JPH01287819A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH01287819A JPH01287819A JP11729288A JP11729288A JPH01287819A JP H01287819 A JPH01287819 A JP H01287819A JP 11729288 A JP11729288 A JP 11729288A JP 11729288 A JP11729288 A JP 11729288A JP H01287819 A JPH01287819 A JP H01287819A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic recording
- thin
- recording medium
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 22
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 8
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 abstract description 28
- 230000001681 protective effect Effects 0.000 abstract description 5
- 229920006254 polymer film Polymers 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 229910020630 Co Ni Inorganic materials 0.000 abstract 1
- 229910020641 Co Zr Inorganic materials 0.000 abstract 1
- 229910002440 Co–Ni Inorganic materials 0.000 abstract 1
- 229910020517 Co—Ti Inorganic materials 0.000 abstract 1
- 229910020520 Co—Zr Inorganic materials 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 229910003460 diamond Inorganic materials 0.000 abstract 1
- 239000010432 diamond Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- -1 polysal 7 Polymers 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RUDINRUXCKIXAJ-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,14-heptacosafluorotetradecanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RUDINRUXCKIXAJ-UHFFFAOYSA-N 0.000 description 1
- 229910020676 Co—N Inorganic materials 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度記録に適した強磁性金属薄膜を磁気記録
層とする磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density recording.
従来の技術
近年、高密度磁気記録への要望から、従来の長手記録に
於ても、最近提案された垂直磁気記録に於ても、Ge系
の強磁性金属薄膜を磁気記録層とする磁気記録媒体の実
用化が強く望まれ、研究が盛んである。Conventional technology In recent years, due to the demand for high-density magnetic recording, magnetic recording using a Ge-based ferromagnetic metal thin film as the magnetic recording layer has become popular, both in conventional longitudinal recording and in the recently proposed perpendicular magnetic recording. There is a strong desire to put the medium into practical use, and research is active.
とりわけ、短波長記録での記録減磁が無視できる垂直磁
気記録は、単磁極ヘッドと、パーマロイ薄膜、Go−O
r垂直磁化膜から成る2層媒体との組み合わせで、極め
て優れた高ぞ度記録特性を示すことが開示され〔特公昭
58−91号公報〕に及んで、−層注目を集め以降、各
方面で改良が続けられてきた中で、現状で最も高記録密
度を達成しているリング型の磁気ヘッドによるヘリカル
走査方式と単層媒体の組み合わせでも高密度記録の可能
性が示されるに及び〔特開昭61−77128号公報〕
実用化に拍車がかかっている。In particular, perpendicular magnetic recording, in which recording demagnetization during short wavelength recording can be ignored, uses a single magnetic pole head, permalloy thin film, and Go-O.
It was disclosed in Japanese Patent Publication No. 58-91 that it exhibits extremely excellent high-level recording characteristics when used in combination with a two-layer medium consisting of a perpendicularly magnetized film. While improvements have been made in the field of technology, the possibility of high-density recording has been shown to be possible even by combining a helical scanning method using a ring-shaped magnetic head, which currently achieves the highest recording density, and a single-layer medium. Publication No. 61-77128]
Practical application is gaining momentum.
実用化の最重要課題は、高密度記録特性を維持できる耐
久性の確保にあり、各種の保護、潤滑膜が検討され〔特
開昭61−131231号公報、特開昭61−1518
30号公報、#!f開昭61−224128号公報〕る
中で、カーボン系の保護膜の利用が〔特開昭61−12
6627号公報、特開昭61−220120号公報、特
開昭61−233412号公報〕耐久性の向上に有効で
あることが知られるようになり、とりわけ硬質のカーボ
ン膜の保護膜としての期待は大きい〔外国論文誌アイイ
ーイーイー トランザクションズ オンマグネティクス
(IEICE TRANSACTIONSON M
AGNKTIC8)vo/ MAG−23,No、。The most important issue for practical application is to ensure durability that can maintain high-density recording characteristics, and various protection and lubricating films have been studied [JP-A-61-131231, JP-A-61-1518].
Publication No. 30, #! JP-A No. 61-224128], the use of a carbon-based protective film [JP-A No. 61-12]
No. 6627, JP-A-61-220120, JP-A-61-233412] It has become known that it is effective in improving durability, and is particularly expected to be used as a protective film for hard carbon films. Large [Foreign journal IEICE TRANSACTIONS ON MAGNETICS]
AGNKTIC8) vo/MAG-23, No.
P、P、2410〜2412 (1987) )。P, P, 2410-2412 (1987)).
