JPH01318912A - Digitizing method and apparatus - Google Patents

Digitizing method and apparatus

Info

Publication number
JPH01318912A
JPH01318912A JP15305488A JP15305488A JPH01318912A JP H01318912 A JPH01318912 A JP H01318912A JP 15305488 A JP15305488 A JP 15305488A JP 15305488 A JP15305488 A JP 15305488A JP H01318912 A JPH01318912 A JP H01318912A
Authority
JP
Japan
Prior art keywords
axis
model
axis direction
detection head
contact detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15305488A
Other languages
Japanese (ja)
Inventor
Shinsuke Yasogawa
八十川 信介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Kiko Co Ltd
Original Assignee
Osaka Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Kiko Co Ltd filed Critical Osaka Kiko Co Ltd
Priority to JP15305488A priority Critical patent/JPH01318912A/en
Publication of JPH01318912A publication Critical patent/JPH01318912A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain data on the three-dimensional shape of a model by moving a non-contact detection head through the intermediary of moving bodies and by detecting the Z-axis direction from data on the X-axis and Y-axis directions and a distance of separation from the model. CONSTITUTION:The lower end of a non-contact detection head 15 is set on a Z-axis direction moving body 11 at a value being somewhat larger than the maximum value in the Z-axis direction of a model M which is mounted on a table 1. The maximum value in the X-axis direction and the maximum value in the Y-axis direction of the model M and a pitch S being set, an X-axis direction moving body 3 and a Y-axis direction moving body 7 are moved at a prescribed speed along routes by a controller 16. Thereby the non-contact detection head is moved in non-contact with the model M. In the meantime, data of an X-axis position detector 6 and a Y-axis position detector 10 are sampled at a prescribed time interval, a shape pattern set beforehand and interpolation precision are added to detection values of these detectors, and thus data on the three-dimensional shape of the model M are obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、モデルまたは製品等から加工用データを得る
ためのデジタイジング方法及び装置に関するものである
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a digitizing method and apparatus for obtaining processing data from a model, product, or the like.

〔従来の技術〕[Conventional technology]

従来のデジタイジング方法は、接触型のトレーサヘンド
を有する倣い機能を持った機械にょリ、モデルまたは製
品を倣い、その時の機械の動きを、検出器を用いてデジ
タル化して記憶させ、これから加工用NCデータを作成
させていたものである。
The conventional digitizing method involves copying a model or product with a contact-type tracer hand and a copying function, digitizing and memorizing the movement of the machine using a detector, and then transmitting it to the processing NC. It was used to create data.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のデジタイジング方法では、高精度の倣いサーボ技
術が必要で高価となり、また、倣いサーボのため、高速
化に限界があり、しかも、接触式のため、粘土等の軟ら
かいモデルに対しては通用が困難又は不可能であった。
Conventional digitizing methods require high-precision copying servo technology, which is expensive, and since it is a copying servo, there is a limit to how high the speed can be increased.Furthermore, since it is a contact method, it is not suitable for soft models such as clay. was difficult or impossible.

本発明は、従来のデジタイジング方法の上記点に鑑みて
提案されたもので、その目的とするところは、高精度の
倣いサーボ技術を必要とせず、かつ、デジタイジングの
高速化を可能とし、やわらかい対象物に対してもデジタ
イジングが可能なデジタイジング方法及び装置を提供し
ようとするものである。
The present invention has been proposed in view of the above points of conventional digitizing methods, and its purpose is to enable high-speed digitizing without requiring high-precision copying servo technology, The present invention aims to provide a digitizing method and device that can digitize even soft objects.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため、本発明のデジタイジング方法
は、モデルに対して、Z軸方向位置を一定の非接触位置
に保持した状態で非接触検出へノドを、Z軸と直交する
X−Y平面内でモデルのX−Y平面内の投影像を、その
一端から他端へ定ピッチで細分割した経路に沿って非接
触で走査させ、上記非接触検出ヘッドのX−Y平面内で
の位置データを刻々と検出し、かつ、各位置での非接触
検出ヘッドとモデルとの間のZ軸方向の隔離距離を検出
してモデルの三次元形状データを得るようにしたもので
ある。
In order to achieve the above object, the digitizing method of the present invention uses a digitizing method to perform non-contact detection on a model while maintaining the Z-axis direction position at a constant non-contact position. The projected image of the model in the X-Y plane is scanned in a non-contact manner along a path subdivided at a constant pitch from one end to the other end, and the non-contact detection head is scanned in the X-Y plane. The three-dimensional shape data of the model is obtained by detecting position data every moment and detecting the separation distance in the Z-axis direction between the non-contact detection head and the model at each position.

