JPH01231254A - Mass spectrometer for tritium measurement - Google Patents

Mass spectrometer for tritium measurement

Info

Publication number
JPH01231254A
JPH01231254A JP63053815A JP5381588A JPH01231254A JP H01231254 A JPH01231254 A JP H01231254A JP 63053815 A JP63053815 A JP 63053815A JP 5381588 A JP5381588 A JP 5381588A JP H01231254 A JPH01231254 A JP H01231254A
Authority
JP
Japan
Prior art keywords
tritium
mass spectrometer
secondary electron
vacuum chamber
light irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63053815A
Other languages
Japanese (ja)
Inventor
Kuniaki Watanabe
渡辺 国昭
Masao Matsuyama
松山 政夫
Kenji Ichimura
市村 憲司
Kan Ashida
芦田 完
Hitoshi Miyake
三宅 均
Shizuo Nakamura
静雄 中村
Toshio Hayashi
俊雄 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyama University
Ulvac Inc
Original Assignee
Toyama University
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyama University, Ulvac Inc filed Critical Toyama University
Priority to JP63053815A priority Critical patent/JPH01231254A/en
Publication of JPH01231254A publication Critical patent/JPH01231254A/en
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To reduce an influence of adsorption contamination of tritium at the time of analyzing tritium as far as possible by coating the whole surface of the part able to contact with tritium to be measured inside a vacuum chamber and performing light irradiation on the inside of the vacuum chamber. CONSTITUTION:A quadripole mass spectrometer 2, a secondary electron multiplication tube 3, halogen lamps 4, 5 and a mercury lamp 6 are arranged. Further, the vacuum chamber 1 is provided with four ports 7 to 10 and the port 7 is connected to a turbo-molecular pump 12 for rough drawing and a rotary pump 13, a port 8 is connected to an ion pump 15, a port 9 is connected to a tritium supply source to be measured and a port 10 is connected to a hydrogen and heavy hydrogen supply source. Further, except the secondary electron multiplication tube 3 and an electric insulating member, all inner exposed parts, with which tritium to be measured such as an inner wall of the vacuum chamber 1 and the surface of a mass spectrometer 2 are given gold coating. That is that gold coating prevents adsorption of tritium and light irradiation can remove adsorbed tritium. Thereby, an influence of adsorption of tritium can be reduced so as to be able to perform tritium measurement.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、トリチウム計測用質量分析装置に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a mass spectrometer for measuring tritium.

[従来の技術] 質量の異なる気体状の物質を分析する場合、−般に知ら
れているように質量分析計が極めて有用である0通常、
この種の質量分析計にはイオンの検出感度を向上させる
ために検出器に微少電流を103倍以上に増幅する二次
電子増倍管が使用されれている。
[Prior Art] When analyzing gaseous substances with different masses, a mass spectrometer is extremely useful, as is generally known.
In order to improve the sensitivity of ion detection, this type of mass spectrometer uses a secondary electron multiplier in the detector that amplifies a minute current by 103 times or more.

[発明が解決しようとする課jJ] ところで、このような質量分析計を用いて水素の放射性
同位体であるトリチウムを分析する場合、分析時間や分
析回数の増加と共にノイズレベルが上昇し、検出感度お
よび分解能が低下する。すなわち、質量分析計の内壁や
二次電子増倍管の表面にトリチウムが吸着し、質量分析
計の内面、特に二次電子増倍管に付着したトリチウムが
β崩壊して電子を放出し、この電子が増幅されてノイズ
として出力され、実験や分析の上で邪魔となっている。
[Issue to be solved by the invention jJ] By the way, when analyzing tritium, which is a radioactive isotope of hydrogen, using such a mass spectrometer, the noise level increases as the analysis time and number of analyzes increase, and the detection sensitivity decreases. and reduced resolution. In other words, tritium is adsorbed on the inner wall of the mass spectrometer and the surface of the secondary electron multiplier tube, and the tritium adhering to the inner surface of the mass spectrometer, especially the secondary electron multiplier tube, undergoes β decay and releases electrons. Electrons are amplified and output as noise, which interferes with experiments and analyses.

