JPH01273373A - Piezoelectric composite thin-film element - Google Patents
Piezoelectric composite thin-film elementInfo
- Publication number
- JPH01273373A JPH01273373A JP63102129A JP10212988A JPH01273373A JP H01273373 A JPH01273373 A JP H01273373A JP 63102129 A JP63102129 A JP 63102129A JP 10212988 A JP10212988 A JP 10212988A JP H01273373 A JPH01273373 A JP H01273373A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thin film
- thin
- polarization
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 53
- 239000002131 composite material Substances 0.000 title claims abstract description 12
- 230000010287 polarization Effects 0.000 claims abstract description 22
- 239000000126 substance Substances 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims abstract 2
- 239000000919 ceramic Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- IDCBOTIENDVCBQ-UHFFFAOYSA-N TEPP Chemical compound CCOP(=O)(OCC)OP(=O)(OCC)OCC IDCBOTIENDVCBQ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、無ａ！薄膜と有ｎ薄膜とを用いた複合薄膜素
子、特に、圧電性複合薄膜素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is applicable to a variety of applications. The present invention relates to a composite thin film element using a thin film and an n-containing thin film, and particularly to a piezoelectric composite thin film element.
従来の技術
圧電材料は、圧電振動子、フィルタ、遅延素子あるいは
圧電センサ・アクチュエータとして広範囲に使用されて
いる。圧電材料としては ＬｊＴａｏ３．Ｌ １Ｎｂ０
３等の単結晶、チタン酸鉛・ジルコン酸チタン酸鉛（Ｐ
Ｚ Ｔ）系のセラミクス、ポリフッ化ビニリデン（Ｐ
ＶＤＦ）等の有機フィルム等が使用されている。ＰＺＴ
系セラミクスは一般に電気機械結合係数および圧電定数
が大きいが、比誘電率が大きいため電圧出方係数が小さ
い。また、音響インピーダンスが大きい。圧電性有機フ
ィルムは、セラミクスにない加工性、成形性をもち、小
さい音響インピーダンスを示すが、圧電定数が小さく、
誘電的・機械的損失が大きい。ざらに圧電定数を大きく
するために、最近、エポキシ系樹脂、シリコンゴム等の
有機材料とＰＺＴ粒子等のセラミクス微粒子を混合した
圧電性複合材料の研究開発が活発に行われている。BACKGROUND OF THE INVENTION Piezoelectric materials are widely used as piezoelectric vibrators, filters, delay elements, or piezoelectric sensor actuators. As a piezoelectric material, LjTao3. L 1Nb0
3 grade single crystal, lead titanate/lead zirconate titanate (P
Z T)-based ceramics, polyvinylidene fluoride (P
Organic films such as VDF) are used. PZT
Ceramics generally have a large electromechanical coupling coefficient and piezoelectric constant, but have a large dielectric constant and therefore a small voltage output coefficient. Also, the acoustic impedance is large. Piezoelectric organic films have processability and formability that ceramics do not have, and exhibit low acoustic impedance, but they have a small piezoelectric constant and
Large dielectric and mechanical losses. In order to roughly increase the piezoelectric constant, research and development have recently been actively conducted on piezoelectric composite materials in which organic materials such as epoxy resins and silicone rubber are mixed with ceramic fine particles such as PZT particles.
圧電材料は自発分極ＰｓＯ向きがランダムであると、各
分域の圧電効果が相互に打ち消し合って、全体として歪
みの発生つまり圧電効果はみられない。そこで、高電界
を印加してＰｓの向きを揃える分極処理が必要となる。When the spontaneous polarization PsO direction of the piezoelectric material is random, the piezoelectric effects of each domain cancel each other out, and no distortion occurs, that is, no piezoelectric effect is observed as a whole. Therefore, a polarization process is required to align the directions of Ps by applying a high electric field.
発明が解決しようとする課題
圧電性複合材料の圧電定数を大きくするには、圧電性の
大きい物質を高充填し、分極化度を高くすることが重要
である。充填塵、分極化度に限界があり、従来の圧電性
複合材料の圧電定数は小さい。Problems to be Solved by the Invention In order to increase the piezoelectric constant of a piezoelectric composite material, it is important to fill it with a highly piezoelectric substance and increase the degree of polarization. Due to the limited dust filling and polarization degree, the piezoelectric constant of conventional piezoelectric composite materials is small.
また、圧電材料に分極処理を施すとき次のような問題が
生じる。Furthermore, the following problem occurs when polarizing a piezoelectric material.
