JPH0129413Y2 - - Google Patents
Info
- Publication number
- JPH0129413Y2 JPH0129413Y2 JP18377283U JP18377283U JPH0129413Y2 JP H0129413 Y2 JPH0129413 Y2 JP H0129413Y2 JP 18377283 U JP18377283 U JP 18377283U JP 18377283 U JP18377283 U JP 18377283U JP H0129413 Y2 JPH0129413 Y2 JP H0129413Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- gas supply
- pressure
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 18
- 238000004140 cleaning Methods 0.000 claims description 10
- 238000007664 blowing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 39
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- -1 for safety reasons Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Feeding And Controlling Fuel (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18377283U JPS6091898U (ja) | 1983-11-30 | 1983-11-30 | ボンベ連結用ガス供給管路清浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18377283U JPS6091898U (ja) | 1983-11-30 | 1983-11-30 | ボンベ連結用ガス供給管路清浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6091898U JPS6091898U (ja) | 1985-06-22 |
| JPH0129413Y2 true JPH0129413Y2 (https=) | 1989-09-07 |
Family
ID=30397645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18377283U Granted JPS6091898U (ja) | 1983-11-30 | 1983-11-30 | ボンベ連結用ガス供給管路清浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6091898U (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5065115B2 (ja) * | 2008-03-25 | 2012-10-31 | 日本エア・リキード株式会社 | ガス供給システム |
-
1983
- 1983-11-30 JP JP18377283U patent/JPS6091898U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6091898U (ja) | 1985-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6326470A (ja) | ガスタンクのための弁 | |
| CN103372557B (zh) | 一种吹扫净化方法及其装置 | |
| WO2000014782A1 (en) | Feed device for large amount of semiconductor process gas | |
| WO2022033134A1 (zh) | 一种废气回收净化装置 | |
| JPH0129413Y2 (https=) | ||
| CN111779972B (zh) | 一种腐蚀气瓶的综合保护系统 | |
| FI91561C (fi) | Laite absorbtiokylmäjärjestelmien kylmäaineen talteenottamiseksi | |
| CN208418156U (zh) | 一种便于处理有害气体的气体充装装置 | |
| CN115872360B (zh) | 制氢纯化系统及其制氢设备 | |
| US6584826B2 (en) | Gas tester | |
| CN108868957A (zh) | 一种分体式发动机机油油道吹气清洗枪 | |
| CN213790807U (zh) | 原位再生过滤装置 | |
| CN212644225U (zh) | 一种应用于输气系统的充气装置 | |
| CN221130761U (zh) | 一种用于氧敏感产品的呼吸器 | |
| CN210845616U (zh) | 一种回收转炉烟气余热的干法除尘装置 | |
| CN208406627U (zh) | 一种烟气脱硫脱硝装置 | |
| CN209922900U (zh) | 一种氩气绿色净化系统 | |
| KR200342060Y1 (ko) | 역류방지밸브를 가지는 반도체용 처리가스 공급장치의진공발생기 | |
| CN222013689U (zh) | 一种特种气体采样装置 | |
| CN215876780U (zh) | 一种捕捉含有机物介质废气的设备及处理VOCs装置 | |
| CN204872262U (zh) | 一种液体有氮封要求的储罐 | |
| JPH0620538Y2 (ja) | エアラインマスクの送気支援警報装置 | |
| DE819477C (de) | Vorrichtung zum Reinigen von Rohrleitungen und Behaeltern | |
| CN217068263U (zh) | 一种煤化工生产中废气处理装置 | |
| CN210571589U (zh) | 氯硅烷介质采样器 |