JPH01321324A - Spectrophotometer capable of measuring two or more samples - Google Patents

Spectrophotometer capable of measuring two or more samples

Info

Publication number
JPH01321324A
JPH01321324A JP15751788A JP15751788A JPH01321324A JP H01321324 A JPH01321324 A JP H01321324A JP 15751788 A JP15751788 A JP 15751788A JP 15751788 A JP15751788 A JP 15751788A JP H01321324 A JPH01321324 A JP H01321324A
Authority
JP
Japan
Prior art keywords
samples
measurement light
measuring light
sample
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15751788A
Other languages
Japanese (ja)
Inventor
Kazuo Furusawa
古沢 一雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15751788A priority Critical patent/JPH01321324A/en
Publication of JPH01321324A publication Critical patent/JPH01321324A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To simultaneously measure a plurality of samples by rotating the reflecting mirror mounted on a rotary shaft by a measuring light change-over mechanism to change over measuring light. CONSTITUTION:When a rotary shaft 4 is rotated by a motor 8 and measuring light 12 is allowed to be incident, the measuring light 12 is successively changed over by the reflecting mirrors 6 (6-1 - 6-4) of a measuring light change-over mechanism to successively pass through samples 2 (2-1 - 2-4) and detected by a photodetector 18 through optical fibers 16-1 - 16-4. The rotation of the rotary shaft 4 is detected by a rotation detector 14 and a rotation detection signal is outputted. When the wavelength of the measuring light 12 is fixed and measurement is performed while the measuring light is allowed to be successively incident to the samples 2 by the measuring light change-over mechanism, the timewise changes of the absorbancies of four samples can be simultaneously measured. By scanning the wavelength of the measuring light 12, the spectra of four samples 2 can be simultaneously measured.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は分光光度計に関し、特に複数の試料を測定する
ことのできる分光光度計に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a spectrophotometer, and particularly to a spectrophotometer capable of measuring a plurality of samples.

複数試料を測定する分光光度計は、例えば、紫外・可視
分光光度計を初め、血液を複数のセルに分配し、それぞ
れに異なる酵素を入れて同時測定を行なう血液検査装置
などの自動生化学分析装置、化学薬品をフローセルに流
して測定し、プロセス制御を行なう装置などに利用され
る。
Spectrophotometers that measure multiple samples include, for example, ultraviolet and visible spectrophotometers, as well as automatic biochemical analysis devices such as blood test devices that distribute blood into multiple cells and perform simultaneous measurements by placing different enzymes in each cell. It is used in devices that flow chemicals through flow cells, measure them, and perform process control.

(従来の技術) 複数試料を同時に測定するために、測定光を光ファイバ
によって複数に分配し、それぞれを対応する試料に入射
させる方法と、セルポジショナと称される試料切換え器
を用いて複数の試料を1本の光路上に順次入れ替える方
法がある。
(Prior art) In order to measure multiple samples at the same time, there is a method in which the measurement light is distributed into multiple beams using an optical fiber and each beam is incident on the corresponding sample. There is a method in which samples are sequentially placed on one optical path.

なお、同時測定における「同時」の語は、厳密な意味で
の時間な同時だけではなく、例えば時間的には異なって
いても短時間のうちに複数試料を測定する場合も同時測
定に含むものとして使用する。
Note that the word "simultaneously" in simultaneous measurement does not only mean simultaneous in the strict sense of the word, but also includes, for example, measuring multiple samples in a short period of time even if they are different in time. Use as.

(発明が解決しようとする課題) 光ファイバで測定光を複数に分配する方法では、−試料
当たりの測定光のエネルギーが分散され、S/N比が悪
くなる。
(Problems to be Solved by the Invention) In the method of distributing the measurement light into a plurality of parts using an optical fiber, the energy of the measurement light per sample is dispersed, resulting in a poor S/N ratio.

また、光ファイバによって分配された各測定光の強度に
はばらつきが生じるため、吸光度の直線性が悪化する。
Further, since the intensity of each measurement light distributed by the optical fiber varies, the linearity of absorbance deteriorates.

