JPH01227667A - High voltage generator - Google Patents

Abstract

PURPOSE:To enhance the durability and reliability of a high voltage generator by applying an AC voltage to inductors, and providing a pair of charge communicating means for communicating charge in contact with contactors of the respective inductors. CONSTITUTION:In a high voltage generator, many cylindrical charge carriers 1 are disposed on both front and rear faces of an insulating rotary disc 3. Contactors 2 buried in and exposed on the outer periphery of the disc 3 are respectively connected to the carriers 1 to be electrically and mechanically coupled thereto. A rotary shaft O is mounted at the bearings of first - second supporting bases as a foundation, and rotated by an induction motor or the like. Low and high potential inductors 4, 4' which operate as the functions of first second induction poles are disposed on the bases, and AC voltage generators 18 are respectively connected to the inductors 4, 4'. Further, synthetic rubbers 12A each containing carbon and the like are mounted on rollers 12, 12'. Thus, a high potential difference is generated at a resistor 9 connected between the rollers 12 and 12'.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement in a high voltage generator that generates a high voltage required when accelerating an ion beam, for example.

(Prior technology) In recent years, technologies using ion beams include particle accelerators, mass spectrometers, isotope separation equipment, etc., as well as surface treatment equipment such as etching and metal processing equipment. It is necessary to supply high voltage to the acceleration tube to accelerate the beam.

For example, in the field of trace element analysis, an extremely small amount of sample is irradiated with an ion beam, the characteristic X-rays generated from this sample are detected by a semiconductor detector, and the trace elements are analyzed based on their energy and intensity. method is used.

In this analysis method, it is necessary to use an acceleration tube to accelerate the ions from the ion source in a well-focused manner. This acceleration is performed using the high voltage generated by the device. Note that this high voltage generator is normally ioo.

Since it generates a high voltage of about V or higher, it is used in a container filled with SF6 gas, which has a high dielectric strength, at high pressure to prevent corona discharge even under such high voltage. Examples of cases in which it is necessary to use a high voltage generator other than those described above include electron beam processing, sputtering, and ion blating.

Various types of high voltage generators have been used in the past, such as the Pandegraaf accelerator, but recently,
There is one using a rotating disk type high voltage generator as disclosed in Japanese Patent Application Laid-Open No. 57-40380.

This rotating disk type high voltage generator is constructed as shown in FIG.

As shown in the figure, the rotation axis 0 of this high voltage generator has
A rotating disk 3 made of an insulating material such as acrylic resin
are attached concentrically, and near the outer periphery of this rotating disk 3, a charge carrier 1 is fixedly fixed through the rotating disk 3 in an axially symmetrical and concentric manner with respect to the rotation axis O. They are placed at equal intervals.

A contactor 2 protruding from the outer peripheral surface of the rotating disk 3 is connected to the charge carrier 1 . In addition, at each position on the rotation path of the charge carrier 1 opposite to the rotation axis 0, there is provided a charge carrier 1 that straddles a predetermined distance in the moving direction on both the front and back surfaces of the rotating disk 3. Inductors 4A to 4D made of a conductive material such as stainless steel are provided, which are arranged as shown in FIG. In this example, a potential of 10 is applied to the inductors 4A and 4D, and a potential of - is applied to the inductors 4B and 4C. A belt 5 made of a conductive elastic body made of synthetic rubber material containing carbon powder, for example, is attached to a conductive pulley 6.6° on the outer peripheral side of the disc 3.
5° is provided, and this rubber belt 5.5° is the contactor 2.
The rotating disk 3 rotates according to the circumferential speed of the rotating disk 3 due to the frictional force generated at the time of the contact.

Furthermore, the pulley 6 on the low potential side, which is at a low potential on the condition that the potential is applied to each inductor 4A to 4D as described above, is connected to the grounded connection terminal 7 under the same condition. The pulleys 6° on the high potential side that are at potential are respectively connected to connection terminals 8, and the connection terminals 7 and 8 are connected to resistors 9 that exhibit a high resistance value.
connected via.

