KR100868898B1 - 적층형 pzt를 이용한 압전펌프 - Google Patents
적층형 pzt를 이용한 압전펌프 Download PDFInfo
- Publication number
- KR100868898B1 KR100868898B1 KR1020070076363A KR20070076363A KR100868898B1 KR 100868898 B1 KR100868898 B1 KR 100868898B1 KR 1020070076363 A KR1020070076363 A KR 1020070076363A KR 20070076363 A KR20070076363 A KR 20070076363A KR 100868898 B1 KR100868898 B1 KR 100868898B1
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- stacked
- hole
- pzt
- fluid suction
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 140
- 238000005086 pumping Methods 0.000 claims abstract description 29
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 230000005684 electric field Effects 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 abstract 5
- 239000007924 injection Substances 0.000 abstract 5
- 238000000034 method Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007876 drug discovery Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 102000004196 processed proteins & peptides Human genes 0.000 description 1
- 108090000765 processed proteins & peptides Proteins 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
- F04B43/026—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel each plate-like pumping flexible member working in its own pumping chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/60—Fluid transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2280/00—Materials; Properties thereof
- F05B2280/10—Inorganic materials, e.g. metals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Abstract
Description
Claims (4)
- 삭제
- 삭제
- 삭제
- 몸체(1)와,상기 몸체(1)의 일측에 형성된 유체 흡입공(31)과 상기 몸체(1)의 타측에 형성된 다수의 유체 토출공(41)과 상기 각 유체 흡입공(31)과 인접한 유체 토출공(41) 사이에 형성된 유로(11)를 각각 가지는 다수의 유체 펌핑실(2)과,상기 유체 흡입공(31) 중 최전단 유체 흡입공(31)에 연결된 유체 흡입관(3)과,상기 유체 토출공(41) 중 최후단 유체 토출공(41)에 연결된 유체 토출관(4)과,상기 각 펌핑실(2)의 일측에 구비되는 금속 다이어프램(5)과,상기 각 금속 다이어프램(5) 일측에 접촉 구비되는 적층형 PZT(6)와,상기 각 적층형 PZT(6)에 순차적으로 전계신호를 인가하여 상기 적층형 PZT(6)의 변위에 따라 상기 금속 다이어프램(5)의 변위를 일으켜 상기 유체 흡입공(31)을 통해 흡입된 유체를 상기 유체 토출공(41)으로 토출시키는 컨트롤러(7)를 포함하여 구성되되,상기 각각의 적층형 PZT(6)는 중앙에 접촉 부재를 중심으로 방사형으로 배치되며,상기 유체 펌핑실(2)은 상기 방사형으로 배치된 각 적층형 PZT(6)의 외측에 방사형으로 구비된 펌프 케이스(12) 내에 각각 구비된 것을 특징으로 하는 적층형 PZT를 이용한 압전펌프.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070076363A KR100868898B1 (ko) | 2007-07-30 | 2007-07-30 | 적층형 pzt를 이용한 압전펌프 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070076363A KR100868898B1 (ko) | 2007-07-30 | 2007-07-30 | 적층형 pzt를 이용한 압전펌프 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100868898B1 true KR100868898B1 (ko) | 2008-11-14 |
Family
ID=40284292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070076363A KR100868898B1 (ko) | 2007-07-30 | 2007-07-30 | 적층형 pzt를 이용한 압전펌프 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100868898B1 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160013557A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프를 이용한 맥동억제 펌핑 방법 |
KR20160013556A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프를 이용한 펌핑 방법 |
KR20160013558A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61130784U (ko) * | 1985-01-31 | 1986-08-15 | ||
JPH06147104A (ja) * | 1992-10-30 | 1994-05-27 | Hitachi Ltd | 圧電多チャンネルポンプ及び駆動制御方法 |
KR20010094731A (ko) * | 1998-12-24 | 2001-11-01 | 후지야마 아키라 | 이미다졸 화합물 및 그의 의약 용도 |
-
2007
- 2007-07-30 KR KR1020070076363A patent/KR100868898B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61130784U (ko) * | 1985-01-31 | 1986-08-15 | ||
JPH06147104A (ja) * | 1992-10-30 | 1994-05-27 | Hitachi Ltd | 圧電多チャンネルポンプ及び駆動制御方法 |
KR20010094731A (ko) * | 1998-12-24 | 2001-11-01 | 후지야마 아키라 | 이미다졸 화합물 및 그의 의약 용도 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160013557A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프를 이용한 맥동억제 펌핑 방법 |
KR20160013556A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프를 이용한 펌핑 방법 |
KR20160013558A (ko) | 2014-07-28 | 2016-02-05 | 이종희 | 압전 펌프 |
KR102099790B1 (ko) | 2014-07-28 | 2020-04-10 | 이종희 | 압전 펌프 |
KR102151025B1 (ko) | 2014-07-28 | 2020-09-02 | 이종희 | 압전 펌프를 이용한 펌핑 방법 |
KR102151030B1 (ko) | 2014-07-28 | 2020-09-02 | 이종희 | 압전 펌프를 이용한 맥동억제 펌핑 방법 |
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