JPH01303077A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH01303077A JPH01303077A JP63133573A JP13357388A JPH01303077A JP H01303077 A JPH01303077 A JP H01303077A JP 63133573 A JP63133573 A JP 63133573A JP 13357388 A JP13357388 A JP 13357388A JP H01303077 A JPH01303077 A JP H01303077A
- Authority
- JP
- Japan
- Prior art keywords
- motor
- stator
- mover
- speed
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 230000000750 progressive effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000002783 friction material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、圧電体により固定子に進行波を生じさせて移
動子を駆動ネせるようにした超音波モータに関し、特に
回転を正、逆に切換える場合や、速度Ｏ付近での駆動を
安定にさせたものである。Detailed Description of the Invention "Field of Industrial Application" The present invention relates to an ultrasonic motor that can drive a moving element by generating a traveling wave in a stator using a piezoelectric material, and particularly relates to an ultrasonic motor that can drive a moving element by generating a traveling wave in a stator using a piezoelectric body. This is to stabilize driving when switching to speed 0 or around speed O.
「従来の技術」
超音波モータは低速、高トルクが得られ、しかも駆動、
停止の応答性がよいので、高精度の制御装置に使用でき
ることが知られている。``Conventional technology'' Ultrasonic motors can achieve low speed and high torque, and are capable of driving
It is known that it can be used in high-precision control devices because of its good stopping response.
また超音波モータを正、逆回転に、あるいは正、逆方向
に連続して繰り返すと、振動装置として適用できること
を本出願人らは提案している。The applicants have also proposed that the ultrasonic motor can be used as a vibrating device by rotating the ultrasonic motor in the forward and reverse directions, or by continuously repeating the rotation in the forward and reverse directions.
「発明が解決しようとする課題」
従来、超音波モータの速度を正、逆に切換えて使用した
り、速度を特にＯ付近にして使用することがあるが、そ
のような場合、超音波モータが停止したり駆動制御が不
可能になったりして、非常に不安定になる。"Problem to be Solved by the Invention" Conventionally, the speed of an ultrasonic motor may be switched between forward and reverse, or the speed may be set to around O. In such cases, the ultrasonic motor It becomes extremely unstable as it stops or becomes uncontrollable.
そこで本発明は、固定子と移動子とで構成されるモータ
部を２組使用し、各モータ部の速度を完全にＯｌあるい
はＯイ」近にすることなく２組のモータ部の合成速度を
完全にＯ２あるいはＯ伺近にするようにし、あるいは合
成速度を正、逆方向に切換えるようにして、超音波モー
タの駆動を確実にし、しかも駆動制御を安定にすること
を目的とする。Therefore, the present invention uses two sets of motor sections each consisting of a stator and a slider, and the combined speed of the two sets of motor sections is adjusted without making the speed of each motor section completely O1 or close to O. The purpose is to ensure the drive of the ultrasonic motor and to stabilize the drive control by completely setting it to O2 or close to O2 or by switching the composite speed between forward and reverse directions.
「課題を解決するための手段」
本発明の超音波モーフは、圧電体により進行波を生しさ
せるようにした固定子と、固定子に圧接されて駆動する
移動子とからなるモータ部を２組有し、一方のモータ部
の移動子を他方のモータ部の固定子に連結させて一体に
駆動できるようにした。"Means for Solving the Problems" The ultrasonic morph of the present invention has two motor parts each consisting of a stator that generates a traveling wave using a piezoelectric material, and a movable element that is driven by being pressed into contact with the stator. The mover of one motor section is connected to the stator of the other motor section so that they can be driven together.
また、両モータの移動子の速度を検出する装置をそれぞ
れ設け、各速度検出装置の出力を速度コントロールアン
プに入力し、この速度コン１−ａ−ルアンプにより両モ
ーク部の動力源を制御するようにした。In addition, a device is provided to detect the speed of the moving elements of both motors, and the output of each speed detecting device is input to a speed control amplifier, and the power source of both moke sections is controlled by this speed control amplifier. I made it.
「作用」
上記手段の超音波モーフは、２組のモータ部を有して、
両モータ部の合成速度が得られるようにしているので、
各モータ部の速度を完全にＯｌあるいは０伺近にさせず
に、合成速度を完全に０、あるいはＯ（＝１近にさせる
ことかできる。その結果、超音波モータの速度Ｏ付近で
の駆動か確実になり、しかも速度を正逆に切換えて駆動
する場合でも安定に作動する。"Operation" The ultrasonic morph of the above means has two sets of motor parts,
Since the composite speed of both motor parts is obtained,
It is possible to make the combined speed completely 0 or close to 0 (=1) without making the speed of each motor section completely 01 or close to 0. As a result, the ultrasonic motor can be driven at a speed close to 0. Moreover, it operates stably even when the speed is switched between forward and reverse directions.
