JPH0123586Y2 - - Google Patents

Info

Publication number
JPH0123586Y2
JPH0123586Y2 JP1984088297U JP8829784U JPH0123586Y2 JP H0123586 Y2 JPH0123586 Y2 JP H0123586Y2 JP 1984088297 U JP1984088297 U JP 1984088297U JP 8829784 U JP8829784 U JP 8829784U JP H0123586 Y2 JPH0123586 Y2 JP H0123586Y2
Authority
JP
Japan
Prior art keywords
tank
chamber
organic solvent
gas
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984088297U
Other languages
English (en)
Japanese (ja)
Other versions
JPS614790U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8829784U priority Critical patent/JPS614790U/ja
Publication of JPS614790U publication Critical patent/JPS614790U/ja
Application granted granted Critical
Publication of JPH0123586Y2 publication Critical patent/JPH0123586Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8829784U 1984-06-14 1984-06-14 洗浄装置 Granted JPS614790U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Publications (2)

Publication Number Publication Date
JPS614790U JPS614790U (ja) 1986-01-13
JPH0123586Y2 true JPH0123586Y2 (enExample) 1989-07-19

Family

ID=30641296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8829784U Granted JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Country Status (1)

Country Link
JP (1) JPS614790U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4579268B2 (ja) * 2001-11-12 2010-11-10 東京エレクトロン株式会社 基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS564318A (en) * 1979-06-20 1981-01-17 Hitachi Ltd Automatic correcting apparatus for roundness of can drum

Also Published As

Publication number Publication date
JPS614790U (ja) 1986-01-13

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