The rotating disc type high voltage generator having such a configuration generates high voltage in the following manner. Note that, in order to simplify the explanation, only one charge carrier 1 will be focused on and its operation will be explained.

First, the charge carrier 1 located in the gap 10 between the inductors 4A and 4B is in contact with the belt 5 via the contact 2 connected to the charge carrier 1, so it is grounded. It is at electric potential. This charge carrier 1 rotates clockwise together with the disk 3 as shown in the figure,
When moving through the inductor 4B, this charge carrier 1 maintains a ground potential as long as it is in contact with the belt 5, and since a negative potential is given to this inductor 4B, this charge carrier 1 As the distance from the gap portion 10 increases, more and more charges appear on the surface of the charge carrier 1 due to electrostatic induction. Then, this charge carrier 1 leaves the belt 5 via the contact 2 while holding this charge, and is transferred to the inductor 4 while a predetermined charge distribution state is formed. , B approaches the inductor 4C, enters its interior, and contacts the belt 5° via the contact 2 while maintaining the same charge distribution state as when leaving the inductor 4B due to the potential of the inductor 40. As the charge carrier 1 approaches the 10° gap between the inductors 40 and 4D, the inductor 4
Under the influence of the electric field generated at D, the charge distribution state changes gradually, and the charge is transferred to the belt 5°. This charge receiving and passing ends when the charge carrier 1 reaches the gap portion 10°. Thereafter, this charge carrier 1 moves through the inductor 4D while contacting the belt 5° having a high potential, and this time, contrary to the above, a potential of 10 is applied to the inductor 4D. Therefore, as the charge carrier 1 moves away from the gap, more negative charges gradually appear on the surface of the charge carrier 1 due to electrostatic induction. Then, this charge carrier 1 leaves the belt 5' through the contactor 2 while holding this charge, approaches the inductor 4A from the inductor 4D, and enters the inside of the inductor 4A. Acting in the same manner as the inductor 4C described above, it transfers the charge induced in the charge carrier 1 to the belt 5° via the contactor 2.

By continuously transporting charges of respective polarities electrostatically induced in each charge carrier 1 as described above to the belt 5 or the belt 5', the low voltage terminals 7. A high voltage is applied between the high voltage terminals 8.

(Problem H to be solved by the invention) However, in such a conventional high voltage generator, the charge distribution of the charge carrier 1 is passed through an inductor to which voltages of opposite polarity are applied. Because the induced charge is exchanged by gradually changing the amount of charge, it is necessary to increase the distance over which the electric charge is exchanged, so an elastic body that can increase this distance is used. This is done by a belt 5,5'' made up of. This belt 5,5'' is connected to each charge carrier 1.
It is necessary to rotate at a high rotation speed (approximately 10.00 rpm) according to the moving speed of the contact 2 (approximately equal to the circumferential speed of the disk 3) while pressing the contact 2 with an appropriate pressure. , it becomes large and there is a risk of causing problems in durability.

As mentioned above, the high voltage generator is housed in a container filled with SF6 gas at high pressure, so regular maintenance requires a lot of time and effort. If an abnormality occurs during operation, it is almost impossible to quickly restore the system, and there are nine other problems.

The present invention has been made to solve such conventional problems, and it is a pair of charge exchangers in which the voltage applied to each inductor is alternating current, and each inductor contacts the contactor to exchange charges. It is an object of the present invention to provide a high voltage generating device that is inexpensive, durable, and reliable, by transferring charges between the charge carriers.

(Means for Solving the Problems) In order to achieve the above object, the present invention provides a charge carrier that transports induced charges to an end face of a rotating disk connected to a drive shaft and made of an insulating material. A large number of contactors, each located at a predetermined radius from the center of rotation of the disk and set up at a predetermined interval from each other, and each electrically connected to the charge carrier, are attached to the rotating disk. A first induction electrode and a second induction electrode having a predetermined distance with respect to the charge carrier are fixed to a base that is exposed to the outside of the disk and fixedly installed opposite to the rotating disk. and a voltage generating means for generating an alternating current voltage having a frequency synchronized with the rotational speed of the charge carrier and having a mutual phase difference.
Induction electrode and said second induction = 9 - A first charge exchange means which has a conductive material part which is connected to each of the electrodes and comes into contact with the contactor, and which exchanges the electric charge induced in the charge carrier; The present invention is characterized in that two electric charge transfer means are positioned at each of the first induction electrode and the second induction electrode and mounted on the base.

