JPH01274447A - ウェーハ輸送用ケース - Google Patents

ウェーハ輸送用ケース

Info

Publication number
JPH01274447A
JPH01274447A JP63103473A JP10347388A JPH01274447A JP H01274447 A JPH01274447 A JP H01274447A JP 63103473 A JP63103473 A JP 63103473A JP 10347388 A JP10347388 A JP 10347388A JP H01274447 A JPH01274447 A JP H01274447A
Authority
JP
Japan
Prior art keywords
wafer
wafers
lid
case
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63103473A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572106B2 (enrdf_load_stackoverflow
Inventor
Takashi Omoto
大本　隆
Tatsuhiko Matake
間竹　達彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Siltronic Japan Corp
Original Assignee
Nippon Steel Corp
NSC Electron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, NSC Electron Corp filed Critical Nippon Steel Corp
Priority to JP63103473A priority Critical patent/JPH01274447A/ja
Publication of JPH01274447A publication Critical patent/JPH01274447A/ja
Publication of JPH0572106B2 publication Critical patent/JPH0572106B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP63103473A 1988-04-26 1988-04-26 ウェーハ輸送用ケース Granted JPH01274447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63103473A JPH01274447A (ja) 1988-04-26 1988-04-26 ウェーハ輸送用ケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63103473A JPH01274447A (ja) 1988-04-26 1988-04-26 ウェーハ輸送用ケース

Publications (2)

Publication Number Publication Date
JPH01274447A true JPH01274447A (ja) 1989-11-02
JPH0572106B2 JPH0572106B2 (enrdf_load_stackoverflow) 1993-10-08

Family

ID=14354977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63103473A Granted JPH01274447A (ja) 1988-04-26 1988-04-26 ウェーハ輸送用ケース

Country Status (1)

Country Link
JP (1) JPH01274447A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07307381A (ja) * 1989-03-31 1995-11-21 Empak Inc 半導体ウエハー、ディスク若しくは基板用パッケージ
JP2007227941A (ja) * 1998-07-10 2007-09-06 Entegris Inc クッション付きウェハー容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07307381A (ja) * 1989-03-31 1995-11-21 Empak Inc 半導体ウエハー、ディスク若しくは基板用パッケージ
JP2007227941A (ja) * 1998-07-10 2007-09-06 Entegris Inc クッション付きウェハー容器

Also Published As

Publication number Publication date
JPH0572106B2 (enrdf_load_stackoverflow) 1993-10-08

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