また、本発明のデジク・fジング装置は、モデルを装着
するテーブルと、テーブル上のモデルに対して、X−Y
−Z軸方向に移動制御可能とした移動体と、移動体のX
−Y平面内での位置データを刻々と検出可能としたX軸
及びY軸位置検出器と、モデルに対してZ@方向位置を
一定の接触位置に保持した状態で上記移動体に装着され
、上記X軸及びY軸位置検出器の位置データ検出に対応
してモデルまでのZ軸方向の隔離距離を検出する非接触
検出ヘッドと、モデルのX−Y平面内の投影像をその一
端から他端へ定ピッチで細分割した経路に沿って移動体
を介して非接触検出ヘッドを走査させ、かつ、この走査
中のX軸及びY軸位置検出器のX−Y平面内の位置デー
タと非接触検出ヘッドによるZ軸方向の離隔距離データ
からモデルの三次元形状データを演算するコントローラ
とを具備したものである。
Further, the digital f-jing device of the present invention has a table on which a model is mounted, and an X-Y
- A moving body whose movement can be controlled in the Z-axis direction and the X of the moving body
- X-axis and Y-axis position detectors capable of detecting position data in the Y plane moment by moment; mounted on the moving body while maintaining the Z@ direction position at a constant contact position with respect to the model; A non-contact detection head detects the separation distance in the Z-axis direction to the model in response to the position data detected by the X-axis and Y-axis position detectors, and a non-contact detection head that detects the projected image of the model in the X-Y plane from one end to the other. The non-contact detection head is scanned via a moving body along a path subdivided at a constant pitch toward the end, and the position data in the X-Y plane of the X-axis and Y-axis position detectors during this scanning is The controller includes a controller that calculates three-dimensional shape data of the model from separation distance data in the Z-axis direction from the contact detection head.

〔作用〕[Effect]

本発明のデジタイジング方法は、モデルのX−Y平面内
の投影像を、その一端から他端へ定ピッチで細分割した
経路に沿って非接触検出ヘッドを非接触で走行させて、
X軸方向及びY軸方向の位置データを刻々と検出する。
The digitizing method of the present invention includes running a non-contact detection head in a non-contact manner along a path that subdivides a projected image of a model in the X-Y plane from one end to the other end at a constant pitch.
Position data in the X-axis direction and Y-axis direction is detected moment by moment.

そして、Z軸方向のデータは、非接触検出ヘッドを2軸
方向に固定しておき、モデルとの間の離隔距離を刻々と
検出させ、上記X軸方向及びY軸方向の位置データと合
わせてモデルの三次元形状データを得るものである。
Then, data in the Z-axis direction is obtained by fixing a non-contact detection head in two axes, detecting the distance between the model and the model, and combining it with the position data in the X-axis and Y-axis directions. This is to obtain three-dimensional shape data of the model.

また、本発明のデジタイジング装置は、非接触検出へ・
ノドを移動体を介して移動させ、X軸方向及びY軸方向
の位置データを、移動体の移動量から検出させ、Z軸方
向の位置データは、非接触検出ヘッドにより、モデルま
での離隔距離で検出させており、これら各軸の位置デー
タは、コントローラにより演算処理される。
In addition, the digitizing device of the present invention can be used for non-contact detection.
The throat is moved through the moving body, position data in the X-axis direction and Y-axis direction is detected from the amount of movement of the moving body, and position data in the Z-axis direction is determined by a non-contact detection head based on the separation distance to the model. The position data of each axis is calculated and processed by the controller.

