JPH01206549A - Composite surface analyzer - Google Patents

Abstract

PURPOSE:To perform manifold analyses by providing a removable electron detector between a fluorescent plate arranged on the output side of an analyzer and the analyzer when this device is constituted with an electron gun inclinatorily arranged against the surface of a sample and the energy analyzer located on the output side of the electron beam radiated on the sample surface. CONSTITUTION:When this device is used as a reflection electron diffracting device, an electron detector 10 is separated not to become an obstacle for the electrons discharged through the outgoing port 6b of an energy analyzer 6, the electrostatic voltage of the analyzer 6 is set to the optimum value to match with the energy of diffracted electrons. Under this condition, a high-energy electron beam from an electron gun 4 is fed close to the surface of a sample 2, the diffracted electrons are fed to the incident port 6a of the analyzer 6 to generate a diffraction pattern on a fluorescent plate 8 via the outgoing port 6b. When this device is used as an auger electron spectral device, the electron detector 10 is inserted between the outgoing port 6b and the fluorescent plate 8, the information on the surface composition and the chemical connection state is obtained here.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a composite surface analysis device suitable for use in analyzing the extreme surface condition of a sample.

(b) Conventional technology In order to investigate the surface condition of a sample, it is necessary to know the surface composition, chemical bonding state, and crystal structure. Therefore,
Conventionally, surface analysis devices include Auger electron spectroscopy, low energy electron diffraction (LEED), and reflected electron diffraction (R).
HEED) devices are provided respectively.

The Auger electron spectrometer detects the Auger electrons generated by exciting the sample surface with an electron beam.
Although it can analyze chemical bonding states, it is not suitable for analyzing crystal structures. In addition, LEED equipment and RHE
Both ED devices can obtain information on the crystal structure by irradiating a sample with an electron beam and detecting diffracted electrons. In this case, the LEED device makes a low-energy (1KeV or less) electron beam perpendicularly incident on the sample.
There are disadvantages in that the background increases, the S/N ratio is poor, and high detection sensitivity cannot be obtained. On the other hand, RHE
The ED device allows a high-energy (several tens of eV) electron beam to be incident on the surface, so it is easy to satisfy the B a g diffraction conditions and high detection sensitivity can be obtained.

Therefore, RHEED devices are more commonly used than LEED devices for crystal structure analysis.

(c) Problems to be solved by the invention However, in recent years, due to the need to correlate the composition, chemical bonding state, and crystal structure of the sample surface and perform multifaceted analysis, the above-mentioned surface analysis devices have been combined. An attempt is being made to do so. In this case, Auger electron spectroscopy and LEED
Since both devices can irradiate an electron beam perpendicularly to the sample surface and detect the electrons emitted from the sample, it is easy to share the same geometric arrangement. A composite surface analysis device is provided that combines an Auger electron spectroscopy device and a low energy electron diffraction (LEED) device.

On the other hand, in the RHEED apparatus, since the electron beam is incident on the sample surface at an angle from the beginning, the diffracted electrons do not return to the incident side but are emitted in the opposite direction. Therefore, it is difficult to simply combine a RHEED device with an Auger electron spectrometer instead of a LEED device.
A combination of an EED device has not yet been provided.

The present invention was made in view of these circumstances, and it is possible to combine an Auger electron spectrometer and a RHEED device, thereby making it possible to determine the composition of the sample surface,
The object of the present invention is to provide a composite surface analysis device that can perform multifaceted analysis by correlating chemical bond states and crystal structures with each other.

(C) Means for Solving the Problems The present invention adopts the following configuration in order to achieve the above object.

That is, the composite surface analysis device of the present invention includes an electron gun arranged obliquely with respect to the sample surface, and an energy analyzer is arranged on the emission side of the electron beam irradiated from the electron gun onto the sample surface. A fluorescent screen is disposed facing the output side of the analyzer, and an electron detector is removably installed between the fluorescent screen and the energy analyzer.

(E) Effect When the above structure is used as a RHEED device, a high-energy electron beam from an electron gun is incident on the surface of the sample. The diffracted electrons diffracted on the sample surface are
The electrons are incident on an energy analyzer, and only predetermined diffracted electrons pass through the energy analyzer and are irradiated onto the fluorescent screen. Thereby, information on the crystal structure can be obtained based on the reflection diffraction image of the fluorescent screen.

