JPH0126106Y2 - - Google Patents
Info
- Publication number
- JPH0126106Y2 JPH0126106Y2 JP20104483U JP20104483U JPH0126106Y2 JP H0126106 Y2 JPH0126106 Y2 JP H0126106Y2 JP 20104483 U JP20104483 U JP 20104483U JP 20104483 U JP20104483 U JP 20104483U JP H0126106 Y2 JPH0126106 Y2 JP H0126106Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- push
- cassette
- wafers
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 40
- 230000003287 optical effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20104483U JPS60111035U (ja) | 1983-12-29 | 1983-12-29 | ウエハカウンタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20104483U JPS60111035U (ja) | 1983-12-29 | 1983-12-29 | ウエハカウンタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60111035U JPS60111035U (ja) | 1985-07-27 |
| JPH0126106Y2 true JPH0126106Y2 (en, 2012) | 1989-08-04 |
Family
ID=30762464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20104483U Granted JPS60111035U (ja) | 1983-12-29 | 1983-12-29 | ウエハカウンタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60111035U (en, 2012) |
-
1983
- 1983-12-29 JP JP20104483U patent/JPS60111035U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60111035U (ja) | 1985-07-27 |
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