JPH01313995A - Through hole printing equipment - Google Patents
Through hole printing equipmentInfo
- Publication number
- JPH01313995A JPH01313995A JP14372588A JP14372588A JPH01313995A JP H01313995 A JPH01313995 A JP H01313995A JP 14372588 A JP14372588 A JP 14372588A JP 14372588 A JP14372588 A JP 14372588A JP H01313995 A JPH01313995 A JP H01313995A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- hole
- printing
- circuit board
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007639 printing Methods 0.000 title claims abstract description 56
- 238000007650 screen-printing Methods 0.000 claims description 10
- 238000013459 approach Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、スルーホール印刷装置に係り、特に印刷ペー
ストを真空吸引によりスルーホール内壁面に確実に安定
して形成させるに好適な真空室を有するスルーホール印
刷装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a through-hole printing device, and particularly to a vacuum chamber suitable for reliably and stably forming printing paste on the inner wall surface of a through-hole by vacuum suction. The present invention relates to a through-hole printing device having a through-hole printing device.
従来のスルーホール印刷装置は、例えば特開昭60−1
32386号公報に記載のように、スクリーン印刷装置
の基板支持台に排気孔を設け、排気孔の圧力を圧力セン
サーで検出し、制御回路によって絞り弁を開閉し排気装
置の排気量を調節することによって、大きな寸法の基板
でも全面同一の吸引条件で歩留まり良くスルーホール印
刷をする技術が知られている。すなわち、上記公報には
、スルーホールを得るための真空吸引について述べられ
ているが、真空室の構造または形状については述べられ
ていなかった。Conventional through-hole printing devices include, for example, Japanese Patent Application Laid-open No. 60-1
As described in Publication No. 32386, an exhaust hole is provided in the substrate support of a screen printing device, the pressure in the exhaust hole is detected by a pressure sensor, and a control circuit opens and closes a throttle valve to adjust the exhaust amount of the exhaust device. A technique is known in which through-hole printing can be performed with high yield under the same suction conditions over the entire surface of a large-sized substrate. That is, although the above-mentioned publication describes vacuum suction for obtaining a through hole, it does not describe the structure or shape of the vacuum chamber.
上記従来技術は、回路基板の単位面積当りにおけるスル
ーホールの数の多い場合、またはスルーホールの孔径に
ばらつきの多い場合においては、回路基板の被刷印面と
その反対面との吸引真空圧の差を利用しているのみで、
スクリーン印刷機構のスキージの動作時間内における空
気の流れについての配慮がされておらず、スルーホール
内壁面への印刷ペーストの塗布が不均一となり、確実に
スルーホールを得ることができなかった。The above-mentioned conventional technology is effective in reducing the difference in suction vacuum pressure between the surface to be printed and the opposite surface of the circuit board when there are many through holes per unit area of the circuit board or when there are many variations in the diameter of the through holes. Only by using
No consideration was given to air flow during the operating time of the squeegee in the screen printing mechanism, and the printing paste was applied unevenly to the inner wall surface of the through hole, making it impossible to reliably obtain the through hole.
本発明は、上記従来技術の問題点を解決するためになさ
れたもので、特に孔数が多く、がっ孔径にばらつきのあ
る回路基板に対しても、真空室内の空気の流れを排気口
部で整流化して抵抗を少なくし、回路基板下では渦流に
よる印刷ペーストの吸引を強め、スルーホール内壁面へ
の印刷ペーストの塗布を均一化し確実にスルーホールを
形成させつるスルーホール印刷装置を提供することを、
その目的とするものである。The present invention was made in order to solve the problems of the prior art described above, and it is possible to reduce the flow of air in the vacuum chamber to the exhaust port, especially for circuit boards with a large number of holes and variations in hole diameter. To provide a through-hole printing device that reduces resistance by rectifying current, strengthens suction of printing paste by eddy current under a circuit board, uniformizes application of printing paste to the inner wall surface of a through-hole, and reliably forms a through-hole. That,
That is the purpose.
