JPH0140283B2 - - Google Patents
Info
- Publication number
- JPH0140283B2 JPH0140283B2 JP3947680A JP3947680A JPH0140283B2 JP H0140283 B2 JPH0140283 B2 JP H0140283B2 JP 3947680 A JP3947680 A JP 3947680A JP 3947680 A JP3947680 A JP 3947680A JP H0140283 B2 JPH0140283 B2 JP H0140283B2
- Authority
- JP
- Japan
- Prior art keywords
- hologram
- light
- movable body
- object light
- interference fringes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000006073 displacement reaction Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005210 holographic interferometry Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000005337 ground glass Substances 0.000 description 2
- 238000001093 holography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3947680A JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3947680A JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56135103A JPS56135103A (en) | 1981-10-22 |
| JPH0140283B2 true JPH0140283B2 (OSRAM) | 1989-08-28 |
Family
ID=12554110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3947680A Granted JPS56135103A (en) | 1980-03-27 | 1980-03-27 | Rectilinear meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56135103A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4466693A (en) * | 1980-11-25 | 1984-08-21 | Agency Of Industrial Science And Technology | Holographic straightness meter |
-
1980
- 1980-03-27 JP JP3947680A patent/JPS56135103A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56135103A (en) | 1981-10-22 |
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