JP2000039407A - X-ray foreign object inspection device - Google Patents

X-ray foreign object inspection device

Info

Publication number
JP2000039407A
JP2000039407A JP23628498A JP23628498A JP2000039407A JP 2000039407 A JP2000039407 A JP 2000039407A JP 23628498 A JP23628498 A JP 23628498A JP 23628498 A JP23628498 A JP 23628498A JP 2000039407 A JP2000039407 A JP 2000039407A
Authority
JP
Japan
Prior art keywords
ray
image
inspected
rays
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23628498A
Other languages
Japanese (ja)
Inventor
Takeshi Goto
武 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elco Co Ltd
Original Assignee
Elco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elco Co Ltd filed Critical Elco Co Ltd
Priority to JP23628498A priority Critical patent/JP2000039407A/en
Publication of JP2000039407A publication Critical patent/JP2000039407A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To accurately detect a foreign object being mixed into an object to be inspected that moves speedily by allowing X rays passing through the object to be inspected to reach a fluorescent plate and capturing the obtained transmission X-ray image with an image pick-up camera. SOLUTION: An object 2 to be inspected being placed on a belt conveyor 3 is successively carried and passes an inspection position part being provided at an X-ray generation source 1. The X-ray generation source 1 detects the timing of the passage of the inspection position of the object 2 to be inspected and applies X rays to the object 2 to be inspected. Application X rays successively pass through the object 2 to be inspected and the belt conveyor 3 and reach a fluorescent plate 4. In this case, when a foreign object is mixed into the object 2 to be inspected, transmission X rays have different amount of attenuation from the case when there are no foreign objects, and a foreign object is recognized in an X-ray perspective image appearing on the fluorescent plate 4. An X-ray transmission image appearing on the fluorescent plate 4 is reflected by a mirror 5 and is captured by an image pick-up camera 7. An image- processing device 8 where a video signal from the image pick-up camera 7 is inputted processes a signal, performs an operation for detecting the foreign object, and judges the presence or absence of the mixture of the foreign object.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、X線を利用して各
種の製品、例えば食料品や薬品等などに混入している異
物を自動的に検出するためのX線異物検査装置に関し、
更に詳しくは、被検査物がベルトコンベア等により高速
で搬送される途中において、精度よく異物を検出するこ
とのできるX線異物検査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray foreign matter inspection apparatus for automatically detecting foreign matter mixed in various products, for example, foods, medicines and the like by using X-rays.
More specifically, the present invention relates to an X-ray foreign matter inspection apparatus capable of detecting foreign matter with high accuracy while an object to be inspected is being conveyed at a high speed by a belt conveyor or the like.

【0002】[0002]

【従来の技術】食品工業や製薬工業において生産される
製品は、飲食されたり人体に投与されるため、製品中に
異物が混入することは許されない。このために、従来よ
り、この種の製品の製造ラインには、非破壊で製品中に
異物が混入しているか否かを検出するための検査装置が
設置されている。これまでの検査装置として、主として
電磁検査方式とX線検査方式とがある。
2. Description of the Related Art Products produced in the food and pharmaceutical industries are eaten and consumed or administered to the human body, and consequently, foreign substances are not allowed to enter the products. For this reason, conventionally, an inspection apparatus for detecting whether or not a foreign substance is mixed in a product in a nondestructive manner is installed in a production line of this type of product. Conventional inspection apparatuses mainly include an electromagnetic inspection method and an X-ray inspection method.

