JPH01196716A - Magnetic recording medium and tape cassette - Google Patents
Magnetic recording medium and tape cassetteInfo
- Publication number
- JPH01196716A JPH01196716A JP2054588A JP2054588A JPH01196716A JP H01196716 A JPH01196716 A JP H01196716A JP 2054588 A JP2054588 A JP 2054588A JP 2054588 A JP2054588 A JP 2054588A JP H01196716 A JPH01196716 A JP H01196716A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- magnetic recording
- recording medium
- protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 20
- 230000001681 protective effect Effects 0.000 claims abstract description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 239000000314 lubricant Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 230000001050 lubricating effect Effects 0.000 abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 abstract description 5
- 239000001301 oxygen Substances 0.000 abstract description 5
- -1 oxygen ions Chemical class 0.000 abstract description 4
- 238000010301 surface-oxidation reaction Methods 0.000 abstract description 4
- 229910021385 hard carbon Inorganic materials 0.000 abstract description 3
- 238000002513 implantation Methods 0.000 abstract description 3
- 229920006254 polymer film Polymers 0.000 abstract description 3
- 235000014113 dietary fatty acids Nutrition 0.000 abstract description 2
- 229930195729 fatty acid Natural products 0.000 abstract description 2
- 239000000194 fatty acid Substances 0.000 abstract description 2
- 150000004665 fatty acids Chemical class 0.000 abstract description 2
- 229910000531 Co alloy Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 229910020676 Co—N Inorganic materials 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適する強磁性金属薄膜全磁気
記録層とする磁気記録媒体及びそれを内蔵したテープカ
セットに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium having a ferromagnetic metal thin film all-magnetic recording layer suitable for high-density magnetic recording, and a tape cassette incorporating the same.
従来の技術
垂直磁気記録方式は現行の面内磁気記録方式に比べ、短
波長での減磁が小さく、その実用化は、今後の磁気記録
の発展にとって重要な技術で、専用の磁気記録媒体の実
用特性の向上が重点課題としてとりあげられて改善検討
が加えられている。Conventional technology The perpendicular magnetic recording method has less demagnetization at short wavelengths than the current longitudinal magnetic recording method, and its practical application is an important technology for the future development of magnetic recording. Improving practical characteristics has been taken up as a priority issue, and improvements are being considered.
特に、Co −Or 、 Go −Or −Nb 等
の強磁性金属薄膜は、耐摩耗性に乏しく、金属石けんや
、パーフルオロポリエーテル等の潤滑剤を配したり(ダ
イジェスト オプ インターマグネティク(Diges
t of INTERMAG) 1985 、 EA
−10(1985))、Go−Or−0保護膜ヲスパツ
タリング法により形成し耐摩耗性を改善する方法〔第9
回日本応用磁気学会学術講演概要集、26八人−11(
1985))等が提案されている。In particular, ferromagnetic metal thin films such as Co-Or and Go-Or-Nb have poor abrasion resistance, and may be treated with lubricants such as metal soap or perfluoropolyether (Digest Op Intermagnetic).
of INTERMAG) 1985, EA
-10 (1985)), Method of forming Go-Or-0 protective film by sputtering method to improve wear resistance [No. 9]
Collected summaries of academic lectures of the Japan Society of Applied Magnetics, 268-11 (
1985)) etc. have been proposed.
発明が解決しようとする課題
しかしながら、保護膜を配し、耐摩耗性を改善した時、
垂直磁気記録方式でも、面内磁気記録方式と変らないス
ペーシング損失による短波長つ1の低下が大きくなるこ
とから、極力保護膜を薄く構成する改善か、磁気記録層
自身の耐摩耗性を改善することで、短波長域でのC/N
−i確保し、かつ耐久性も実用範囲に保持する必要があ
り、改善が望まれていた。Problems to be Solved by the Invention However, when a protective film is provided to improve wear resistance,
Even in the perpendicular magnetic recording method, the drop in short wavelengths due to spacing loss, which is the same as in the longitudinal magnetic recording method, is large, so it is recommended to make the protective film as thin as possible or improve the wear resistance of the magnetic recording layer itself. By doing so, the C/N in the short wavelength range
-i, and it is necessary to maintain durability within a practical range, and improvements have been desired.
本発明は上記した事情に鑑みてなされたもので、C/N
と耐久性を共に改良した垂直磁気記録用の磁気記録媒体
とそれを用いたテープカセットを提供するものである。The present invention was made in view of the above circumstances, and the C/N
The present invention provides a magnetic recording medium for perpendicular magnetic recording with improved durability and durability, and a tape cassette using the same.
課題全解決するための手段
本発明の磁気記録媒体は、上記した問題点を解決するた
め、CO系合金垂直磁化膜を部分的に表面酸化した上に
保護潤滑層を配するようにしたものである。Means for Solving All the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a CO-based alloy perpendicular magnetization film partially oxidized on the surface and a protective lubricant layer disposed on the surface. be.
