JPH01251680A - Laser oscillator - Google Patents

Laser oscillator

Info

Publication number
JPH01251680A
JPH01251680A JP63076386A JP7638688A JPH01251680A JP H01251680 A JPH01251680 A JP H01251680A JP 63076386 A JP63076386 A JP 63076386A JP 7638688 A JP7638688 A JP 7638688A JP H01251680 A JPH01251680 A JP H01251680A
Authority
JP
Japan
Prior art keywords
mirror
aperture
output mirror
opening
inner diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63076386A
Other languages
Japanese (ja)
Inventor
Kenji Kumamoto
健二 熊本
Takayoshi Kudo
工藤　貴由
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP63076386A priority Critical patent/JPH01251680A/en
Publication of JPH01251680A publication Critical patent/JPH01251680A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To eliminate distortion of an output mirror and to acquire a laser oscillator having a stable mode by providing an aperture for an inner diameter of the output mirror at a position different from that of an opening of the output mirror. CONSTITUTION:An inner diameter of an opening section 11a of an aperture 11 is set equal to or less than an inner diameter 4b of an output mirror 4, and the aperture 11 is cooled down through a fixing block 10. When reflection light reflected by a convex mirror 3 passes through the aperture 11, a portion thereof is cut. The partially cut light passes through an opening hole 10a and then reaches a concave mirror without impinging an opening section 4b of the output mirror 4. Since heat is not absorbed by the output mirror 4 itself, distortion of the output mirror 4 is not developed. Consequently, the oscillation mode is not affected at all.

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、アパーチャ構造を改良した不安定型のレーザ
発振器に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an unstable laser oscillator with an improved aperture structure.

［従来の技術］ 第３図は従来の不安定型のレーザ発振器の一例を示す断
面図である。（１）はレーザ発振器の筐体で、筐体（１
）内は真空状態でレーザガスが封入されている。（２）
　、　（３）は筐体（１）の両端に対向して設けられた
凹面鏡及び凸面鏡、（４）はレーザ光を外部に取り出す
ため、レーザ光の共振軸Ａに対して一定の角度傾斜させ
て取り付けられた取り出し鏡、（４ａ）は取り出し鏡（
４）に設けられ、レーザ光が凸面鏡（３）で反射された
際にアパーチャの効果を有する開口部、（６）はレーザ
発振器内で増幅されて外部に取り出されたレーザ光、（
７）、（７ａ）は高電圧が印加される一対の電極、（８
）は放電空間である。[Prior Art] FIG. 3 is a sectional view showing an example of a conventional unstable laser oscillator. (1) is the housing of the laser oscillator;
) is filled with laser gas in a vacuum state. (2)
, (3) is a concave mirror and a convex mirror provided opposite to each other at both ends of the housing (1), and (4) is a mirror tilted at a certain angle with respect to the resonance axis A of the laser beam in order to extract the laser beam to the outside. The attached take-out mirror (4a) is the take-out mirror (
4) is an aperture that has an aperture effect when the laser beam is reflected by the convex mirror (3); (6) is the laser beam that is amplified within the laser oscillator and taken out to the outside;
7), (7a) are a pair of electrodes to which a high voltage is applied;
) is the discharge space.

第４図（ａ）　、　（ｂ）は第３図に示した取り出し鏡
（４）の拡大説明図で、第３図（ａ）は取り出し鏡（４
）の開口部（４ａ）にテーパがない場合を示し、第３図
（ｂ）は開口部（４ａ）にテーバがある場合を示す。FIGS. 4(a) and 4(b) are enlarged explanatory views of the take-out mirror (4) shown in FIG.
) shows a case where the opening (4a) has no taper, and FIG. 3(b) shows a case where the opening (4a) has a taper.

なお、（９）は凸面鏡（３）により反射され、開口部（
４ａ）を通過する反射光を示す。Note that (9) is reflected by the convex mirror (3) and the aperture (
4a) shows the reflected light passing through.

上記のように溝成した従来のレーザ発振器の作用を説明
すれば次の通りである。The operation of the conventional laser oscillator having the grooves as described above will be explained as follows.

まず、電極（７）　、　（７ａ）間に高電圧が印加され
ると、両型Ｗ　（７）　、（７ａ）間に放電空間（８）
が形成され、放電空間（８）内のレーザガスが放電によ
り励起され、反転分布を形成する。励起されたレーザガ
スにより形成された内部光は、凹面鏡（２）と凸面鏡（
３）の間で共振増幅され、その後取り出し鏡（４）によ
り直角方向に反射されてレーザ光（６）となり、外部に
取り出される。なお、共振軸Ａ上で共振するレーザ光が
凸面鏡（３）で反射されて反射光（９）が開口部（４ａ
）を通過するときには、取り出し鏡（４）の開口部（４
ａ）が反射光（９）に対してアパーチャ効果を果す。First, when a high voltage is applied between the electrodes (7) and (7a), a discharge space (8) is created between both types W (7) and (7a).
is formed, the laser gas in the discharge space (8) is excited by the discharge, and a population inversion is formed. The internal light formed by the excited laser gas passes through the concave mirror (2) and the convex mirror (2).
3), and is then reflected in a right angle direction by an extraction mirror (4) to become a laser beam (6), which is extracted to the outside. Note that the laser beam resonating on the resonance axis A is reflected by the convex mirror (3) and the reflected light (9) is transmitted to the opening (4a).
), when passing through the opening (4) of the take-out mirror (4).
a) exerts an aperture effect on the reflected light (9).