セルポジショナを用いて試料を動かす方法では、試料を
機械的に動かして切り換えるので、試料切替え時の測定
不能な期間が長くなり、また、測定周期を短かくするこ
とができない。例えば6個の試料を測定する場合、10
秒で1周期の測定ができる程度であり、速い反応の同時
測定を行なうことはできない。
In the method of moving the sample using a cell positioner, since the sample is mechanically moved and switched, the period during which measurements are not possible when switching samples becomes long, and the measurement cycle cannot be shortened. For example, when measuring 6 samples, 10
It is only possible to measure one period in seconds, and simultaneous measurement of fast reactions is not possible.

本発明は測定光のエネルギーを効率よく活用してS/N
比を上げ、しかも短かい周期で測定することができるよ
うにして、測定データをほぼ連続的に取得して複数試料
の時間変化を同時に測定したり、スペクトルを同時に測
定することのできる分光光度計を提供することを目的と
するものである。
The present invention efficiently utilizes the energy of measurement light to achieve S/N
A spectrophotometer that can increase the ratio and perform measurements at short intervals, acquiring measurement data almost continuously, measuring time changes of multiple samples at the same time, and measuring spectra at the same time. The purpose is to provide the following.

(課題を解決するための手段) 本発明は、固定して配置された複数個の試料に測定光を
順次切り換えて入射させる測定光切換え機構と、試料を
通過した測定光を単一の光検出器で受光する受光部と、
測定光切換え機構の切換え位置を検出する回転検出部と
、受光部の測定信号を回転検出部の検出信号をもとにし
て処理するデータ処理部とを備える。測定光切換え機構
では各試料に対応する複数の反射鏡が回転軸に取りつけ
られており、各反射鏡は互いに回転軸方向の位置が異な
り1回転軸方向に対して傾斜し、かつ、測定光の入射方
向に対して等しい回転角を占有している。
(Means for Solving the Problems) The present invention includes a measurement light switching mechanism that sequentially switches measurement light to enter a plurality of fixedly arranged samples, and a single light detection system that detects the measurement light that has passed through the sample. A light receiving part that receives light on the device,
It includes a rotation detection section that detects the switching position of the measurement light switching mechanism, and a data processing section that processes the measurement signal of the light receiving section based on the detection signal of the rotation detection section. In the measurement light switching mechanism, a plurality of reflecting mirrors corresponding to each sample are attached to a rotating shaft, and each reflecting mirror has a different position in the rotational axis direction and is tilted with respect to the rotational axis direction. It occupies an equal angle of rotation with respect to the direction of incidence.

(作用) 測定光切換え機構で反射鏡が取りつけられている回転軸
が回転すると、測定光を反射させる反射鏡が順次切り替
わっていく。各反射鏡が占有している回転角に対応する
一定時間だけ各反射鏡から対応する試料に測定光が入射
する。各試料には測定光が分配されることなく、全てが
反射されて入射する。
(Function) When the rotating shaft to which the reflecting mirrors are attached by the measuring light switching mechanism rotates, the reflecting mirrors that reflect the measuring light are sequentially switched. Measurement light enters the corresponding sample from each reflecting mirror for a certain period of time corresponding to the rotation angle occupied by each reflecting mirror. The measurement light is not distributed to each sample, but is entirely reflected and incident on the sample.

試料を通過した測定光は受光部で単一の光検出器に導か
れて検出される。データ処理部では回転検出部の検出信
号に基づいて受光部の測定信号を弁別し、試料ごとにデ
ータ処理を行なう。
The measurement light that has passed through the sample is guided to a single photodetector at the light receiving section and detected. The data processing section discriminates the measurement signal of the light receiving section based on the detection signal of the rotation detection section and performs data processing for each sample.

(実施例) 第1図は一実施例においてデータ処理部を除いた部分の
平面図を表わしている0図では一例として試料が4個配
置されたものを示しているが、試料の数は3個以下であ
っても、又はさらに多数であってもよい。
(Example) Figure 1 shows a plan view of the part excluding the data processing unit in an example. Figure 0 shows an example in which four samples are arranged, but the number of samples is three. The number may be less than or equal to 1, or may be even larger.

2−1〜2−4は試料セルに入れられて配置−された試
料である。試料2−1〜2−4の位置は固定されている
Samples 2-1 to 2-4 are placed in sample cells. The positions of samples 2-1 to 2-4 are fixed.