〔実施例〕〔Example〕

第1図は本発明装置の一実施例を示す概略斜視図であっ
て、同図において、(1)はテーブル、(2)はテーブ
ル(1)の後面に立設したコラム、(3)はコラム(2
)にX軸方向(左右方向)に摺動可能に装備したX軸方
向移動体、(4)はX軸サーボモータ、(5)はX軸ボ
ールねしであって、ボールナツト(図示省略)を介して
X軸方向移動体(3)をコラム(2)上でX軸方向に駆
動する装置を構成しており、X軸方向移動体(3)の移
動量は、X軸位置検出器(6)で検出される。
FIG. 1 is a schematic perspective view showing one embodiment of the device of the present invention, in which (1) is a table, (2) is a column erected on the rear surface of the table (1), and (3) is a Column (2
) is equipped with an X-axis moving body slidable in the X-axis direction (horizontal direction), (4) is an X-axis servo motor, and (5) is an X-axis ball screw with a ball nut (not shown). This constitutes a device that drives the X-axis moving body (3) on the column (2) in the X-axis direction, and the amount of movement of the X-axis moving body (3) is determined by the X-axis position detector (6 ) is detected.

(7)はX軸方向移動体(3)にY軸方向(前後方向)
に移動可能に装着されたX軸方向移動体、(8)はY軸
サーボモータ、(9)はY軸ボールねしであって、ポー
ルナツト(図示−省略)を介してY軸方向移動体(7)
をX軸方向移動体(3)に対してY軸方向に駆動する装
置を構成しており、Y軸方向移動体(7)の移動量は、
Y軸位置検出器(10)で検出される。
(7) is attached to the X-axis moving body (3) in the Y-axis direction (back and forth direction).
(8) is a Y-axis servo motor, (9) is a Y-axis ball screw, which is movably mounted on the Y-axis moving body ( 7)
constitutes a device that drives the X-axis moving body (3) in the Y-axis direction, and the amount of movement of the Y-axis moving body (7) is:
It is detected by a Y-axis position detector (10).

(11)はY軸方向移動体(7)に2軸方向(上下方向
)に移動可能に装着されたX軸方向移動体、(12)は
2軸サーボモータ、(13)はZ軸ボールねしであって
、ポールナツト(図示省略)を介してX軸方向移動体(
11)をY軸方向移動体(7)に対してZiIl17I
iFlに駆動する装置を構成しており、X軸方向移動体
(11)の移動量は、Z軸位置検出器(14)で検出さ
れる。
(11) is an X-axis moving body attached to the Y-axis moving body (7) so that it can move in two axes (up and down), (12) is a two-axis servo motor, and (13) is a Z-axis ball. The X-axis moving body (
11) with respect to the Y-axis moving body (7).
It constitutes a device that drives iFl, and the amount of movement of the X-axis moving body (11) is detected by a Z-axis position detector (14).

(15)はX軸方向移動体(11)に装着された非接触
検出ヘッド、(16)はコントローラ、(M)はモデル
を示している。
(15) is a non-contact detection head mounted on the X-axis moving body (11), (16) is a controller, and (M) is a model.

非接触検出ヘッド(15)は、第2図に示す様にレーデ
光源(17)とレンズ(18)  (19)と絞り(2
0)及び光位置センサ(21)の組合せよりなり、非接
触検出ヘッド(15)からモデル(M)までの離隔距離
を、光位置センサ(21)により検出させる構成である
。即ち、レーザ光源(17)からのレーザ光は、ハーフ
ミラ−(22)からレンズ(18)を経てモデル(M)
に達し、モデル(M)を反射したレーザ光は、レンズ(
18)、絞り(20) 、レンズ(19)を経て光位置
センサ(21)に入射し、非接触検出ヘッド(15)か
らモデル(M)までの離隔距離に比例して光位置センサ
(21)への入射位置が変化することによって、離隔距
離を検出させるものである。
The non-contact detection head (15) consists of a Rede light source (17), lenses (18) (19), and an aperture (2) as shown in Figure 2.
0) and an optical position sensor (21), and the separation distance from the non-contact detection head (15) to the model (M) is detected by the optical position sensor (21). That is, the laser light from the laser light source (17) passes through the half mirror (22), the lens (18), and the model (M).
The laser beam that reaches the lens (M) and reflects the model (M)
18), the aperture (20), the light enters the position sensor (21) through the lens (19), and the light enters the position sensor (21) in proportion to the separation distance from the non-contact detection head (15) to the model (M). The separation distance is detected by changing the incident position on the beam.