(Function) With this configuration, AC voltages having a frequency synchronized with the movement position of the charge carrier are applied to the first induction electrode or the second induction electrode with different phases by the voltage generation means. .

For example, when this phase is 180 degrees and a peak voltage of 10 is applied to the first induction electrode, a peak voltage of - is applied to the second induction electrode. As a result, the charge carrier passing through the first induction electrode and the second induction electrode is charged with a polarity opposite to the change in the current voltage applied to each of the induction electrodes. You will be guided.

In other words, if a charge carrier with a negative charge begins to enter the first induction electrode while a negative voltage is applied to the first induction electrode, as the charge carrier moves, the first
The voltage applied to the induction electrode will gradually shift to a voltage of 10. During this transition period, when a peak voltage of 10 is applied to the first induction electrode, the contact and the first transfer means come into contact, and the voltage applied to the first induction electrode gradually shifts to a voltage of -. , - charges induced in the charge carrier are transferred to the first induction electrode during the period when the peak voltages of - are reached. Then, when a - peak voltage is applied to the first induction electrode, the contact and the first transfer means are separated from each other with ten charges induced in the charge carrier.

Thereafter, the charge carrier into which the ten charges have been induced moves with the rotation of the rotating disk while holding the ten charges, and enters the second induction electrode. The opposite state is simultaneously performed on the second induction electrode, and by continuously performing this on the charge carrier disposed on the rotating disk, the first induction electrode and the second induction electrode are The potential difference between the two induction electrodes can be made very high, and a high voltage can be obtained.

(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

FIG. 1 shows a cross-sectional view of a high voltage generator according to the present invention, and FIG. 2 shows a longitudinal cross-sectional view of the same device. Incidentally, the same members as those shown in FIG. 6 are given the same reference numerals.

As shown in these figures, the front and back surfaces of the rotating disk 3 made of insulating synthetic resin such as acrylic resin are charged with a smooth cylindrical shape with no corners. A large number of charge carriers 1 are arranged at equal intervals concentrically with respect to the rotation axis 0 of the rotating disk 3, and each charge carrier 1 is connected to a fixed body IA passing through the rotating disk 3. It is permanently installed. Further, each charge carrier 1 is connected to a contact 2 that is embedded and exposed in the outer circumferential surface 3A of the rotating disk 3.
and charge carrier 1 are charge carrier 1 as shown in FIG.
The contactor 2 is engaged with the fixed body IA that fixes the contactor 2, thereby electrically and mechanically being connected. This contactor 2 has a disk spherical shape (not shown), so that contact with rollers 12, 12 degrees, which will be described later, can be made extremely smoothly, and adjacent contactors 2 can mutually contact each other. They are spaced apart from each other by a certain distance so that they have a certain degree of dielectric strength.

The rotation axis O of the rotary/rotating disk 3 is the first
It is rotatably attached to the support stand 10A and the second support stand 10B by bearings IIA and ilB provided respectively, and a rotary power generating device such as an induction motor (not shown) is connected to this rotating shaft 0. The rotating disk 3 is rotated at, for example, about 18 oorpm. Further, a rotation speed sensor 14 such as an encoder is attached to the rotation shaft O to detect the rotation speed of the rotation shaft and the relative position of the rotating disk 3 from an arbitrarily set original position. Since the rotating disk 3 rotates at such a high speed, the rotating disk 3 has sufficient mechanical rigidity and dynamic balance, and is designed to be as lightweight as possible.