分光された測定光12を試料2−1〜2−4に入射させ
るために、試料2−1〜2−4の配列方向と平行に回転
軸4が取りつけられている。回転軸4には測定光12を
反射させてそれぞれ対応する試料2−1〜2−4に入射
させるために、4個の平面反射鏡6−1〜6−4が取り
つけられている。回転軸4はベルト10を介してモータ
8によって回転卵動される。回転軸4にはロータリーエ
ンコーダなどの回転検出器14が取りつけられ、回転軸
4の回転角が検出される。
In order to make the separated measurement light 12 incident on the samples 2-1 to 2-4, a rotating shaft 4 is attached parallel to the arrangement direction of the samples 2-1 to 2-4. Four plane reflecting mirrors 6-1 to 6-4 are attached to the rotating shaft 4 in order to reflect the measurement light 12 and make it incident on the corresponding samples 2-1 to 2-4, respectively. The rotating shaft 4 is rotated by a motor 8 via a belt 10. A rotation detector 14 such as a rotary encoder is attached to the rotating shaft 4, and the rotation angle of the rotating shaft 4 is detected.

試料2−1〜2−4に対して反射鏡6−1〜6−4と反
対側には光ファイバ16−1〜16−4が配置され、光
ファイバ16−1〜16−4は束ねられて単一の光検出
器18に導かれている。反射鏡6−1〜6−4によって
順次反射されて試料2−1〜2−4を通過した測定光1
2は、光ファイバ16−1〜16−4を経て光検出器1
8で検出される。光検出器18としては例えば光電子増
倍管などを使用することができる。
Optical fibers 16-1 to 16-4 are arranged on the opposite side of the reflectors 6-1 to 6-4 with respect to the samples 2-1 to 2-4, and the optical fibers 16-1 to 16-4 are bundled. and is guided to a single photodetector 18. Measurement light 1 that has been sequentially reflected by reflecting mirrors 6-1 to 6-4 and passed through samples 2-1 to 2-4
2 is connected to the photodetector 1 via optical fibers 16-1 to 16-4.
Detected at 8. As the photodetector 18, for example, a photomultiplier tube or the like can be used.

反射鏡6−1〜6−4は測定光12を順次切り換えて試
料2−1〜2−4に入射させるように回転軸4に取りつ
けられている。第2図、第3図及び第4図に回転軸4と
反射鏡6−1〜6−4を示す。反射1’16−1〜6−
4は回転軸4の軸方向に位置を異ならせて回転軸4上に
配置され、測定光12を反射して対応する試料に入射さ
せるように回転軸4の軸方向に対して傾斜して取りつけ
られている。本実施例では測定光12は回転軸4に平行
に入射し、各反射鏡6−1〜6−4は回転軸方向に対し
て45度に傾斜している。また、第3図に示されるよう
に、各反射鏡6−1〜6−4の中心位置は回転軸4の回
転方向に対して互いに90度ずつずれて配置されている
The reflecting mirrors 6-1 to 6-4 are attached to the rotating shaft 4 so as to sequentially switch the measurement light 12 and make it incident on the samples 2-1 to 2-4. The rotating shaft 4 and the reflecting mirrors 6-1 to 6-4 are shown in FIGS. 2, 3, and 4. Reflection 1'16-1~6-
4 are arranged on the rotating shaft 4 at different positions in the axial direction of the rotating shaft 4, and are mounted at an angle with respect to the axial direction of the rotating shaft 4 so as to reflect the measurement light 12 and make it incident on the corresponding sample. It is being In this embodiment, the measurement light 12 is incident parallel to the rotation axis 4, and each of the reflecting mirrors 6-1 to 6-4 is inclined at 45 degrees with respect to the rotation axis direction. Further, as shown in FIG. 3, the center positions of the respective reflecting mirrors 6-1 to 6-4 are arranged to be shifted from each other by 90 degrees with respect to the rotational direction of the rotating shaft 4.