「実施例」
本発明の超音波モーフの一実施例を図面により説明する
。"Example" An example of the ultrasonic morph of the present invention will be described with reference to the drawings.
円板状の基板１」−に、第１モータ部の固定イ２が設け
られ、固定子２−にに摩擦材３を介して移動子４が配置
される。移動子４はゴム材４ａを介して皿バネ５に押さ
れ、移動子４が固定子２に圧接されるようになっている
。なお固定子２と移動子４との接触面間か、進行波を伝
達できるような摩擦を生じるように処理されているとき
は、摩擦材３は不要である。また固定子２における移動
子４と接触する面の逆側の面に、圧電素子６か円別状に
配置され、この圧電素子６に、電源７から高周波電圧か
印加されるようになっている。そして、圧電素子６が高
周波電圧により振動して、固定子２の移動子４と接触す
る表面に進行波を生じさせ、この進行波により移動子４
が回転するようになっている。A fixed part 2 of the first motor section is provided on a disk-shaped substrate 1'', and a movable element 4 is placed on the stator 2 with a friction material 3 interposed therebetween. The movable element 4 is pressed by a disc spring 5 via a rubber material 4a, so that the movable element 4 is pressed against the stator 2. Note that the friction material 3 is not required when the contact surfaces between the stator 2 and the movable element 4 are treated to generate friction capable of transmitting traveling waves. Further, piezoelectric elements 6 are arranged in a circle on a surface of the stator 2 opposite to the surface that contacts the movable element 4, and a high frequency voltage is applied to the piezoelectric elements 6 from a power source 7. Then, the piezoelectric element 6 vibrates due to the high-frequency voltage and generates a traveling wave on the surface of the stator 2 that comes into contact with the movable element 4, and this traveling wave causes the movable element 4 to
is set to rotate.
第２モーク部の固定子８は、前記移動子４の上面側に配
置され、固定子８」二に、第］モータ部と同様に摩擦材
９を介して、あるいは介せずに移動子１０が設けられる
。また前記同様に固定子８に圧電素子１１が取付けられ
、電源７から高周波電圧が供給されるようになっている
。移動子１０はゴム材１０ａを介して冊バネ１２に押さ
れ、移動子１０が固定子８に圧接されるようになってい
る。皿へネ１２の内周側基部は出力軸１３の鍔部１３ａ
に係止され、皿バネ１２の押圧力により、固定子８に押
接されて固定子８の進行波を受けた移動子１０が出力軸
１３と一体に回転するようになっている。なお出力軸１
３は、第］モータ部と第２モータ部との中央部を貫通し
、各モータ部の外側位置で基板１に設けた軸受１４と、
カバーに設けた軸受１５とに保持される。The stator 8 of the second moke section is disposed on the upper surface side of the movable element 4, and the stator 8 is connected to the movable element 10 with or without a friction material 9 in the same manner as the second motor section. is provided. Similarly to the above, a piezoelectric element 11 is attached to the stator 8, and a high frequency voltage is supplied from the power source 7. The movable element 10 is pushed by a book spring 12 via a rubber material 10a, so that the movable element 10 is pressed against the stator 8. The inner peripheral side base of the countersunk head 12 is connected to the flange 13a of the output shaft 13.
The movable element 10 is pressed against the stator 8 and receives a traveling wave from the stator 8 due to the pressing force of the disc spring 12, and rotates together with the output shaft 13. Note that output shaft 1
3 is a bearing 14 that passes through the center of the first motor section and the second motor section and is provided on the substrate 1 at an outer position of each motor section;
It is held by a bearing 15 provided on the cover.
第１モータ部と第２モーク部の各中央貫通孔内にカラー
１６か挿入され、カラー１６内にブツシュ１７が設けら
れ、このブツシュ１７内を回転軸１３が貫通して、ブツ
シュ】７とは別個に回転するようになっている。また、
カラー１６に鍔部１ｆ３ａが設けられ、この鍔部ｌｅａ
に第１モーク部の皿バネ５の中央基部が係止され、さら
に鍔部ｌｅａと第２モータ部の固定子８とが連結される
。よって第１モーク部の移動子４はカラー１６を介して
、第２モータ部の固定子８と一体に回転することになる
。A collar 16 is inserted into each central through-hole of the first motor section and the second moke section, a bushing 17 is provided inside the collar 16, and the rotary shaft 13 passes through this bushing 17. They are designed to rotate separately. Also,
The collar 16 is provided with a flange 1f3a, and this flange lea
The central base of the disc spring 5 of the first moke section is locked, and the flange lea and the stator 8 of the second motor section are further connected. Therefore, the mover 4 of the first motor section rotates together with the stator 8 of the second motor section via the collar 16.
