JPH0122117B2 - - Google Patents

Info

Publication number
JPH0122117B2
JPH0122117B2 JP13541280A JP13541280A JPH0122117B2 JP H0122117 B2 JPH0122117 B2 JP H0122117B2 JP 13541280 A JP13541280 A JP 13541280A JP 13541280 A JP13541280 A JP 13541280A JP H0122117 B2 JPH0122117 B2 JP H0122117B2
Authority
JP
Japan
Prior art keywords
vacuum chuck
arm
shaft
motor
eccentric shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13541280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5761485A (en
Inventor
Seiichi Chiba
Akihiro Nishimura
Kazuhiro Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP13541280A priority Critical patent/JPS5761485A/ja
Publication of JPS5761485A publication Critical patent/JPS5761485A/ja
Publication of JPH0122117B2 publication Critical patent/JPH0122117B2/ja
Granted legal-status Critical Current

Links

JP13541280A 1980-09-29 1980-09-29 Placing transferring device for sample Granted JPS5761485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13541280A JPS5761485A (en) 1980-09-29 1980-09-29 Placing transferring device for sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13541280A JPS5761485A (en) 1980-09-29 1980-09-29 Placing transferring device for sample

Publications (2)

Publication Number Publication Date
JPS5761485A JPS5761485A (en) 1982-04-13
JPH0122117B2 true JPH0122117B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-25

Family

ID=15151116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13541280A Granted JPS5761485A (en) 1980-09-29 1980-09-29 Placing transferring device for sample

Country Status (1)

Country Link
JP (1) JPS5761485A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5761485A (en) 1982-04-13

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