第2図(A)に示されるように、いま測定光12が反射
鏡6−1で反射されて試料2−1に入射する位置から、
回転軸4が測定光入射方向から見て反時計方向に90度
回転すると、同図(B)に示されるように測定光12は
反射鏡6−2で反射されて試料2−2に入射する。この
ように、回転軸4の回転にともなって測定光12は試料
2−1〜2−4に順次切り換えられて入射していく。
As shown in FIG. 2(A), from the position where the measurement light 12 is now reflected by the reflecting mirror 6-1 and enters the sample 2-1,
When the rotating shaft 4 rotates 90 degrees counterclockwise when viewed from the measurement light incident direction, the measurement light 12 is reflected by the reflecting mirror 6-2 and enters the sample 2-2, as shown in FIG. . In this way, as the rotation shaft 4 rotates, the measurement light 12 is sequentially switched and incident on the samples 2-1 to 2-4.

第5図にデータ処理部の一例を示す。FIG. 5 shows an example of the data processing section.

光検出器18の出力ラインがデマルチプレクサ2oを経
て各試料2−1〜2−4に対応するサンプルホールド回
路22−1〜22−4に接続されている。デマルチプレ
クサ20は回転検出器14の回転検出信号により動作が
制御され、各サンプルホールド回路22−1〜22−4
にはそれぞれの試料2−1〜2−4を通過した測定光1
2による光検出器18の検出信号が保持されて出力され
る。
The output line of the photodetector 18 is connected to sample hold circuits 22-1 to 22-4 corresponding to each sample 2-1 to 2-4 via a demultiplexer 2o. The operation of the demultiplexer 20 is controlled by a rotation detection signal from the rotation detector 14, and each sample and hold circuit 22-1 to 22-4
is the measurement light 1 that has passed through each sample 2-1 to 2-4.
The detection signal of the photodetector 18 by 2 is held and output.

次に、本実施例の動作について説明する。Next, the operation of this embodiment will be explained.

モータ8により回転軸4を回転させ、測定光12を入射
させると、測定光12は測定光切換え機構の反射鏡6−
1〜6−4によって順次切り換えられて試料2−1〜2
−4を順次通過し、光ファイバ16−1〜16−4を経
て光検出器18で検出される。
When the rotary shaft 4 is rotated by the motor 8 and the measuring light 12 is incident, the measuring light 12 is reflected by the reflecting mirror 6- of the measuring light switching mechanism.
Samples 2-1 to 2 are sequentially switched by 1 to 6-4.
-4, and is detected by the photodetector 18 via optical fibers 16-1 to 16-4.

光検出器18の検出信号は、第6図に示されるように試
料2−1〜2−4の順に繰り返して得られる。一方、回
転検出器14が回転軸4の回転を検出して第6図に示さ
れる回転検出信号を出力する。回転検出信号がオンの期
間にデマルチプレクサ20の対応するゲートがオンとな
り、光検出器信号が採取されてそれぞれのサンプルホー
ルド回路22−1〜22−4に保持される。サンプルホ
ールド回路22−1〜22−4に保持された信号は、対
応する試料の光検出器信号が次の周期で採取されるまで
保持される。
The detection signal of the photodetector 18 is repeatedly obtained from samples 2-1 to 2-4 in the order shown in FIG. On the other hand, the rotation detector 14 detects the rotation of the rotating shaft 4 and outputs a rotation detection signal shown in FIG. While the rotation detection signal is on, the corresponding gate of the demultiplexer 20 is turned on, and the photodetector signals are sampled and held in the respective sample and hold circuits 22-1 to 22-4. The signals held in the sample and hold circuits 22-1 to 22-4 are held until the photodetector signal of the corresponding sample is sampled in the next cycle.

測定光12の波長を固定しておき、測定光切換え機構に
より測定光12を試料2−1〜2−4に順次入射させな
がら測定していくと、4個の試料について同時に吸光度
の時間変化を測定することができる。第7図はこのよう
にして測定された吸光度の時間変化の例を表わしている
By fixing the wavelength of the measurement light 12 and making measurements while sequentially making the measurement light 12 incident on the samples 2-1 to 2-4 using the measurement light switching mechanism, it is possible to simultaneously measure changes in absorbance over time for the four samples. can be measured. FIG. 7 shows an example of the change in absorbance measured in this way over time.

