CN207325953U - A kind of production equipment of sub-micron and nano metal powder - Google Patents
A kind of production equipment of sub-micron and nano metal powder Download PDFInfo
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- CN207325953U CN207325953U CN201721061259.2U CN201721061259U CN207325953U CN 207325953 U CN207325953 U CN 207325953U CN 201721061259 U CN201721061259 U CN 201721061259U CN 207325953 U CN207325953 U CN 207325953U
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Abstract
New material power production engineering device technique field is the utility model is related to, specifically discloses a kind of sub-micron and the production equipment of nano metal powder, including:Plasma generator, plasma transferred arc torch, metal powder charging (feeding) equipment, sealing stainless steel casing, ceramic crucible, electrode graphite rod, waste material material taking mouth, metal vapors transition region, powder collector;Plasma transferred arc torch is installed on the top of sealing stainless steel casing, and electrode graphite rod is through the bottom of ceramic crucible and sealing stainless steel casing;The side of sealing stainless steel casing is equipped with metal vapors transition region, and the other end of metal vapors transition region is connected with powder collector;Metal powder charging (feeding) equipment is positioned at more among plasma transferred arc torch;The anode of plasma generator is electrically connected with plasma transferred arc torch, and the cathode of plasma generator is electrically connected with electrode graphite rod.The utility model effectively improves energy utilization efficiency and increase evaporation of metal amount, is adapted to the various 10 ~ 1000nm metal-powders of production.
Description
Technical field
New material power production engineering device technique field is the utility model is related to, is specifically a kind of sub-micron and Nano metal powder
The production equipment of body.
Background technology
The production technology of nano material is the key of nano material technology development, research and application, at present nano material
Up to tens kinds of technology of preparing.Nano metal powder is as a kind of widely applied material of nano material, particularly in high-quality
In the preparation of nano metal powder, realize that industrialization best method has vaporize-condensation law and high-temperature hydrogen reduction method.Evaporation-condensation
Method production process is controllable, and system is closed, and production process is without exhaust gas waste water, and powder characteristic is excellent, is production high-quality sub-micro
Rice and nano metal powder the best way.
1984, Gleiter was prepared for extra-fine nickel powder using vaporize-condensation law first, and this method is to utilize electric arc, high frequency
The high temperature heat source such as electric field or plasma by raw metal in high vacuum or low-pressure inert gas, heating and gasifying or distillation,
Then rapid condensation is into superfine powder, and this method can prepare various submicron particles, and feature is any surface finish, size tunable,
Good sphericity.At subsequent more than 30 years, various countries researcher was researched and developed once again on the Research foundation of Gleiter, passes through equipment
Upgrading, the change of mode of heating, the further investigation of theoretical foundation, the technology of vaporize-condensation law obtained significant progress.
Different according to mode of heating, vaporize-condensation law particularly may be divided into electrical resistance heating, induction heating method, laser
Heating, electron beam heating and plasma heating method etc., the brief of its different heating method are compared, as shown in table 1.
The comparison sheet of 1 vaporize-condensation law different heating mode of table
Mode of heating | Atmosphere | System pressure (Pa) | Yield | Equipment requirement |
Resistance heating | Inert gas | 133~13332 | It is low | It is low |
High-frequency induction heating | Inert gas | 133~6500 | It is low | It is low |
Electron beam heats | Inert gas | 133 | It is low | It is high |
Laser beam heats | Inert gas | 1300~14000 | It is low | It is high |
Plasma heating | Inert gas | 26000~100000 | It is medium | It is low |
As known from Table 1, plasma heating method because evaporation efficiency it is fast, equipment requirement is relatively low, the prepared superfine powder bodily form
Core speed is fast, is one of method for preparing super-fine metal powder best in current vaporize-condensation law.
