JPH0129787Y2 - - Google Patents

Info

Publication number
JPH0129787Y2
JPH0129787Y2 JP4425986U JP4425986U JPH0129787Y2 JP H0129787 Y2 JPH0129787 Y2 JP H0129787Y2 JP 4425986 U JP4425986 U JP 4425986U JP 4425986 U JP4425986 U JP 4425986U JP H0129787 Y2 JPH0129787 Y2 JP H0129787Y2
Authority
JP
Japan
Prior art keywords
centering
centered
cup
wafer
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4425986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62157149U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4425986U priority Critical patent/JPH0129787Y2/ja
Publication of JPS62157149U publication Critical patent/JPS62157149U/ja
Application granted granted Critical
Publication of JPH0129787Y2 publication Critical patent/JPH0129787Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP4425986U 1986-03-26 1986-03-26 Expired JPH0129787Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4425986U JPH0129787Y2 (enrdf_load_stackoverflow) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4425986U JPH0129787Y2 (enrdf_load_stackoverflow) 1986-03-26 1986-03-26

Publications (2)

Publication Number Publication Date
JPS62157149U JPS62157149U (enrdf_load_stackoverflow) 1987-10-06
JPH0129787Y2 true JPH0129787Y2 (enrdf_load_stackoverflow) 1989-09-11

Family

ID=30861897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4425986U Expired JPH0129787Y2 (enrdf_load_stackoverflow) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPH0129787Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206315A (ja) * 2008-02-28 2009-09-10 Chugai Ro Co Ltd テーブルへの基板搭載装置
EP2255890A1 (en) * 2008-03-25 2010-12-01 Tokuyama Corporation Centering device for circular member and coater equipped with the same

Also Published As

Publication number Publication date
JPS62157149U (enrdf_load_stackoverflow) 1987-10-06

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