測定光12の波長を走査していくことにより4個の試料
2−1〜2−4のスペクトルを同時に測定することがで
きる。ただし、この場合はベースラインは各試料2−1
〜2−4の位置で測定する必要がある。第8図はこのよ
うにしてスペクトルを測定した例を表わしている。
By scanning the wavelength of the measurement light 12, the spectra of the four samples 2-1 to 2-4 can be measured simultaneously. However, in this case, the baseline is 2-1 for each sample.
It is necessary to measure at positions ~2-4. FIG. 8 shows an example of a spectrum measured in this manner.

上記の実施例は同時に測定する試料を4個としているが
、他の個数の試料を同時に測定する場合は、配置される
試料の数と反射鏡及び光フアイバ入射端の数を一致させ
る。
In the above embodiment, four samples are measured at the same time, but when measuring another number of samples at the same time, the number of samples arranged is matched with the number of reflecting mirrors and optical fiber input ends.

また、上記の実施例では測定光切換え機構の反射鏡6−
1〜6−4として平面反射鏡を用いているが、凹面反射
鏡を用いることもできる。凹面反射鏡を用いた場合は、
第9図に示されるように反射ji 6 a −1〜6a
−4の幅を狭くする。これに伴なって、光検出器信号は
第10図に示されるように第6図のものより幅が狭くな
る。そのため、回転検出器14の回転検出信号の幅も狭
くする。
Further, in the above embodiment, the reflecting mirror 6- of the measurement light switching mechanism is
Although plane reflecting mirrors are used as 1 to 6-4, concave reflecting mirrors may also be used. When using a concave reflector,
As shown in FIG. 9, the reflection ji 6 a -1~6a
- Narrow the width of 4. Accordingly, the width of the photodetector signal becomes narrower as shown in FIG. 10 than that in FIG. 6. Therefore, the width of the rotation detection signal from the rotation detector 14 is also narrowed.

凹面反射tf16 a −1〜6 a −4を用いると
、測定光12を試料2−1〜2−4の中心に絞る・こと
ができ、試料2−1〜2−4の量を少なくすることがで
きる。
By using the concave reflection tf16a-1 to 6a-4, the measurement light 12 can be focused on the center of the samples 2-1 to 2-4, and the amount of the samples 2-1 to 2-4 can be reduced. I can do it.

第11図はさらに他の実施例を表わす。FIG. 11 shows yet another embodiment.

第1図の実施例では試料2−1〜2−4を通過した測定
光12を光ファイバ16−1〜16−4を用いて光検出
器18に導いているが、第11図の実施例では試料2−
1〜2−4を通過した測定光12を受光する側にも、入
射側と同様の回転軸24に反射鏡26−1〜26−4を
取りつけたものをIsする6回転軸4,24はベルト1
0を介してモータ8によって同期して回転させ、反射鏡
6−1で反射された測定光12は試料2−1を通過し反
射鏡26−1で反射されて光検出器18に導かれ、反射
鏡6−2で反射された測定光12は試料2−2を通過し
反射鏡26−2で反射されて光検出器18に導かれ、反
射鏡6−3で反射された測定光12は試料2−3を通過
し反射鏡26−3で反射されて光検出器18に導かれ1
反射鏡6−4で反射された測定光12は試料2−4を通
過し反射鏡26−4で反射されて光検出器18に導かれ
るようにする。
In the embodiment shown in FIG. 1, the measurement light 12 that has passed through the samples 2-1 to 2-4 is guided to the photodetector 18 using optical fibers 16-1 to 16-4, but in the embodiment shown in FIG. Now, sample 2-
On the side that receives the measurement light 12 that has passed through the measuring beams 1 to 2-4, there are also mirrors 26-1 to 26-4 attached to the same rotating shaft 24 as on the incident side. belt 1
The measurement light 12 is rotated synchronously by a motor 8 via a mirror 26-1, passes through a sample 2-1, is reflected by a reflector 26-1, and is guided to a photodetector 18. The measurement light 12 reflected by the reflection mirror 6-2 passes through the sample 2-2, is reflected by the reflection mirror 26-2, and is guided to the photodetector 18, and the measurement light 12 reflected by the reflection mirror 6-3 is It passes through the sample 2-3, is reflected by the reflecting mirror 26-3, and is guided to the photodetector 18.
The measurement light 12 reflected by the reflecting mirror 6-4 passes through the sample 2-4, is reflected by the reflecting mirror 26-4, and is guided to the photodetector 18.

