the high ionization degree, the plasma of high-energy-density, when this high-energy-density hot plasma (central temperature reaches 40000K) acts on the high pure metal raw material of anode, produce metal atmosphere plasma, this plasma is in diffusion process, fierce collision takes place in continuous and intert-gas atoms, or utilize the rapid off-energy of chilling apparatus and cool off, this effective cooling procedure forms very high regional supersaturation district in metal vapors, make the metal vapors cooling, spontaneous nucleation and cohesion grow into the ultra micron cluster from gas phase, after cluster forms, by the gaseous exchange effect supersaturation district that speeds away, be deposited at last on the wall of particle collection device.
The utility model compared with prior art has the following advantages:
1, the utility model adopts the plasma spraying gun of high-frequency arc strike device and special construction, the plasma arcs that high frequency electric source is produced carries out space constraint, make plasma be subjected to cold compression, mechanical compress, three kinds of pinch effects of electromagnetism compression, free electric arc between the anode and cathode is compressed into the plasma of high temperature, high ionization degree, high-energy-density, temperature can reach more than the 30000K, and thermal power density is up to 10 4W/cm 2, can make the refractory metal evaporation of fully vaporizing, produce metal-powder.
2, superhigh temperature evaporation thermal source of the present utility model and two extreme parameters of chilling apparatus have realized that continuously adjustable temperature field distributes and thermograde, is generally 10 5-10 6K/m, cooling velocity height (can reach 100K/S), the plasma temperature distributed areas are little, nucleation rate is big, help forming superfine, high performance metal nanoparticle.
3, the utility model is external high-frequency arc strike device, and the relative position between its plasma gun and the crucible, angle all can change freely.
4, metal powder grain of the present utility model produces in the low pressure inert protective gas, and powder purity height is the standard sphere; Again because it generates the well-crystallized under accurate thermal equilibrium state.
5, the utility model can be applicable to producing of various metals that are evaporated and compound ultra micro powder thereof as required by optimizing the size and the performance of technological parameter control nano-powder.
6, the utility model technology is simple, easy to operate, productive rate is high, and to the geometry of raw material metal without limits, does not produce waste material.
Description of drawings
Fig. 1 is a structure principle chart of the present utility model
Concrete true mode
With reference to Fig. 1, a kind ofly prepare the device of nano metal powder with plasma, comprise vacuum chamber 1, be located at crucible 2, plasma generating device 3, particle collection device 4 and the cold water circulatory system 10 etc. in the vacuum chamber 1.Particle collection device 4 comprises double layer sleeve barrel 5 and is located at negative pressure extracting device 6 two parts of double layer sleeve barrel bottom, and wherein two layered cylinder 5 places around the crucible 2 in the vacuum chamber 1, and negative pressure extracting device 6 is arranged on outside the vacuum chamber 1; Plasma generating device 3 is external high-frequency arc strike device, and its rifle body extends to the top of crucible 2 by the wall of vacuum chamber 1 and sleeve 5; The cavity of above-mentioned double layer sleeve barrel 5 is communicated with cooling fluid, also is provided with condenser pipe 7 on its outer wall.In order to produce the low-melting-point nano metal-powder, be provided with negative electrode 8 moving up and down (tungsten filament or metal) at the top of vacuum chamber 1; The gaseous phase outlet of the negative pressure extracting device 6 of above-mentioned particle collection device is communicated with vacuum chamber 1 by circulating pump 9.The water cooled pipeline of the above-mentioned cold water circulatory system 10 can adopt the water power pipe.For the particle diameter of realizing the nano metal powder, the controllability of performance, the utility model also is provided with automaton, and on the diverse location of particle collection device 4 configuring plasma diagnostic system (not marking among the figure).
Utilize the utility model almost can prepare the nano powder of any metal: at N 2, NH 3Etc. preparing AlN, TiN, Si under the atmosphere 3N 4Deng metal nitride; Under oxidizing atmosphere, can prepare WO 3, MoO 3, metal oxide such as NiO the ultra micro powder; In raw metal, sneak into carbon or CH 4, C 2H 6The next nano powder of producing metal carbides (as WC, ZRC etc.) of atmosphere.

