JPH0141204B2 - - Google Patents

Info

Publication number
JPH0141204B2
JPH0141204B2 JP57108726A JP10872682A JPH0141204B2 JP H0141204 B2 JPH0141204 B2 JP H0141204B2 JP 57108726 A JP57108726 A JP 57108726A JP 10872682 A JP10872682 A JP 10872682A JP H0141204 B2 JPH0141204 B2 JP H0141204B2
Authority
JP
Japan
Prior art keywords
light
target
polarizing beam
beam splitter
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57108726A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58225302A (ja
Inventor
Yutaka Ono
Eiji Ogita
Toshitsugu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP57108726A priority Critical patent/JPS58225302A/ja
Publication of JPS58225302A publication Critical patent/JPS58225302A/ja
Publication of JPH0141204B2 publication Critical patent/JPH0141204B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57108726A 1982-06-24 1982-06-24 光学式機械量測定装置 Granted JPS58225302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57108726A JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57108726A JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS58225302A JPS58225302A (ja) 1983-12-27
JPH0141204B2 true JPH0141204B2 (enrdf_load_html_response) 1989-09-04

Family

ID=14491986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57108726A Granted JPS58225302A (ja) 1982-06-24 1982-06-24 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS58225302A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2704987B2 (ja) * 1988-02-17 1998-01-26 国際電信電話 株式会社 偏波ダイバーシティ光受信方式
JP5260261B2 (ja) * 2008-12-25 2013-08-14 株式会社雄島試作研究所 偏光分離型干渉計及び偏光分離干渉計型測長器

Also Published As

Publication number Publication date
JPS58225302A (ja) 1983-12-27

Similar Documents

Publication Publication Date Title
US7193720B2 (en) Optical vibration imager
US7196780B2 (en) Velocimeter, displacement meter, vibrometer and electronic device
US4512661A (en) Dual differential interferometer
JP2007285898A (ja) レーザ振動計
CN106680831B (zh) 激光主动相干平衡探测偏振分析仪
KR101910084B1 (ko) 평행빔 광학 소자 및 이를 이용한 간섭계
US6954273B2 (en) Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams
RU2458352C2 (ru) Детектор и способ определения скорости
KR102007004B1 (ko) 3차원 형상 측정장치
US6654121B1 (en) Apparatus and method for detecting polarization
JPH0141204B2 (enrdf_load_html_response)
CN107121071B (zh) 二维位移测量装置及测量方法
JPH0375041B2 (enrdf_load_html_response)
JPH045122B2 (enrdf_load_html_response)
JP2002116005A (ja) レーザ干渉計型変位計
JPH0141205B2 (enrdf_load_html_response)
JPH026002B2 (enrdf_load_html_response)
JPH0134082Y2 (enrdf_load_html_response)
JPS6355035B2 (enrdf_load_html_response)
JPH06213623A (ja) 光学式変位センサ
JP2866784B2 (ja) 振動検出方法
JPH0326321B2 (enrdf_load_html_response)
JP7622582B2 (ja) 振動計及び振動測定方法
RU2340879C1 (ru) Устройство измерения параметров поляризации оптического излучения
JPS58225301A (ja) 光学式変位測定装置