【0003】電磁検査方式によるものは、被検査物中に
存在する異物による電磁変化を検出するものであって、
検査装置全体が安価に構成できる特徴があり、大規模の
製造ラインのみならず中小規模の製造ラインまで広く導
入されている。一方、X線検出方式による検査装置は、
X線源からのX線を被検査物に照射し、そこを透過した
X線量をX線画像センサにより検出し、画像処理して異
物を検出するような構成となっている。ここで、X線画
像センサとしては、蛍光増倍管とテレビジョンカメラを
組み合わせたものや、X線テレビジョンカメラ、X線ラ
インセンサ等が用いられる。
The electromagnetic inspection method detects electromagnetic changes due to foreign substances present in an inspection object.
It has the feature that the entire inspection apparatus can be configured at low cost, and is widely used not only in large-scale production lines but also in small- and medium-scale production lines. On the other hand, the inspection device using the X-ray detection method
An X-ray from an X-ray source is applied to an inspection object, the amount of X-ray transmitted therethrough is detected by an X-ray image sensor, and image processing is performed to detect foreign matter. Here, as the X-ray image sensor, a combination of a fluorescence intensifier and a television camera, an X-ray television camera, an X-ray line sensor, or the like is used.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、電磁検
査方式は、強磁性体の金属異物が混入されている場合は
検出精度がよいが、異物が非磁性体の金属であったり、
非金属であったりすると、その混入を検出できなかった
り、あるいは精度よく検出することができないという問
題点がある。また、調味料食品のように塩分、水分を多
量に含んでいると、電界電導により食品自体が導体化さ
れているので、異物が混入していなくとも異物があるよ
うに誤って検出する等の欠点があった。また、X線検出
方式による検査装置は、蛍光増倍管やX線テレビジョン
カメラ等を用いる場合、鮮明な画像を得るためにはカメ
ラやセンサの露光時間を長くとらなくてはならず、被検
査物がコンベア等により高速に搬送されるような場合、
高い精度で異物を検出することができないという問題点
がある。また、X線ラインセンサを使用する場合を含め
装置全体が高価になるために一般の製造ラインに採用さ
れるに至っていない。
However, the electromagnetic inspection method has good detection accuracy when ferromagnetic metal foreign matter is mixed, but the foreign matter is a non-magnetic metal,
If it is a non-metal, there is a problem that the contamination cannot be detected or it cannot be detected with high accuracy. In addition, if the food contains a large amount of salt and water, as in seasoning foods, the food itself is converted into a conductor by electric field conduction. There were drawbacks. In addition, when an X-ray detection type inspection apparatus uses a fluorescent intensifier or an X-ray television camera, the exposure time of the camera or sensor must be long in order to obtain a clear image. When the inspection object is conveyed at high speed by a conveyor or the like,
There is a problem that foreign matter cannot be detected with high accuracy. Further, since the entire apparatus becomes expensive including the case of using an X-ray line sensor, it has not been adopted in a general production line.

【0005】従って本発明が解決しようとする課題は、
X線検出方式を採用するものであって、高速で移動する
被検査物についても混入する異物を精度良く検出できる
安価なX線異物検査装置を提供することを目的とする。
[0005] Therefore, the problem to be solved by the present invention is:
An object of the present invention is to provide an inexpensive X-ray foreign substance inspection apparatus that employs an X-ray detection method and can accurately detect a foreign substance mixed in an inspection object that moves at a high speed.

【0006】[0006]

【課題を解決するための手段】このような課題を達成す
るために、本発明では、被検査物にX線を照射するX線
源と、該被検査物をX線が照射され位置に搬送する搬送
手段と、該被検査物を透過したX線を受け透視画像を可
視画像に変換する蛍光板と、該蛍光板に得られた可視画
像を撮像し電気信号に変換する撮像カメラと、この撮像
カメラからの電気信号を受け異物検出のための画像処理
を行なう画像処理装置からなるX線異物検査装置であ
る。また、蛍光板に得られた可視画像を反射させて撮像
カメラに与える回転可能の反射手段と、この反射手段を
被検査物の移動と同期して回転させる駆動手段とを設け
たことを特徴とするX線異物検査装置である。
In order to achieve the above object, according to the present invention, an X-ray source for irradiating an inspection object with X-rays, and the inspection object is transported to a position where the X-rays are irradiated. Transporting means, a fluorescent plate which receives X-rays transmitted through the inspection object and converts a fluoroscopic image into a visible image, an imaging camera which captures the visible image obtained on the fluorescent plate and converts it into an electric signal, and this imaging camera Is an X-ray foreign matter inspection device including an image processing device that receives an electric signal from the device and performs image processing for foreign matter detection. In addition, a rotatable reflecting means for reflecting the visible image obtained on the fluorescent screen and giving it to the imaging camera, and a driving means for rotating the reflecting means in synchronization with the movement of the inspection object are provided. It is an X-ray foreign matter inspection device.