従来の質量分析装置を用いたトリチウムの実際の分析動
作においては、添付図面の第5図に示すようにトリチウ
ムガスの接触量の増加と共にノイズレベル及びノイズ幅
は大きく増大し、例えばトリチウムガスの接触量が0.
1Torrの場合にはノイズレベルが10’Aまで増大
し、初期のノイズレベルに比べて約100倍となってい
る。このノイズレベルの電流値は水素ガスに換算すると
約1O−7Torrの分圧に相当する。このようなノイ
ズレベル及びノイズ幅の増加は真空排気だけでは初期の
状態にまで戻すことは困難である。
In the actual tritium analysis operation using a conventional mass spectrometer, as shown in Figure 5 of the attached drawings, the noise level and noise width greatly increase as the amount of tritium gas in contact increases. The amount is 0.
In the case of 1 Torr, the noise level increases to 10'A, which is about 100 times the initial noise level. The current value at this noise level corresponds to a partial pressure of about 10-7 Torr when converted into hydrogen gas. It is difficult to return such an increase in noise level and noise width to the initial state by evacuation alone.

そこで、本発明は、質量分析五1を用いて水素の放射性
同位体であるトリチウムを分析する際のトリチウムの吸
着汚染の影響をできるだけ軽減させようとするものであ
る。
Therefore, the present invention aims to reduce as much as possible the influence of tritium adsorption contamination when analyzing tritium, which is a radioactive isotope of hydrogen, using mass spectrometry.

[課題を解決するための手段] 従って、本発明の目的はトリチウムの吸着汚染の影響を
実質的に除去してノイズレベルを抑え検出感度および分
解能の良好なトリチウム計測用質量分析装置を提供する
ことにある。
[Means for Solving the Problems] Therefore, an object of the present invention is to provide a mass spectrometer for measuring tritium that substantially eliminates the influence of tritium adsorption contamination, suppresses noise level, and has good detection sensitivity and resolution. It is in.

この目的を達成するために、本発明によるトリチウム計
測用質量分析装置は、質量分析計を収容し内部を排気系
に連結した真空室内において質量分析計の二次電子増倍
管および電気絶縁部材を除いた計測すべきトリチウムと
接触し得る部分の表面全体を金で被覆し、また真空室内
に光照射を行なって吸着したトリチウムを除去する光照
射手段を設けたことを特徴としている。
In order to achieve this objective, the mass spectrometer for tritium measurement according to the present invention has a secondary electron multiplier tube and an electrical insulating member of the mass spectrometer in a vacuum chamber that houses the mass spectrometer and whose interior is connected to an exhaust system. The device is characterized in that the entire surface of the portion that can come into contact with the removed tritium to be measured is coated with gold, and a light irradiation means is provided for irradiating light into the vacuum chamber to remove adsorbed tritium.

光照射手段は、質量分析計の二次電子用1S管に直接光
を入射させる水銀ランプを備え得る。
The light irradiation means may include a mercury lamp that makes light directly enter the secondary electron 1S tube of the mass spectrometer.

好ましくは、質量分粧計は四重怪質量分析計から成り、
この質量分析計の四重極部に対して二次電子増倍管は9
0°の角度を成して配置され得る。
Preferably, the mass spectrometer comprises a quadruple spectrometer,
There are 9 secondary electron multipliers for the quadrupole section of this mass spectrometer.
They may be arranged at an angle of 0°.

また、質量分析計の二次電子増倍管は好ましくは網目状
のシールド部材で覆われ得る。
Further, the secondary electron multiplier tube of the mass spectrometer may preferably be covered with a mesh-like shield member.