上記目的を達成するために、本発明に係るスルーホール
印刷装置の構成は、スクリーン印刷機構と、このスクリ
ーン印刷機構側に被印刷物である回路基板を載置し、内
部に真空室を形成し、反印刷側に排気口を有する支持台
と、前記排気口に接続する排気装置とを備え、真空吸引
により回路基板のスルーホール内壁面に印刷ペーストを
塗布するスルーホール印刷装置において、上記支持台の
真空室上部に回路基板を載置させ、その真空室下部に排
気口を開口し、前記回路基板背部から前記排気口へ前記
真空室内を吸引排気される空気の流れが整流となる形状
に当該真空室を形成したものである。In order to achieve the above object, the configuration of the through-hole printing apparatus according to the present invention includes a screen printing mechanism, a circuit board as a printing medium placed on the side of the screen printing mechanism, and a vacuum chamber formed inside. In a through-hole printing apparatus that is equipped with a support stand having an exhaust port on the side opposite to printing and an exhaust device connected to the exhaust port, and applies printing paste to the inner wall surface of the through-hole of a circuit board by vacuum suction, the support stand is A circuit board is placed on the top of the vacuum chamber, an exhaust port is opened at the bottom of the vacuum chamber, and the vacuum is shaped so that the flow of air sucked and exhausted in the vacuum chamber from the back of the circuit board to the exhaust port is rectified. It forms a chamber.
また、真空室内の吸引排気される空気の流れを整流化す
る整流板を、真空室内に設けたものである。Further, a rectifying plate is provided in the vacuum chamber to rectify the flow of air sucked and exhausted within the vacuum chamber.
なお、付記すると、上記目的は、スルーホール印刷時の
真空室内空気の吸引に際し、空気の流れをマクロ的に整
流とする漏斗状の形状を有する真空室を設けること、あ
るいは漏斗状形状の真空室内に整流板を設けた真空室を
設けることにより達成される。As an additional note, the above purpose is to provide a vacuum chamber with a funnel-shaped shape that macroscopically rectifies the air flow when suctioning the air in the vacuum chamber during through-hole printing, or to create a vacuum chamber with a funnel-shaped shape This is achieved by providing a vacuum chamber equipped with a rectifying plate.
一般にスルーホール印刷は、回路基板を支持台に載置し
、印刷時には支持台の内部に形成された真空室の空気を
排気口から真空ボ、ンプなどの排気装置で吸引排気して
回路基板の反印刷側となる下面(背景)を負圧とし、印
刷された印刷ペーストをスルーホール内壁に吸引塗布し
て導体層を形成するものである。Generally, in through-hole printing, the circuit board is placed on a support stand, and during printing, the air in the vacuum chamber formed inside the support stand is sucked and exhausted from the exhaust port using an exhaust device such as a vacuum pump or pump. A conductor layer is formed by applying negative pressure to the lower surface (background) on the side opposite to printing, and applying suction to the inner wall of the through hole with the printed printing paste.
本発明のスルーホール印刷装置では、真空室は漏斗状の
形状をなし、吸引排気する空気の流れが排気口に近づく
につれて整流となり、印刷直前のスクリーンで覆わ九た
スルーホールと印刷直後の印刷ペーストで覆われたスル
ーホールとの真空側においては、回路基板の上面の大気
と真空室側との圧力差だけでなく、カルマン渦現象が発
生して強い負圧となり、印刷ペーストを一層強く吸引し
てスルーホール内壁面に印刷ペーストを塗布して確実に
スルーホールを形成し、スルーホール形成後は真空室内
の空気流に沿って排気される。In the through-hole printing device of the present invention, the vacuum chamber has a funnel-like shape, and the flow of suction and exhaust air becomes rectified as it approaches the exhaust port, and the through-hole is covered with a screen immediately before printing and the printing paste immediately after printing. On the vacuum side between the through holes covered by the circuit board, there is not only a pressure difference between the atmosphere on the top surface of the circuit board and the vacuum chamber side, but also a Karman vortex phenomenon, which creates a strong negative pressure, which attracts the printing paste even more strongly. A printing paste is applied to the inner wall surface of the through hole to ensure the formation of the through hole, and after the through hole is formed, it is evacuated along with the air flow inside the vacuum chamber.
以下、本発明の各実施例を第1図ないし第4図を参照し
て説明し、従来技術の一実施例を第5図を参照して説明
する。Hereinafter, each embodiment of the present invention will be explained with reference to FIGS. 1 to 4, and an embodiment of the prior art will be explained with reference to FIG. 5.
