JPH0121228B2 - - Google Patents

Info

Publication number

JPH0121228B2

JPH0121228B2 JP14263280A JP14263280A JPH0121228B2 JP H0121228 B2 JPH0121228 B2 JP H0121228B2 JP 14263280 A JP14263280 A JP 14263280A JP 14263280 A JP14263280 A JP 14263280A JP H0121228 B2 JPH0121228 B2 JP H0121228B2

Authority

JP

Japan

Prior art keywords

magnetic

bath

ions

plating bath

ion concentration

Prior art date

1980-10-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000007772 electroless plating Methods 0.000 claims description 10
• 229910001429 cobalt ion Inorganic materials 0.000 claims description 6
• XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 claims description 6
• 229910021645 metal ion Inorganic materials 0.000 claims description 6
• 229910052709 silver Inorganic materials 0.000 claims description 6
• 239000004332 silver Substances 0.000 claims description 6
• -1 silver ions Chemical class 0.000 claims description 6
• 239000007864 aqueous solution Substances 0.000 claims description 3
• 239000000872 buffer Substances 0.000 claims description 3
• 239000003638 chemical reducing agent Substances 0.000 claims description 3
• 229910001453 nickel ion Inorganic materials 0.000 claims description 3
• 239000008139 complexing agent Substances 0.000 claims description 2
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 1
• 238000007747 plating Methods 0.000 description 15
• FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 11
• 239000000203 mixture Substances 0.000 description 5
• KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 2
• VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 2
• BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 2
• 229910052921 ammonium sulfate Inorganic materials 0.000 description 2
• 235000011130 ammonium sulphate Nutrition 0.000 description 2
• 229910000361 cobalt sulfate Inorganic materials 0.000 description 2
• 229940044175 cobalt sulfate Drugs 0.000 description 2
• KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 2
• 230000003247 decreasing effect Effects 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 238000001556 precipitation Methods 0.000 description 2
• 229910000367 silver sulfate Inorganic materials 0.000 description 2
• YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 2
• 229910001379 sodium hypophosphite Inorganic materials 0.000 description 2
• PRWXGRGLHYDWPS-UHFFFAOYSA-L sodium malonate Chemical compound [Na+].[Na+].[O-]C(=O)CC([O-])=O PRWXGRGLHYDWPS-UHFFFAOYSA-L 0.000 description 2
• 239000000758 substrate Substances 0.000 description 2
• 239000003795 chemical substances by application Substances 0.000 description 1
• WPUMTJGUQUYPIV-JIZZDEOASA-L disodium (S)-malate Chemical compound [Na+].[Na+].[O-]C(=O)[C@@H](O)CC([O-])=O WPUMTJGUQUYPIV-JIZZDEOASA-L 0.000 description 1
• 238000009713 electroplating Methods 0.000 description 1
• 230000004907 flux Effects 0.000 description 1
• LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
• 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
• 239000003002 pH adjusting agent Substances 0.000 description 1
• 238000002791 soaking Methods 0.000 description 1
• 235000019265 sodium DL-malate Nutrition 0.000 description 1
• 239000001394 sodium malate Substances 0.000 description 1
• 229940074404 sodium succinate Drugs 0.000 description 1
• ZDQYSKICYIVCPN-UHFFFAOYSA-L sodium succinate (anhydrous) Chemical compound [Na+].[Na+].[O-]C(=O)CCC([O-])=O ZDQYSKICYIVCPN-UHFFFAOYSA-L 0.000 description 1
• 238000005406 washing Methods 0.000 description 1