[作   用] このように構成した本発明のトリチウム計測用質量分析
装置においては、質量分析計を収容し内部を排気系に連
結した真空室の内面全体と、質量分析計の二次電子増信
管および電気絶縁部材を除いた部分の表面とに施された
金被覆は、トリチウムの吸着を防止する働きをし、また
、光照射手段による光照射で吸着したトリチウムは除去
され得、しかも質量分析計の二次電子増倍管に水銀ラン
プから直接光を入射させることにより、吸着したトリチ
ウムの光照射による除去効果が高められる。
[Function] In the mass spectrometer for tritium measurement of the present invention configured as described above, the entire inner surface of the vacuum chamber that houses the mass spectrometer and whose interior is connected to the exhaust system, and the secondary electron intensifier tube of the mass spectrometer The gold coating applied to the surface of the parts other than the electrically insulating member functions to prevent the adsorption of tritium, and the adsorbed tritium can be removed by light irradiation by the light irradiation means, and the adsorbed tritium can be removed by light irradiation by the light irradiation means. By directing light from a mercury lamp into the secondary electron multiplier tube, the removal effect of adsorbed tritium by light irradiation can be enhanced.

二次電子増倍管の場合、入射口付近に付着したトリチウ
ムによる影響は後段側で増幅されて出力側に大きく出る
ため、入射口付近に付着したトリチウムを光で除去する
ことが大切になる。
In the case of a secondary electron multiplier tube, the effect of tritium attached near the input port is amplified in the latter stage and appears significantly on the output side, so it is important to remove tritium attached near the input port using light.

さらに、二次電子増倍管を網目状のシールド部材で覆う
ことにより光の入射を妨げずにイオンや電子によるノイ
ズの軽減が得られ得る。
Furthermore, by covering the secondary electron multiplier with a mesh-like shield member, noise caused by ions and electrons can be reduced without blocking the incidence of light.

[実 施 例] 以下、添付図面を参照して本発明の実施例について説明
する。
[Example] Hereinafter, an example of the present invention will be described with reference to the accompanying drawings.

第1図には本発明によるトリチウム計測用質量分析装置
の構成を概略的に示し、1は真空室で、その内には四重
極質量分析計2、二次電子増倍管3、最大出力650 
W程度のハロゲンランプ4.5及び出力10W程度の水
銀ランプ6が図示したように配置されている。すなわち
二次電子増倍管3は四重極質量分析計2の軸線方向に対
して90°の角度を成して位置決めされ、水銀ランプ6
は二次電子増倍管3に対向して設けられ、イオン検出部
の光照射効果を上げるようにしている。
FIG. 1 schematically shows the configuration of a mass spectrometer for tritium measurement according to the present invention, in which 1 is a vacuum chamber, which includes a quadrupole mass spectrometer 2, a secondary electron multiplier 3, and a maximum output 650
A halogen lamp 4.5 with an output of about 10 W and a mercury lamp 6 with an output of about 10 W are arranged as shown. That is, the secondary electron multiplier tube 3 is positioned at an angle of 90° with respect to the axial direction of the quadrupole mass spectrometer 2, and the mercury lamp 6
is provided opposite to the secondary electron multiplier 3 to increase the effect of light irradiation on the ion detection section.

また真空室1には四つのボート7〜10が設けられてお
り、ボート7は仕切り弁11を介して粗引き用のターボ
分子ポンプ12および回転ポンプ13に連結され、また
ボート8は仕切り弁14を介してイオンポンプ15に連
結されている。
Further, the vacuum chamber 1 is provided with four boats 7 to 10, and the boat 7 is connected to a roughing turbo molecular pump 12 and a rotary pump 13 via a gate valve 11, and the boat 8 is connected to a gate valve 14. It is connected to the ion pump 15 via.

ボート9は仕切り弁16を介して計測すべきトリチウム
供給a(図示してない)に連結され、またボート10は
仕切り弁17を介して水素及び重水素供給源(図示して
ない)に連結されている。なお、第1図において18は
真空計である。
The boat 9 is connected via a gate valve 16 to a tritium supply a (not shown) to be measured, and the boat 10 is connected via a gate valve 17 to a hydrogen and deuterium supply source (not shown). ing. In addition, in FIG. 1, 18 is a vacuum gauge.