In plasma heating vaporize-condensation law method prepares metal dust technique, generally using high-frequency plasma, sense
Answer plasma, transferred-arc plasma or non-transferred arc plasma heating means to carry out evaporated metal and obtain metal vapors,
Subsequent chilling metal vapors obtains ultra micro fine metal powder.In high-frequency plasma, induction plasma, untransferable arc plasma
Evacuator body hardware is prepared in ultra micro fine metal powder technique, is generally made using the metal powder of certain particle size (50~300 μm)
For raw material, metal powder is added directly into plasma arcs, and metal powder is under the high temperature action of high-frequency plasma arc, metal powder
It is evaporated and becomes metal vapors, then metal vapors, which gathers, cold obtains ultra micro fine metal powder.But since the metal powder of charging has one
Fixed size distribution, high-frequency plasma, induction plasma, non-transferred arc plasma are because of energy deficiency, not only evaporation capacity
It is relatively low, and have the bigger metallic evaporation of part particle diameter not exclusively, remain in ultra tiny metal powder.This part is residual
The metallic particle diameter stayed is far longer than the particle diameter of ultra tiny metal powder, causes the decline of product quality.
In plasma transferred arc evaporated metal equipment prepares ultra micro fine metal powder technique, general plasma transferred
Arc is acted directly on metal bath surface, obtains metal vapors using the high evaporation temperature metal of plasma transferred arc, then metal
Steam chilling obtains ultra micro fine metal powder.But due to being limited be subject to direct-current plasma transferred arc and metal bath surface heat transfer
System, it is small with the contact surface of metal bath surface, cause evaporation of metal efficiency low, metal-powder low output, the consumption of energy is big, cost
It is high.
The technical problems to be solved in the utility model be to provide one kind can improve evaporation of metal efficiency again noresidue metal it is big
Metal evaporation equipment of the particle in ultra tiny metal powder, this equipment can be used for the production of sub-micron and Nano metal powder,
Particularly produce high-melting-point sub-micron and nano metal powder material.
Utility model content
It is above-mentioned to solve the purpose of this utility model is to provide a kind of sub-micron and the production equipment of nano metal powder
The problem of being proposed in background technology.
To achieve the above object, the utility model provides following technical solution:
A kind of production equipment of sub-micron and nano metal powder, including:Plasma generator, plasma transferred arc
Torch, metal powder charging (feeding) equipment, sealing stainless steel casing, ceramic crucible, electrode graphite rod, waste material material taking mouth, metal vapors transition
Area, powder collector;Plasma transferred arc torch is installed on the top of sealing stainless steel casing, and electrode graphite rod runs through ceramic earthenware
Crucible and the bottom for sealing stainless steel casing;Ceramic crucible is placed on the bottom in sealing stainless steel casing;Seal outside stainless steel
The side of shell is equipped with metal vapors transition region, and the other end of metal vapors transition region is connected with powder collector;Metal powder adds
Expect equipment positioned at more among plasma transferred arc torch, and at the top of sealing stainless steel casing, sealing stainless steel casing bottom
The side in portion is equipped with waste material material taking mouth;The anode of plasma generator is electrically connected with plasma transferred arc torch, plasma
The cathode of generator is electrically connected with electrode graphite rod.
As further program of the utility model:Dielectric gas, dielectric gas bag are provided with sealing stainless steel casing
Include one kind in argon gas, nitrogen, hydrogen, ammonia.
As further program of the utility model:The installation number of the plasma transferred arc torch is 3~8.
As further program of the utility model:Plasma transferred arc torch and sealing stainless steel casing upper vertical side
To angle be 10~60 °.
As further program of the utility model:The metal powder fed by metal powder charging (feeding) equipment is refractory metal
Powder or low-melting-point metal powder, wherein high-melting metal powder include tantalum powder, tantalum alloy powder, tungsten alloy powder, titanium valve, Titanium Powder, grain
Footpath is 50~300 μm;Low-melting-point metal powder includes nickel powder, nickel alloy powder, copper powder, copper alloy powder, aluminium powder, Al alloy powder, tin and closes
Bronze and stainless steel powder, particle diameter are 50~300 μm.
As further program of the utility model:A diameter of 150-350mm of ceramic crucible, is placed on plasma transferred
At 80-250mm under the center of arc torch.
As further program of the utility model:Cooling system is placed in powder collector.
