JPH0129019B2 - - Google Patents

Info

Publication number
JPH0129019B2
JPH0129019B2 JP56068780A JP6878081A JPH0129019B2 JP H0129019 B2 JPH0129019 B2 JP H0129019B2 JP 56068780 A JP56068780 A JP 56068780A JP 6878081 A JP6878081 A JP 6878081A JP H0129019 B2 JPH0129019 B2 JP H0129019B2
Authority
JP
Japan
Prior art keywords
sample
electron beam
objective lens
magnetic pole
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56068780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57182955A (en
Inventor
Tadashi Ootaka
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56068780A priority Critical patent/JPS57182955A/ja
Publication of JPS57182955A publication Critical patent/JPS57182955A/ja
Publication of JPH0129019B2 publication Critical patent/JPH0129019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56068780A 1981-05-07 1981-05-07 Objective lens for scanning electron microscope Granted JPS57182955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56068780A JPS57182955A (en) 1981-05-07 1981-05-07 Objective lens for scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56068780A JPS57182955A (en) 1981-05-07 1981-05-07 Objective lens for scanning electron microscope

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP5099624A Division JP2530095B2 (ja) 1993-04-26 1993-04-26 走査形電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS57182955A JPS57182955A (en) 1982-11-11
JPH0129019B2 true JPH0129019B2 (enrdf_load_html_response) 1989-06-07

Family

ID=13383582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56068780A Granted JPS57182955A (en) 1981-05-07 1981-05-07 Objective lens for scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57182955A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2530095B2 (ja) * 1993-04-26 1996-09-04 株式会社日立製作所 走査形電子顕微鏡

Also Published As

Publication number Publication date
JPS57182955A (en) 1982-11-11

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