Further, the first support stand 10A and the second support stand 10B include an inductor 4 on the low potential side that can function as a first induction electrode, and an inductor 4° on the high potential side that can function as a second induction electrode. The inductors 4, 4° are fixedly arranged opposite to each other on both sides of the disk 3 on the moving path of the charge carrier 1, axially symmetrical with respect to the rotation axis O described above, and are rotated together with the rotating disk 3. The charge carrier 1 passing through the space has an extremely narrow gap.

AC voltage generating circuits 18, which are voltage generating means, are connected to these inductors 4 and 4°, respectively, and as will be described later, an AC voltage is applied to these inductors 4.4°. Charges corresponding to the alternating current voltage will be induced.

Note that in FIG. 2, the charge carrier 1 is shown to have a relatively large thickness in order to make the structure easier to understand, but in reality, the amount of induced charge is the same as that of the charge carrier 1. Since it is determined by the gap formed by the inductor 4 and the area of the charge carrier 1 on the inductor 4 side, it is of course possible to reduce the thickness of the charge carrier 1 to make the high voltage generator more compact. It is.

Further, the first support base 10A contacts each of the contacts 2 provided on each charge carrier 1, and rotates according to the circumferential speed of the rotating disk 3 due to the frictional force generated at the time of contact. A roller 12 serving as a first charge transfer means and a roller 12° serving as a second charge transfer means that transfer and receive charges induced in the charge carrier 1 are attached to the support shaft 13A or 13.
The support shafts 13A and 13B are attached to the first support stand 10A. A conductive elastic material, for example synthetic rubber 12A containing carbon or the like therein, is firmly attached to the rollers 12 and 12° by adhesive or the like. The roller 12 is connected to a grounded connection terminal 7, and the roller 12' is connected to a resistor 9 exhibiting a high resistance value. As a result, the roller 12
A very high potential difference will occur between the resistor 9 and the roller 12°. Note that these rollers 12, 12° are attached to the support shaft 1 attached to the first support stand.
3A and 13B, these support shafts 13A and 13B may be attached to the second support stand or both of the first and second support stands.

Further, FIG. 3 shows a control block diagram of the high voltage generator according to the present invention.

As shown in the figure, the control device 20 that controls the high voltage generator includes a start switch 19 that starts the device, and a rotary switch 19 that detects the number of rotations of the rotating disk 3 or the moving position of the charge carrier 1. number sensor 14 and inductor 4 and 4
An AC voltage generation circuit 18 serving as a voltage generation means for applying an AC voltage to the AC voltage generator 18 is connected to a disk drive motor 15 that rotationally drives the rotating disk 3, and the AC voltage generation circuit 18 includes:
AC voltages having a frequency corresponding to the detection signal of the rotation speed sensor 14 are applied to the respective inductors 4 and 4° with their phases being different, for example, by 180°.

The high voltage generator of the present invention having such a configuration operates as follows. This operation will be explained in detail below based on the operation flowchart of FIG. 4 and with reference to the control block diagram shown in FIG. 3.

First, the control device 20 determines whether the startup switch 19 for starting the high voltage generator is turned on.

As a result of this determination, if the starting switch 19 is off, the process waits until an on signal is input (step 10). On the other hand, if the start switch 19 is on, the control device 20 starts the disk drive motor 15 using an induction motor or the like (step 11), and the rotation speed of the rotating disk 3 is outputted from the rotation speed sensor 14. is input (step 12).

Then, the control device 20 inputs this rotation speed and determines whether or not this rotation speed has reached a specified rotation speed (for example, 1800 rpm). As a result of this judgment, if the specified rotation speed has not been reached, the disc drive motor 15 is accelerated until the specified rotation speed is reached (step 13), and when the specified rotation speed is reached, the control device 20 starts the AC voltage generation circuit 8. Then, an AC voltage of a specified frequency is applied to the inductor 4 and the inductor 4'. This frequency is also related to the size of the contactor 2, so it cannot actually be determined by a simple calculation as shown below, but as a rough guide, it is possible to If there are 24 charge carriers 1 and their rotational speed is 18001'pm, then 24
x 1800/60 = 7201 (Z.