Claims (4)

1, a kind of device for preparing nano metal powder with plasma, comprise vacuum chamber (1), be located at crucible (2), plasma generating device (3), particle collection device (4) and the cold water circulatory system (10) etc. in the vacuum chamber (1), it is characterized in that: described plasma generating device (3) is external high-frequency arc strike device, and its plasma gun is extend into the top of crucible 2 by the wall of vacuum chamber (1).
2, the device for preparing nano metal powder with plasma as claimed in claim 1, it is characterized in that: described particle collection device (4) comprises double layer sleeve barrel (5) and is located at the negative pressure extracting device (6) of double layer sleeve barrel bottom, and two layered cylinder (5) places the interior crucible (2) of vacuum chamber (1) all around, and negative pressure extracting device (6) is located at outside the vacuum chamber (1); The cavity of described two layered cylinder (5) is communicated with cooling fluid, and its outer wall also is provided with condenser pipe (7).
3, as claimed in claim 1 or 2ly prepare the device of nano metal powder with plasma, it is characterized in that: the top of described vacuum chamber (1) is provided with negative electrode moving up and down (8).
4, as claimed in claim 1ly prepare the device of nano metal powder with plasma, it is characterized in that: the gaseous phase outlet of described particle collection device (4) is communicated with vacuum chamber (1) by circulating pump (9).
CN 200320109952 2003-11-28 2003-11-28 Device for preparing nano metal powder by plasma Expired - Fee Related CN2712505Y (en)

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CN 200320109952 CN2712505Y (en) 2003-11-28 2003-11-28 Device for preparing nano metal powder by plasma

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Application Number Priority Date Filing Date Title
CN 200320109952 CN2712505Y (en) 2003-11-28 2003-11-28 Device for preparing nano metal powder by plasma

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100333835C (en) * 2005-07-29 2007-08-29 华南理工大学 High energy ball mill method with plasma aid
CN101927352A (en) * 2010-09-21 2010-12-29 李立明 Novel technology for continuously producing nano powder by using ultra-high temperature plasma and preparation process thereof
CN102672192A (en) * 2012-05-23 2012-09-19 兰州大学 Automatic classified collection device for nanopowder
CN103658670A (en) * 2014-01-16 2014-03-26 山东昊轩电子陶瓷材料有限公司 Ultrafine titanium powder and preparation method thereof
CN104588670A (en) * 2014-12-30 2015-05-06 宁波广博纳米新材料股份有限公司 Preparation method of nano-grade Mg-Y-Ni hydrogen storage alloy powder
CN105817634A (en) * 2016-05-24 2016-08-03 施嘉豪 Device for preparing nanometer and micrometer particle size metal powder through non-transferred arc plasma torch
CN107876792A (en) * 2017-12-15 2018-04-06 浙江中盛新材料股份有限公司 Prepare the production equipment of metal nano material
CN108405873A (en) * 2018-04-26 2018-08-17 白西燕 A kind of nanometer metal micropowder preparation method and its preparation system
CN110193607A (en) * 2017-10-27 2019-09-03 浙江亚通焊材有限公司 A kind of plasma gun of plasma rotating electrode powder manufacturing apparatus
CN112752608A (en) * 2018-09-07 2021-05-04 心脏研究所有限公司 Plasma polymerization apparatus

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100333835C (en) * 2005-07-29 2007-08-29 华南理工大学 High energy ball mill method with plasma aid
CN101927352A (en) * 2010-09-21 2010-12-29 李立明 Novel technology for continuously producing nano powder by using ultra-high temperature plasma and preparation process thereof
CN102672192A (en) * 2012-05-23 2012-09-19 兰州大学 Automatic classified collection device for nanopowder
CN102672192B (en) * 2012-05-23 2014-03-26 兰州大学 Automatic classified collection device for nanopowder
CN103658670A (en) * 2014-01-16 2014-03-26 山东昊轩电子陶瓷材料有限公司 Ultrafine titanium powder and preparation method thereof
CN104588670A (en) * 2014-12-30 2015-05-06 宁波广博纳米新材料股份有限公司 Preparation method of nano-grade Mg-Y-Ni hydrogen storage alloy powder
CN105817634A (en) * 2016-05-24 2016-08-03 施嘉豪 Device for preparing nanometer and micrometer particle size metal powder through non-transferred arc plasma torch
CN110193607A (en) * 2017-10-27 2019-09-03 浙江亚通焊材有限公司 A kind of plasma gun of plasma rotating electrode powder manufacturing apparatus
CN110193607B (en) * 2017-10-27 2022-03-11 浙江亚通焊材有限公司 Plasma gun for plasma rotating electrode powder manufacturing equipment
CN107876792A (en) * 2017-12-15 2018-04-06 浙江中盛新材料股份有限公司 Prepare the production equipment of metal nano material
CN108405873A (en) * 2018-04-26 2018-08-17 白西燕 A kind of nanometer metal micropowder preparation method and its preparation system
CN112752608A (en) * 2018-09-07 2021-05-04 心脏研究所有限公司 Plasma polymerization apparatus
CN112752608B (en) * 2018-09-07 2022-12-23 奈德公司 Plasma polymerization apparatus

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