JPH0140917Y2 - - Google Patents

Description

[Detailed description of the invention] [Technical field to which the invention belongs] This invention is applicable to semiconductor factories, electrical parts assembly factories,
The present invention relates to the structure of the entrance/exit door of a dust-free room used for other purposes.

[Description of prior art]

The dust-free chamber is configured to isolate the indoor atmosphere from the outside air and control the amount of dust inside according to each standard to prevent dust from adhering to the work processes performed inside. Such dust-free chambers are widely used in semiconductor factories, integrated circuit manufacturing factories, electrical component assembly factories, and the like.

In such a dust-free room, when a worker enters and exits to go to the toilet or for other reasons, the worker's body and work clothes are charged with static electricity, which attracts dust from the outside and brings it into the dust-free room. Become. In order to prevent this, air showers and the like are installed at the entrance and exit of the dust-free room, but this is insufficient to control the amount of dust inside.

In addition, if a worker starts work with static electricity charged, the static electricity will affect the objects in the work process.
It may cause insulation breakdown of electric circuits.

There is a technique to electrically ground the door or door handle of a dust-free room to discharge static electricity that accumulates on workers entering and exiting the room, but this may be the case if workers are wearing nylon work clothes. When a worker touches the door when entering or exiting the door, he or she feels an electrical shock from the discharge, which is unpleasant.

[Purpose of invention]

The present invention is an improvement on this, and aims to provide a door structure for a dust-free room that appropriately discharges static electricity from the human body and work clothes of a worker and does not cause discomfort during discharge.

[Characteristics of the invention]

This invention is a door installed at the worker entrance of a dust-free room, in which the door body is made of electrically insulating material, the handle and hinge are made of metal, and the fixed side of the hinge is electrically connected to ground potential. and a resistor is connected between the handle and the movable side of the hinge so that a gentle discharge occurs when the door handle is touched. shall be.

[Explanation based on examples]

This will be explained with reference to the drawings.

FIG. 1 is a structural diagram of an apparatus according to an embodiment of the present invention. Door 1 is a door installed at the entrance to the dust-free room,
Its body consists of an insulator made of synthetic building materials. The handle 2 is made of metal. The hinge 3 is also made of metal. The fixed side of the hinge 3 is electrically connected to ground. Between the movable side of the hinge 3 and the handle 2, there is a conductive rubber 4 attached to the surface of the door 1.
Connected by This conductive rubber 4 is not a perfect conductor but a resistor, and the resistance value between the handle 2 and the ground is about 50 kΩ.

According to this structure, when a worker going in and out of the door 1 touches the handle 2, the static electricity charged on his body is gently discharged through the resistor, so that he does not feel an unpleasant electric shock. do not have.

This conductive rubber 4 serves as a cushioning material and decoration for the door so that it does not hit other objects when the door 1 is opened. It is possible to discharge static electricity that has accumulated on the worker.

FIG. 2 is an electrical circuit diagram of the device according to the present invention. The resistor 4 can be constructed using electrical wires, resistors, and other appropriate electrical components in addition to conductive rubber. It is appropriate to set the resistance value between the door handle and ground in the range of 1kΩ to 1MΩ. That is, if the resistance value is lower than this range, the human body may feel a shock of discharge, and if it is higher than this range, efficient discharge will not occur in a short time. As a result of experiments, it was found that a value of several tens of kΩ is suitable for practical use.

[Effect of idea]

As explained above, according to the present invention, the static electricity that accumulates on workers who go in and out of the dust-free room through the entrance/exit door is naturally discharged without them being aware of it, thereby reducing the proportion of dust brought into the dust-free room. In addition, it is possible to prevent the influence of static electricity on objects in the work process due to charging of the worker, and furthermore, it is possible to eliminate the electrical shock felt by the worker due to discharge.

[Brief explanation of the drawing]

FIG. 1 is a structural diagram of an apparatus according to an embodiment of the present invention. FIG. 2 is an electrical circuit diagram of the device according to the present invention. 1...door, 2...handle, 3...hinge, 4...
...Conductive rubber (resistor).

Claims (1)

[Claims for Utility Model Registration] (1) A door installed at the worker's entrance to a dust-free room, the main body of which is made of electrically insulating material, the handle and the hinge made of metal; A door for a dust-free room, characterized in that a fixed side is electrically connected to ground potential, and an electric resistor is connected between the handle and the movable side of the hinge. (2) The dust-free room door as set forth in claim (1) of the utility model registration claim, wherein the resistor is conductive rubber adhered to the surface of the door.