（１）分極処理により絶紗破壊が生じる場合かある。(1) Polarization treatment may cause breakage of the wire.
（２）高密度に配列している高分解能プレイ素子では、
それらを均一に分極することが困難である。(2) In high-resolution play elements arranged in high density,
It is difficult to polarize them uniformly.
課題を解決するための手段
基板上に形成され化学式が（Ｐ ｂ ｘ Ｌ ａ ｙＸ
Ｔ Ｉ ＺＺ ｒ ｗ ） ０３て表される圧電性薄
膜群と、前記圧電性薄膜群に付設された電極と、前記圧
電性薄膜群の少なくとも間隙に配された有機薄膜とを有
し、前記圧電性薄膜群の分極軸を高度に一方向に配向さ
せた構成とする。ただし、上式におけるＸ＝ ｙＴ２
およびＷは下記ａ、 ｂまたはＣの条件を満足するも
のとする。A means for solving the problem is formed on a substrate and has the chemical formula (P b x L a yX
A piezoelectric thin film group represented by T I ZZ r w ) 03, an electrode attached to the piezoelectric thin film group, and an organic thin film disposed at least in a gap between the piezoelectric thin film group, The polarization axes of the polar thin films are highly oriented in one direction. However, X in the above formula = yT2
and W shall satisfy the following conditions a, b, or c.
ａ） ０．７≦ｘ≦１．０．９≦ｘ＋ｙ≦１．０．９５
≦ｚ≦ｌ、ｗ＝０ｂ） ｘ＝ｌ、 ｙ＝ｏ、 ０．２≦
ｚ≦０．８． ｚ＋ｗ＝］ｃ） ０．８３≦ｘ≦１．
ｘ＋ｙ＝ｌ、０．２≦ｚ≦０．８゜０．９６≦ｚ十−≦
１
作用
り記の薄膜は、これをスパッタリング法により作製する
さい、充分に＜００１＞方向に配向していれば、分極処
理を行わなくとも自発分極が揃っている（特開昭６２−
２０５２６６号公報）。本発明はこの圧電性薄膜を利用
したもので、圧電定数が大きく、Ｐｓが既に揃った自然
分極が得られ、分極処理を行う必要がなく、歩留まり良
く高性能の複合薄膜素子が提供できる。a) 0.7≦x≦1.0.9≦x+y≦1.0.95
≦z≦l, w=0b) x=l, y=o, 0.2≦
z≦0.8. z+w=]c) 0.83≦x≦1.
x+y=l, 0.2≦z≦0.8゜0.96≦z10−≦
When the thin film described in 1. Function is fabricated by the sputtering method, if it is sufficiently oriented in the <001> direction, the spontaneous polarization will be uniform even without polarization treatment (Japanese Patent Laid-Open No. 1983-1989).
205266). The present invention utilizes this piezoelectric thin film, has a large piezoelectric constant, can obtain natural polarization with Ps already uniform, does not require polarization treatment, and can provide a high-yield, high-performance composite thin film element.
実施例
第１図及び第２図はそれぞれ本発明の複合薄膜素子の構
成及び製造工程を示す図である。Embodiment FIGS. 1 and 2 are diagrams showing the structure and manufacturing process of a composite thin film element of the present invention, respectively.
（１００）でへき関したＭｇＯ単結単結晶基板上面に、
レジストで保護した部分を２次元に配列し、燐酸でエツ
チングして、深さ約ｌＯμｍの凹部群を形成した後、高
周波マグネトロンスパッタリング法で圧電性薄膜群２と
してＰ ｂ Ｚ ｒｎ５Ｔ １ｉＩ５０３を４μｍ成長
させた（ａ）。雰囲気ガスにはＡ「と０２の混合ガスを
用い、スパッタリングターゲットは、
１、 ８ＰＺＴ＋０． ２ＰｂＯ）
の粉末である。On the top surface of the MgO single crystal substrate separated by (100),
The parts protected by the resist were arranged two-dimensionally and etched with phosphoric acid to form a group of recesses with a depth of about 10 μm, and then P b Z rn5T 1iI503 was grown to a thickness of 4 μm as the piezoelectric thin film group 2 by high-frequency magnetron sputtering. (a). A mixed gas of A and 02 was used as the atmospheric gas, and the sputtering target was a powder of 1.8PZT+0.2PbO).
表１にスパッタリング条件を示す。Table 1 shows the sputtering conditions.