As further program of the utility model:Cooling system includes gas phase cooling system and liquid phase cooling system;Its
In use gas phase cooling system for not oxidizable metal powder, not oxidizable metal powder includes nickel powder, copper powder, cobalt powder, gas
The gas of phase cooling system is nitrogen, one kind in argon gas, helium;Liquid phase cooling system is used for oxidizable metal powder,
Oxidizable metal powder includes titanium valve, aluminium powder, lithium powder, and the medium of liquid phase cooling system includes water, alcohol, diesel oil, kerosene, the last of the ten Heavenly stems
Alkane.
As further program of the utility model:Metal vapors transition region, sealing stainless steel casing, powder collector are equal
Water interlayer containing logical cooling water.
Compared with prior art, the beneficial effects of the utility model are:
The utility model can utilize ultra-high temperature plasma transferred arc directly to evaporate the metal powder of greater particle size, effectively carry
High-energy utilization ratio and increase evaporation of metal amount, are adapted to the production of various 10~1000nm metal-powders, particularly high-melting-point
Metal-powder and oxidizable metal powder.
Specific feature is as described below:
1) heating evaporation is carried out using plasma transferred arc torch as heating source using 3~8, capacity usage ratio is high, evaporation
Faster, yield is very big for efficiency, avoids most of metallic particles into causing waste in ceramic crucible, yield can to 5~
30kg/h,
2) production equipment is versatile, can be adapted to the production of various 10~1000nm metal powders, and production cost is low, easily real
Existing large-scale industrial production.
3) it is adapted to the production of sub-micron and nanoscale refractory metal, and oxidizable nanometer titanium power, aluminium powder, lithium powder
Deng production.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model sub-micron and the production equipment of nano metal powder.
Fig. 2 is that embodiment 1 produces 106nm tantalum powders with 6 front views that plasma transferred arc torch is laid out;
Fig. 3 is that embodiment 1 produces 106nm tantalum powders with 6 top views that plasma transferred arc torch is laid out;
Fig. 4 is that embodiment 1 produces 106nm tantalum powders SEM figures.
Fig. 5 is that embodiment 2 produces 82nm aluminium powders SEM figures.
Fig. 6 is that embodiment 3 produces 289nm nickel powders SEM figures.
Fig. 7 is liquid phase cooling system flow chart.
Fig. 8 is gas phase cooling system flow chart.
In figure:1- plasma generators;2- plasma transferred arc torches;4- metal powder charging (feeding) equipments;5- metal powders;6-
Plasma transferred arc;7- seals stainless steel casing;8- ceramic crucibles;9- electrode graphite rods;10- waste material material taking mouths;11- gold
Belong to steam transition region;12- powder collectors.
Embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation describes, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiment in the utility model, what those of ordinary skill in the art were obtained without making creative work
Every other embodiment, shall fall within the protection scope of the present invention.
Referring to Fig. 1, in the utility model, the production equipment of a kind of sub-micron and nano metal powder, including:Plasma
Body generator 1, plasma transferred arc torch 2, metal powder charging (feeding) equipment 4, sealing stainless steel casing 7, ceramic crucible 8, electrode stone
Inker 9, waste material material taking mouth 10, metal vapors transition region 11, powder collector 12.
Plasma transferred arc torch 2 is installed on the top of sealing stainless steel casing 7, and electrode graphite rod 9 runs through ceramic crucible 8
And the bottom of sealing stainless steel casing 7;Ceramic crucible 8 is placed on the bottom in sealing stainless steel casing 7, seals outside stainless steel
The side of 7 bottom of shell is equipped with waste material material taking mouth 10;The side of sealing stainless steel casing 7 is equipped with metal vapors transition region 11, and gold
The other end for belonging to steam transition region 11 is connected with powder collector 12;Metal powder charging (feeding) equipment 4 is positioned at more plasma transferred
It is opposite with electrode graphite rod 9 among arc torch 2, and through 7 top of sealing stainless steel casing.The anode of plasma generator 1 with
Plasma transferred arc torch 2 is electrically connected, and the cathode of plasma generator 1 is electrically connected with electrode graphite rod 9.