二次電子増倍管3及び電気絶縁部材を除いて真空室1の
内壁や四重蜘質量分析計2の表面等計測すべきトリチウ
ムの接触し得る内部露出部分全てに厚さ2ノ1程疫の金
被覆か例えば金メツキ法など適当な手トスを用いて施さ
れている。
Except for the secondary electron multiplier tube 3 and electrical insulating members, all internal exposed parts that can come into contact with the tritium to be measured, such as the inner wall of the vacuum chamber 1 and the surface of the quadruple spider mass spectrometer 2, should be covered with a layer of about 2 to 1 thick. The gold coating is applied using a suitable hand toss, such as the gold plating method.

動作時に、粗引き用のターボ分子ポンプ12および回転
ボンダ13にはトリチウムカスが流れれないようにし、
外部へ排出しないイオンポンプ15でトリチウムガスを
排気するようにされている。
During operation, tritium scum is prevented from flowing into the roughing turbo molecular pump 12 and rotary bonder 13,
The tritium gas is exhausted by an ion pump 15 that does not discharge it to the outside.

また、二次電子増倍管3は、光やイオン、電子によるノ
イズを減少させる通常用いられている筒状の金属シール
ド部材に代えてハロゲンランプ4.5及び水銀ランプ6
からの光の照射をできるたけ妨げないように網目状のシ
ールド部材(図示してない)で覆われている。この場合
、使用される網IN状のシールド部材の表面には金被覆
か施され得る。
In addition, the secondary electron multiplier tube 3 uses a halogen lamp 4.5 and a mercury lamp 6 instead of the normally used cylindrical metal shield member that reduces noise caused by light, ions, and electrons.
It is covered with a mesh-like shield member (not shown) so as not to obstruct the irradiation of light as much as possible. In this case, the surface of the mesh-shaped shield member used may be coated with gold.

第2図はノイズレベル及びノイズ幅とトリチウムガスの
接触時間との関係を示し、実線グラフは分圧が10”6
Torrの時であり、点線グラフは分圧が1O−4To
rrの時である。分圧を7O−67orrにする場合に
はイオンポンプ15で排気しながらポート9がら真空室
l内にトリチウムガスを導入する方法がとられ、また分
圧を10’Torrにする場合には、全ての仕切り弁を
閉じ、イオンポンプ15も止めた状態で10’Torr
までトリチウムガスを導入し、ある時間保持し、その後
吸着しているトリチウムの影響を測定している。前者の
方法では、接触時間中にトリチウム水の生成が認められ
た。第2図から認められるように、トリチウムガスの接
触時間の増加と共にノイズレベル及びノイズ幅の両方と
も増大するが、分圧の低い前者の方法の方がノイズの増
加率は大きくなっている。このようなノイズの増加率の
差異はトリチウムガスの接触時におけるトリチウム水の
生成量の差に依存しているものと考えられる。
Figure 2 shows the relationship between the noise level and noise width and the contact time of tritium gas.The solid line graph shows the relationship between the noise level and noise width and the contact time of tritium gas.
Torr, and the dotted line graph indicates that the partial pressure is 1O-4To
It's time for rr. When the partial pressure is set to 70-67 orr, tritium gas is introduced into the vacuum chamber l through the port 9 while being evacuated by the ion pump 15, and when the partial pressure is set to 10'Torr, all 10'Torr with the gate valve closed and the ion pump 15 also stopped.
Tritium gas is introduced up to a certain point, held for a certain period of time, and then the effect of the adsorbed tritium is measured. In the former method, formation of tritiated water was observed during the contact time. As can be seen from FIG. 2, both the noise level and noise width increase as the contact time of tritium gas increases, but the rate of increase in noise is greater in the former method with a lower partial pressure. It is thought that such a difference in the rate of increase in noise depends on the difference in the amount of tritium water produced during contact with tritium gas.