作用
本発明の磁気記録媒体は、上記した構成により、垂直磁
化膜自身に酸化部分の微小突部が形成され、その部分で
の相手側との摺動負担により摩擦、摩耗が軽減し、耐久
性が向上すると共に、スペーシング損失2受ける部分が
酸化部分に集中し、その他の部分は、無視できるので短
波長域でのC/Nが確保されることになる。Effect: Due to the above-described structure, the magnetic recording medium of the present invention has minute protrusions of oxidized portions formed on the perpendicularly magnetized film itself, which reduces friction and wear due to the sliding load on the other side, and improves durability. At the same time, the C/N ratio in the short wavelength range is ensured because the portions subject to spacing loss 2 are concentrated in the oxidized portions and other portions can be ignored.
実施例
以下、図面を参照しながら本発明の一実施例について詳
しく説明する。図は本発明の一実施例の磁気記録媒体の
拡大断面図である。図で1はポリエチレンテレフタレー
ト、ポリフェニレニサルファイド、ポリエーテルサルフ
ォン、ポリエーテルイミド等の高分子フィルムで必要に
応じ、微粒子塗布層等の下塗9層を配したものを用いる
こともできる。2はGo−Or 、 Go −Mo 、
Go−Ti 。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings. The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In the figure, 1 is a polymer film made of polyethylene terephthalate, polyphenylene sulfide, polyether sulfone, polyetherimide, etc. If necessary, a film with nine undercoating layers such as a fine particle coating layer can also be used. 2 is Go-Or, Go-Mo,
Go-Ti.
Go −W 、 Go−Or −Wb 、 Co −N
i −Or等のG。Go-W, Go-Or-Wb, Co-N
G of i-Or etc.
系合金垂直磁化膜で電子ビーム蒸着法、高周波スパンタ
リング法、イオyブレーティング法等により形成した0
、05μmから0.3μmの薄膜で3は部分的な表面酸
化層で、酸化層の厚みは耐久性確保のためには厚く、ス
ペーシング損失を減らしいを改善するためには薄くする
ことが求められることから100人から200人が好ま
しいもので、部分的な表面酸化層の上面からみた面積は
、全体のAからIA程度が好ましい。又表面酸化層は、
点状に散在してもよいし、ストライプ状又は格子状等で
もよく、加工法は酸素イオン注入か酸素中性ビーム注入
、酸素原子注入が適している。4は保護潤滑層で、BN
膜、ダイアモンド状硬質炭素薄膜、プラズマ重合膜など
の保護膜に、脂肪酸、パーフルオロポリエーテル等の潤
滑層を配したものでスペーシング損失を小さくするよう
薄く構成する必要があり、材料選択、製造方法、製造条
件については実験的に検討し、最適化するのが好ましい
。A perpendicularly magnetized film of a perpendicularly magnetized alloy is formed by electron beam evaporation, high-frequency sputtering, io-y brating, etc.
, 05 μm to 0.3 μm thin film, 3 is a partial surface oxidation layer, the oxide layer needs to be thick to ensure durability, and thin to reduce spacing loss and improve stiffness. 100 to 200 people is preferable because of the large number of people involved, and the total area of the partial surface oxidized layer as viewed from the top is preferably about A to IA. In addition, the surface oxidation layer is
They may be scattered in the form of dots, stripes, or grids, and suitable processing methods include oxygen ion implantation, oxygen neutral beam implantation, and oxygen atom implantation. 4 is a protective lubricating layer, BN
A protective film such as a thin diamond-like hard carbon film or a plasma-polymerized film is coated with a lubricating layer made of fatty acid, perfluoropolyether, etc. It must be thin enough to minimize spacing loss, and material selection and manufacturing are required. It is preferable to examine and optimize the method and manufacturing conditions experimentally.
以下、更に具体的に本発明の一実施例について詳しく説
明する。厚み10μmのポリエチレンテレフタレートフ
ィルム(平均粗さ26人、最大粗さ60人)上に、高周
波スパッタリング法でG。Hereinafter, one embodiment of the present invention will be described in more detail. G was applied onto a 10 μm thick polyethylene terephthalate film (average roughness: 26 mm, maximum roughness: 60 mm) using a high-frequency sputtering method.
−1r (Or : 20,4wt%)垂直磁化膜11
500人形成し、酸素原子を、酸素イオンを1sK、、
でで加速し、中間でイオンと直交する方向に電子シャワ
ーを浴びせて、中和して作り、その酸素原子ビームi4
〜5X10 atoms/−で照射し、酸化層厚み12
0人、酸化層面分率24%、酸化層形状はテープの長平
方向とほぼ直交方向に並んだ幅50μmのストライプ状
とした。この処理により、酸化層部は、平均50人の突
部となった。-1r (Or: 20.4wt%) perpendicular magnetization film 11
500 people form oxygen atoms and oxygen ions at 1sK,
Oxygen atomic beam i4
Irradiated with ~5X10 atoms/-, oxide layer thickness 12
The oxide layer surface fraction was 24%, and the oxide layer shape was a stripe shape with a width of 50 μm arranged in a direction substantially perpendicular to the longitudinal direction of the tape. As a result of this treatment, the oxidized layer portion had an average of 50 protrusions.