The principle of the utility model is to utilize more plasma transferred arcs for plasma transferred arc torch 2 being produced superhigh temperature
The metal powder 5 for the greater particle size that 6 direct evaporated metal powder charging (feeding) equipments 4 fall, then obtains sub-micron and nanometer by chilling
Level metal-powder, is adapted to the industrialized production of various 10~1000nm metal-powders, particularly refractory metal powder and easy oxygen
The metal powder of change.
The dielectric gas of the generation of the plasma transferred arc 6 can be argon gas, nitrogen, hydrogen, ammonia or mixing
Gas.Plasma transferred arc 6 has energy density height, and (energy density is up to 105~106W/cm2), temperature height (arc column center
Temperature 30000K~300000K), the advantages that flame flow velocity degree big (up to 300~800m/s).
The plasma transferred arc torch 2, it is installed number and is arranged to according to produced melting point metal, particle diameter and yield
3~8, plasma transferred arc torch 2 and the angle in sealing stainless steel casing upper vertical direction, can according to the condition of production, from
10~60 ° of placements.
2 center of plasma transferred arc torch placed metal powder charging (feeding) equipment 4, and big particle diameter metal powder 5 passes through metal
Powder charging (feeding) equipment 4 is added in more plasma transferred arcs 6 that plasma transferred arc torch 2 is produced.
The metal powder 5 of charging can be high-melting metal powder and low-melting-point metal powder, and wherein high-melting metal powder includes tantalum
And tantalum alloy powder, tungsten alloy powder, titanium or titanium alloy powder, particle diameter are 50~300 μm;Low-melting-point metal powder includes nickel and nickel alloy
Powder, copper and copper alloy powder, aluminium and Al alloy powder, tin alloy powder and stainless steel powder, particle diameter are 50~300 μm, by production gained
Sub-micron and Nano metal powder particle diameter be 10~1000nm.
Electrode graphite rod 9 is formed with plasma generator 1, plasma transferred arc torch 2 and plasma transferred arc 6
Circuit.A diameter of 150-350mm of ceramic crucible 8, is placed at the 80-250mm under the center of plasma transferred arc torch 2, uses
In the unevaporated charging metal residual powder of collection.
The sealing stainless steel casing 7, it contains certain thickness thermal insulation material, and effect is to prevent internal high temperature region
Contacting external air, and heat loss is reduced, improve evaporation efficiency.The metal vapors transition region 11, sealing stainless steel casing
7th, water interlayer of the powder collector 12 containing logical cooling water.
Metal vapors evaporates into metal vapors transition region 11, and connects powder collector 12, metal vapors transition region 11
The space grown up for the cooling velocity and forming core of adjusting metal vapors, powder collector 12 is interior to place cooling system, for collecting
Metal dust.The difference of powder property is collected, cooling system includes gas phase cooling system and liquid phase cooling system.Wherein produce not
Oxidizable metal powder, such as nickel powder, copper powder, cobalt powder, the gas of gas phase cooling system can be in nitrogen, argon gas, helium
It is a kind of;Oxidizable metal powder, such as titanium valve, aluminium powder, lithium powder are produced, the medium of liquid phase cooling system includes water, alcohol, bavin
The organic solvents such as oil, kerosene, decane.
Concrete application is as described in the following Examples.
The production of 1 106nm tantalum capacitance tantalum powders of embodiment
Using 6 plasma transferred arc torch 2, it is separated by 60 ° of placements, the placement angle of plasma arcs torch and vertical direction
For 30 °, as Figure 2-3.The irregular tantalum raw material powder that average grain diameter is 25~100 μm is added into metal powder charging (feeding) equipment 4,
After checking system sealing, air blower is opened so that the argon gas circulation in system, opens plasma generator 1,
Power Control then starts metal powder charging (feeding) equipment 4 in 400~500kW at the same time, and charging rate is controlled in 5~10 kg/h.