第1図は1本発明の一実施例のスルーホール印刷装置の
要部構成図、第2図は、第1図の真空室の、スルーホー
ル印刷中の空気の流れを示す縦断面図である。FIG. 1 is a configuration diagram of main parts of a through-hole printing apparatus according to an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view of the vacuum chamber of FIG. 1 showing air flow during through-hole printing. .
第1図におい”C,lは、被印刷物である回路基板、2
は、スクリーン印刷機構を構成するスクリーン、3は、
スクリーン印刷機構を構成するスキージ、4は印刷ペー
ストである。In Fig. 1, "C, l" is a printed circuit board,
is a screen that constitutes a screen printing mechanism; 3 is a screen that constitutes a screen printing mechanism;
A squeegee 4 constitutes a screen printing mechanism, and 4 is a printing paste.
5は1回路基板1を支持する支持台、6は真空室、7は
排気口である。すなわち、支持台5は、スクリーン印刷
機構に対向するように支持台上部(真空室上部)に回路
基板1を載置し、支持台下部(真空室下部)に排気ロア
を開口し、内部に真空室6を形成したものである。そし
C1この真空室6は、Wi記回路基板下面(背部)lb
から排気ロアへ、真空室内を吸引排気される空気の流れ
が排気ロアに近づくにつれて整流となる形状に真空室7
を形成しており、例えば第1図に示すように真空室6は
漏斗状の形状となっている。5 is a support stand that supports one circuit board 1, 6 is a vacuum chamber, and 7 is an exhaust port. That is, the support stand 5 has the circuit board 1 placed on the upper part of the support stand (at the upper part of the vacuum chamber) so as to face the screen printing mechanism, and has an exhaust lower opening at the lower part of the support stand (at the lower part of the vacuum chamber) to create a vacuum inside. A chamber 6 is formed therein. Then, C1, this vacuum chamber 6 is located on the lower surface (back) of the circuit board lb.
The vacuum chamber 7 is shaped so that the flow of air sucked and exhausted in the vacuum chamber from the exhaust lower to the exhaust lower becomes rectified as it approaches the exhaust lower.
For example, as shown in FIG. 1, the vacuum chamber 6 has a funnel-like shape.
回路基板1には、基板両面間の電気的接続のためのスル
ーホール11,12.13、および14を有している。The circuit board 1 has through holes 11, 12, 13, and 14 for electrical connection between both sides of the board.
7′は排気管、8は制御バルブ、9は真空ポンプ、10
は、真空ポンプ9を駆動する電動機で、これらで、排気
ロアに接続する排気装置を構成している。7' is an exhaust pipe, 8 is a control valve, 9 is a vacuum pump, 10
is an electric motor that drives the vacuum pump 9, and these constitute an exhaust device connected to the exhaust lower.
このように、本装置は、スルーホール11゜12.13
、および14を有する回路基板1を支持台5上に載置し
、スクリーン2を介してスキージ3を矢印方向に移動さ
せながら印刷ペースト4を回路基板1の上面1aに印刷
し、真空室6の下部の排気ロアと排気管7′と制御バル
ブ8とを真空ポンプ9に接続し、真空室6の内部の空気
を吸引排気する構成となっている。In this way, this device has through holes 11°12.13
, and 14 is placed on the support stand 5, and printing paste 4 is printed on the upper surface 1a of the circuit board 1 while moving the squeegee 3 in the direction of the arrow through the screen 2. The lower exhaust lower, exhaust pipe 7', and control valve 8 are connected to a vacuum pump 9, and the air inside the vacuum chamber 6 is sucked and exhausted.
第2図は、スキージ3が矢印方向に移動しながら印刷は
行うとともに、排気ロアから真空室6の空気を吸引排気
している状況を示している。実線矢印は空気の流れであ
る。FIG. 2 shows a situation in which the squeegee 3 performs printing while moving in the direction of the arrow, and also sucks and exhausts air from the vacuum chamber 6 from the exhaust lower. Solid arrows indicate air flow.
