JPH01223429A - Production of active matrix type liquid crystal display device - Google Patents

Abstract

PURPOSE:To reduce the number of stages by forming the whole or a part of a resist pattern for forming an active element and a bus line by screen printing. CONSTITUTION:A thin film 14 is formed on the entire surface of a substrate 13, a screen mesh 15 is put on the film 14 and a resist 17 such as etching resist ink proof against strong acids on the mesh 15 is pressed out on the film 14 with a squeegee 14. The resist 17 is selectively pressed out through the mesh 15 to form a resist pattern 18 on the film 14. By forming the resist pattern by screen printing as mentioned above, three stages required to form the pattern by the conventional photolithography, that is, coating, exposing and developing stages can be reduced to one stage.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method of manufacturing an active matrix liquid crystal display device.

<Prior Art> Various systems have been proposed and developed as display devices using liquid crystals. Among these, methods using active elements are often used in liquid crystal display devices that drive multiple pixels arranged in a Mad Vx arrangement, and are essential for achieving high contrast display with a large number of scanning lines. It becomes.

FIG. vJ2 is a cross-sectional view of a main part of a liquid crystal display device using the above-mentioned active matrix method. As shown in the figure, pixel electrodes 3. Bus line 5. and an active element 4 are arranged, an alignment film 6°, a liquid crystal layer 7. A color filter 8 is disposed on the main surface of the counter substrate 11, which faces the main surface of the active element substrate 2 with the alignment film 6 interposed therebetween. Black matrix9. and a counter electrode 10 are arranged. Further, polarizing plates 1 are provided on the back surface of the active element substrate 2 and the back surface of the counter substrate 11, respectively.
12 is provided to modulate the transmitted light.

Note that the above-mentioned arrangement and facing relationship are arbitrary, and many liquid crystal display devices realized in various combinations have been reported.

In such a liquid crystal display device, during the manufacturing process, active elements 4. Bus line 5. In the step of manufacturing the pixel electrode 3, a method is adopted in which a desired resist pattern is formed using photolithography technology. Specifically, for example, as shown in FIG. 3(a)K, first, a thin film 21. which is to be patterned all over the substrate 20 is formed. After sequentially forming the photoresist 22, a photomask 23 having a desired pattern is placed on top of the photoresist 22, as shown in FIG.
Light is irradiated onto the photoresist 22 from above to remove the photoresist 2.
2 is selectively exposed. Subsequently, the exposed photoresist 22 is developed to complete a resist pattern 22a as shown in FIG. 3(C).

<Problems to be Solved by the Invention> In the above-mentioned conventional technology, only the formation of a resist pattern requires three steps: photoresist coating, exposure, and development, which hinders the reduction in manufacturing costs of active matrix liquid crystal display devices. There is.

<Means for Solving the Problems> The present invention has been made to solve the above-mentioned problems, and is a liquid crystal display device that controls rotation or non-rotation of a plane of polarization in response to application or non-application of voltage. In an active matrix liquid crystal display device in which an external signal transmitted through a bus line drives a plurality of pixels in a matrix through active elements, all or part of the active elements and the resist pattern for forming the bus line are screen printed. The present invention provides a method for manufacturing an active matrix liquid crystal display device.

As mentioned above, by forming the resist pattern for forming active elements and bus lines by screen printing, the number of steps is significantly reduced compared to when forming the resist pattern using conventional photolithography technology. do.

<Examples> Examples of the present invention will be described in detail below with reference to the drawings, but the present invention is not limited thereto.

FIGS. 1(a) to 1(C) are sectional views of essential parts for explaining one embodiment of the present invention. First, a thin film 14 is formed on the entire surface of the substrate 13 as shown in FIG. 1(a), and then a screen mesh 15 is placed on the thin film 14 as shown in FIG. 1(b).
When the resist 17 such as strong acid-resistant etching resist ink on the screen mesh 15 is pushed out onto the thin film 14 with the squeegee 16, the resist 17 is selectively pushed out by the screen mesh 15 as shown in FIG. 1(C). A resist pattern 18 is formed on the thin film 14.

As described above, by forming a resist pattern by screen printing, it is possible to reduce the three steps of coating, exposure, and development required when forming a resist pattern by conventional photolithography technology to one step. Further, the steps other than this resist pattern forming step are exactly the same as those when using photolithography technology, and no new or different steps are introduced or changes are made to the steps.

In addition, in the screen printing method of the present invention, stainless steel 5
By using a screen mesh such as 00 mesh or integrally molded flat mesh, the resolution can be reduced to 50 μm9.
Overlay accuracy is approximately ±10μm, approximately 30011m
It is fully applicable to active matrix liquid crystal display devices having a pixel pitch of the above.

<Effects of the Invention> According to the present invention, the manufacturing process of an active matrix type liquid crystal display device can be shortened, so that the cost of the liquid crystal display device can be significantly reduced.

[Brief explanation of the drawing]

FIGS. 1(a) to (C) are cross-sectional views for explaining one embodiment of the present invention, FIG. 2 is a cross-sectional view of essential parts of an active matrix liquid crystal display device, and FIGS. 3(a) to (C) ) is a sectional view for explaining a conventional example. 1.12 Polarizing plate 2 Active element substrate 8 Pixel electrode 4 Active element 5 Bus line 6 Alignment film 7 Liquid crystal layer 8 Color filter 9 Black matrix 10 Counter electrode 11 Counter substrate 18 Substrate 14 Thin film 15 Screen mesh 1
6 S'T-S 17L/Sist 18 Resist Pattern

Claims (1)

[Claims] 1. A liquid crystal display device that controls the rotation or non-rotation of the plane of polarization in response to the application or non-application of voltage, in which an external signal transmitted through a bus line drives multiple pixels in a matrix through active elements. 1. A method of manufacturing an active matrix liquid crystal display device, wherein all or a part of the active elements and the resist pattern for forming bus lines are formed by screen printing.