【0007】[0007]

【発明の実施の形態】以下本発明を図面を用いて詳細に
説明する。図1は、本発明に係るX線異物検査装置の一
例を示す構成ブロック図である。図において、1はX線
発生源で、例えばクーリッジ管等が使用でき、電気的に
X線の照射を制御できるようになっている。2は被検査
物で、ベルトコンベア3上に載置されて連続的に搬送さ
れている。ベルトコンベア3の途中には、X線発生源1
が設置され搬送されてくる被検査物2にX線が照射でき
るようになっている。4は蛍光板で、ベルトコンベア3
を挟んでX線発生源1に対峙するように設置されてお
り、被検査物2を透過したX線の像を可視像に変換す
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a configuration block diagram showing an example of an X-ray foreign matter inspection apparatus according to the present invention. In the figure, reference numeral 1 denotes an X-ray generation source, for example, a Coolidge tube or the like can be used so that irradiation of X-rays can be electrically controlled. An inspection object 2 is placed on a belt conveyor 3 and is continuously conveyed. In the middle of the belt conveyor 3, an X-ray source 1
Is installed, and X-rays can be irradiated to the inspection object 2 conveyed. Reference numeral 4 denotes a fluorescent plate, and the belt conveyor 3
Is installed so as to face the X-ray generation source 1 with the X-ray interposed therebetween, and converts an X-ray image transmitted through the inspection object 2 into a visible image.

【0008】5は蛍光板4に表れた可視像を反射させる
回転可能の鏡(反射手段)で、ここではベルトコンベア
3の搬送方向と直交する軸を回転軸とするようになって
いる。鏡5は回転軸を中心としてモータ6のような駆動
手段により、被検査物2の移動速度、すなわち、ベルト
コンベア3の搬送速度と同期して回転するように構成さ
れている。
[0008] Reference numeral 5 denotes a rotatable mirror (reflecting means) for reflecting a visible image appearing on the fluorescent screen 4. Here, an axis orthogonal to the conveying direction of the belt conveyor 3 is used as a rotation axis. The mirror 5 is configured to rotate about the rotation axis in synchronization with the moving speed of the inspection object 2, that is, the transport speed of the belt conveyor 3 by driving means such as a motor 6.

【0009】7は例えばCCDを用いた撮像カメラで、
蛍光板4に表れた可視像を鏡5を介してカメラ内に結像
させ、ビデオ信号に変換する。撮像カメラ7からのビデ
オ信号は、画像処理装置8に送られここで信号処理され
て被検査物2内の異物が検出演算される。この検出演算
としては、例えば被検査物2に異物のない状態で得られ
る蛍光板4の可視像をあらかじめメモリに記憶させてお
き、この時の可視像と検査すべき被検査物が順次搬送さ
れた状態で得られる各可視像とを比較することにより異
物の混入の有無が検出できる。
Reference numeral 7 denotes an imaging camera using a CCD, for example.
A visible image appearing on the fluorescent screen 4 is formed in a camera via a mirror 5 and converted into a video signal. A video signal from the imaging camera 7 is sent to an image processing device 8 where the signal is processed to detect and calculate a foreign substance in the inspection object 2. In this detection calculation, for example, a visible image of the fluorescent screen 4 obtained in a state where the inspection object 2 has no foreign matter is stored in a memory in advance, and the visible image at this time and the inspection object to be inspected are sequentially conveyed. The presence or absence of a foreign substance can be detected by comparing each of the visible images obtained in the state as described above.