第12図はデータ処理部の他の例を表わしている。FIG. 12 shows another example of the data processing section.

光検出器18の出力ラインにサンプルホールド回路28
を接続する。回転検出器14の回転検出信号によりある
試料の光検出器信号が保持され、その信号がA/D変換
回路30でデジタル信号に変換され、入力ポート32を
経てコンピュータ34に取り込まれる。一方1回転検出
器14の回転検出信号はまた、入力ポート36を経てコ
ンピュータ34に取り込まれ、その回転検出信号で光検
出器信号が試料ごとに弁別され、メモリ38−1〜38
−4に振り分けられて記憶されていく。
A sample hold circuit 28 is connected to the output line of the photodetector 18.
Connect. A photodetector signal of a certain sample is held by the rotation detection signal of the rotation detector 14, and the signal is converted into a digital signal by the A/D conversion circuit 30 and input into the computer 34 via the input port 32. On the other hand, the rotation detection signal of the one-rotation detector 14 is also taken into the computer 34 via the input port 36, and the photodetector signal is discriminated for each sample using the rotation detection signal.
-4 and are stored.

(発明の効果) 本発明では複数個配置された試料に対して測定光を分散
させるのではなく、測定光切換え機構により順次切り換
えて入射させるので、測定光の光エネルギーの損失が少
なく、高いS/N比で測定することができる。
(Effects of the Invention) In the present invention, instead of dispersing the measurement light onto a plurality of samples arranged, the measurement light switching mechanism sequentially switches the measurement light and makes it incident on the sample, so there is little loss of optical energy of the measurement light and high S. /N ratio.

測定光切換え機構においては回転軸に取りつけた反射鏡
を回転させることにより、測定光の切換えを行なうので
、高速切換えが可能であり、複数の試料の同時測定が可
能となり、吸光度などの連続的変化を測定することがで
きるようになる。
In the measurement light switching mechanism, the measurement light is switched by rotating a reflector attached to the rotating shaft, so high-speed switching is possible, and simultaneous measurement of multiple samples is possible, allowing continuous changes in absorbance, etc. be able to measure.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は一実施例におけるデータ処理部以外の部分を示
す概略平面図、第2図(A)、(B)はそれぞれ測定光
切換え機構の反射鏡の状態を示す平面図、第3図は反射
鏡と回転軸を測定光入射方向から見た側面図、第4図は
反射鏡と回転軸を示す斜視図、第5図は一実施例におけ
るデータ処理部の一例を示す回路図、第6図は一実施例
の動作を示す波形図、第7図及び第8図はそれぞれ一実
施例を用いた測定例を示す波形図、第9図は他の実施例
における反射鏡と回転軸を測定光入射方向から見た側面
図、第10図は第9図の反射鏡を用いた場合の動作を示
す波形図、第11図はさらに他の実施例におけるデータ
処理部以外の部分を示す概略平面図、第12図は他の実
施例におけるデータ処理部を示すブロック図である。 2−1〜2−4・・・・・・試料、4,24・・・・・
・回転軸、6−1〜64,6a−1〜6a−4,26−
1〜26−4・・・・・・反射鏡、8・・・・・・モー
タ、12・・・・・・測定光、14・・・・・・回転検
出器、16−1〜16−4・・・・・・光ファイバ、1
8・・・・・・光検出器、20・・・・・・デマルチプ
レクサ、22−1〜22−4.28・・・・・・サンプ
ルホールド回路、34・・・・・・コンピュータ、38
−1〜38−4・・・・・・メモリ。 特許出願人 株式会社島津製作所
FIG. 1 is a schematic plan view showing parts other than the data processing section in one embodiment, FIGS. 2A and 2B are plan views showing the state of the reflecting mirror of the measurement light switching mechanism, and FIG. FIG. 4 is a side view of the reflecting mirror and the rotating shaft viewed from the measurement light incident direction, FIG. 4 is a perspective view showing the reflecting mirror and the rotating shaft, FIG. 5 is a circuit diagram showing an example of the data processing section in one embodiment, and FIG. The figure is a waveform diagram showing the operation of one embodiment, Figures 7 and 8 are waveform diagrams each showing a measurement example using one embodiment, and Figure 9 is a measurement of the reflecting mirror and rotation axis in another embodiment. FIG. 10 is a waveform diagram showing the operation when using the reflecting mirror of FIG. 9, and FIG. 11 is a schematic plan view showing parts other than the data processing section in another embodiment. 12 are block diagrams showing a data processing section in another embodiment. 2-1 to 2-4...Sample, 4,24...
・Rotating shaft, 6-1 to 64, 6a-1 to 6a-4, 26-
1 to 26-4...Reflector, 8...Motor, 12...Measurement light, 14...Rotation detector, 16-1 to 16- 4...Optical fiber, 1
8...Photodetector, 20...Demultiplexer, 22-1 to 22-4.28...Sample and hold circuit, 34...Computer, 38
-1 to 38-4...Memory. Patent applicant: Shimadzu Corporation