In other words, an AC voltage having a frequency of 720H2 is applied to the inductor 4 and the inductor 4'. In this case, inductor 4 and inductor 4
The applied voltage has a phase difference of 180°. Note that this rotational speed sensor 14 can detect not only the rotational speed but also the moving position of the rotating disk 3, and can also detect the relative position between each charge carrier 1 and each inductor 4, 4°. (step 14). And the control device 20
determines whether the start switch 19 is turned off, and continues in step 11 until the start switch 19 is turned off.
The process from step 14 is repeated, and when the start switch 19 is turned off, the execution of the program is ended and the function of the high voltage generator is stopped (step 15).

Although the control device 20 operates as described above, the specific high voltage generation operation of the high voltage generator is as follows.

This effect will be explained using FIG. 5.

In this case, the rotational speed of the rotating disk 3 is 1800 rpm, its moving direction is in the direction of the arrow in the figure, and the frequency of the AC voltage output from the AC voltage generation circuit 18 is 720H2. As mentioned above, since the rotation speed sensor 14 can also detect the moving position of the rotating disk 3,... The waveform phase is completely synchronized, and the AC voltage applied to the inductor 4' by the AC voltage generator 18 has a sine waveform having a frequency and phase as shown in FIG. Also, as shown in the figure,
The radius of the charge carrier 1 and the radius of the contact are both R.

To simplify the explanation, only the operation on the 4° side of the inductor, which has a high voltage of 10, will be explained; Explanation will be omitted.

First, as shown in FIG. 5, the moving position of the charge carrier 1,
More precisely, the moving position of the contactor 2 and the phase of the AC sine waveform output from the AC voltage generation circuit 18 are completely synchronized based on the signal from the rotation sensor 14, and the rotating disk At the moment when the contact 2 of the charge carrier 1 comes into contact with the roller 12' as the charge carrier 1 rotates,
Ten peak voltages as shown in the figure are applied to the inductor 4°, and the charge carrier 1 in this state is
The charge distribution state of the ten charges induced by the low potential side inductor 4 (not shown) through which the charge carrier 1 has passed remains maintained. For this reason, corona discharge is suppressed. As the charge carrier 1 gradually enters the inductor 4° while the contactor 2 is in contact with the roller 12°, the voltage applied to the inductor 4° also increases as shown in the figure. It shifts to one side with the position, and the electric field generated in the inductor 4' changes accordingly.

In this way, as the charge carrier 1 moves, the inductor 4
When the voltage applied to the inductor 4 changes in one direction, the charge distribution of the charge carrier 1 changes as the voltage applied to the inductor 4 changes, and the charge carrier 1 moves through the charge transfer section shown in the figure. In the meantime, the charges that were not induced before entering the inductor 4 of the charge carrier 1 are transferred to the roller 12.

After the charge carrier 1 has passed through the charge exchange section, when the contact between the contact 2 and the roller 12 is released, a negative peak voltage is applied to the inductor 4, so that the charge is transferred. Ten charges are induced in the body 1, and immediately after leaving the inductor 4', a predetermined charge distribution is formed in the charge carrier 1 and the charge is directed toward the inductor 4.

Then, when entering inductor 4, this inductor 4
Since AC voltages with opposite phases are applied to the inductors 4 and 4, □Contrary to what was described above, the -
A charge of 10 is transferred and a charge of 10 is induced toward the inductor 4°.

Therefore, the transfer and induction of charges induced in the charge carrier 1 occurs within the charge transfer section of the inductor, that is,
This is done during the period when the contactor and roller are in contact. Moreover, this charge transfer and charge induction are automatically performed within a short distance section using a sinusoidal waveform synchronized with the moving position of the charge carrier 1 outputted by the AC voltage generating circuit. Therefore, in order to efficiently transport charge, the frequency and phase of the AC voltage applied to the inductor must be set to such a frequency that the transfer and induction of charge is completed between the peaks of the waveform. This frequency and phase differ depending not only on the number of rotations of the rotating disk 3 but also on the size of the contactor and the number of charge carriers provided.