［発明が解決しようとする課題］ 上記のように構成した従来のレーザ発振器によれば、取
り出し鏡自体がアパーチャを兼用しているため、取り出
し鏡が熱吸収により歪みを生じたり、開口部の内径内面
での回折光がモードの変形を生むという問題があった。[Problems to be Solved by the Invention] According to the conventional laser oscillator configured as described above, since the take-out mirror itself also serves as an aperture, the take-out mirror may become distorted due to heat absorption, or the inner diameter of the aperture may become distorted. There was a problem in that diffracted light on the inner surface caused mode deformation.

本発明は上記のような問題点を解決するためになされた
もので、取り出し鏡の歪みを無くし、モードの安定した
レーザ発振器を得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and aims to eliminate distortion of the extraction mirror and obtain a laser oscillator with a stable mode.

［課題を解決するための手段］ 本発明は上記の目的を達成するためになされたもので、
取り出し鏡開口部とは別個の位置に該取り出し鏡の内径
用アパーチャを設けたレーザ発振器を提供するものであ
る。[Means for Solving the Problems] The present invention has been made to achieve the above objects, and
The present invention provides a laser oscillator in which an aperture for the inner diameter of the extraction mirror is provided at a position separate from the extraction mirror opening.

［作用］ 本発明によれば、取り出し鏡の開口部とは別個の位置に
設けた取り出し鏡内径用のアパーチャによりレーザ光を
テーパ処理し、または吸収する。[Operation] According to the present invention, the laser beam is tapered or absorbed by the aperture for the inner diameter of the extraction mirror provided at a position separate from the opening of the extraction mirror.

［実施例〕 第１図は本発明実施例の要部拡大断面図である。[Example〕 FIG. 1 is an enlarged sectional view of a main part of an embodiment of the present invention.

図において、（３）は第３図に示した筐体（１）の−端
に設けられた凸面鏡、（４）はレーザ光を筐体（１）の
外部に取り出すため、レーザ光の共振軸Ａに対して一定
角度だけ傾斜させて設けられた取り出し鏡、（４ｂ）は
取り出し鏡（４〉に設けられた開口部である。（１０）
は取り出し鏡（４）の開口部（４ｂ）よりも大きい径の
開口穴（１０ａ）を有する取り出し鏡（４）の取り付は
ブロック、（１１）は取り付はブロック（１０）の開口
穴（１０ａ）の凸面鏡（３）側に直接取り付けられた取
り出し鏡（４）の内径用のアパーチャで、例えばエツジ
による反射、あるいはアルマイト等の吸収体を用いて吸
収によりレーザ光の凸面鏡（３）からの反射光を処理す
るように構成されている。このアパーチャ（１１）の開
口部（ｌｌａ）の内径は、取り出し鏡（４）の内径（４
ｂ）と同等又はそれよりも小さく設定され、さらにアパ
ーチャ（１１）は取り付はブロック（１０）を通して冷
却されるようになっている。In the figure, (3) is a convex mirror installed at the negative end of the housing (1) shown in Figure 3, and (4) is the resonant axis of the laser beam to extract the laser beam to the outside of the housing (1). The take-out mirror (4b) is an opening provided in the take-out mirror (4>), which is inclined at a certain angle with respect to A. (10)
(11) has an opening hole (10a) with a larger diameter than the opening (4b) of the extraction mirror (4). The aperture for the inner diameter of the take-out mirror (4) is directly attached to the convex mirror (3) side of 10a), and the laser beam is removed from the convex mirror (3) by reflection from an edge or absorption using an absorber such as alumite. The device is configured to process reflected light. The inner diameter of the opening (lla) of this aperture (11) is the inner diameter (4) of the extraction mirror (4).
b), and the aperture (11) is mounted such that it is cooled through the block (10).

上記のように構成した本発明の詳細な説明すれば次の通
りである。第３図で示したように、レーザガスの励起に
より発生した内部光が発振器内で共振して増幅されるが
、本発明ではさらに凸面鏡（３）で反射された反射光（
９）がアパーチャ（１１）を通るとき、その一部がカッ
トされる。このようにして、一部をカットされた反射光
（９）は、開口穴（１０ａ）を通過し、さらに取り出し
鏡（４）の開口部（４ｂ〉にあたることなく、第３図に
示す凹面鏡（２）に到達する。従って、取り出し鏡（４
）自体に熱が吸収されず、このため取り出し鏡（４）に
歪みが生じることもなく発振モードへの影響もない。A detailed explanation of the present invention configured as above is as follows. As shown in FIG. 3, the internal light generated by excitation of the laser gas resonates within the oscillator and is amplified, but in the present invention, the reflected light (
9) passes through the aperture (11), a part of it is cut. In this way, the partially cut reflected light (9) passes through the aperture (10a) and does not hit the opening (4b) of the take-out mirror (4). 2).Therefore, take out the mirror (4).
) itself does not absorb heat, so that the take-out mirror (4) is not distorted and the oscillation mode is not affected.

