JPH01236666A - Polarization of piezoelectric ceramic - Google Patents
Polarization of piezoelectric ceramicInfo
- Publication number
- JPH01236666A JPH01236666A JP63061959A JP6195988A JPH01236666A JP H01236666 A JPH01236666 A JP H01236666A JP 63061959 A JP63061959 A JP 63061959A JP 6195988 A JP6195988 A JP 6195988A JP H01236666 A JPH01236666 A JP H01236666A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- ceramic layer
- piezoelectric
- polarization
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 39
- 230000010287 polarization Effects 0.000 title abstract description 12
- 229920001971 elastomer Polymers 0.000 claims abstract description 22
- 239000000806 elastomer Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 7
- 230000005684 electric field Effects 0.000 claims 1
- 229910001369 Brass Inorganic materials 0.000 abstract description 8
- 239000010951 brass Substances 0.000 abstract description 8
- 229920002545 silicone oil Polymers 0.000 abstract description 2
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、電気回路において、フィルタや発振子として
機能する圧電セラミックスの分極方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of polarizing piezoelectric ceramics that function as a filter or an oscillator in an electric circuit.
(従来の技術)
近年、情報量の増大に伴って、情報処理の高速化が図ら
れ、フィルタや発振子の需要が増すとともに、高周波化
に推移している。圧電セラミックスを応用した10〜1
00100O帯の圧電共振子では、その厚さ縦振動を利
用するのが有利である。この厚さ縦振動を利用した圧電
共振子の製造方法は、従来第2図に示すようなものであ
った。すなわち、圧電共振子の目的の厚さより約100
−程度厚い板状の圧電セラミックス11に分権用電極1
2を付与し、両分極用電極12間に電位差を与えて圧電
セラミックス11を分極する。さらに圧電セラミックス
11の両面を研磨し、分極用電極12を除去すると同時
に目的の厚さにしたのち、圧電共振子用の電極を蒸着等
によって付与するものであった。(Prior Art) In recent years, with the increase in the amount of information, information processing speed has been increased, and the demand for filters and oscillators has increased, as well as the trend toward higher frequencies. 10-1 using piezoelectric ceramics
For a piezoelectric resonator in the 00100O band, it is advantageous to utilize its thickness longitudinal vibration. A method of manufacturing a piezoelectric resonator using this thickness longitudinal vibration has conventionally been shown in FIG. 2. That is, approximately 100 mm thicker than the intended thickness of the piezoelectric resonator.
- Decentralization electrode 1 on a fairly thick plate-shaped piezoelectric ceramic 11
2 is applied, and a potential difference is applied between both polarization electrodes 12 to polarize the piezoelectric ceramic 11. Further, both sides of the piezoelectric ceramic 11 were polished to remove the polarization electrode 12 and at the same time, the desired thickness was obtained, and then electrodes for the piezoelectric resonator were applied by vapor deposition or the like.
(発明が解決しようとする課題)
上記従来の方法では1分極用の電極を付与する必要があ
り、この分極用電極は製品上では不必要なものであり、
原価を高くしている一つの要因であった。(Problems to be Solved by the Invention) In the above conventional method, it is necessary to provide one polarization electrode, and this polarization electrode is unnecessary on the product.
This was one of the factors that made the cost high.
本発明の目的は、従来の欠点を解消し、原価の低い厚さ
縦振動を、利用した圧電共振子を提供することである。An object of the present invention is to eliminate the conventional drawbacks and provide a piezoelectric resonator that utilizes thickness longitudinal vibration at low cost.
(課題を解決するための手段)
本発明の圧電セラミックスの分極方法は、圧電セラミッ
クスをその厚さ方向に導電性エラストマ−ではさみ、そ
の導電性ニジストマー間に電位差を与えることによって
圧電セラミックスを分極させるものである。(Means for Solving the Problems) The piezoelectric ceramic polarization method of the present invention involves sandwiching the piezoelectric ceramic between conductive elastomers in the thickness direction and polarizing the piezoelectric ceramic by applying a potential difference between the conductive elastomers. It is something.
(作 用)
本発明の方法により、圧電セラミックスに分極用電極を
付与する必要がなくなり、大幅に原価を引き下げること
ができる。(Function) According to the method of the present invention, there is no need to provide polarization electrodes to piezoelectric ceramics, and the cost can be significantly reduced.
(実施例) 本発明の一実施例を第1図に基づいて説明する。(Example) An embodiment of the present invention will be described based on FIG.
