JPH01305581A - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- JPH01305581A JPH01305581A JP63136499A JP13649988A JPH01305581A JP H01305581 A JPH01305581 A JP H01305581A JP 63136499 A JP63136499 A JP 63136499A JP 13649988 A JP13649988 A JP 13649988A JP H01305581 A JPH01305581 A JP H01305581A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric element
- unimorph
- bending
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 abstract description 10
- 238000005336 cracking Methods 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000033001 locomotion Effects 0.000 description 4
- 206010013647 Drowning Diseases 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、各種駆動装置や圧電リレー等として用いられ
る、圧電素子に対する電気的負荷による湾曲動作を利用
した圧電式アクチュエータに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a piezoelectric actuator, which is used as various drive devices, piezoelectric relays, etc., and utilizes a bending motion caused by an electrical load on a piezoelectric element.
従来の技術
第２図を参照しながら従来の圧電式アクチュエータにつ
いて説明する。BACKGROUND OF THE INVENTION A conventional piezoelectric actuator will be described with reference to FIG.
従来、この種のＨ二重式アクチュエータは、圧電素子６
と振動板７とを貼り合わせて成る圧電ユニモルフを支持
台８に挟持固定することにより構成されていた。Conventionally, this type of H double actuator has a piezoelectric element 6
It was constructed by sandwiching and fixing a piezoelectric unimorph formed by pasting together a diaphragm 7 and a diaphragm 7 to a support base 8.
上記のように構成された従来の圧電式アクチコーエータ
は、圧電素子６に電圧を印加すると、その印加電圧の極
性方向により、圧電素子６は伸縮を行い、貼り合わされ
た振動板７との変位差により、圧電ユニモルフの先端９
が湾曲動作を行うものである。In the conventional piezoelectric acticoator configured as described above, when a voltage is applied to the piezoelectric element 6, the piezoelectric element 6 expands and contracts depending on the polarity direction of the applied voltage, causing displacement with the bonded diaphragm 7. Due to the difference, the tip of the piezoelectric unimorph 9
performs a bending motion.
発明が解決しようとする課題
このような従来の構成では、支持台８から圧電ユニモル
フが突出する基部１０に圧電ユニモルフ自体の湾曲動作
による応力が集中し、動作の繰り返しにより結果的に圧
電ユニモルフの突出基部１０の位置で圧電素子６に割れ
を生じることがある。Problems to be Solved by the Invention In such a conventional configuration, stress due to the bending motion of the piezoelectric unimorph itself is concentrated on the base 10 from which the piezoelectric unimorph projects from the support base 8, and as a result of repeated motions, the piezoelectric unimorph protrudes. Cracks may occur in the piezoelectric element 6 at the base 10.
本発明は−１−記のような問題点を解決し、圧電ユニモ
ルフの支持台からの突出基部に、湾曲動作による応力の
集中を防！１ニジ、圧電素子の割れを防１１−し耐久性
の優れた製品を得ることを１４１的とするものである。The present invention solves the problems mentioned in -1- and prevents the concentration of stress caused by the bending action on the protruding base of the piezoelectric unimorph from the support base! The first objective is to prevent the piezoelectric element from cracking and to obtain a product with excellent durability.
課題を解決するだめの手段
本発明は」−記の問題点をＩＩＪ′Ｎ法するために、３
＋’板状の圧電素子を２枚貼り合わせてなる圧電バイモ
ルフ、又は甲板状の圧電素子と振動板を貼り合わせてな
る圧電ユニモルフどこの月゛電バイ千ルフ、又は圧電ユ
ニモルフの一端面を挟持する支持台どを設け、かつこの
支持台の１１：電バイ干ルフ、又（Ｊ圧電ユニモルフの
挟持部に弾性挟持体を介在して固定したものである。Means for Solving the Problems The present invention provides three methods for solving the problems mentioned above.
＋'A piezoelectric bimorph made by pasting together two plate-shaped piezoelectric elements, or a piezoelectric unimorph made by pasting together a plate-like piezoelectric element and a diaphragm. A support stand is provided, and the support stand is fixed to the holding part of the piezoelectric unimorph (11) or (J piezoelectric unimorph) with an elastic holding body interposed therebetween.
作 用
この構成により、圧電ユニモルフの支持台からの突出部
は弾性挟持体にＪ：り挟持されているため、応力はこの
弾性挟持体に分散され、圧電ユニモルフの一部に応力が
集中されることを防１１−することとなる。Effect: With this configuration, the protruding portion of the piezoelectric unimorph from the support base is held between the elastic clamping bodies, so stress is dispersed to the elastic clamping bodies and stress is concentrated on a part of the piezoelectric unimorph. This will prevent 11- things from happening.
実施例
第１図は本発明の一実施例による圧電式アクチュエータ
の支持部を示した断面図である。ｌは圧電素子、２は圧
電素子１に貼り合わされた振動機、３ Ｌｌ支持台て、
圧電素Ｔ−１と振動板２て構成されたＪ１電ユニ干ルフ
を挟持固定している。４１ｊ弾・ｌ’ｌ秋持住持体支持
台：３のＦＥ ？ｉｉユニ千ルフ挟持部に介イ１固定さ
れている。Embodiment FIG. 1 is a sectional view showing a support portion of a piezoelectric actuator according to an embodiment of the present invention. 1 is a piezoelectric element, 2 is a vibrator bonded to the piezoelectric element 1, 3 is a Ll support base,
A J1 electronics rack made up of a piezoelectric element T-1 and a diaphragm 2 is clamped and fixed. 41j bullet/l'l Akimochi body support stand: 3 FE? ii. The interposer 1 is fixed to the Unisenrufu clamping part.