この圧電性薄膜群２上にＡｕ電極薄膜３を蒸着により作
製した（ｂ）。次ぎに圧電性薄膜群２の間隙に有Ｉｌ薄
膜４を設けた（Ｃ）。上記有機薄膜４は感光性ポリイミ
ド系樹脂をスピンナで塗布し、紫外線に照射した後、２
００℃で熱処理したものである。次いで、電極薄膜３が
コンタクトホールを通してお互いに電気的に接触するよ
うに上部共通表１
電極３′を設ける（ｄ）。さらに、圧電性薄膜群２の下
部におけるＭｇＯ基板基板熱濃燐酸によりエツチングし
、開口部５を設けた（ｅ）。 凹部群に形成された圧電
性薄膜は同時に取り去った。この１１０部５を通して前
記圧電性薄膜群２の基板側の面にＡｕ電極薄膜６を作製
した（ｆ）。On this piezoelectric thin film group 2, an Au electrode thin film 3 was fabricated by vapor deposition (b). Next, an Il-containing thin film 4 was provided in the gap between the piezoelectric thin film group 2 (C). The organic thin film 4 is formed by coating a photosensitive polyimide resin with a spinner and irradiating it with ultraviolet light.
It was heat treated at 00°C. Next, upper electrodes 3' are provided so that the electrode thin films 3 are in electrical contact with each other through the contact holes (d). Further, the MgO substrate at the bottom of the piezoelectric thin film group 2 was etched with hot concentrated phosphoric acid to form an opening 5 (e). The piezoelectric thin film formed in the group of recesses was removed at the same time. An Au electrode thin film 6 was formed on the substrate side surface of the piezoelectric thin film group 2 through this 110 part 5 (f).
なお、圧電性薄膜群２を高密度に配列しないとき、メタ
ルマスクで分離した。Note that when the piezoelectric thin film group 2 was not arranged in high density, it was separated using a metal mask.
Ｐ ｂ Ｚ ｒ ［１，５Ｔ ｉ ｎ５０３７ｉ４膜は
、分極軸（＜００１〉方向）の９８％が一方向に配向し
ていた。この素子では、分極処理をしなくとも、圧電定
数ｄ３３は３００ｘ１０−１２Ｃ／Ｎ、電圧出力係数ｇ
３３は１２０ｘｌＯ−３ｍＶ／Ｎとなり、分極処理を施
したＰＺＴ系セラミクスと比較して、ｄ３３の値をほぼ
保持しｇ３３は５倍以上と著しく増大することができた
。In the P b Z r [1,5T i 5037i4 film, 98% of the polarization axes (<001> direction) were oriented in one direction. In this element, even without polarization, the piezoelectric constant d33 is 300x10-12C/N, and the voltage output coefficient g
33 was 120xlO-3 mV/N, and compared to PZT ceramics subjected to polarization treatment, the value of d33 was almost maintained and g33 was significantly increased to more than 5 times.
本スパッタリング条件で菱面体晶系をもつ（００１）配
向のＰ ｂ Ｚ ｒ ｔａ６Ｔ ｉ ［！、４０３薄膜
が得られた。菱面体晶系ＰＺＴ薄膜の分極軸は（１１１
）方向であるにもかかわらず、ｄ３３及びｇ３３は正方
品系ＰＺＴｉ膜と同等の値が得られた。Under these sputtering conditions, (001)-oriented P b Z r ta6T i [! , 403 thin films were obtained. The polarization axis of the rhombohedral PZT thin film is (111
) direction, values of d33 and g33 were equivalent to those of the square PZTi film.
また、有機薄膜４にエポキシ系・シリコン系樹脂あるい
はポリフッ化ビニル、ポリカーボネート、ナイロン、テ
トロン等の圧電性高分子のいずれを用いてもその効果が
大なることは言うまでもないことである。It goes without saying that the effect will be greater no matter which organic thin film 4 is made of epoxy/silicon resin or piezoelectric polymer such as polyvinyl fluoride, polycarbonate, nylon, or tetron.
このように本実施例に用いたＰＺＴｉ膜では、薄膜作製
時に十分に＜００１＞方向に配向していれば、分極処理
を行わなくても自発分極が揃っており、大きな圧電定数
ｄ３３及び電圧出力係数ｇ３３が得られることがわかっ
た。In this way, in the PZTi film used in this example, if it is sufficiently oriented in the <001> direction during thin film fabrication, the spontaneous polarization will be uniform even without polarization treatment, and a large piezoelectric constant d33 and voltage output will be obtained. It was found that a coefficient g33 was obtained.
