JPH0135474Y2 - - Google Patents
Info
- Publication number
- JPH0135474Y2 JPH0135474Y2 JP8105586U JP8105586U JPH0135474Y2 JP H0135474 Y2 JPH0135474 Y2 JP H0135474Y2 JP 8105586 U JP8105586 U JP 8105586U JP 8105586 U JP8105586 U JP 8105586U JP H0135474 Y2 JPH0135474 Y2 JP H0135474Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- holding member
- floor
- storage case
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 claims description 25
- 238000004140 cleaning Methods 0.000 description 9
- 239000011324 bead Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8105586U JPH0135474Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8105586U JPH0135474Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-30 | 1986-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62193730U JPS62193730U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 |
| JPH0135474Y2 true JPH0135474Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-30 |
Family
ID=30932438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8105586U Expired JPH0135474Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0135474Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4801981B2 (ja) * | 2005-11-30 | 2011-10-26 | Ｈｏｙａ株式会社 | 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体 |
| KR101126735B1 (ko) * | 2005-12-20 | 2012-03-29 | 주식회사 엘지실트론 | 웨이퍼 카세트 |
| KR100963466B1 (ko) | 2008-04-28 | 2010-06-17 | 주식회사 이 월드 | 박판 강화유리 적재용 카세트 |
| JP5416154B2 (ja) * | 2011-03-22 | 2014-02-12 | Ｈｏｙａ株式会社 | 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体 |
-
1986
- 1986-05-30 JP JP8105586U patent/JPH0135474Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62193730U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-09 |