第2図に示すように、大気は印刷前のスルーホール11
と印刷後の貫通したスルーホール14とから流れ込むと
ともに排気ロアの部分で整流となって吸引排気され、印
刷直前のスクリーン2で覆われたスルーホール12と印
刷直後の上面1aを印刷ペースト4′で覆われたスルー
ホール13との下面1bにおいては、真空室6内空気の
流れがカルマン渦現象で強い負圧となって印刷ペースト
4′を局部的に強く吸引して孔を貫通し導体層のスルー
ホールを形成し、貫通後は回路基板1の上部の大気を吸
引し真空室6内の空気の流れは排気ロアに向う整流とな
る。As shown in Figure 2, the atmosphere is exposed to the through hole 11 before printing.
The printing paste 4' flows into the through hole 14 that penetrates after printing, is rectified at the exhaust lower part, and is sucked and exhausted, and the through hole 12 covered with the screen 2 immediately before printing and the upper surface 1a immediately after printing are covered with printing paste 4'. On the lower surface 1b of the covered through-hole 13, the flow of air in the vacuum chamber 6 creates a strong negative pressure due to the Karman vortex phenomenon, which locally strongly attracts the printing paste 4', penetrating the hole and forming the conductor layer. A through hole is formed, and after passing through, the atmosphere above the circuit board 1 is sucked in, and the flow of air in the vacuum chamber 6 is rectified toward the exhaust lower.
上記にくらべ、従来の箱形の真空室の空気流は第5図に
示すとおりである。Compared to the above, the air flow in a conventional box-shaped vacuum chamber is as shown in FIG.
第5図は、従来のスルーホール印刷装置における真空室
の、空気の流れを示す縦断面図である。FIG. 5 is a longitudinal sectional view showing air flow in a vacuum chamber in a conventional through-hole printing device.
図中、第2図と同一符号のものは同等部分であるから、
その説明を省略する。In the figure, parts with the same symbols as in Figure 2 are equivalent parts, so
The explanation will be omitted.
第5図に示す従来の真空室6′は箱形をなし、下部に複
数の排気ロアa、7bを開口している。A conventional vacuum chamber 6' shown in FIG. 5 is box-shaped and has a plurality of exhaust lowers a and 7b opened at the bottom.
スキージ3が矢印方向に移動しながら印刷を行うととも
に、排気ロアa、7bから真空室6′の空気を吸引排気
すると、真空室6′内の空気の流れは乱れを起し、回路
基板1の下面1bの下部においても安定した渦流が発生
しないことから、確実にスルーホールを得ることはでき
ない。When the squeegee 3 prints while moving in the direction of the arrow and sucks and exhausts the air in the vacuum chamber 6' from the exhaust lowers a and 7b, the air flow in the vacuum chamber 6' becomes turbulent and the circuit board 1 is Since a stable vortex is not generated in the lower part of the lower surface 1b, it is not possible to reliably form a through hole.
上記のように、第1図、第2図に示した本実施例によれ
ば、真空室内の空気の流れを、排気口部分では整流化し
て抵抗を少なくし、回路基板下では渦流による印刷ペー
ストの吸引を強め、スルーホール孔貫通後は整流効果に
よる空気流の速度があがることによりスルーホール内壁
面への印刷ペーストの塗布が均一化され、さらに不貫通
部の下面の渦流を強めて負圧による印刷ペーストの吸引
を強めることとなり、導体層となるスルーホールを確実
に形成させる。上記により不良率の少ないスルーホール
印刷とタクトタイムの短縮が可能である。As described above, according to the present embodiment shown in FIGS. 1 and 2, the air flow inside the vacuum chamber is rectified at the exhaust port to reduce resistance, and under the circuit board, the printing paste is generated by the eddy current. After passing through the through-hole, the speed of the air flow increases due to the rectification effect, which makes the printing paste evenly applied to the inner wall of the through-hole, and further strengthens the vortex flow on the bottom of the non-penetrated part, creating a negative pressure. This strengthens the suction of the printing paste and ensures the formation of through holes that will become conductive layers. The above enables through-hole printing with a low defect rate and shortening of takt time.
