JPH01209645A - Ion source and electron gun - Google Patents

Ion source and electron gun

Info

Publication number
JPH01209645A
JPH01209645A JP3186388A JP3186388A JPH01209645A JP H01209645 A JPH01209645 A JP H01209645A JP 3186388 A JP3186388 A JP 3186388A JP 3186388 A JP3186388 A JP 3186388A JP H01209645 A JPH01209645 A JP H01209645A
Authority
JP
Japan
Prior art keywords
electrode
lowermost
electrons
flowing
permanent magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3186388A
Inventor
Kiyoshi Hashimoto
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP3186388A priority Critical patent/JPH01209645A/en
Publication of JPH01209645A publication Critical patent/JPH01209645A/en
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the flowing-in of positive ions or electrons to an accelerator by providing permanent magnets to an electrode at the lowermost downstream, and making the potential of the electrode at the immediately upper side of the lowermost electrode higher than that of the lowermost electrode.
CONSTITUTION: Of plural acceleration electrodes 3W5, to the electrode 5 at the lowermost downstream along the advancing direction of the negative ions or electrons, permanent magnets 7 and 8 are arranged, while the potential of the electrode 4 (deceleration electrode) immediately upper side from the lowermost electrode 5 is made higher than that of the lowermost electrode 5. As a result, the reverse flow of the positive ions can be prevented by the electrostatic barrier, and the electrons generated at a drift 6 can be prevented from flowing in the deceleration electrode 4 by a magnetic field produced by the permanent magnets 7 and 8. The flowing-in of the positive ions or the electrons to the accelerator can be prevented consequently.
COPYRIGHT: (C)1989,JPO&Japio
JP3186388A 1988-02-16 1988-02-16 Ion source and electron gun Granted JPH01209645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3186388A JPH01209645A (en) 1988-02-16 1988-02-16 Ion source and electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3186388A JPH01209645A (en) 1988-02-16 1988-02-16 Ion source and electron gun

Publications (1)

Publication Number Publication Date
JPH01209645A true JPH01209645A (en) 1989-08-23

Family

ID=12342887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3186388A Granted JPH01209645A (en) 1988-02-16 1988-02-16 Ion source and electron gun

Country Status (1)

Country Link
JP (1) JPH01209645A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002043103A3 (en) * 2000-11-20 2002-10-17 Varian Semiconductor Equipment Extraction and deceleration of low energy beam with low beam divergence
EP2446456A1 (en) * 2009-06-23 2012-05-02 L-3 Communications Corporation Magnetically insulated cold-cathode electron gun
CN102592930A (en) * 2011-01-08 2012-07-18 日新离子机器株式会社 Ion source

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002043103A3 (en) * 2000-11-20 2002-10-17 Varian Semiconductor Equipment Extraction and deceleration of low energy beam with low beam divergence
CN1311508C (en) * 2000-11-20 2007-04-18 瓦里安半导体设备联合公司 Extraction and deceleration of low energy beam with low beam divergence
EP2446456A1 (en) * 2009-06-23 2012-05-02 L-3 Communications Corporation Magnetically insulated cold-cathode electron gun
EP2446456A4 (en) * 2009-06-23 2014-03-19 L 3 Comm Corp Magnetically insulated cold-cathode electron gun
CN102592930A (en) * 2011-01-08 2012-07-18 日新离子机器株式会社 Ion source
JP2012146424A (en) * 2011-01-08 2012-08-02 Nissin Ion Equipment Co Ltd Ion source

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