Big particle diameter tantalum powder, enters ultra-high temperature plasma transferred arc center by metal powder charging (feeding) equipment 4,6 grades from
Under the action of daughter transferred arc torch 2, big particle diameter tantalum powder flash evapn, and enter under argon gas protection from metal vapors transition region 11
Gas phase cooling system, gassy system flow chart are as shown in Figure 8.In a cooling system, metal vapors cooling grows up to form a nanometer tantalum
Powder, then nano-tantalum and argon gas are collected into metal dust, gas circulation uses by gas-solid separator.It is a small amount of unevaporated
Bulky grain tantalum powder is fed, then is fallen into the ceramic crucible 8 placed in equipment, a diameter of 150-350mm of ceramic crucible 8, puts
At 80-250mm under the center of plasma transferred arc torch 2.Gained tantalum powder is detected by specific surface instrument, its average grain diameter is
106nm, separately has sample to observe pattern, such as Fig. 4 under a scanning electron microscope.
The production of 2 82nm solid propellants high activity aluminium powder of embodiment
Using 3 plasma guns, it is separated by 120 ° of placements, the placement angle of plasma arcs torch and vertical direction is 30 °.Will
Average grain diameter produces big particle diameter aluminium powder by 15~100 μm of spray-on process and adds metal powder charging (feeding) equipment 4, checks system sealing
After, open air blower so that the argon gas circulation in system, opens plasma generator 1, Power Control is 200
~250kW, then starts metal powder charging (feeding) equipment 4 at the same time, and charging rate is controlled in 8~16kg/h.
Big particle diameter aluminium powder, enters ultra-high temperature plasma transferred arc center by metal powder charging (feeding) equipment 4,3 grades from
Under the action of daughter transferred arc torch 2, powder flash evapn, and enter liquid phase from metal vapors transition region 11 under argon gas protection and cool down
System, liquid phase systems flow chart is as shown in fig. 7, liquid phase medium uses kerosene.In a cooling system, metal vapors instantaneous cooling into
Nanometer aluminium powder, then nanometer aluminium powder and kerosene are collected into aluminium powder, kerosene circulation makes by supercentrifuge progress solid-liquor separation
With.A small amount of unevaporated charging bulky grain aluminium powder, then fall into the ceramic crucible 8 placed in equipment, the diameter of ceramic crucible 8
For 150-350mm, it is placed at the 80-250mm under the center of plasma transferred arc torch.Gained aluminium powder is examined by specific surface instrument
Survey, its average grain diameter is 82nm, separately has sample to observe pattern under a scanning electron microscope, as shown in Fig. 5.
The production of 3 289nm electronic component electrode material nickel powders of embodiment
Using 3 plasma guns, it is separated by 120 ° of placements, the placement angle of plasma arcs torch and vertical direction is 30 °, such as
Shown in Fig. 2.The nickel powder that average grain diameter is 25~100 μm is added into metal powder charging (feeding) equipment 4, after checking system sealing,
Open air blower so that the nitrogen circulation in system, opens plasma generator 1, Power Control 250~
400kW, then starts metal powder charging (feeding) equipment 4 at the same time, and charging rate is controlled in 15~25kg/h.
Big particle diameter nickel powder, enters ultra-high temperature plasma transferred arc center by metal powder charging (feeding) equipment 4,3 grades from
Under the action of daughter transferred arc torch 2, flash evapn, and enter gas phase cooling system from metal vapors transition region 11 under nitrogen protection
System, gassy system flow chart are as shown in Figure 5.In a cooling system, metal vapors cooling grows up to be formed nickel powder, then nickel powder and
Nitrogen is collected into metal dust, gas circulation uses by gas-solid separator.A small amount of unevaporated charging bulky grain nickel powder, then
Fall into the ceramic crucible 8 placed in equipment, a diameter of 150-350mm of ceramic crucible 8, is placed on plasma transferred arc torch
Center under 80-250mm at.Gained nickel powder is detected by specific surface instrument, its average grain diameter is 289nm, separately has sample sweeping
Observed under electron microscope pattern is retouched, as shown in Figure 6.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of the spirit or essential attributes without departing substantially from the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The scope of type is indicated by the appended claims rather than the foregoing description, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are embraced therein.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical solution, this narrating mode of specification is only that those skilled in the art should for clarity
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It is appreciated that other embodiment.