In addition, in Fig. 5, the effective distance refers to the distance over which the electric field of the inductor effectively acts on the charge carrier for transfer and induction of charge (at least within this range, the inductor is formed flat). As shown in the figure, if the radius of the charge carrier is R, this effective distance is 2.
It becomes R. The reason why the inductor is longer than this effective distance is because the electric field from each inductor on the high-voltage side and the low-voltage side, to which voltages with different phases are applied, has an adverse effect on charge transfer and induction. This is to prevent the effects of

In addition, in this example, the number of rotations of the rotating disk is 1800.
For example, even if the voltage is 1500 rpm, the frequency and output waveform of the AC voltage output from the AC voltage generation circuit 18 can be applied to the contact position between the contactor and the roller of the charge carrier. If the voltage is applied to each inductor in synchronization, the present invention can be applied regardless of the rotation speed. In addition, in this example, the voltage waveform applied to the inductor is a sine wave, but =
23- It goes without saying that the present invention is not limited to this, and other alternating current waveforms can be applied within the range in which the present invention can be implemented.

(Effects of the Invention) As is clear from the above explanation, according to the present invention, the voltage applied to each induction electrode is alternating current, and a pair of exchangers that contact each contactor to exchange electric charge are provided. Since the electric charge is exchanged from the charge carrier by the means, the electric charge can be exchanged and the electric charge can be induced over a short distance, and the frequency and the frequency of the AC voltage can be changed regardless of the rotational speed of the rotating disk. By adjusting the phase appropriately, it is possible to generate high voltage. In addition, the transfer means can be made smaller and extremely strong, which not only improves its durability and reliability, but also improves its reliability as a high voltage generator. It is also possible to reduce manufacturing costs. Furthermore, this also makes it possible to lengthen the periodic maintenance cycle.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a high-voltage generator according to the present invention, FIG. 2 is a longitudinal cross-sectional view of a high-voltage generator according to the present invention, and FIG. 3 is a cross-sectional view of a high-voltage generator according to the present invention. 4 is a control block diagram, FIG. 4 is an operation flowchart of the high voltage generator according to the present invention, FIG. 5 is a diagram providing a detailed operation explanation of the high voltage generator according to the present invention, and FIG. 6 is a diagram of the conventional high voltage generator. FIG. 2 is a cross-sectional view of the high voltage generator. DESCRIPTION OF SYMBOLS 1... Charge carrier, 2... Contact, 3... Rotating disk, 4... Inductor knee (first induction electrode), 4°...
Inductor (second induction electrode), 5.5゛...belt, 6.6°...pulley, 7...low potential terminal,
9...Resistor, 10A, IOB...1st. Second
Support stand (base), = 25- 11A, IIB... Bearing, 12... Roller (first delivery means), 12-... Roller (second delivery means), 12A...
Synthetic rubber (conductive material department), 14... Rotation speed sensor, 18... AC voltage generation circuit (voltage generation means). Patent applicant Azusa Engineering Co., Ltd. Agent Patent attorney 8 1) Mikio (and 1 other person) )Figure 2Figure 3

Claims (1)

[Claims] On the end face of a rotating disk connected to the drive shaft and made of insulating material,
A large number of charge carriers that transport the induced charges are positioned at a predetermined radius from the center of rotation of the rotating disk, and are erected at a predetermined interval from each other, and each of the charge carriers is electrically connected to the charge carrier. The connected contactor is attached to the rotary disk so as to be exposed to the outside of the rotary disk, and the contactor is mounted on a base fixedly installed opposite to the rotary disk at a predetermined interval with respect to the charge carrier. A voltage generating means for generating an alternating current voltage having a frequency synchronized with the rotational speed of the charge carrier and having a mutual phase difference; A first charge transfer means and a second charge transfer means that are connected to each of the induction electrode and the second induction electrode, each having a conductive material portion that comes into contact with the contact, and that transfer and receive the charge induced in the charge carrier. A high voltage generator comprising: means mounted on the base with means positioned at each of the first induction electrode and the second induction electrode.