発明が解決しようとする課題
硬質カーボン摸の中で、ダイアモンド状硬質炭素膜(以
下り、L、C膜と呼ぶ)は、その硬度が保護性能にとっ
て重要で、スパッタリング法、プラズマ加速法、イオン
ビームデポジション法等の夫々の製造条件を最適化する
ことで対応が図られているのが現状であるが、保護性能
を十分得るに必要であることから、短波長でのスペーシ
ング損失が問題であり、改善が望1れていた。本発明は
、上記した事情に鑑みなされたもので、スペーシング損
失を改良した磁気記録媒体を提供するものである。Problems to be Solved by the Invention Among hard carbon films, the hardness of diamond-like hard carbon films (hereinafter referred to as L and C films) is important for their protective performance, and they can be used with sputtering methods, plasma acceleration methods, and ion beam methods. Currently, solutions are being taken by optimizing manufacturing conditions such as the deposition method, but spacing loss at short wavelengths is a problem because it is necessary to obtain sufficient protection performance. There was a hope for improvement. The present invention was made in view of the above circumstances, and provides a magnetic recording medium with improved spacing loss.
課題を解決するための手段
上記した課題を解決するため本発明の磁気記録媒体は、
強磁性金属薄膜上に81又は00層を介してダイアモン
ド状硬質炭素薄膜を配するようにしたものである。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises:
A diamond-shaped hard carbon thin film is disposed on a ferromagnetic metal thin film via an 81 or 00 layer.
作用
本発明の磁気記録媒体は、上記した構成により、Sl又
はGe薄膜がり、 L、 C,膜をよりダイアモンド購
造の結晶配列をエピタキシー的に助けることから硬さが
増大し、薄くしても十分な保護性能を有するように出来
ることからスペーシング損失を小さくできるようになる
のである。Operation The magnetic recording medium of the present invention has the above-described structure, and since the Sl or Ge thin film epitaxially supports the crystal alignment of the L, C film, the hardness increases and even if the film is made thinner. Since sufficient protection performance can be achieved, spacing loss can be reduced.
実施例
以下、図面を参照しながら本発明の実施例について説明
する。図は本発明の磁気記録媒体に係る一実施例の拡大
断面図である。図で1は、ポリアミド、ポリイミド、ポ
リエーテルエーテルケトン。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. The figure is an enlarged sectional view of one embodiment of the magnetic recording medium of the present invention. In the figure, 1 is polyamide, polyimide, polyether ether ketone.
ポリエーテルサルフオン、ボリフェニレンサルフフイド
、ポリサル7オン、ポリエチレンナフタレート等の高分
子フィルムで、必要に応じて、水溶性高分子から成るみ
みず状の下塗り層や、T:xo 2 +Zr O2*
Ca c 05 + Or 205等の微粒子を配した
微粒子塗布層等を配したものを用いることもできる。Polymer film such as polyether sulfon, polyphenylene sulfide, polysal 7, polyethylene naphthalate, etc. If necessary, a worm-like undercoat layer made of water-soluble polymer or T: xo 2 + Zr O 2 *
It is also possible to use a layer coated with fine particles such as Ca c 05 + Or 205 or the like.
2はGo −Cr 、 Go −Ti 、 Co −N
i 、 Go−Zr。2 is Go-Cr, Go-Ti, Co-N
i, Go-Zr.
Go−Ru、 Go−Pt、Go−T1L+ Co −
W、 Go −0、Go −Ni −0,Go −C
r −Nb 、Go −Ni−P等の強磁性金属薄膜
で、スパッタリング法。Go-Ru, Go-Pt, Go-T1L+ Co −
W, Go-0, Go-Ni-0, Go-C
Sputtering method using a ferromagnetic metal thin film such as r-Nb, Go-Ni-P, etc.
イオンブレーティング法、電子ビーム蒸着法等により形
成される。It is formed by ion blating method, electron beam evaporation method, etc.
3はSi又はGoの薄膜で、好ましい膜厚は20人から
50人で高周波スパッタリング法又はイオンブレーティ
ング法で製膜するのが好ましいが、勿論、高分子フィル
ムの温度をあげて電子ビーム蒸着することで製膜しても
よい。4はり、 L、 C。3 is a thin film of Si or Go, preferably formed by 20 to 50 people using a high frequency sputtering method or an ion blasting method, but of course, it is also possible to raise the temperature of the polymer film and deposit it with an electron beam. A film may be formed by this method. 4 Hari, L, C.
膜で、高周波スパッタリング法、イオンビームデポジシ
ョン法、プラズマ加速法等で形成した膜厚50Aから1
00ムの膜を用いればよい。5は高級アルコール、弗素
オイル等の潤滑剤で真空蒸着法、溶液塗布法等により、
スペーシング損失を無視できる量を配設すればよい。A film with a thickness of 50A to 1
A film of 0.00 μm may be used. 5 is a lubricant such as higher alcohol or fluorine oil by vacuum deposition method, solution coating method, etc.
It is sufficient to arrange the amount so that the spacing loss can be ignored.