コントローラ(16)は、X軸サーボモータ(4)及び
Y軸サーボモータ(8)を介してX軸方向移動体(3)
及びY軸方向移動体く7)を第3図に示す様に移動させ
、かつ、各軸位置検出器(6)  (10)  (14
)の位置データ及び非接触検出ヘッド(15)の光位置
センサ(21)の検出値を演算処理してモデル(M)の
三次元形状データを作成する。
The controller (16) controls the X-axis moving body (3) via the X-axis servo motor (4) and the Y-axis servo motor (8).
and Y-axis direction moving body 7) as shown in Fig. 3, and each axis position detector (6) (10) (14
) and the detection value of the optical position sensor (21) of the non-contact detection head (15) are processed to create three-dimensional shape data of the model (M).

上記X軸方向移動体(3)の移動範囲(P)及びY軸方
向移動体(7)の移動範囲(Q)は、モデル(M)のX
−Y平面内の投影像によって決定され、この範囲を、そ
の一端から他端へ定ピッチ(S)で細分割したジグザグ
経路に沿ってコントローラ(16)により駆動される。
The moving range (P) of the X-axis moving body (3) and the moving range (Q) of the Y-axis moving body (7) are
- It is determined by the projected image in the Y plane and is driven by the controller (16) along a zigzag path that subdivides this range from one end to the other at a constant pitch (S).

上記ピンチ(S)は、光位置センサ(21)の分解能を
限度として小さくする程精密なデジタイジングが可能と
なり、加工条件等によって適当な値に設定される。
The smaller the pinch (S) is, the smaller the resolution of the optical position sensor (21), the more precise digitizing becomes possible, and it is set to an appropriate value depending on processing conditions and the like.

本発明装置は以上の構成からなり、次に動作を説明する
The device of the present invention has the above configuration, and its operation will be explained next.

テーブル(1)上に装着したモデル(M)のZ軸方向の
最大値より若干大きい値で非接触検出ヘッド(15)の
下端をX軸方向移動体(11)にセントする。そして、
モデル(M)のX軸方向の最大値及びY軸方向の最大値
並びにピッチ(S)を設定し、コントローラ(16)に
よって、X軸方向移動体(3)及びY軸方向移動体(7
)を第3図の如き経路に沿って一定速度で移動させる。
The lower end of the non-contact detection head (15) is placed on the X-axis moving body (11) at a value slightly larger than the maximum value in the Z-axis direction of the model (M) mounted on the table (1). and,
The maximum value in the X-axis direction, the maximum value in the Y-axis direction, and the pitch (S) of the model (M) are set, and the controller (16) controls the X-axis direction moving body (3) and the Y-axis direction moving body (7).
) is moved at a constant speed along a path as shown in FIG.

これにより、非接触検出ヘッド(15)はモデル(M 
)に非接触で移動する。そして、この間、X軸位置検出
器(6)及びY軸位置検出器(10)のデータを一定時
間間隔でサンプリングし、これと同時に、非接触検出ヘ
ッド(15)の光位置センサ(21)の検出値を刻々と
サンプリングする。これらの検出値に予め設定した形状
パターン及び補間精度を加味させて、モデル(M)の三
次元形状データが得られる。
As a result, the non-contact detection head (15) is connected to the model (M
) to move contactlessly. During this time, the data of the X-axis position detector (6) and the Y-axis position detector (10) are sampled at fixed time intervals, and at the same time, the data of the optical position sensor (21) of the non-contact detection head (15) is sampled. Sample detected values every moment. Three-dimensional shape data of the model (M) is obtained by adding a preset shape pattern and interpolation accuracy to these detected values.

上記実施例では、X軸方向に定ピッチ(S)で細分割し
ているが、Y軸方向に定ピンチ(S)で細分割させても
よく、また、それぞれの移動範囲(P)  (Q)は、
モデル(M)のx−y平面への投影像の輪郭形状に適合
させることによって、無駄な動作を減少させることが可
能である。
In the above embodiment, the subdivision is performed in the X-axis direction at a constant pitch (S), but it may also be subdivided in the Y-axis direction at a constant pinch (S), and each movement range (P) (Q )teeth,
It is possible to reduce unnecessary operations by adapting the contour shape of the projected image of the model (M) onto the xy plane.

