JPH0128313Y2 - - Google Patents

Info

Publication number
JPH0128313Y2
JPH0128313Y2 JP1985012697U JP1269785U JPH0128313Y2 JP H0128313 Y2 JPH0128313 Y2 JP H0128313Y2 JP 1985012697 U JP1985012697 U JP 1985012697U JP 1269785 U JP1269785 U JP 1269785U JP H0128313 Y2 JPH0128313 Y2 JP H0128313Y2
Authority
JP
Japan
Prior art keywords
piezo
pump
vibrator
fluid
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985012697U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61130784U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985012697U priority Critical patent/JPH0128313Y2/ja
Publication of JPS61130784U publication Critical patent/JPS61130784U/ja
Application granted granted Critical
Publication of JPH0128313Y2 publication Critical patent/JPH0128313Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1985012697U 1985-01-31 1985-01-31 Expired JPH0128313Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985012697U JPH0128313Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985012697U JPH0128313Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Publications (2)

Publication Number Publication Date
JPS61130784U JPS61130784U (enrdf_load_stackoverflow) 1986-08-15
JPH0128313Y2 true JPH0128313Y2 (enrdf_load_stackoverflow) 1989-08-29

Family

ID=30496006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985012697U Expired JPH0128313Y2 (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPH0128313Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
KR100868898B1 (ko) * 2007-07-30 2008-11-14 한국기계연구원 적층형 ｐｚｔ를 이용한 압전펌프
WO2017135206A1 (ja) * 2016-02-01 2017-08-10 株式会社村田製作所 気体制御装置

Also Published As

Publication number Publication date
JPS61130784U (enrdf_load_stackoverflow) 1986-08-15

Similar Documents

Publication Publication Date Title
US11578715B2 (en) Pump
US10900480B2 (en) Disc pump with advanced actuator
JP5494801B2 (ja) 流体ポンプ
US11441555B2 (en) Pump
EP1947339A1 (en) Pump using unimorph vibration diaphragm
WO2013117945A1 (en) Disc pump with advanced actuator
JPH0128313Y2 (enrdf_load_stackoverflow)
US20230313790A1 (en) Fluid control device
US20210277883A1 (en) Pump
JPH0128312Y2 (enrdf_load_stackoverflow)
JPH0354383A (ja) 圧電式ポンプ
CN111980887A (zh) 一种压电微泵的错层支承结构及气体控制装置
JPH03542Y2 (enrdf_load_stackoverflow)
JPH03149370A (ja) 圧電振動体およびそれを用いた圧電式ポンプ
JP4586371B2 (ja) ポンプ装置及びダイヤフラムアクチュエータ
JPS6135747Y2 (enrdf_load_stackoverflow)
JP5500310B2 (ja) アクティブバルブ、流体制御装置
JPS639481U (enrdf_load_stackoverflow)
JPH0350300Y2 (enrdf_load_stackoverflow)
SU1430592A1 (ru) Пьезогидравлический насос
CN113294321A (zh) 用于压电微泵的振动板及其压电微泵
CN119012652A (zh) 散热装置及散热系统
JPS6270677A (ja) ピエゾポンプ
JPS61101687A (ja) ポンプ
JPH01315272A (ja) 圧電モータ