以１のように＋：１１４成された圧電式アクチュエータ
に１月電素ｒｌに電圧を印加するど圧電、ｌ：ｉ−、ニ
ーモルフの先端が矢印△又は１３力向に湾曲する。この
時圧電素子１の突出基部５には圧電ユニモルフの湾曲動
作による曲げ応力等が加オつるが、弾性挟持体４を設ｉ
−Ｊて１土電素ｒ１の突出基部５を挟持したことにより
、湾曲による応力を分散させることができ反復動作さね
でも素子の割れや剥離等を生じない。When a voltage is applied to the piezoelectric actuator having the +:114 configuration as described in 1 above, the piezoelectric element rl, l:i-, and the tip of the knee morph curve in the direction of the arrow Δ or 13 force. At this time, the protruding base 5 of the piezoelectric element 1 is subjected to bending stress due to the bending action of the piezoelectric unimorph, but the elastic clamping body 4 is provided.
By sandwiching the protruding base portion 5 of the earth electric element r1, the stress caused by bending can be dispersed, and the element does not crack or peel even after repeated operations.
発明の効果
以上のように本発明は圧電バイ；Ｅルフ、又はｎ電ユニ
干ルフσル一端面を挟持する支持台の挟持部に弾性挟持
体を介在固定したことにより、圧電素子の突出）、（部
の湾曲による応力を分散させることができ、結果的にＩ
口Ｉ素子の溺れ、剥離等を防止し、アクチュエータとし
ての信頼性を向」ニし、製品の長寿命化を図ることがで
きる等実用的価値は極めて高いものである。Effects of the Invention As described above, the present invention has an elastic clamping body interposed and fixed to the clamping part of a support base that clamps one end surface of a piezoelectric device (e.g., an electric device) or an n-electronic device. , (the stress due to the curvature of the part can be dispersed, and as a result, I
It has extremely high practical value, as it prevents drowning and peeling of the I-element, improves the reliability of the actuator, and extends the life of the product.
第１図は本発明による圧電式アクチュエータの一実施例
を示した断面図、第２図は従来例を示した断面図である
。
１・・・圧電素子 ２・・・振動板 ３・・・支持
台４・・・弾性挟持体FIG. 1 is a sectional view showing an embodiment of a piezoelectric actuator according to the present invention, and FIG. 2 is a sectional view showing a conventional example. 1... Piezoelectric element 2... Vibration plate 3... Support base 4... Elastic clamping body
Claims (1)
ルフ、又は平板状の圧電素子と振動板を貼り合わせてな
る圧電ユニモルフとこの圧電バイモルフ、又は圧電ユニ
モルフの一端面を挟持する支持台とを設け、かつこの支
持台の圧電バイモルフ、又は圧電ユニモルフの挟持部に
弾性挟持体を介在して固定したことを特徴とする圧電式
アクチュエータ。A piezoelectric bimorph formed by pasting together two flat piezoelectric elements, or a piezoelectric unimorph formed by pasting together a flat piezoelectric element and a diaphragm, and a support base that holds one end surface of the piezoelectric bimorph or piezoelectric unimorph are provided. and a piezoelectric actuator, characterized in that the piezoelectric bimorph or piezoelectric unimorph of the support base is fixed to the clamping portion with an elastic clamping body interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63136499A JPH01305581A (en) | 1988-06-02 | 1988-06-02 | Piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63136499A JPH01305581A (en) | 1988-06-02 | 1988-06-02 | Piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01305581A true JPH01305581A (en) | 1989-12-08 |
Family
ID=15176597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63136499A Pending JPH01305581A (en) | 1988-06-02 | 1988-06-02 | Piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01305581A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007064649A (en) * | 2005-08-29 | 2007-03-15 | Kyocera Corp | Acceleration sensor |
| CN109357962A (en) * | 2018-12-11 | 2019-02-19 | 中国民航大学 | A kind of side crops industry bending fatigue test device and method |
-
1988
- 1988-06-02 JP JP63136499A patent/JPH01305581A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007064649A (en) * | 2005-08-29 | 2007-03-15 | Kyocera Corp | Acceleration sensor |
| CN109357962A (en) * | 2018-12-11 | 2019-02-19 | 中国民航大学 | A kind of side crops industry bending fatigue test device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7535155B2 (en) | Piezoelectric device and piezoelectric switch provided with the same | |
| US2386279A (en) | Piezoelectric device | |
| US4638206A (en) | Sheet-like piezoelectric element | |
| EP0996175A3 (en) | Piezoelectric/electrostrictive device | |
| JP2000323882A (en) | Fan device and driving method therefor | |
| JPH01305581A (en) | Piezoelectric actuator | |
| JP2645832B2 (en) | Vertical effect type monomorph element and driving method thereof | |
| JPS62298189A (en) | Piezoelectric actuator | |
| JPH0470874B2 (en) | ||
| JPS59186380A (en) | Control of microscopic displacement for bimorph type piezoelectric body displacement device | |
| JPS6412111B2 (en) | ||
| JPS63240380A (en) | Vibration generator | |
| JP3326735B2 (en) | Piezo actuator | |
| JPH0257354B2 (en) | ||
| JPH01128586A (en) | Printed board connecting method | |
| JPS59175777A (en) | Method for driving bimorph vibrator | |
| JPS59115580A (en) | Bimorph supporting structure | |
| JPS58146473A (en) | Piezoelectric driver | |
| JPS6067815A (en) | Angular velocity sensor | |
| JPH02248087A (en) | Ceramic actuator | |
| JPH0430481A (en) | Driving method of piezoelectric actuator | |
| JPS602658Y2 (en) | Piezoelectric vibrator holding structure | |
| JPH033179A (en) | Magnetic head | |
| JPH07142781A (en) | Piezoelectric bimorph device | |
| JPS61177785A (en) | Bimorph element |