本発明は、磁気ディスク・磁気テープのいずれで実施し
てもよいが以下更に具体的に比較例との対比で一例を説
明する。厚み10μmのポリエチレンテレフタレートフ
ィルム上に直径90ムのKu203微粒子を15ケ/(
μm)配し、その上に高周波スパッタリング法でGo
−Cjr (Co : s。Although the present invention may be implemented using either a magnetic disk or a magnetic tape, one example will be explained in more detail below in comparison with a comparative example. 15 pieces/(
μm), and Go
-Cjr (Co: s.
wt% )垂直磁化膜を1800人配し、Sl又はGe
をターゲットにして高周波スパッタリング法でSi膜又
はGe膜を配し、その上にグラファイトをターゲットに
してり、 L、 C膜を形成し、真空蒸着法で40人パ
ーフルオロミリスチン酸を配してから8ミリ幅の磁気テ
ープを製造した。一方比較例は、Si又はGeを介さず
に同じ条件でり、 L、 C,膜を形成したものである
。これらの磁気テープを改造した8ミリビデオにより、
ギャップ長0.13μmのアモルファスヘッドにより、
ビット長0.19μm。wt%) 1800 perpendicularly magnetized films, Sl or Ge
A Si film or a Ge film is placed using a high-frequency sputtering method using the target as a target, and then a L and C film is formed using a graphite target, and perfluoromyristic acid is placed using a vacuum evaporation method. A magnetic tape with a width of 8 mm was manufactured. On the other hand, in the comparative example, L, C, films were formed under the same conditions without using Si or Ge. With 8mm video modified from these magnetic tapes,
With an amorphous head with a gap length of 0.13 μm,
Bit length 0.19μm.
トランクピッチ6μmの信号を記録し、再生出力を相対
比較すると共にスチル状態で、ノイズが画像目視で目立
つようになるまでの時間で耐久性を比較した結果をテー
プ条件を変えたものについて表にまとめて示した。A signal with a trunk pitch of 6 μm was recorded, and the playback output was compared relative to the other, and the durability was compared in the still state by the time until noise became noticeable when visually inspecting the image. The results are summarized in a table for different tape conditions. It was shown.
(以下余白)
表より、従来例とほぼ同程度の耐久性を得た上でスペー
シング損失の改良は、約3(dB)の出力増につながる
もので高密度記録にとって有価値性は明白である。尚C
o −N i −0斜め蒸着膜はGo−Or薄膜よりも
保護膜が薄くでき例えばあることも確かめた中で特記す
べき事項といえる。(Left below) From the table, it can be seen that improving the spacing loss while obtaining almost the same durability as the conventional example leads to an increase in output of approximately 3 (dB), which is clearly useful for high-density recording. be. Nao C
This is a matter worth mentioning as it has been confirmed that the o -N i -0 obliquely deposited film can have a thinner protective film than the Go-Or thin film.
発明の効果
以上のように本発明によれば、耐久性を確保した上で高
密度記録を実現できる磁気記録媒体が得られるといった
すぐれた効果がある。Effects of the Invention As described above, the present invention has the excellent effect of providing a magnetic recording medium that can realize high-density recording while ensuring durability.
図は本発明に係る一実施例の磁気記録媒体の拡大断面図
である。
1・・・・・・高分子フィルム、2・・・・・・強磁性
金属薄膜、3・・・・・・Si (又はG6)4膜、4
・・・・・・D、L、C膜。The figure is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention. 1...Polymer film, 2...Ferromagnetic metal thin film, 3...Si (or G6) 4 film, 4
...D, L, C membranes.
Claims (1)
ンド状硬質炭素薄膜を配したことを特徴とする磁気記録
媒体。A magnetic recording medium characterized in that a diamond-shaped hard carbon thin film is disposed on a ferromagnetic metal thin film via a Si or Ge layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11729288A JPH01287819A (en) | 1988-05-13 | 1988-05-13 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11729288A JPH01287819A (en) | 1988-05-13 | 1988-05-13 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01287819A true JPH01287819A (en) | 1989-11-20 |
Family
ID=14708141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11729288A Pending JPH01287819A (en) | 1988-05-13 | 1988-05-13 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01287819A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09138943A (en) * | 1995-11-14 | 1997-05-27 | Nec Corp | Magnetic disk medium |
US5973447A (en) * | 1997-07-25 | 1999-10-26 | Monsanto Company | Gridless ion source for the vacuum processing of materials |
US6322880B1 (en) * | 1998-09-28 | 2001-11-27 | Seagate Technology Llc | Magneto-resistance recording media comprising a foundation layer and a C-overcoat |
-
1988
- 1988-05-13 JP JP11729288A patent/JPH01287819A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09138943A (en) * | 1995-11-14 | 1997-05-27 | Nec Corp | Magnetic disk medium |
US5973447A (en) * | 1997-07-25 | 1999-10-26 | Monsanto Company | Gridless ion source for the vacuum processing of materials |
US6322880B1 (en) * | 1998-09-28 | 2001-11-27 | Seagate Technology Llc | Magneto-resistance recording media comprising a foundation layer and a C-overcoat |
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