【0010】このように構成された装置の動作を次に説
明する。被検査物2は、ベルトコンベア2に載せられて
次々に搬送され、X線発生源1が設置されている検査位
置部分を通過する。X線発生源1は、被検査物2が所定
の検査位置部分を通過するタイミングを、図示していな
い例えば光センサ等により検出し、X線を被検査物2に
向けて照射する。被検査物2に照射されたX線は、被検
査物2、ベルトコンベア3をそれぞれ透過し、蛍光板4
に到達する。ここで、被検査物2内に異物が混入してい
る場合、そこを通過するX線は、異物の無い場合と減衰
量が異なり、蛍光板4に表れるX線透視画像中に異物の
存在が認められる。
Next, the operation of the above-configured device will be described. The inspection object 2 is placed on the belt conveyor 2 and transported one after another, and passes through the inspection position where the X-ray source 1 is installed. The X-ray source 1 detects the timing at which the inspection object 2 passes through a predetermined inspection position by, for example, an optical sensor (not shown), and irradiates the inspection object 2 with X-rays. The X-rays applied to the inspection object 2 pass through the inspection object 2 and the belt conveyor 3 respectively, and
To reach. Here, when a foreign substance is mixed in the inspection object 2, the amount of attenuation of the X-ray passing therethrough is different from that when no foreign substance is present, and the presence of the foreign substance is recognized in the X-ray fluoroscopic image appearing on the fluorescent screen 4. Can be

【0011】蛍光板4に表れたX線透視画像は、鏡5で
反射され撮像カメラ7により捕らえられる。撮像カメラ
からのビデオ信号は画像処理装置8に送られ、ここで信
号処理され異物検出演算が行われて、異物の混入の有無
が判定される。なお、以上の説明は、X線の照射時間を
短時間とし蛍光板4に残像時間が長いものを使用した場
合であって、鏡5は静止状態で蛍光板5に表れるX線透
視画像を撮像カメラ7に入射させる場合を想定した。本
発明は、以上のような使用においても実現可能である
が、次に、鏡5を被検査物2の移動と同期して回転させ
て、より鮮明な画像を得ることもできる。
The X-ray fluoroscopic image appearing on the fluorescent screen 4 is reflected by the mirror 5 and captured by the imaging camera 7. The video signal from the imaging camera is sent to the image processing device 8, where the signal is processed and a foreign matter detection calculation is performed to determine whether or not foreign matter is mixed. In the above description, the X-ray irradiation time is short and the fluorescent screen 4 has a long after-image time, and the mirror 5 is used to capture the X-ray fluoroscopic image appearing on the fluorescent screen 5 in a stationary state. It is assumed that the light beam is incident on. The present invention can be realized in the use as described above, but it is also possible to obtain a clearer image by rotating the mirror 5 in synchronization with the movement of the inspection object 2.

【0012】図2は、鏡5を被検査物2の移動と同期し
て回転させ鮮明な画像を得る場合の鏡の駆動方法を説明
するための図である。ベルトコンベア3により矢印B方
向に搬送された被検査物2は、検査位置に到達した後、
微小な時間Δtだけ経過すると2−1に示す位置から2
−2に示す位置に僅かであるが移動する。ここで、鏡5
の回転中心から位置2−1とを結ぶ線分と、位置2−2
を結ぶ線分のなす角度をCとし、この間X線発生源1か
らX線が連続して被検査物2に照射されるようにしてあ
る。また、蛍光板4はここでは残像時間の短いものが用
いられていて、被検査物4が移動するのに合わせて蛍光
板に表れるX線透視画像も移動するようになっている。
FIG. 2 is a diagram for explaining a mirror driving method in a case where the mirror 5 is rotated in synchronization with the movement of the inspection object 2 to obtain a clear image. After the inspection object 2 conveyed in the direction of arrow B by the belt conveyor 3 reaches the inspection position,
After the elapse of the minute time Δt, the position 2
The position slightly moves to the position indicated by -2. Here, mirror 5
A line segment connecting the rotation center to the position 2-1 and the position 2-2
Is defined as C, and during this time, X-rays are continuously emitted from the X-ray source 1 to the inspection object 2. Further, here, the fluorescent plate 4 having a short after-image time is used, and the X-ray fluoroscopic image appearing on the fluorescent plate moves as the inspection object 4 moves.

