JPH01291386A - Visual inspecting device - Google Patents

Abstract

PURPOSE:To obtain a visual inspecting device of a semiconductor device of a low cost of a lens barrel, a camera, etc., by providing a position detecting means for detecting a moving position of an inspection object on a carrying means. CONSTITUTION:An encoder 4a detects an axial rotation of a motor 3a, and transfers a rotating signal corresponding to a moving position of an IC 1a to a microcomputer 9a through a rotational position detecting part 5a. The microcomputer 9a recognizes a position of the IC 1a on a belt, based on this signal, outputs a light emitting instruction to a stroboscopic light emission lighting equipment 6a, an image of half of the IC 1a is brought to image pickup to a camera 7a by a first light emission, and subsequently, an image of the IC 1a of the remaining half is brought to image pickup to the camera 7a by a second light emission, and they are converted to video signals, respectively and written in image memories 8a, 8b. In such a way, lens barrel for bringing an inspection object to split image pickup becomes unnecessary, only one set of image pickup means is used, and an inexpensive visual inspecting device is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Differential Fields of Application] The present invention relates to a visual inspection device for automating the visual inspection of semiconductor devices.

[Conventional technology]

FIG. 4 is a configuration diagram showing a conventional appearance inspection apparatus for semiconductor devices. This visual inspection apparatus has two inspection processes, lane 1 and lane 2, and both perform the same operation. In the figure, 1a and 1b are semiconductor devices (hereinafter referred to as ICs) to be inspected, and 2a and 2b are ICs 1a and 1b.
3a and 3b are motors 6a for moving the belts of belt conveyors 2a and 2b, which are conveying means.

6b is a strobe lighting device which is instantaneous light emitting means provided on the upper part of IC1a and 1b, and 35a and 35b are ICja
, a plurality of mirror bodies reflecting 1b, 7a-7d are mirror bodies 35a
, 35b, and this mirror body 35a.

35b is a camera that captures the image of I Cla and jb, 10b is an image memory ga, 8b and a microcomputer 9
An image processing device consisting of a, and 10c an image memory 8
Image processing device 36 consisting of c, 8d and microcomputer 9b
a, 36C is a sensor consisting of a light transmitting element and a light receiving element provided on the side surface with respect to the traveling direction A of I Cla, 1b;
6b and 36d are sensors 36a on the input side.

36C, and its output side is connected to microcomputers 9a and 9b.

Next, the operation will be explained. As mentioned above, lane 1 and lane 2 in FIG. 4 perform the same operation, so lane 1
Only lane 2 will be explained, and explanation of lane 2 will be omitted. Now, IC1
A moves in the traveling direction A on the belt by the rotation of a motor 3a attached to the belt conveyor 2a. At this time, when the IC 1a blocks light from reaching the light receiving element of the sensor 36a, the sensor amplifier 36bil:m optical signal is transmitted to the microcomputer 9a. When the microcomputer 9a receives this signal, it instructs the strobe lighting device 6a to emit light, causing it to emit light.

The image of IC1a caused by this light emission is reflected by mirror body 35a and divided into images by cameras 7a and 7c. This camera 7
The images captured in a and 7c are converted into electrical signals, and are sent to an image memory 8a and an image memory 8b according to instructions from a microcomputer 9a.
will be written to. Then, the microcomputer 9a performs image processing related to the inspection based on the information in the image memories 13a and gb.

FIGS. 5(a) and 5(b) are flowcharts showing the processing steps of the microcomputer 9a. Here, (a) of the same figure shows the processing of lane 1, and (I) of the same figure shows the processing of lane 2.

In the same figure (a), from the sensor 36a to the sensor amplifier 3
When the light blocking signal is input to the microcomputer 9a via 6b (
Step 38), the strobe lighting device 6a is made to emit light, and the video signal of the IC1a is simultaneously written to the image memo IJ8a, 8b via the cameras 7a, 7c (Step 3).
9). Then, image processing A and B related to the inspection are performed based on the video signals stored in the image memories 8a and 8b (step 40).

[Problem to be solved by the invention]

Since the conventional appearance inspection apparatus for semiconductor devices is configured as described above, the mirror bodies 35a, 35b and the cameras 7a to 7d are
The disadvantage is that multiple units are required for each lane, which increases the price.

The present invention has been made in order to eliminate the above-mentioned drawbacks, and an object of the present invention is to obtain an appearance inspection apparatus for a semiconductor device including a mirror body, a camera, etc., which is inexpensive.

[Means to solve the problem]

The appearance inspection apparatus according to the present invention includes a conveying means for conveying an object to be inspected, a position detecting means provided on the conveying means for detecting the position of the object to be inspected, and a plurality of times based on a signal from the position detecting means. instantaneous light emitting illumination means for irradiating light onto the object to be inspected; imaging means for capturing an image of the object to be inspected illuminated by the instantaneous light emitting illumination means and outputting a video signal; and image processing of this image signal for inspection. and image processing means.

[Effect]

The image processing means irradiates the inspection object multiple times with light from the instantaneous illumination means based on the signal from the position detection means, and generates an image related to the inspection based on a video signal of the inspection object obtained from the imaging means at this time. (Let's do some processing.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a configuration diagram showing an embodiment according to the present invention.

In the figure, the same parts or parts as in FIG. 4 are given the same reference numerals. 4a, 4b are rotary encoders attached to the motors 3a, 3b; 5a, 5b are rotational position detectors connected to the rotary encoders 4a, 4b; 10
A is an image processing device consisting of image memos 1J8a to 1J8d and a microcomputer 9a.