また、非接触検出ヘッド(15)には、レーザー光以外
に、指向性の高い媒体(例えば、超音波)を使用しても
よい。
Furthermore, in addition to laser light, a highly directional medium (for example, ultrasonic waves) may be used in the non-contact detection head (15).

さらに、非接触検出ヘッド(15)で検出したデータは
、そのまま取り込まず、複数個分のデータをサンプリン
グする毎に、前のデータを遅らせて記憶させる如きバッ
ファ処理機能をもたせたり、或いは、各測定点で、その
周囲のデータを集めて平均値を求めさせるために、微小
範囲の走査機能を持たせることができる。また、非接触
検出ヘッド(15)に先行検出制御機能をもたせ、測定
点の前方のモデル形状を検出させてZ軸方向の位置を変
更させ、衝突等を防止させることも可能であり、さらに
、先行検出で得たデータにより、傾斜面や曲面等の場合
には、これらの面に対向するように傾斜させたり、或い
は、法線方向検出機能を付与すること藻可能である。
Furthermore, the data detected by the non-contact detection head (15) may be provided with a buffer processing function that delays and stores the previous data each time multiple pieces of data are sampled, or for each measurement. In order to collect data around a point and find an average value, it is possible to provide a scanning function for a minute range. Furthermore, it is also possible to provide the non-contact detection head (15) with a prior detection control function to detect the model shape in front of the measurement point and change the position in the Z-axis direction to prevent collisions, etc. Based on the data obtained in advance detection, in the case of inclined surfaces, curved surfaces, etc., it is possible to tilt the surface so as to face these surfaces, or to add a normal direction detection function.

〔発明の効果〕〔Effect of the invention〕

本発明の方法によれば、高精度の倣いサーボ技術を必要
とせず、かつ、デジタイジングの高速化が可能であり、
しかも、やわらかいモデルに対してもデジタイジングが
可能となり、モデルの製作が容易化できる。
According to the method of the present invention, high-precision copying servo technology is not required, and high-speed digitizing is possible.
Moreover, digitizing is also possible for soft models, making model production easier.

