JPH0139045B2 - - Google Patents

Info

Publication number
JPH0139045B2
JPH0139045B2 JP2580883A JP2580883A JPH0139045B2 JP H0139045 B2 JPH0139045 B2 JP H0139045B2 JP 2580883 A JP2580883 A JP 2580883A JP 2580883 A JP2580883 A JP 2580883A JP H0139045 B2 JPH0139045 B2 JP H0139045B2
Authority
JP
Japan
Prior art keywords
measured
optical axis
curvature
laser interferometer
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2580883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58193408A (ja
Inventor
Kenji Nunome
Kenichi Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Toyo Bearing Co Ltd filed Critical NTN Toyo Bearing Co Ltd
Priority to JP2580883A priority Critical patent/JPS58193408A/ja
Publication of JPS58193408A publication Critical patent/JPS58193408A/ja
Publication of JPH0139045B2 publication Critical patent/JPH0139045B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/213Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring radius of curvature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2580883A 1983-02-17 1983-02-17 球面曲率半径測定方法 Granted JPS58193408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2580883A JPS58193408A (ja) 1983-02-17 1983-02-17 球面曲率半径測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2580883A JPS58193408A (ja) 1983-02-17 1983-02-17 球面曲率半径測定方法

Publications (2)

Publication Number Publication Date
JPS58193408A JPS58193408A (ja) 1983-11-11
JPH0139045B2 true JPH0139045B2 (zh) 1989-08-17

Family

ID=12176164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2580883A Granted JPS58193408A (ja) 1983-02-17 1983-02-17 球面曲率半径測定方法

Country Status (1)

Country Link
JP (1) JPS58193408A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108204A (ja) * 1982-12-13 1984-06-22 住友電気工業株式会社 電線
FR2620219B1 (fr) * 1987-09-04 1991-03-29 Synthelabo Systeme optique pour determiner la variation de courbure d'un objet sur une zone de petites dimensions
CN102168955B (zh) * 2011-05-18 2012-09-19 中国科学院长春光学精密机械与物理研究所 一种光学球面曲率半径的检测方法

Also Published As

Publication number Publication date
JPS58193408A (ja) 1983-11-11

Similar Documents

Publication Publication Date Title
US3786332A (en) Micro positioning apparatus
KR940003918B1 (ko) 형상측정장치
US4884697A (en) Surface profiling interferometer
US5671541A (en) Accuracy verification devices for coordinate measuring machines
Brand et al. Development of a special CMM for dimensional metrology on microsystem components
US5649368A (en) Method for calibrating a coordinate measuring apparatus having two pivot axes
CN114577125B (zh) 一种非接触式光学透镜中心厚度测量方法及测量装置
US7099008B2 (en) Alignment adjuster of probe, measuring instrument and alignment adjusting method of probe
CN209961611U (zh) 一种基于尺读望远镜及光杠杆的测定装置
US7764387B2 (en) Apparatus and method for measuring suspension and head assemblies in a stack
US4359282A (en) Optical measuring method and apparatus
US8184301B2 (en) Surface alignment and positioning method and apparatus
JP4434431B2 (ja) 三次元形状測定装置
US3740150A (en) Surface measurement by interferometer
US5646732A (en) Coordinate measuring system
JPH0139045B2 (zh)
Takacs et al. Surface profiling interferometer
US3347130A (en) Optical measuring instruments
JP4326356B2 (ja) 位相補正値測定方法
JPS60151501A (ja) 曲率半径測定装置
JPH06174430A (ja) 中心厚測定方法およびそれに使用する装置
JP2672718B2 (ja) 屈折率測定方法及び装置
JPH0338645Y2 (zh)
JP2000298011A (ja) 形状測定方法および装置
Wang Straightness Detection Method and Accuracy Analysis of Guide Rail Parts