Claims (10)
- A kind of 1. production equipment of sub-micron and nano metal powder, it is characterised in that including:Plasma generator(1), etc. Gas ions transferred arc torch(2), metal powder charging (feeding) equipment(4), sealing stainless steel casing(7), ceramic crucible(8), electrode graphite rod (9), waste material material taking mouth(10), metal vapors transition region(11), powder collector(12);Plasma transferred arc torch(2)Installation In sealing stainless steel casing(7)Top, electrode graphite rod(9)Through ceramic crucible(8)And sealing stainless steel casing(7)'s Bottom;Ceramic crucible(8)It is placed on sealing stainless steel casing(7)Interior bottom;Seal stainless steel casing(7)Side be equipped with gold Belong to steam transition region(11), and metal vapors transition region(11)The other end be connected with powder collector(12);Metal powder feeds Equipment(4)Positioned at more plasma transferred arc torch(2)Centre, and through sealing stainless steel casing(7)Top, seals stainless steel Shell(7)The side of bottom is equipped with waste material material taking mouth(10);Plasma generator(1)Anode and plasma transferred arc torch (2)It is electrically connected, plasma generator(1)Cathode and electrode graphite rod(9)It is electrically connected.
- 2. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that sealing stainless steel Shell(7)In be provided with dielectric gas, dielectric gas includes one kind in argon gas, nitrogen, hydrogen, ammonia.
- 3. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that the plasma Body transferred arc torch(2)Installation number be 3 ~ 8.
- 4. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that plasma turns Move arc torch(2)With sealing stainless steel casing(7)The angle in upper vertical direction is 10 ~ 60 °.
- 5. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that pass through metal powder Charging (feeding) equipment(4)The metal powder of charging(5)For high-melting metal powder or low-melting-point metal powder, wherein high-melting metal powder includes tantalum Powder, tantalum alloy powder, tungsten alloy powder, titanium valve, Titanium Powder, particle diameter are 50 ~ 300 μm;Low-melting-point metal powder includes nickel powder, nickel alloy Powder, copper powder, copper alloy powder, aluminium powder, Al alloy powder, tin alloy powder and stainless steel powder, particle diameter are 50 ~ 300 μm.
- 6. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that ceramic crucible (8)A diameter of 150-350mm, be placed on plasma transferred arc torch(2)Center under 80-250mm at.
- 7. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that powder collector (12)Interior placement cooling system.
- 8. the production equipment of sub-micron according to claim 7 and nano metal powder, it is characterised in that cooling system bag Include gas phase cooling system and liquid phase cooling system.
- 9. the production equipment of sub-micron according to claim 8 and nano metal powder, it is characterised in that for being not easy oxygen The metal powder of change uses gas phase cooling system, and not oxidizable metal powder includes nickel powder, copper powder, cobalt powder, gas phase cooling system Gas is nitrogen, one kind in argon gas, helium;Liquid phase cooling system, oxidizable metal are used for oxidizable metal powder Powder includes titanium valve, aluminium powder, lithium powder, and the medium of liquid phase cooling system includes water, alcohol, diesel oil, kerosene, decane.
- 10. the production equipment of sub-micron according to claim 1 and nano metal powder, it is characterised in that metal vapors Transition region(11), sealing stainless steel casing(7), powder collector(12)Water interlayer containing logical cooling water.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107309433A (en) * | 2017-08-23 | 2017-11-03 | 周世恒 | A kind of production equipment of sub-micron and nano metal powder |
CN114288962A (en) * | 2021-12-09 | 2022-04-08 | 核工业西南物理研究院 | Device and method for synthesizing nano nitride powder by thermal plasma |
-
2017
- 2017-08-23 CN CN201721061259.2U patent/CN207325953U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107309433A (en) * | 2017-08-23 | 2017-11-03 | 周世恒 | A kind of production equipment of sub-micron and nano metal powder |
CN114288962A (en) * | 2021-12-09 | 2022-04-08 | 核工业西南物理研究院 | Device and method for synthesizing nano nitride powder by thermal plasma |
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