第1図は本発明の圧電セラミックスの分極方法を示す断
面図である。本実施例において、P bT 103−
P b Z r O3P b(Mgl/3 Nb2/3
) 0 :+の3成分系の圧電セラミックスを用いて実
験を行った。第1図において、長さ3 cs 、幅2a
1.厚さ約400μmの圧電セラミックス1をその厚さ
方向に厚さ5mのカーボンコンポジット系の導電性エラ
ストマー2ではさみ、さらにそれを厚さ2mmの黄銅板
3ではさんだ。これを厚さ0.5anの黄銅の板ばね4
の間にはさみ全体を密着させた。この状態で100℃に
あたためたシリコンオイル中に浸漬し、黄銅の板はね4
を通じて導電性エラストマー2間に2kVの電位差を与
え、圧電セラミックス1を分極した。そののち、圧電セ
ラミックス1を厚さ250戸になるように粒度# 20
00の研磨剤を用いて両面研磨し、5+Mn角に切断し
た。得られた5X5X0.25mmの圧電セラミックス
の厚さと垂直な面の両面の中央に直径2mの銀電極を蒸
着し、厚さ縦振動を利用した圧電共振子を得た。この圧
電共振子から求めた電気的特性と従来の方法で得られた
圧電共振子から求めた電気的特性を比較すると表のよう
になる。FIG. 1 is a sectional view showing the method of polarizing piezoelectric ceramics of the present invention. In this example, P bT 103-
P b Z r O3P b(Mgl/3 Nb2/3
) An experiment was conducted using a three-component piezoelectric ceramic of 0:+. In Figure 1, length 3 cs, width 2a
1. A piezoelectric ceramic 1 with a thickness of about 400 μm is sandwiched in the thickness direction between carbon composite conductive elastomer 2 with a thickness of 5 m, which is further sandwiched between brass plates 3 with a thickness of 2 mm. This is a brass leaf spring 4 with a thickness of 0.5 an.
The entire scissor was placed in close contact between the two. In this state, soak the brass plate in silicone oil heated to 100℃ and remove the brass plate.
A potential difference of 2 kV was applied between the conductive elastomers 2 through the conductive elastomers 2 to polarize the piezoelectric ceramics 1. After that, the piezoelectric ceramic 1 was made with particle size #20 so that the thickness was 250 mm.
Both sides were polished using No. 00 abrasive and cut into 5+Mn squares. Silver electrodes with a diameter of 2 m were deposited at the center of both surfaces perpendicular to the thickness of the obtained piezoelectric ceramic of 5 x 5 x 0.25 mm to obtain a piezoelectric resonator utilizing longitudinal vibration of the thickness. The table below shows a comparison of the electrical characteristics obtained from this piezoelectric resonator and the electrical characteristics obtained from a piezoelectric resonator obtained by a conventional method.
表
但し、Kし : 電気機械結合係数
Nt : 周波数常数
εバ/ε。: 比誘電率
なお、表において、εバ/ε。の測定は5×5X0.2
5mの圧電セラミックス板の厚さ方向と垂直な面の両面
全面に銀電極を蒸着した圧電共振子より求めた。However, K: Electromechanical coupling coefficient Nt: Frequency constant ε/ε. : Relative dielectric constant In the table, ε/ε. The measurement is 5x5x0.2
It was determined using a piezoelectric resonator in which silver electrodes were deposited on both surfaces of a 5 m piezoelectric ceramic plate perpendicular to the thickness direction.
このように、本実施例では、圧電セラミックスを導電性
エラストマーにはさんで導電性エラストマー間に電圧差
を与えて分極することにより、導電性エラストマーが電
極として働き、分極用の電極を付与しなくとも、分極用
電極を付与した場合と変りなく分極できるため、原価を
大きく低減できる。As described above, in this example, piezoelectric ceramics are sandwiched between conductive elastomers and polarized by applying a voltage difference between the conductive elastomers, so that the conductive elastomers act as electrodes and no electrodes for polarization are provided. In both cases, polarization can be achieved in the same way as when polarization electrodes are provided, so the cost can be significantly reduced.
この導電性エラストマーが電極として働くのは、導電性
エラストマーが弾性に富むため、圧電セラミックスの表
面にそって密着できるためである。This conductive elastomer works as an electrode because it is highly elastic and can adhere closely along the surface of the piezoelectric ceramic.