Claims (1)

【特許請求の範囲】[Claims] (1)固定して配置された複数個の試料に測定光を順次
切り換えて入射させる測定光切換え機構と、試料を通過
した測定光を単一の光検出器で受光する受光部と、前記
測定光切換え機構の切換え位置を検出する回転検出部と
、前記受光部の測定信号を前記回転検出部の検出信号を
もとにして処理するデータ処理部とを備え、前記測定光
切換え機構では各試料に対応する複数の反射鏡が回転軸
に取りつけられており、各反射鏡は互いに回転軸方向の
位置が異なり、回転軸方向に対して傾斜し、かつ、測定
光の入射方向に対して等しい回転角を占有している分光
光度計。
(1) A measurement light switching mechanism that sequentially switches measurement light to make it incident on a plurality of fixedly arranged samples, a light receiving section that receives the measurement light that has passed through the sample with a single photodetector, and the measurement The measurement light switching mechanism includes a rotation detection section that detects the switching position of the light switching mechanism, and a data processing section that processes the measurement signal of the light receiving section based on the detection signal of the rotation detection section. A plurality of reflecting mirrors corresponding to the rotation axis are attached to the rotation axis, and each reflection mirror has a different position in the rotation axis direction, is tilted with respect to the rotation axis direction, and has an equal rotation with respect to the incident direction of the measurement light. A spectrophotometer occupies a corner.
JP15751788A 1988-06-24 1988-06-24 Spectrophotometer capable of measuring two or more samples Pending JPH01321324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15751788A JPH01321324A (en) 1988-06-24 1988-06-24 Spectrophotometer capable of measuring two or more samples

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15751788A JPH01321324A (en) 1988-06-24 1988-06-24 Spectrophotometer capable of measuring two or more samples

Publications (1)

Publication Number Publication Date
JPH01321324A true JPH01321324A (en) 1989-12-27

Family

ID=15651405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15751788A Pending JPH01321324A (en) 1988-06-24 1988-06-24 Spectrophotometer capable of measuring two or more samples

Country Status (1)

Country Link
JP (1) JPH01321324A (en)

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Publication number Priority date Publication date Assignee Title
JP2013181781A (en) * 2012-02-29 2013-09-12 Toshiba Corp Automatic analyzer
DE102017218691B4 (en) 2016-10-19 2020-06-18 Fanuc Corporation Beam splitting device
JP2018066880A (en) * 2016-10-20 2018-04-26 ファナック株式会社 Beam distributor
CN107966767A (en) * 2016-10-20 2018-04-27 发那科株式会社 Beam splitter
DE102017218510B4 (en) 2016-10-20 2021-10-07 Fanuc Corporation Beam distributor
JP2018121075A (en) * 2018-04-06 2018-08-02 東京エレクトロン株式会社 Substrate processing device, and substrate processing method
CN109212743A (en) * 2018-09-17 2019-01-15 西北核技术研究所 Beam laser system is closed in the reflective pulse laser beam combining device of shaft and pulse
CN109212743B (en) * 2018-09-17 2020-08-14 西北核技术研究所 Rotating shaft reflection type pulse laser beam combiner and pulse beam combining laser system
WO2021193198A1 (en) * 2020-03-27 2021-09-30 東京エレクトロン株式会社 Foreign matter detection device, substrate processing device, and method for checking operation of foreign matter detection device
WO2023127488A1 (en) * 2021-12-27 2023-07-06 東京エレクトロン株式会社 Device for detecting foreign matter and method for detecting foreign matter
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