次に、第3図(a)は、本発明の他の実施例に係る整流
板を設けた真空室の縦断面図、第3図(b)は、第3図
(a)のX−X矢視断面図、第3図(c)は、回路基板
を載置した真空室の縦断面図、第4図(a)は1本発明
のさらに他の実施例に係る整流板を設けた真空室の縦断
面図、第4図(b)は、第4図(a)のY−Y矢視断面
図である。各図中、第1図と同一符号のものは同等部分
であるから、その説明を省略する。Next, FIG. 3(a) is a vertical cross-sectional view of a vacuum chamber provided with a rectifying plate according to another embodiment of the present invention, and FIG. 3(b) is a longitudinal sectional view taken along the line X-X in FIG. 3(c) is a vertical sectional view of a vacuum chamber in which a circuit board is placed, and FIG. 4(a) is a sectional view of a vacuum chamber provided with a rectifying plate according to still another embodiment of the present invention. The longitudinal cross-sectional view of the chamber, FIG. 4(b), is a cross-sectional view taken along the YY arrow in FIG. 4(a). In each figure, parts with the same reference numerals as those in FIG. 1 are equivalent parts, so a description thereof will be omitted.
第3図(a)、(b)に示す実施例は、漏斗状の真空室
6内に格子状の整流板15を設け、排気ロアに達する前
から空気の流れを整流化するようにしたものである。In the embodiment shown in FIGS. 3(a) and 3(b), a grid-like rectifying plate 15 is provided in a funnel-shaped vacuum chamber 6 to rectify the air flow before it reaches the exhaust lower. It is.
また、第3図(Q)に示すものは、回路基板1のスルー
ホールの孔に合わせて整流板15′の格子穴の位置を設
定したものである。この例は、特に大形の回路基板に対
して効果がある。Furthermore, in the case shown in FIG. 3(Q), the positions of the grid holes of the rectifying plate 15' are set to match the through holes of the circuit board 1. This example is particularly effective for large circuit boards.
第3図の整流板を付加することにより、先の第1図、第
2図の実施例の効果を、より顕著にすることができる。By adding the current plate shown in FIG. 3, the effects of the embodiments shown in FIGS. 1 and 2 can be made more pronounced.
第4図(a)、(b)に示す実施例は、漏斗状の真空室
6内に螺旋状の整流板16を設け、排気ロアに達する前
から空気の流れを整流化するようにしたものである。In the embodiment shown in FIGS. 4(a) and 4(b), a spiral rectifier plate 16 is provided in a funnel-shaped vacuum chamber 6 to rectify the air flow before it reaches the exhaust lower. It is.
第4図の実施例によれば、先の第1図、第2図の実施例
の効果を、より顕著にすることができる。According to the embodiment shown in FIG. 4, the effects of the embodiments shown in FIGS. 1 and 2 can be made more pronounced.
なお、整流板は、第3図、第4図の実施例に限らず、排
気口に達する前に整流効果をもたらすものであれば、例
えば同心円状の整流板を用いてもよいことは言うまでも
ない。Note that the current plate is not limited to the embodiments shown in FIGS. 3 and 4, and it goes without saying that a concentric current plate, for example, may be used as long as it provides a rectifying effect before reaching the exhaust port. .
以上述べたように、本発明によれば、特に孔数が多く、
かつ孔径にばらつきのある回路基板に対しても、真空室
内の空気の流れを排気口部で整流化して抵抗を少なくし
、回路基板下では渦流による印刷ペーストの吸引を強め
、スルーホール内壁面への印刷ペーストの塗布を均一化
し確実にスルーホールを形成させつるスルーホール印刷
装置を提供することができる。As described above, according to the present invention, the number of holes is particularly large;
In addition, even for circuit boards with uneven hole diameters, the air flow inside the vacuum chamber is rectified at the exhaust port to reduce resistance, and under the circuit board, the suction of the printing paste is strengthened by the eddy current, allowing it to reach the inner wall of the through-hole. It is possible to provide a through-hole printing device that uniformizes the application of printing paste and reliably forms through-holes.