【0013】鏡5は、被検査物2の移動とともに矢印A
方向に回転しており、微小な時間Δtだけ経過する間に
変化する鏡5の回転角度Dは、前記の各線分がなす角度
Cに対して、以下のような関係に設定してある。 D=C/2 ……(1)
The mirror 5 moves with the arrow A as the object 2 moves.
The rotation angle D of the mirror 5, which changes during the elapse of a minute time Δt, is set in the following relationship with respect to the angle C formed by each line segment. D = C / 2 (1)

【0014】ベルトコンベア3の搬送速度を一定とする
と、角度Cの時間変化は一定の値となる。従って、
(1)式の関係を満たしながら鏡5を一定の角速度で回
転させることで、蛍光板4に表れ角度Cの間移動する被
検査物2のX線透視画像を、撮像カメラ7の受光面の一
定の位置に常に結像させることができる。
Assuming that the conveying speed of the belt conveyor 3 is constant, the time change of the angle C becomes a constant value. Therefore,
By rotating the mirror 5 at a constant angular velocity while satisfying the relationship of the expression (1), an X-ray fluoroscopic image of the inspection object 2 appearing on the fluorescent screen 4 and moving during the angle C can be obtained at a constant light receiving surface of the imaging camera 7. Can always be formed at the position.

【0015】これにより、撮像カメラ7に対する露光時
間を長くすることができ、コントラストの明るい鮮明な
画像を得ることができる。従って、この実施例によれ
ば、被検査物の搬送速度を高速にしても高い精度で被検
査物に混入した異物を検出することができる。
As a result, the exposure time for the imaging camera 7 can be lengthened, and a clear image with a high contrast can be obtained. Therefore, according to this embodiment, even if the transport speed of the inspection object is increased, it is possible to detect the foreign matter mixed in the inspection object with high accuracy.

【0016】なお、上記の各実施例では被検査物の搬送
手段としてベルトコンベアを用いたものであるが、他の
搬送手段を用いてもよい。また、X線発生手段1から照
射されるX線の強さを、被検査物の種類や大きさ等によ
り自動的に変更するような構成を付加してもよい。
In each of the above embodiments, a belt conveyor is used as a means for transporting the inspection object, but other transport means may be used. Further, a configuration may be added in which the intensity of X-rays emitted from the X-ray generation unit 1 is automatically changed depending on the type and size of the inspection object.

【0017】[0017]

【発明の第2実施例】図3は本発明の第2の実施例を示
すブロック図である。図1に示す実施例の構成図中の5
の鏡を、7の撮像カメラに置き換えた例である。蛍光板
に現れるX線透視画像中の被検査物2は、図4において
微少時間Δtだけ経過すると矢印B方向に2−1に示す
位置から2−2に示す位置に移動する。ここで撮像カメ
ラの受光面を通る回転中心から位置2−1を結ぶ線分
と、位置2−2を結ぶ線分のなす角度Cだけ撮像カメラ
7の受光軸をΔt時間内に被検査物の移動に合わせて回
転させる事によりX線透視画像を撮像カメラ7の受光面
の一定の位置に常に結像させることが出来る。これによ
り被検査物の搬送速度を高速にしてもコントラストの鮮
明な明るい画像を得ることが出来る。
FIG. 3 is a block diagram showing a second embodiment of the present invention. 5 in the configuration diagram of the embodiment shown in FIG.
This is an example in which the mirror is replaced by 7 imaging cameras. The inspection object 2 in the X-ray fluoroscopic image appearing on the fluorescent screen moves from the position indicated by 2-1 to the position indicated by 2-2 in the direction of arrow B after the elapse of the minute time Δt in FIG. Here, the light receiving axis of the imaging camera 7 is moved within the time Δt by an angle C formed by a line segment connecting the position 2-1 from the rotation center passing through the light receiving surface of the imaging camera and a line segment connecting the position 2-2. By rotating in accordance with the movement, an X-ray fluoroscopic image can always be formed at a fixed position on the light receiving surface of the imaging camera 7. As a result, a bright image with clear contrast can be obtained even when the transport speed of the inspection object is increased.