第１、＄２モータ部の各移動子４．１０の外周位置にそ
れぞれ、速度検出装置１８．１９が設けられ、その検出
値が速度コントロールアンプ２０に入力されるようにな
っている。速度コン）・ロールアンプ２０は、検出値に
応じて各モータ部の前記電源６を制御するようになって
おり、各モータ部を適宜の速度になるように制御する。Speed detection devices 18 and 19 are provided at the outer periphery of each moving element 4 and 10 of the first and second motor sections, respectively, and the detected values thereof are input to the speed control amplifier 20. The speed controller/roll amplifier 20 controls the power source 6 of each motor section according to the detected value, and controls each motor section to an appropriate speed.
よって出力軸１３は、２つのモータ部の合成速度で回転
することになり、各モータ部の速度を互いに逆方向の等
速度にすれば出力軸の速度はＯとなり、各モータ部の速
度を完全に０、あるいはＯ付近にしなくてもよい。Therefore, the output shaft 13 will rotate at the combined speed of the two motor sections, and if the speeds of each motor section are made uniform in opposite directions, the speed of the output shaft will be O, and the speed of each motor section will be completely adjusted. It is not necessary to set it to 0 or around 0.
なお、各モータ部の回転方向を逆にするには、固定子に
設けた２分割の圧電素子にそれぞれ、十９０°位相差の
ある高周波電圧を印加する場合と、−９０°位相差のあ
る高周波電圧を印加する場合とに切換えればよく、その
切換えを連続させることもできる。そして本発明の超音
波モータの出力速度を正逆に切換えるには、各モータ部
の速度の合成値か正逆に切換れるようにすればよい。Note that in order to reverse the rotation direction of each motor section, there are two methods: applying a high frequency voltage with a phase difference of 190 degrees to each of the two piezoelectric elements provided on the stator, and applying a high frequency voltage with a phase difference of -90 degrees. It is only necessary to switch when applying a high frequency voltage, and the switching can be continued. In order to switch the output speed of the ultrasonic motor of the present invention between forward and reverse, it is only necessary to switch between the forward and reverse directions based on the composite value of the speeds of each motor section.
以上の実施例では、超音波モータを回転させる形式のも
のであったが、超音波モータを直線方向に移動させる場
合にも本発明を同様に適用可能である。In the above embodiments, the ultrasonic motor is rotated, but the present invention is similarly applicable to the case where the ultrasonic motor is moved in a linear direction.
「発明の効果」
本発明の超音波モータは、モータ部を２つ有し、それら
の合成速度が得られるので、各モータ部の速度を完全に
０、あるいはＯ（１近にしなくてもそれらの合成出力速
度を完全に０、あるいはＯ（＝ｊ近にできる。よって、
０伺近の出力速度を得る場合でも確実に作動し、また速
度を正逆に切換える場合にも、その切換え制御か安定に
できる。"Effects of the Invention" The ultrasonic motor of the present invention has two motor parts, and the combined speed of these parts can be obtained. The resultant output speed can be completely 0 or close to O(=j. Therefore,
It operates reliably even when obtaining an output speed close to 0, and stable switching control can be achieved even when switching the speed between forward and reverse directions.
このように本発明の超音波モータは、非常に高精度に、
停止、前進、後退を任意に制御できるので、たとえば、
コンピュータの磁気ドラム、フロッピーディスク、レー
ザディスクの駆動相モータ、コンパクトオートフォーカ
スメラのモータや、レーザを利用する計測システムでの
レーザ、及びミラーの回転角の制御用駆動モータとして
使用できる。その他、ロボットの物を握ったり移動した
りする部分の駆動を高精度に制御する場合にも、その駆
動モータとして、また制御モータとして十分対応できる
。In this way, the ultrasonic motor of the present invention can
Stopping, moving forward, and retreating can be controlled arbitrarily, so for example,
It can be used as a drive phase motor for computer magnetic drums, floppy disks, and laser disks, a compact autofocus camera motor, a laser in a measurement system that uses a laser, and a drive motor for controlling the rotation angle of a mirror. In addition, the motor can also be used as a drive motor or a control motor when controlling the drive of parts of a robot that grip or move objects with high precision.
