JPH0126530B2 - - Google Patents

Info

Publication number
JPH0126530B2
JPH0126530B2 JP56165034A JP16503481A JPH0126530B2 JP H0126530 B2 JPH0126530 B2 JP H0126530B2 JP 56165034 A JP56165034 A JP 56165034A JP 16503481 A JP16503481 A JP 16503481A JP H0126530 B2 JPH0126530 B2 JP H0126530B2
Authority
JP
Japan
Prior art keywords
transfer
feed
attached
pulse motor
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56165034A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5866341A (ja
Inventor
Noboru Sato
Hirohide Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56165034A priority Critical patent/JPS5866341A/ja
Publication of JPS5866341A publication Critical patent/JPS5866341A/ja
Publication of JPH0126530B2 publication Critical patent/JPH0126530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Die Bonding (AREA)
  • Control Of Conveyors (AREA)
JP56165034A 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置 Granted JPS5866341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56165034A JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56165034A JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Publications (2)

Publication Number Publication Date
JPS5866341A JPS5866341A (ja) 1983-04-20
JPH0126530B2 true JPH0126530B2 (enFirst) 1989-05-24

Family

ID=15804572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56165034A Granted JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Country Status (1)

Country Link
JP (1) JPS5866341A (enFirst)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145141U (ja) * 1984-03-09 1985-09-26 株式会社東芝 Ｉｃフレ−ムの搬送整列装置
JPS6197836U (enFirst) * 1984-11-30 1986-06-23

Also Published As

Publication number Publication date
JPS5866341A (ja) 1983-04-20

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