発明の効果
本発明によれば、製造される複合薄膜素子は、圧電特性
も優れていて、分極処理が不要であり、実用的に極めて
有効である。Effects of the Invention According to the present invention, the composite thin film element manufactured has excellent piezoelectric properties, does not require polarization treatment, and is extremely effective in practice.
第１図は本発明の一実施例における圧電性複合薄膜素子
の構成を示す図、第２図は同素子の製造工程を示す図で
ある。
ｌ・・・基板、２・・・圧電性薄膜、３・・・電極薄膜
、４・・・有機薄膜、５・・・開口部、６・・・第２の
電極薄膜。
代理人の氏名 弁理士 中尾敏男 はか１名第１図
上部電極
電極薄膜
第２図
、５ ６第２の電極薄膜FIG. 1 is a diagram showing the structure of a piezoelectric composite thin film element in one embodiment of the present invention, and FIG. 2 is a diagram showing the manufacturing process of the same element. 1... Substrate, 2... Piezoelectric thin film, 3... Electrode thin film, 4... Organic thin film, 5... Opening, 6... Second electrode thin film. Name of agent Patent attorney Toshio Nakao (1 person) Figure 1 Upper electrode electrode thin film Figure 2, 5 6 Second electrode thin film
Claims (1)
、前記圧電性薄膜に付設された電極と、前記圧電性薄膜
の少なくとも間隙に形成された有機薄膜とを有し、前記
圧電性薄膜は、化学式（Ｐｂ＿ｘＬａ＿ｙ）（Ｔｉ＿ｚ
Ｚｒ＿ｗ）Ｏ＿３で表され、ａ）０．７≦ｘ≦１、０．
９≦ｘ＋ｙ≦１、０．９５≦ｚ≦１、ｗ＝０ｂ）ｘ＝ｌ
、ｙ＝０、０．２≦ｚ≦０．８、ｚ＋ｗ＝１ｃ）０．８
３≦ｘ≦１、ｘ＋ｙ＝１、０．２≦ｚ≦０．８、０．９
６≦ｚ＋ｗ≦１ のいずれかの組成をもち、〈００１〉方向あるいは〈１
１１〉方向に高度に配向しており、分極の方向も高度に
揃っていることを特徴とする圧電性複合薄膜素子。[Scope of Claims] A piezoelectric thin film separated from each other and arranged two-dimensionally, an electrode attached to the piezoelectric thin film, and an organic thin film formed at least in a gap between the piezoelectric thin films. , the piezoelectric thin film has the chemical formula (Pb_xLa_y)(Ti_z
Zr_w) O_3, a) 0.7≦x≦1, 0.
9≦x+y≦1, 0.95≦z≦1, w=0b) x=l
, y=0, 0.2≦z≦0.8, z+w=1c)0.8
3≦x≦1, x+y=1, 0.2≦z≦0.8, 0.9
It has a composition of 6≦z+w≦1, and has a <001> direction or a <1
A piezoelectric composite thin film element characterized by being highly oriented in the 11> direction and having highly aligned polarization directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63102129A JPH01273373A (en) | 1988-04-25 | 1988-04-25 | Piezoelectric composite thin-film element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63102129A JPH01273373A (en) | 1988-04-25 | 1988-04-25 | Piezoelectric composite thin-film element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01273373A true JPH01273373A (en) | 1989-11-01 |
Family
ID=14319168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63102129A Pending JPH01273373A (en) | 1988-04-25 | 1988-04-25 | Piezoelectric composite thin-film element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01273373A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013502656A (en) * | 2009-08-18 | 2013-01-24 | イマージョン コーポレーション | Haptic feedback using composite piezoelectric actuators |
-
1988
- 1988-04-25 JP JP63102129A patent/JPH01273373A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013502656A (en) * | 2009-08-18 | 2013-01-24 | イマージョン コーポレーション | Haptic feedback using composite piezoelectric actuators |
| US8878806B2 (en) | 2009-08-18 | 2014-11-04 | Immersion Corporation | Haptic feedback using composite piezoelectric actuator |
| JP2015109090A (en) * | 2009-08-18 | 2015-06-11 | イマージョン コーポレーションＩｍｍｅｒｓｉｏｎ Ｃｏｒｐｏｒａｔｉｏｎ | Haptic feedback using composite piezoelectric actuator |
| US9671865B2 (en) | 2009-08-18 | 2017-06-06 | Immersion Corporation | Haptic feedback using composite piezoelectric actuator |
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