図面は本発明の超音波モータの断面図である。
２．８； 固定子 ４．１０；移動子５ 、
＋２．皿バネ １３：出力軸１８．１８；速度
検出装置
出 願 人 株式会社 〕 コ り代
理 人 弁理士 牧 克 次The drawing is a sectional view of the ultrasonic motor of the present invention. 2.8; Stator 4.10; Mover 5,
+2. Disc spring 13: Output shaft 18.18; Speed detection device Applicant: Co., Ltd.] Corriage allowance
Patent Attorney Katsutsugu Maki
Claims (2)
た構成のモータ部を２組有し、第１のモータ部の移動子
と第２のモータ部の固定子とを連結して一体に駆動可能
としたことを特徴とする超音波モータ。(1) It has two sets of motor sections each having a structure in which a mover is pressed into contact with a stator on which a piezoelectric element is attached, and the mover of the first motor section and the stator of the second motor section are connected and integrated. An ultrasonic motor characterized by being capable of driving.
ータ部にそれぞれの固定子に対する各移動子の速度検出
装置を設け、速度検出装置の出力を速度コントロールア
ンプに入力し、速度コントロールアンプにより両モータ
部の動力源を制御させることを特徴とする超音波モータ
。(2) In the ultrasonic motor according to claim 1, both motor sections are provided with a speed detection device for each movable element with respect to each stator, and the output of the speed detection device is inputted to a speed control amplifier. An ultrasonic motor characterized by controlling power sources of both motor parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63133573A JP2688582B2 (en) | 1988-05-31 | 1988-05-31 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63133573A JP2688582B2 (en) | 1988-05-31 | 1988-05-31 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01303077A true JPH01303077A (en) | 1989-12-06 |
| JP2688582B2 JP2688582B2 (en) | 1997-12-10 |
Family
ID=15107969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63133573A Expired - Fee Related JP2688582B2 (en) | 1988-05-31 | 1988-05-31 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2688582B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0739173A (en) * | 1993-07-23 | 1995-02-07 | Nikon Corp | Drive controller for ultrasonic motor |
| EP0827000A1 (en) * | 1996-08-29 | 1998-03-04 | Carl Zeiss Jena GmbH | Device for modulation of the caracteristics of an optical system |
| US6252334B1 (en) * | 1993-01-21 | 2001-06-26 | Trw Inc. | Digital control of smart structures |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62207179A (en) * | 1986-03-07 | 1987-09-11 | Nissan Motor Co Ltd | Ultrasonic vibrating motor |
-
1988
- 1988-05-31 JP JP63133573A patent/JP2688582B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62207179A (en) * | 1986-03-07 | 1987-09-11 | Nissan Motor Co Ltd | Ultrasonic vibrating motor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6252334B1 (en) * | 1993-01-21 | 2001-06-26 | Trw Inc. | Digital control of smart structures |
| JPH0739173A (en) * | 1993-07-23 | 1995-02-07 | Nikon Corp | Drive controller for ultrasonic motor |
| EP0827000A1 (en) * | 1996-08-29 | 1998-03-04 | Carl Zeiss Jena GmbH | Device for modulation of the caracteristics of an optical system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2688582B2 (en) | 1997-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2608413B2 (en) | Ultrasonic drive | |
| JPH01303077A (en) | Ultrasonic motor | |
| JPH07154981A (en) | Surface elastic wave motor | |
| JPH01122375A (en) | Controlling method for piezoelectric motor | |
| US6288473B1 (en) | Frequency modulation drive for a piezoelectric motor | |
| JP2975072B2 (en) | Actuator driving method and ultrasonic actuator realizing this driving method | |
| JPS63193359A (en) | Recording medium driving device | |
| JPH01318564A (en) | Ultrasonic motor | |
| JP2586045B2 (en) | Vibration motor | |
| JP2601659B2 (en) | Ultrasonic drive | |
| Toyama et al. | Development of spherical ultrasonic motor | |
| JP2636366B2 (en) | Ultrasonic actuator control device | |
| JPH0442784A (en) | Ultrasonic motor having temperature regulator | |
| JPH062478Y2 (en) | Ultrasonic motor | |
| JPS627379A (en) | Ultrasonic wave motor apparatus | |
| JPS63140677A (en) | Ultrasonic motor | |
| JPS63249480A (en) | Ultrasonic motor | |
| JPH0332376A (en) | Ultrasonic actuator | |
| JPS63257473A (en) | Ultrasonic motor | |
| JP3235859B2 (en) | Ultrasonic motor | |
| JP2628170B2 (en) | Ultrasonic linear drive | |
| JPH02223389A (en) | Stepping motor and driving method therefor | |
| JPS63299787A (en) | Ultrasonic motor driving device | |
| JP2585574B2 (en) | Ultrasonic drive using a ring-shaped piezoelectric vibrator | |
| JPH01315278A (en) | Ultrasonic motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |