JPH01272984A - 半導体装置の試験方法 - Google Patents

半導体装置の試験方法

Info

Publication number
JPH01272984A
JPH01272984A JP1056204A JP5620489A JPH01272984A JP H01272984 A JPH01272984 A JP H01272984A JP 1056204 A JP1056204 A JP 1056204A JP 5620489 A JP5620489 A JP 5620489A JP H01272984 A JPH01272984 A JP H01272984A
Authority
JP
Japan
Prior art keywords
semiconductor device
metal electrode
voltage source
dielectric enclosure
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1056204A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057663B2 (enrdf_load_stackoverflow
Inventor
Yasuhiro Fukuda
保裕 福田
Ikuo Suganuma
菅沼　郁夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1056204A priority Critical patent/JPH01272984A/ja
Publication of JPH01272984A publication Critical patent/JPH01272984A/ja
Publication of JPH057663B2 publication Critical patent/JPH057663B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP1056204A 1989-03-10 1989-03-10 半導体装置の試験方法 Granted JPH01272984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1056204A JPH01272984A (ja) 1989-03-10 1989-03-10 半導体装置の試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1056204A JPH01272984A (ja) 1989-03-10 1989-03-10 半導体装置の試験方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58180838A Division JPS6073375A (ja) 1983-09-30 1983-09-30 半導体装置の試験方法

Publications (2)

Publication Number Publication Date
JPH01272984A true JPH01272984A (ja) 1989-10-31
JPH057663B2 JPH057663B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=13020588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1056204A Granted JPH01272984A (ja) 1989-03-10 1989-03-10 半導体装置の試験方法

Country Status (1)

Country Link
JP (1) JPH01272984A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008096129A (ja) * 2006-10-06 2008-04-24 Fujitsu Ltd 電位勾配測定装置及び電子デバイスプロセス評価装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008096129A (ja) * 2006-10-06 2008-04-24 Fujitsu Ltd 電位勾配測定装置及び電子デバイスプロセス評価装置

Also Published As

Publication number Publication date
JPH057663B2 (enrdf_load_stackoverflow) 1993-01-29

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