Here, the cameras 7a and 7b constitute imaging means, and the rotary encoders 4a and 4b and rotational position detection units 5a and 5b
constitutes a position detection means.

Next, the operation will be explained. In this embodiment, since lane 1 and lane 2 perform the same operation, only lane 1 will be explained and explanation of lane 2 will be omitted. Now, when the motor 3a attached to the belt conveyor 2a rotates, the IC 1a placed on the belt moves in the traveling direction A.

At this time, the encoder 4a detects the rotation of the shaft of the motor 3a, and transmits a rotation signal corresponding to the moving position of the workpiece C1a to the microcomputer 9a via the rotation position detection section 5a. The microcomputer 9a recognizes the position of the IC[a on the belt based on this signal, and instructs the strobe lighting device 6a to emit light. The number of times the strobe light emitting device 6a emits light at this time is determined in accordance with the image memories 8a and 8b in the image processing device 10a.

That is, by the first light emission, a half image of ICja is captured by the camera 7a, converted into a video signal, and written into the image memory 8a. Subsequently, the image of the remaining half of the IC 1a is captured by the camera 7a by the second light emission, converted into a video signal, and written into the image memory 8b. In FIG. 4, this is because the mirror body 35a reflects the camera 57a,
This has the same effect as the operation of dividing the image into 7c. Then, the microcomputer 9a performs image processing related to the inspection based on the information in the image memos 1J8a and 8b.

FIG. 2 is a flowchart showing image processing related to the inspection of the microcomputer 9a, and FIG.
17 is a flowchart showing the writing process to the image memos 178a to 8d in FIG. Here, (a) in the same figure shows the processing for lane 1, and (a) in the same figure shows the processing for lane/2. Now, in FIG. 2, the My In 9a is the image processing device 10a.
Inspection image processing A to D is sequentially performed corresponding to the image memos 178a to 8d in the image memo 178a to 18d. For example, when image processing is started in step 11, the image memory 8a in lane 1
It is determined whether a video signal has been written to (step 12).

Here, when the video signal is written to the image memory 8a,
Inspection image processing A is performed only on this memo 1J8a (step 13), and the process returns to step 12 again. Next, since the video signal has already been written in step 12, the process proceeds to step 14, where a determination is made regarding the image memory 8b. In this way, video signals are sequentially written into all the image memories, and the operation continues until all inspection image processing is completed.

Next, FIG. 3(a) will be explained. As described above, when a rotation signal is input from the rotary encoder 4a to the microcomputer 9a via the rotation detection section 5a, the microcomputer 9a starts interrupting the program (step 20). Next, it is determined whether or not the strobe illumination device 6a is instructed to emit light for the first time (step 21). If it is the first time, the camera 7
Writing the video signal obtained in step a to the image memory 8a 1 (
Step 22). Then, the second order of the next processing is set (step 23), and the interrupt is terminated (step 26). On the other hand, in the judgment in step 21, if it is the second light emission instruction, the video signal obtained by the camera 7a is written to the image memo 1J8b (step 24), the first order is set, and the process ends (step 25). , 26
).

In this way, this device is equipped with the rotary encoder 4a for detecting the moving position of the IC1a and the rotation detecting section 5a on the belt conveyor, so that the bell body 35a as shown in FIG.
, 35b becomes unnecessary. In addition, the number of cameras placed in each lane can be reduced to one instead of two. As a result, when visual inspection is performed in multiple lanes, the number of cameras installed can be halved, making it possible to obtain an inexpensive device.

In addition, by increasing the configuration of the image memory, it can be used for large-sized ICs, and has remarkable effects such as extremely high versatility. Since processing can be performed with one microcomputer, there is no need to arrange an image processing device for each lane, and the device can be simplified.

〔Effect of the invention〕

As described above, according to the present invention, by providing the transport means with the position detection means for detecting the moving position of the object to be inspected,
A mirror body for dividing images of the inspection object becomes unnecessary. Furthermore, the number of imaging means that were previously arranged in plurality for each lane can be reduced to one.

This makes it possible to reduce the number of imaging means when performing inspection in a plurality of lanes, making it possible to obtain an inexpensive external appearance inspection apparatus.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a flowchart showing image processing related to inspection of the microcomputer 9a, and FIGS. 3(a) and (b) are image memories in the microcomputer 9a. Flowchart showing write processing to 8a to 8d, FIG. 4 is a conventional configuration diagram, FIG. 5(a), Φ)
is a flowchart showing the processing steps of the microcomputer 9a. 1a, ib* 111+ 11 IC, 2Jl, 2'l
) * * 11 @ Belt conveyor, 3a, 3b
...Motor, 4a, 4b...Rotary encoder, 5a, 5b...II@Rotation detection section, 6a, 6b...
,... Strobe illumination device, 7a, 7b... Camera, 8a to 8d... Φ image memory, 9a... Microcomputer, 1oa @ 11 @ Φ image processing device.

Claims (1)

[Claims] A transport means for transporting an object to be inspected; a position detecting means provided on the transport means for detecting the position of the object to be inspected; Instantaneous light emitting illumination means for irradiating light onto an object to be inspected; Imaging means for taking an image of the object to be inspected illuminated by the instantaneous emitting illumination means and outputting a video signal; image processing of this image signal for inspection. An appearance inspection device comprising an image processing means.