第２図は本発明の他の実施例を示す要部拡大断面図であ
る。本実施例においては、取り出し鏡（４）の開口穴（
１０ａ）の内壁に円筒形状で断面り字型のアパーチャ（
１２）を取り付けたものである。すなわち、本実施例で
は、第１図で示した場合に比べ、アパーチャ（１２）の
取り付はブロック（１０）への接触面積を大きく取れる
ので冷却効果がよりすぐれている。FIG. 2 is an enlarged sectional view of a main part showing another embodiment of the present invention. In this embodiment, the opening hole (
10a) has a cylindrical shaped aperture (
12) is attached. That is, in this embodiment, compared to the case shown in FIG. 1, the mounting of the aperture (12) can provide a larger contact area with the block (10), so that the cooling effect is better.

［発明の効果］ 以上の説明から明らかなように、本発明によれば、取り
出し鏡の開口部とは別個の位置に、取り出し鏡の内径用
アパーチャを設けたので、取り出し鏡の熱歪みがなく、
モードの良いレーザ光を得ることができる。[Effects of the Invention] As is clear from the above description, according to the present invention, since the aperture for the inner diameter of the take-out mirror is provided at a position separate from the opening of the take-out mirror, there is no thermal distortion of the take-out mirror. ,
Laser light with good mode can be obtained.

【図面の簡単な説明】 第１図は本発明の実施例を示す要部拡大断面図、第２図
は本発明の他の実施例を示す要部拡大断面図、第３図は
従来のレーザ発振器の一例を示す断面図、第４図（ａ）
　、　（ｂ）はそれぞれ従来のレーザ発振器の作用説明
図である。 （４）・・・取り出し鏡、（４ａ）・・・開口部、（１
０〉・・・取り付はブロック、（ｌｏａ）・・・開口穴
、（１１）、（１２）・・・アパーチャ。 なお、図中同一符号は同一または相当部分を示すものと
する。[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is an enlarged sectional view of the main part showing an embodiment of the present invention, Fig. 2 is an enlarged sectional view of the main part showing another embodiment of the invention, and Fig. 3 is a conventional laser Cross-sectional view showing an example of an oscillator, FIG. 4(a)
, (b) are respectively explanatory diagrams of the operation of a conventional laser oscillator. (4)... Take-out mirror, (4a)... Opening, (1
0>...Mounting is by block, (loa)...opening hole, (11), (12)...aperture. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] 不安定型のレーザ発振器において、レーザ光の取り出し
鏡開口部とは別個の位置に該取り出し鏡の内径用アパー
チャを設けたことを特徴とするレーザ発振器。What is claimed is: 1. An unstable laser oscillator, characterized in that an aperture for the inner diameter of the extraction mirror is provided at a position separate from an opening of the extraction mirror for laser light.
JP63076386A 1988-03-31 1988-03-31 Laser oscillator Pending JPH01251680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63076386A JPH01251680A (en) 1988-03-31 1988-03-31 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63076386A JPH01251680A (en) 1988-03-31 1988-03-31 Laser oscillator

Publications (1)

Publication Number Publication Date
JPH01251680A true JPH01251680A (en) 1989-10-06

Family

ID=13603893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63076386A Pending JPH01251680A (en) 1988-03-31 1988-03-31 Laser oscillator

Country Status (1)

Country Link
JP (1) JPH01251680A (en)

Similar Documents

Publication Publication Date Title
US4942588A (en) Laser device
EP0412555B1 (en) Gas laser device
JP3503588B2 (en) Solid state laser oscillator
JPH01251680A (en) Laser oscillator
JPH08148739A (en) Laser resonator and laser apparatus provided with said laser resonator
JP5135650B2 (en) Laser equipment
JPH0371683A (en) Gas laser device
JP2001015837A (en) Solid state laser oscillator
JPH1126840A (en) Laser device
JPH0632699Y2 (en) Laser oscillator
JP2755217B2 (en) Solid state laser oscillator
JP2684108B2 (en) Laser oscillator
JPH03155684A (en) Gas laser device
JP2550693B2 (en) Solid-state laser device
JPS62141793A (en) Dye laser
JPH0563260A (en) Laser device
JP2543739Y2 (en) Linearly polarized gas laser tube
JPH02109383A (en) Gas laser oscillator
JPH0799358A (en) Solid state-laser system
JPH05110174A (en) Diode excitation solid laser
JP2937441B2 (en) He-Ne gas laser device
JPH0342887A (en) Laser resonator
JPS5855656Y2 (en) gas laser tube
JPH05167147A (en) Solid-state laser equipment
JPH038591B2 (en)