JPH0124619Y2 - - Google Patents
Info
- Publication number
- JPH0124619Y2 JPH0124619Y2 JP9385979U JP9385979U JPH0124619Y2 JP H0124619 Y2 JPH0124619 Y2 JP H0124619Y2 JP 9385979 U JP9385979 U JP 9385979U JP 9385979 U JP9385979 U JP 9385979U JP H0124619 Y2 JPH0124619 Y2 JP H0124619Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- scanning
- width
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 31
- 238000001514 detection method Methods 0.000 claims description 8
- 238000004611 spectroscopical analysis Methods 0.000 claims 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 8
- 229910052717 sulfur Inorganic materials 0.000 description 8
- 239000011593 sulfur Substances 0.000 description 8
- 238000007689 inspection Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000005211 surface analysis Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9385979U JPH0124619Y2 (OSRAM) | 1979-07-06 | 1979-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9385979U JPH0124619Y2 (OSRAM) | 1979-07-06 | 1979-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5627664U JPS5627664U (OSRAM) | 1981-03-14 |
| JPH0124619Y2 true JPH0124619Y2 (OSRAM) | 1989-07-25 |
Family
ID=29326758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9385979U Expired JPH0124619Y2 (OSRAM) | 1979-07-06 | 1979-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0124619Y2 (OSRAM) |
-
1979
- 1979-07-06 JP JP9385979U patent/JPH0124619Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5627664U (OSRAM) | 1981-03-14 |
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