第3図には本発明の装置を用いて一定量のトリチウムガ
スを接触させた後、光照射を行い、その照射直後に脱離
した成分を質量分析計で測定した結果を示し、光照射に
伴い水素(H/e= 2 ) 、水()4/e=18)
 、−酸化炭素(H/e= 28)炭酸ガス(H10=
44)等の種々の気体の脱離が起こる他に、トリチウム
ガス(H/e= 4及び6)及びトリチウム水(H/e
= 20)の脱Afも促進されることが認められる。注
目すべきことは、最初にトリチウムガスのみを接触させ
たにもがかわらず、トリチウム水も脱離してくることで
ある。このことがら、ノイズの増加原因としてはトリチ
ウムガス及びトリチウム水の両方の吸着が関係しており
、光照射によるトリチウム除去効果がトリチウム水に関
しても期待できる。また光照射直後における質量分析装
置の内壁温度の上昇はほとんど見られず、トリチウムガ
ス及びトリチウム水の脱離作用は熱的作用によるもので
はなく光照射により吸着しているトリチウムや曲のガス
がエネルギをもらい壁面から脱離するものと認められる
Figure 3 shows the results of light irradiation after contacting a certain amount of tritium gas using the device of the present invention, and measurement of the components desorbed immediately after the irradiation using a mass spectrometer. associated hydrogen (H/e=2), water ()4/e=18)
, -carbon oxide (H/e= 28) carbon dioxide gas (H10=
In addition to desorption of various gases such as 44), tritium gas (H/e = 4 and 6) and tritium water (H/e
= 20) was also found to be promoted. What should be noted is that even though only tritium gas was brought into contact at the beginning, tritium water also desorbed. For this reason, the cause of the increase in noise is related to the adsorption of both tritium gas and tritium water, and the effect of removing tritium by light irradiation can also be expected for tritium water. In addition, there is almost no increase in the temperature of the inner wall of the mass spectrometer immediately after light irradiation, and the desorption effect of tritium gas and tritium water is not due to thermal action, but due to the energy of tritium and curved gas adsorbed by light irradiation. It is recognized that the product is detached from the wall due to the

第4図にはノイズレベル及びノイズ幅と光照射との関係
を示し、光照射を開始すると、ノイズレベルは一時的に
増大するが、その後ノイズレベル及びノイズ幅は急速に
減少することが認められる。
Figure 4 shows the relationship between the noise level and noise width and light irradiation, and it is observed that when light irradiation starts, the noise level increases temporarily, but then the noise level and noise width rapidly decrease. .

この場合、光照射を停止すると、ノイズレベル及びノイ
ズ幅は序所に増加してくるが、これは装置内に残留して
いたトリチウムが再吸着したことによるものであり、光
の未照射部分をできるだけ少なくすること及び真空排気
部の排気性能を高めることによって改善できる。また光
源の出力を高めることによって光照射による除去効果を
さらに高めることができる。
In this case, when the light irradiation is stopped, the noise level and noise width will initially increase, but this is due to the tritium remaining in the device being re-adsorbed, and the unirradiated area is This can be improved by reducing the amount as much as possible and improving the exhaust performance of the vacuum exhaust section. Moreover, the removal effect by light irradiation can be further enhanced by increasing the output of the light source.

[発明の効果] 以上説明してきたように、本発明によれば、トリチウム
に接触し得る実質的な部分に金被覆を施したことにより
、トリチウムの吸着を軽減でき、また光照射によって計
測時にその場で同時に吸着したトリチウムを除去でき、
その結果、トリチウムの吸着の影響を少なくしてトリチ
ウムの計測を行うことができる。
[Effects of the Invention] As explained above, according to the present invention, adsorption of tritium can be reduced by coating a substantial portion that can come into contact with tritium with gold, and the adsorption of tritium can be reduced during measurement by light irradiation. At the same time, adsorbed tritium can be removed in situ.
As a result, tritium can be measured while reducing the influence of tritium adsorption.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明によるトリチウム計測用質量分析装置の
一実施例を示す1a路線図、第2図はトリチウムの接触
時間とノイズレベル及びノイズ幅との関係を示すグラフ
、第3図は本発明による光照射による脱^W成分の質量
スペクトルを示す図、第4図は本発明による光照射とノ
イズレベル及びノイズ幅との関係を示すグラフ、第5図
はノイズに対するトリチウムガスの接触の影響を示す図
である。 図   中 1:真空室 2:質量分析計 3:二次電子tt!J倍管 4〜6:光照射手段 第5図 Mte    Ll    10   20   30
9 邸(<) 師 だ(掛′!:A出(2)) ゛n\ヤ゛ドΔ゛/→(<) X \IXツ (<)
Fig. 1 is a route map 1a showing an embodiment of the mass spectrometer for measuring tritium according to the present invention, Fig. 2 is a graph showing the relationship between tritium contact time, noise level and noise width, and Fig. 3 is a graph showing the relationship between the tritium contact time and the noise level and noise width. Fig. 4 is a graph showing the relationship between light irradiation and noise level and noise width according to the present invention, and Fig. 5 shows the influence of contact with tritium gas on noise. FIG. Figure Middle 1: Vacuum chamber 2: Mass spectrometer 3: Secondary electrons tt! J multiplier tubes 4 to 6: Light irradiation means Fig. 5 Mte Ll 10 20 30
9 House (<) Master (Kake'!: A exit (2)) ゛n\ya゛doΔ゛/→ (<)