【0018】[0018]

【発明の効果】以上詳細に説明したように、本発明によ
れば、被検査物を通過したX線を蛍光板に到達させ、そ
こで透過X線画像を得るようにするとともに、得られた
透過X線画像を撮像カメラで捕らえるようにしたもの
で、簡単な構成で異物の検出を行なうことができる。ま
た、蛍光板に得られた透過X線画像を被検査物の移動と
同期して回転する反射手段を介して撮像カメラに結像さ
せることにより、撮像カメラ内での露光時間を長くする
ことができ、発光光量の少ない蛍光板を使用しても、よ
り鮮明な画像を得ることができるようになって、高速で
移動する被検査物に対しても混入する異物を精度良く検
出することができる。
As described above in detail, according to the present invention, the X-rays that have passed through the object to be inspected reach the fluorescent plate, where a transmitted X-ray image is obtained. Since the line image is captured by the imaging camera, foreign matter can be detected with a simple configuration. Further, by forming the transmitted X-ray image obtained on the fluorescent screen on the imaging camera via the reflecting means which rotates in synchronization with the movement of the inspection object, the exposure time in the imaging camera can be lengthened. Even if a fluorescent plate having a small amount of emitted light is used, a clearer image can be obtained, and a foreign substance mixed into an inspection object moving at high speed can be detected with high accuracy.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.

【図2】反射手段である鏡を駆動する場合の駆動方法を
説明するための図である。
FIG. 2 is a diagram for explaining a driving method when a mirror that is a reflection unit is driven.

【図3】本発明の第2の実施例の構成図である。FIG. 3 is a configuration diagram of a second embodiment of the present invention.

【図4】本発明の第2の実施例の撮像カメラの駆動方法
を説明する為の図である。
FIG. 4 is a diagram for explaining a method of driving an imaging camera according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 X線発生源 2 被検査物 3 ベルトコンベア 4 蛍光板 5 反射手段 6 モータ 7 撮像カメラ 8 画像処理装置 9 モータ制御装置 DESCRIPTION OF SYMBOLS 1 X-ray generation source 2 Inspection object 3 Belt conveyor 4 Fluorescent plate 5 Reflecting means 6 Motor 7 Imaging camera 8 Image processing device 9 Motor control device

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】被検査物にX線を照射するX線源と、該被
検査物をX線が照射され位置に搬送する搬送手段と、該
被検査物を透過したX線を受け透視画像を可視画像に変
換する蛍光板と、該蛍光板に得られた可視画像を撮像し
電気信号に変換する撮像カメラと、この撮像カメラから
の電気信号を受け異物検出のための画像処理を行なう画
像処理装置からなるX線異物検査装置。
An X-ray source for irradiating an X-ray to an object to be inspected, conveying means for irradiating the object to be irradiated with the X-ray, and conveying the X-ray transmitted through the object to be inspected, a fluoroscopic image Plate for converting the image into a visible image, an image pickup camera for picking up the visible image obtained on the fluorescent plate and converting the image into an electric signal, and an image processing device for receiving the electric signal from the image pickup camera and performing image processing for foreign matter detection X-ray foreign substance inspection device.
【請求項2】蛍光板に得られた可視画像を反射させて撮
像カメラに与える回転可能の反射手段と、この反射手段
を被検査物の移動と同期して回転させる駆動手段とを設
けたことを特徴とする請求項1のX線異物検査装置。
2. A system according to claim 1, further comprising: rotatable reflecting means for reflecting the visible image obtained on the fluorescent screen to the imaging camera, and driving means for rotating the reflecting means in synchronization with the movement of the inspection object. 2. The X-ray foreign matter inspection apparatus according to claim 1, wherein:
【請求項3】受光軸を回転又は移動可能にした撮像カメ
ラに、蛍光板に得られた可視画像の被検査物の移動に同
期し追跡移動させる駆動手段を設けた事を特徴とする請
求項1のX線異物検査装置。
3. An imaging camera having a light-receiving axis rotatable or movable, provided with driving means for performing a tracking movement in synchronization with the movement of the inspection object in the visible image obtained on the fluorescent screen. X-ray foreign matter inspection device.
JP23628498A 1998-07-19 1998-07-19 X-ray foreign object inspection device Pending JP2000039407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23628498A JP2000039407A (en) 1998-07-19 1998-07-19 X-ray foreign object inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23628498A JP2000039407A (en) 1998-07-19 1998-07-19 X-ray foreign object inspection device