On the other hand, when used as an Auger electron spectrometer,
An electron detector is inserted and arranged at a position opposite to the emission aperture of the energy analyzer. Auger electrons generated from the sample surface by electron beam irradiation are incident on an energy analyzer, and only predetermined Auger electrons pass through the energy analyzer and are detected by an electron detector. This allows information on the composition and chemical bonding state of the sample surface to be obtained.

(f) Example drawings are configuration diagrams of a composite surface analysis device of the present invention. The composite surface analysis device 1 of this embodiment includes an electron gun 4 arranged obliquely with respect to the surface of the sample 2.

Further, a spherical electrostatic type energy analyzer 6 is disposed on the emission side of the electron beam irradiated onto the surface of the sample 2 from the electron gun 4. The focal point on the incident side of the energy analyzer 6 is set to coincide with the electron beam irradiation position of the sample 2. In addition, extra X-rays, ultraviolet rays, thermoelectrons, visible light, etc. generated from the sample surface near the electron beam irradiation position of sample 2 (particularly noticeable when the sample is heated) A shielding member 7 is arranged to prevent the scattered radiation from being irradiated onto a fluorescent screen 8, which will be described later. On the other hand, a fluorescent screen 8 for obtaining a diffracted electron image is disposed facing the output side of the energy analyzer 6, and an electron detector 10 such as a channeltron is disposed between the output side of the energy analyzer 6 and the fluorescent screen 8. It is installed so that it can be inserted and removed freely.

Next, the analysis operation of the composite surface analysis device having the above configuration will be explained.

(i) When used as a RHEED device In this case, the electron detector lO is the output port 6b of the energy analyzer 6.
Keep it separate so that it does not interfere with the electrons emitted from the Furthermore, the electrostatic voltage of the energy analyzer 6 is set to an optimal value in accordance with the energy of the diffracted electrons.

In this state, a high-energy electron beam from the electron gun 4 is incident on the surface of the sample 2. Then, the diffracted electrons diffracted on the surface of the sample 2 are incident on the entrance port 6a of the energy analyzer 6. Due to electron beam irradiation, not only diffracted electrons but also extra X-rays, ultraviolet rays, thermoelectrons, visible rays, etc. are generated from the surface of the sample 2, but these are removed by the energy analyzer 6 and incident with a predetermined energy. Only the electrons pass through the energy analyzer 6 and are irradiated onto the fluorescent screen 8 from the exit port 6b. If an energy analyzer such as this example is selected in which the incident and exit angles at the entrance port 6a and exit port 6b are preserved, the diffraction pattern will appear on the fluorescent screen 8 while being preserved.

Thereby, a reflection diffraction image with a high S/N ratio can be obtained.

(11) When used as an Auger electron spectrometer In this case, an electron detector IO is inserted and arranged at the focal point on the emission side of the energy analyzer 6. Furthermore, the electrostatic voltage of the energy analyzer lO is set to an optimal value in accordance with the energy of Auger electrons.

In this state, the surface of the sample 2 is irradiated with an electron beam from the electron gun 4. Auger electrons generated from the surface of the sample 2 by electron beam irradiation are incident on the entrance port 6a of the energy analyzer 6, and only Auger electrons with a predetermined energy pass through the energy analyzer 6 and are emitted from the exit port 6b. Detected by electronic detector 10. This allows information on the composition and chemical bonding state of the sample surface to be obtained.

(g) Effects According to the present invention, the Ohnoe electron spectrometer and RT-IEE
It becomes possible to combine the D-devices, and this brings about excellent effects such as the ability to correlate the composition, chemical bonding state, and crystal structure of the sample surface and perform multifaceted analysis.

[Brief explanation of the drawing]

The drawing is a configuration diagram of the composite surface analysis device of the present invention. l... Composite surface analyzer, 2... Sample, 4... Electron gun, 6... Energy analyzer, 8... Fluorescent screen, 1
0...electronic detector.

Claims (1)

[Claims] (1) Equipped with an electron gun arranged obliquely with respect to the sample surface,
An energy analyzer is placed on the emission side of the electron beam irradiated onto the sample surface from this electron gun, and a fluorescent screen is placed facing the emission side of the energy analyzer, and electron detection is performed between the fluorescent screen and the energy analyzer. A composite surface analysis device characterized by a device that can be inserted and removed.