弾性率の大きい金属等では十分に圧電セラミックスと密
着しないため不適当である。また、導電性エラストマー
を用いた場合でも厚さが薄い場合には、圧電セラミック
スの表面の凹凸が大きいときなどには密着性が悪くなる
ことがあるため導電性エラストマーは厚い方がよいが、
2mm以上の厚さがあれば十分に効果が期待できる。ま
た、圧電セラミックスのそりや表面荒さにも影響される
ため、圧電セラミックスのそりや表面荒さはできるだけ
小さい方が望ましい。Metals with a high elastic modulus are not suitable because they do not adhere sufficiently to the piezoelectric ceramics. Furthermore, even when a conductive elastomer is used, if it is thin, adhesion may deteriorate when the surface of the piezoelectric ceramic has large irregularities, so the thicker the conductive elastomer, the better.
A sufficient effect can be expected if the thickness is 2 mm or more. In addition, it is also affected by the warpage and surface roughness of the piezoelectric ceramics, so it is desirable that the warpage and surface roughness of the piezoelectric ceramics be as small as possible.
なお、本実施例においてはカーボンコンポジット系の導
電性エラストマーを用いたが、他の導電性エラストマー
を用いてもよい。また本実施例において圧電セラミック
スとしてPbTi0.−PbZrO,−Pb(Mgl/
3Nb2/3)O,系を用いたが、他の圧電セラミック
スに対しても有効である。Although a carbon composite conductive elastomer was used in this example, other conductive elastomers may be used. In this example, PbTi0. -PbZrO, -Pb(Mgl/
Although the 3Nb2/3)O system was used, it is also effective for other piezoelectric ceramics.
(発明の効果)
本発明によれば、圧電セラミックスをその厚さ方向に導
電性エラストマーではさみ、その導電性エラストマー間
に電位差を与えることによって導電性エラストマーが電
極として働き、圧電セラミックスが分極されるため、圧
電セラミックスに分極用の電極を付与する必要がなく、
JJx価を大きく低減させることができ、その実用上の
効果は大である。(Effects of the Invention) According to the present invention, a piezoelectric ceramic is sandwiched between conductive elastomers in the thickness direction, and by applying a potential difference between the conductive elastomers, the conductive elastomer acts as an electrode, and the piezoelectric ceramic is polarized. Therefore, there is no need to add polarization electrodes to piezoelectric ceramics,
The JJx value can be greatly reduced, and its practical effect is great.
第1図は本発明の一実施例における圧電セラミックスの
分極方法を示す断面図、第2図は従来の方法による分極
方法を示す断面図である。
1 ・・・圧電セラミックス、2・・・導電性エラスト
マー、3・・・黄銅板、4 ・・・板ばね。
特許出願人 松下電器産業株式会社
第1図
第2図FIG. 1 is a sectional view showing a method for polarizing piezoelectric ceramics according to an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional method for polarizing piezoelectric ceramics. 1... Piezoelectric ceramics, 2... Conductive elastomer, 3... Brass plate, 4... Leaf spring. Patent applicant: Matsushita Electric Industrial Co., Ltd. Figure 1 Figure 2
Claims (1)
ーではさみ、前記導電性エラストマー間に電位差を与え
ることによって圧電セラミックスに電界をかけることを
特徴とする圧電セラミックスの分極方法。A method for polarizing piezoelectric ceramics, which comprises sandwiching piezoelectric ceramics between conductive elastomers in the thickness direction and applying an electric field to the piezoelectric ceramics by applying a potential difference between the conductive elastomers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63061959A JPH01236666A (en) | 1988-03-17 | 1988-03-17 | Polarization of piezoelectric ceramic |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63061959A JPH01236666A (en) | 1988-03-17 | 1988-03-17 | Polarization of piezoelectric ceramic |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01236666A true JPH01236666A (en) | 1989-09-21 |
Family
ID=13186234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63061959A Pending JPH01236666A (en) | 1988-03-17 | 1988-03-17 | Polarization of piezoelectric ceramic |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01236666A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995025637A1 (en) * | 1994-03-21 | 1995-09-28 | Spectra, Inc. | Simplified ink jet head |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57140013A (en) * | 1981-02-20 | 1982-08-30 | Toko Inc | Manufacture for piezoelectric resonator |
-
1988
- 1988-03-17 JP JP63061959A patent/JPH01236666A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57140013A (en) * | 1981-02-20 | 1982-08-30 | Toko Inc | Manufacture for piezoelectric resonator |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995025637A1 (en) * | 1994-03-21 | 1995-09-28 | Spectra, Inc. | Simplified ink jet head |
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