JPH0131958Y2 - - Google Patents
Info
- Publication number
- JPH0131958Y2 JPH0131958Y2 JP8707083U JP8707083U JPH0131958Y2 JP H0131958 Y2 JPH0131958 Y2 JP H0131958Y2 JP 8707083 U JP8707083 U JP 8707083U JP 8707083 U JP8707083 U JP 8707083U JP H0131958 Y2 JPH0131958 Y2 JP H0131958Y2
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- optical
- optical axis
- coaxial
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 33
- 238000005286 illumination Methods 0.000 claims description 19
- 238000007689 inspection Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000002775 capsule Substances 0.000 description 27
- 238000010586 diagram Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8707083U JPS59194047U (ja) | 1983-06-09 | 1983-06-09 | 同軸反射形光学検査器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8707083U JPS59194047U (ja) | 1983-06-09 | 1983-06-09 | 同軸反射形光学検査器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59194047U JPS59194047U (ja) | 1984-12-24 |
| JPH0131958Y2 true JPH0131958Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-02 |
Family
ID=30216993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8707083U Granted JPS59194047U (ja) | 1983-06-09 | 1983-06-09 | 同軸反射形光学検査器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59194047U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1983
- 1983-06-09 JP JP8707083U patent/JPS59194047U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59194047U (ja) | 1984-12-24 |