更にこの上に、グラフアイIfターゲットにして、 人
r + H2= 7.2 X 1 0−’ (Torr
) 人r:H2=1:4.1356(M田) 1.5
(KW )の条件でスパッタリングして、ダイアモン
ド状硬質炭素薄膜を70人形成し、その土に、パーフル
オロセルボン酸として市販のデュポン社製の” KRY
TOX、157FS−M″を乾燥厚50八で配し、8ミ
リ幅の磁気テープとした。一方比較例はco−Or−0
保護膜を高周波スパッタリング法により160人形成し
そノ上に同1.; < ” KRYTOX 15了FS
−M″ヲ60人配た以外は同じ条件のものを用いた。両
者のテープ全改造した8ミリビデオによV特性比較した
。Furthermore, on top of this, set the graph eye If target, person r + H2 = 7.2 X 1 0-' (Torr
) Person r:H2=1:4.1356 (Mada) 1.5
A diamond-like hard carbon thin film was formed by sputtering under the conditions of (KW), and on the soil was added "KRY" manufactured by DuPont, which is commercially available as perfluorocervonic acid.
TOX, 157FS-M'' was arranged with a dry thickness of 50 mm to make a magnetic tape with a width of 8 mm.On the other hand, the comparative example was co-Or-0.
160 protective films were formed by high frequency sputtering method, and the same 1. ; < ” KRYTOX 15 FS
The same conditions were used except that 60 ``-M'' tapes were distributed.The V characteristics of both tapes were compared using 8mm video tapes that had been completely modified.
ギャップ長o、16μmの積層型アモルファスヘッドに
より、0.38μmの記録波長の矩形波を記録し、再生
G/Hf比較した。初期のC/Nは実施例2o(dB)
とすると、比較例は−s、2(dB)であった。又40
℃85%RHでくり返し走行した時、60回目の再生出
力は、実施例は初期値に対し、3台のビデオとも1(d
B)以内の出力低下であったが、比較例は再生出力が3
7回目の走行で3(dB)低下しかつ、走行が不安定と
なる現象がみられた。A rectangular wave with a recording wavelength of 0.38 μm was recorded using a stacked amorphous head with a gap length o of 16 μm, and the reproduction G/Hf was compared. Initial C/N is Example 2o (dB)
Then, the comparative example was -s, 2 (dB). 40 again
When repeatedly driven at ℃85%RH, the playback output for the 60th time was 1(d) for all three video cameras compared to the initial value in the example.
B) However, in the comparative example, the playback output was 3.
On the 7th run, there was a phenomenon in which the power level decreased by 3 (dB) and the running became unstable.
スチル特性は、実施例は、画面にノイズが目立つまでの
時間が70〜75(分)であったのに比し、比較例は4
1〜47(分)であった。As for the still characteristics, in the example, the time until noise became noticeable on the screen was 70 to 75 minutes, while in the comparative example it was 4 minutes.
It was 1 to 47 (minutes).
発明の効果
以上のように本発明によれば短波長域で改善されたC/
Nと、耐久性をもった磁気記録媒体が得られるといった
すぐれた効果がある。Effects of the Invention As described above, according to the present invention, the C/
N has the excellent effect of producing a durable magnetic recording medium.
図は本発明の一実施例における磁気記録媒体の拡大断面
図である。
1・・・・・・高分子フィルム、2・・・・・・GO系
系合金垂直化化膜3・・・・・・部分表面酸化層。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名/
−−一 高 公 子 フ ィ ル人? −−−Co糸
金合金垂直磁化The figure is an enlarged cross-sectional view of a magnetic recording medium in one embodiment of the present invention. 1...Polymer film, 2...GO-based alloy verticalization film 3...Partial surface oxidation layer. Name of agent: Patent attorney Toshio Nakao and 1 other person/
--Kimiko Ichigo Phil person? ---Co thread metal alloy perpendicular magnetization
Claims (2)
に保護潤滑層を配したことを特徴とする磁気記録媒体。(1) A magnetic recording medium characterized by having a Co-based alloy perpendicularly magnetized film partially oxidized on the surface and provided with a protective lubricant layer.
したテープカセット。(2) A tape cassette containing the magnetic recording medium according to claim 1 in the form of a tape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2054588A JPH01196716A (en) | 1988-01-29 | 1988-01-29 | Magnetic recording medium and tape cassette |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2054588A JPH01196716A (en) | 1988-01-29 | 1988-01-29 | Magnetic recording medium and tape cassette |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01196716A true JPH01196716A (en) | 1989-08-08 |
Family
ID=12030124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2054588A Pending JPH01196716A (en) | 1988-01-29 | 1988-01-29 | Magnetic recording medium and tape cassette |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01196716A (en) |
-
1988
- 1988-01-29 JP JP2054588A patent/JPH01196716A/en active Pending
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