また、本発明の装置によれば、簡単安価な構成からなる
デジタイジング装置を提供することが可能である。
Further, according to the device of the present invention, it is possible to provide a digitizing device having a simple and inexpensive configuration.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明装置の一実施例を示す概略斜視図、第2
図は非接触検出ヘッドの一例を示す原理説明図、第3図
はX軸及びY軸方向の移動方法の一例を示す移動経路図
である。 (1)・・・テーブル、   (2)・−・コラム、(
3)・−・X軸方向移動体、 (4)・・−X軸サーボモータ、 (5)−・・X軸ボールねし、 (6)・・−X軸位置検出器、 (7)・−X軸方向移動体、 (8)・・・Y軸サーボモータ、 (9)−Y軸ボールねじ、 (10)・−・Y軸位置検出器、 (11)−・−Z軸方向移動体、 (12)・・・X軸サーボモータ、 (13)・・−・Z軸ボールねし、 (14)・・・Z軸位置検出器、 (15)−・−非接触検出ヘッド、 (16)・・−・・コントローラ、(M)・・・−・モ
デル。 特許 出願人 大阪機工株式会社
FIG. 1 is a schematic perspective view showing one embodiment of the device of the present invention, and FIG.
The figure is a principle explanatory diagram showing an example of a non-contact detection head, and FIG. 3 is a movement path diagram showing an example of a method of moving in the X-axis and Y-axis directions. (1)...Table, (2)...Column, (
3)--X-axis direction moving body, (4)--X-axis servo motor, (5)--X-axis ball screw, (6)--X-axis position detector, (7)- -X-axis moving body, (8)...Y-axis servo motor, (9)-Y-axis ball screw, (10)--Y-axis position detector, (11)--Z-axis moving body , (12)...X-axis servo motor, (13)...Z-axis ball screw, (14)...Z-axis position detector, (15)...-non-contact detection head, (16) )...--Controller, (M)...--Model. Patent Applicant Osaka Kiko Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] (1)モデルに対して、Z軸方向位置を一定の非接触位
置に保持した状態で非接触検出ヘッドを、Z軸と直交す
るX−Y平面内でモデルのX−Y平面内の投影像を、そ
の一端から他端へ定ピッチで細分割した経路に沿って非
接触で走査させ、上記非接触検出ヘッドのX−Y平面内
での位置データを刻々と検出し、かつ、各位置での非接
触検出ヘッドとモデルとの間のZ軸方向の隔離距離を検
出してモデルの三次元形状データを得ることを特徴とす
るデジタイジング方法。
(1) With the non-contact detection head held at a constant non-contact position in the Z-axis direction with respect to the model, the projected image of the model in the X-Y plane is measured in the X-Y plane perpendicular to the Z-axis. is scanned in a non-contact manner from one end to the other along a path subdivided at a fixed pitch, and the position data of the non-contact detection head in the X-Y plane is detected moment by moment, and at each position. A digitizing method characterized by detecting the separation distance in the Z-axis direction between a non-contact detection head and the model to obtain three-dimensional shape data of the model.
(2)モデルを装着するテーブルと、テーブル上のモデ
ルに対して、X−Y−Z軸方向に移動制御可能とした移
動体と、移動体のX−Y平面内での位置データを刻々と
検出可能としたX軸及びY軸位置検出器と、モデルに対
してZ軸方向位置を一定の接触位置に保持した状態で上
記移動体に装着され、上記X軸及びY軸位置検出器の位
置データ検出に対応してモデルまでのZ軸方向の隔離距
離を検出する非接触検出ヘッドと、モデルのX−Y平面
内の投影像をその一端から他端へ定ピッチで細分割した
経路に沿って移動体を介して非接触検出ヘッドを走査さ
せ、かつ、この走査中のX軸及びY軸位置検出器のX−
Y平面内の位置データと非接触検出ヘッドによるZ軸方
向の離隔距離データとからモデルの三次元形状データを
演算するコントローラとを具備したことを特徴とするデ
ジタイジング装置。
(2) A table on which the model is mounted, a movable body whose movement can be controlled in the X-Y-Z axis directions with respect to the model on the table, and position data of the movable body within the X-Y plane. X-axis and Y-axis position detectors that can detect the position of the X-axis and Y-axis position detectors are attached to the movable body with the Z-axis direction position maintained at a constant contact position with respect to the model, and the positions of the X-axis and Y-axis position detectors are A non-contact detection head detects the separation distance in the Z-axis direction to the model in response to data detection, and a non-contact detection head detects the separation distance in the Z-axis direction to the model, and The non-contact detection head is scanned via the moving body, and the X- and Y-axis position detectors are
A digitizing device comprising: a controller that calculates three-dimensional shape data of a model from position data in the Y plane and separation distance data in the Z-axis direction from a non-contact detection head.
JP15305488A 1988-06-20 1988-06-20 Digitizing method and apparatus Pending JPH01318912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15305488A JPH01318912A (en) 1988-06-20 1988-06-20 Digitizing method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15305488A JPH01318912A (en) 1988-06-20 1988-06-20 Digitizing method and apparatus

Publications (1)

Publication Number Publication Date
JPH01318912A true JPH01318912A (en) 1989-12-25

Family

ID=15553971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15305488A Pending JPH01318912A (en) 1988-06-20 1988-06-20 Digitizing method and apparatus

Country Status (1)

Country Link
JP (1) JPH01318912A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445911U (en) * 1990-08-22 1992-04-20
JPH0716107U (en) * 1993-08-25 1995-03-17 株式会社東京精密 Three-dimensional surface roughness / contour shape measuring machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124816A (en) * 1984-11-22 1986-06-12 Hitachi Ltd Non-contact type three-dimensional measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124816A (en) * 1984-11-22 1986-06-12 Hitachi Ltd Non-contact type three-dimensional measuring apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445911U (en) * 1990-08-22 1992-04-20
JPH0716107U (en) * 1993-08-25 1995-03-17 株式会社東京精密 Three-dimensional surface roughness / contour shape measuring machine

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