Claims (1)

【特許請求の範囲】 1、質量分析計を収容し内部を排気系に連結した真空室
内において質量分析計の二次電子増倍管および電気絶縁
部材を除いた計測すべきトリチウムと接触し得る部分の
表面全体を金で被覆し、また真空室内に光照射を行なっ
て吸着したトリチウムを除去する光照射手段を設けたこ
とを特徴とするトリチウム計測用質量分析装置。 2、光照射手段が質量分析計の二次電子増倍管に直接光
を入射させる水銀ランプを備えている請求項1に記載の
トリチウム計測用質量分析装置。 3、質量分析計が四重極質量分析計であり、この質量分
析計の四重極部に対して二次電子増倍管を90°の角度
を成して配置した請求項1に記載のトリチウム計測用質
量分析装置。 4、質量分析計の二次電子増倍管が網目状のシールド部
材で覆われている請求項1に記載のトリチウム計測用質
量分析装置。
[Scope of Claims] 1. Parts that can come into contact with tritium to be measured, excluding the secondary electron multiplier tube and electrical insulating members of the mass spectrometer, in a vacuum chamber that houses the mass spectrometer and is connected to an exhaust system. 1. A mass spectrometer for measuring tritium, the entire surface of which is coated with gold, and further provided with a light irradiation means for irradiating light into a vacuum chamber to remove adsorbed tritium. 2. The mass spectrometer for measuring tritium according to claim 1, wherein the light irradiation means includes a mercury lamp that directly irradiates light into a secondary electron multiplier tube of the mass spectrometer. 3. The mass spectrometer according to claim 1, wherein the mass spectrometer is a quadrupole mass spectrometer, and the secondary electron multiplier tube is arranged at an angle of 90° with respect to the quadrupole part of the mass spectrometer. Mass spectrometer for tritium measurement. 4. The mass spectrometer for measuring tritium according to claim 1, wherein the secondary electron multiplier tube of the mass spectrometer is covered with a mesh-like shield member.
JP63053815A 1988-03-09 1988-03-09 Mass spectrometer for tritium measurement Pending JPH01231254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63053815A JPH01231254A (en) 1988-03-09 1988-03-09 Mass spectrometer for tritium measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63053815A JPH01231254A (en) 1988-03-09 1988-03-09 Mass spectrometer for tritium measurement

Publications (1)

Publication Number Publication Date
JPH01231254A true JPH01231254A (en) 1989-09-14

Family

ID=12953291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63053815A Pending JPH01231254A (en) 1988-03-09 1988-03-09 Mass spectrometer for tritium measurement

Country Status (1)

Country Link
JP (1) JPH01231254A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109427537A (en) * 2017-09-04 2019-03-05 南京麒麟科学仪器集团有限公司 A kind of mass spectrograph

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107550A (en) * 1980-12-24 1982-07-05 Jeol Ltd Ion detector for mass spectrograph

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107550A (en) * 1980-12-24 1982-07-05 Jeol Ltd Ion detector for mass spectrograph

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109427537A (en) * 2017-09-04 2019-03-05 南京麒麟科学仪器集团有限公司 A kind of mass spectrograph

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