Publications (1)

Publication Number Publication Date
JP2000039407A true JP2000039407A (en) 2000-02-08

Family

ID=16998515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23628498A Pending JP2000039407A (en) 1998-07-19 1998-07-19 X-ray foreign object inspection device

Country Status (1)

Country Link
JP (1) JP2000039407A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006133052A (en) * 2004-11-05 2006-05-25 Ishizuka Glass Co Ltd Foreign matter inspection method and device
KR100681663B1 (en) 2004-12-20 2007-02-09 재단법인 포항산업과학연구원 The method to assess the cleanness of inclusions in stainless steels using X-ray microscpe
WO2010140689A1 (en) * 2009-06-05 2010-12-09 マスプロ電工株式会社 Millimeter wave imaging device and program
WO2014013829A1 (en) * 2012-07-20 2014-01-23 浜松ホトニクス株式会社 Radiation image acquisition device
US10101469B2 (en) 2011-01-25 2018-10-16 Hamamatsu Photonics K.K. Radiation image acquisition device
US10859715B2 (en) 2015-09-30 2020-12-08 Hamamatsu Photonics K.K. Radiation image acquisition system and radiation image acquisition method
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006133052A (en) * 2004-11-05 2006-05-25 Ishizuka Glass Co Ltd Foreign matter inspection method and device
KR100681663B1 (en) 2004-12-20 2007-02-09 재단법인 포항산업과학연구원 The method to assess the cleanness of inclusions in stainless steels using X-ray microscpe
WO2010140689A1 (en) * 2009-06-05 2010-12-09 マスプロ電工株式会社 Millimeter wave imaging device and program
JP2010281737A (en) * 2009-06-05 2010-12-16 Maspro Denkoh Corp Millimeter wave image pickup device and program
US10746884B2 (en) 2011-01-25 2020-08-18 Hamamatsu Photonics K.K. Radiation image acquisition device
US10101469B2 (en) 2011-01-25 2018-10-16 Hamamatsu Photonics K.K. Radiation image acquisition device
CN104487868A (en) * 2012-07-20 2015-04-01 浜松光子学株式会社 Radiation image acquisition device
US9500600B2 (en) 2012-07-20 2016-11-22 Hamamatsu Photonics K.K. Radiation image acquisition system
JP2014021015A (en) * 2012-07-20 2014-02-03 Hamamatsu Photonics Kk Radiographic image acquisition device
US10234406B2 (en) 2012-07-20 2019-03-19 Hamamatsu Photonics K.K. Radiation image acquisition system
WO2014013829A1 (en) * 2012-07-20 2014-01-23 浜松ホトニクス株式会社 Radiation image acquisition device
US10859715B2 (en) 2015-09-30 2020-12-08 Hamamatsu Photonics K.K. Radiation image acquisition system and radiation image acquisition method
US11237278B2 (en) 2015-09-30 2022-02-01 Hamamatsu Photonics K.K. Radiation image acquisition system and radiation image acquisition method
CN115475267A (en) * 2022-09-19 2022-12-16 上海莱陆科技有限公司 Intelligent control system of object table disinfecting equipment
CN115475267B (en) * 2022-09-19 2023-12-01 上海莱陆科技有限公司 Intelligent control system of object table disinfection equipment

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