第1図は、本発明の一実施例のスルーホール印刷装置の
要部構成図、第2図は、第1図の真空室の、スルーホー
ル印刷中の空気の流れを示す縦断面図、第3図(a)は
、本発明の他の実施例に係る整流板を設けた真空室の縦
断面図、第3図(b)は、第3図(a)のX−X矢視断
面図、第3図(c)は、回路基板を載置した真空室の縦
断面図、第4図(a)は1本発明のさらに他の実施例に
係る整流板を設けた真空室の縦断面図、第4図(b)は
、第4図(a)のY−Y矢視断面図、第5図は、従来の
スルーホール印刷装置における真空室の、空気の流れを
示す縦断面図である。
1・・・回路基板、1a・・・上面、1b・・・下面、
2・・・スクリーン、3・・・スキージ、4.4’ ・
・・印刷ペースト、5・・・支持台、6・・・真空室、
7・・・排気口、7′・・・排気管、9・・・真空ポン
プ、11,12.、L3゜14・・・スルーホール、1
5,15’ 、16・・・整流板。
百1図
第Z図
冨3図
第4図
((L) 。、)
ts、 ts’、 (6++−整流板
第5図
1et 7!LFIG. 1 is a configuration diagram of main parts of a through-hole printing apparatus according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of the vacuum chamber in FIG. 3(a) is a longitudinal sectional view of a vacuum chamber provided with a rectifying plate according to another embodiment of the present invention, and FIG. 3(b) is a sectional view taken along the line X-X in FIG. 3(a). , FIG. 3(c) is a vertical cross-sectional view of a vacuum chamber in which a circuit board is placed, and FIG. 4(a) is a vertical cross-sectional view of a vacuum chamber provided with a rectifying plate according to still another embodiment of the present invention. 4(b) is a sectional view taken along the Y-Y arrow in FIG. 4(a), and FIG. 5 is a vertical sectional view showing the air flow in the vacuum chamber in a conventional through-hole printing device. be. 1...Circuit board, 1a...Top surface, 1b...Bottom surface,
2... Screen, 3... Squeegee, 4.4' ・
...Printing paste, 5...Supporting stand, 6...Vacuum chamber,
7...Exhaust port, 7'...Exhaust pipe, 9...Vacuum pump, 11,12. , L3゜14...Through hole, 1
5, 15', 16... rectifier plate. Figure 101 Figure Z Figure 3 Figure 4 ((L) .,) ts, ts', (6++- Rectifier plate Figure 5 1et 7!L
Claims (1)
に被印刷物である回路基板を載置し、内部に真空室を形
成し、反印刷側に排気口を有する支持台と、前記排気口
に接続する排気装置とを備え、真空吸引により回路基板
のスルーホール内壁面に印刷ペーストを塗布するスルー
ホール印刷装置において、上記支持台の真空室上部に回
路基板を載置させ、その真空室下部に排気口を開口し、
前記回路基板背部から前記排気口へ前記真空室内を吸引
排気される空気の流れが整流となる形状に当該真空室を
形成したことを特徴とするスルーホール印刷装置。1. A screen printing mechanism, a support base on which a circuit board to be printed is placed on the side of the screen printing mechanism, a vacuum chamber formed inside, and an exhaust port on the side opposite to printing, and an exhaust device connected to the exhaust port. In a through-hole printing device that applies printing paste to the inner wall surface of the through-hole of a circuit board by vacuum suction, the circuit board is placed on the upper part of the vacuum chamber of the support base, and an exhaust port is opened in the lower part of the vacuum chamber. death,
A through-hole printing device characterized in that the vacuum chamber is formed in a shape that rectifies the flow of air sucked and exhausted in the vacuum chamber from the back of the circuit board to the exhaust port.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14372588A JPH01313995A (en) | 1988-06-13 | 1988-06-13 | Through hole printing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14372588A JPH01313995A (en) | 1988-06-13 | 1988-06-13 | Through hole printing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01313995A true JPH01313995A (en) | 1989-12-19 |
Family
ID=15345549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14372588A Pending JPH01313995A (en) | 1988-06-13 | 1988-06-13 | Through hole printing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01313995A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09162547A (en) * | 1995-12-12 | 1997-06-20 | Niyuurongu Seimitsu Kogyo Kk | Through hole printing sucking table |
JP2009529805A (en) * | 2006-03-10 | 2009-08-20 | ナノソーラー インコーポレイテッド | High efficiency solar cells with insulated vias |
-
1988
- 1988-06-13 JP JP14372588A patent/JPH01313995A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09162547A (en) * | 1995-12-12 | 1997-06-20 | Niyuurongu Seimitsu Kogyo Kk | Through hole printing sucking table |
JP2009529805A (en) * | 2006-03-10 | 2009-08-20 | ナノソーラー インコーポレイテッド | High efficiency solar cells with insulated vias |
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