JPH01184611A - Inductive thin film magnetic head - Google Patents
Inductive thin film magnetic headInfo
- Publication number
- JPH01184611A JPH01184611A JP371788A JP371788A JPH01184611A JP H01184611 A JPH01184611 A JP H01184611A JP 371788 A JP371788 A JP 371788A JP 371788 A JP371788 A JP 371788A JP H01184611 A JPH01184611 A JP H01184611A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- core
- thin film
- magnetic domain
- domain structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 14
- 230000001939 inductive effect Effects 0.000 title claims description 6
- 230000005389 magnetism Effects 0.000 claims 1
- 230000005381 magnetic domain Effects 0.000 abstract description 19
- 230000005415 magnetization Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 3
- 230000006399 behavior Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
【産業上の利用分野〕
本発明は、磁気記録装置における記録媒体への情報の書
き込み及び読み出しを行う磁気ヘッドに係り、特に高密
度な磁気記録に適した薄膜磁気ヘッドに関するものであ
る。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a magnetic head for writing and reading information to and from a recording medium in a magnetic recording device, and particularly relates to a thin film magnetic head suitable for high-density magnetic recording. It is related to.
一般に薄膜磁気ヘッドは、ヨーク構造をもつ磁性薄膜か
らなる磁気コアと、これに挟まれた導電層コイルからな
り、コア先端の磁極部Pが媒体に対向して走行記録及び
再生が行われる。磁気コアの形状に関しては特開昭54
−144501号に記載のように、記録再生効率を高め
、磁気飽和を防止することを目的として、後部コアBが
できるだけ広い断面積をもつように考えられている。第
3図に示すように媒体に対向するトラック幅Xにほぼ等
しい幅をもつ矩形の磁極先端部Pに対し、コイルの上部
及び下部を覆う後部コア部Bの磁性膜の平面形状は、除
々に広がりをもつものが設計されている。又、0部で上
部磁性層が窪み、下部磁性層と接触する構造となってい
る。In general, a thin film magnetic head consists of a magnetic core made of a magnetic thin film having a yoke structure and a conductive layer coil sandwiched between the magnetic core, and a magnetic pole portion P at the tip of the core faces the medium for recording and reproducing. Regarding the shape of the magnetic core, see JP-A-54
As described in No. 144501, the rear core B is designed to have as wide a cross-sectional area as possible for the purpose of increasing recording and reproducing efficiency and preventing magnetic saturation. As shown in FIG. 3, with respect to the rectangular magnetic pole tip P having a width approximately equal to the track width X facing the medium, the planar shape of the magnetic film of the rear core portion B that covers the upper and lower portions of the coil gradually changes. It is designed to be expansive. Further, the upper magnetic layer is depressed at the 0 part and has a structure in which it contacts the lower magnetic layer.
この従来技術は、ヘッド動作時に磁気コア内でおこる磁
化の挙動についての配慮がなされておらず、コアに発生
する磁区構造が不均一、不安定で磁化が複数な挙動をと
るために、再生出力の低下や波形歪を引きおこすという
問題があった。特に磁極先端とそこから広がりをもつ後
部コアとの境界部における磁区構造は、形状や磁歪の影
響を受けて最も不安定となり、記録両特性に大きく影響
する0本発明の目的は、磁気コア内で、磁気的に安定な
磁気構造をとり、ヘッド動作時に、磁化が単純な挙動を
とる磁気コア形状を設計することにある。This conventional technology does not take into consideration the behavior of magnetization that occurs within the magnetic core during head operation, and the magnetic domain structure generated in the core is uneven and unstable, and the magnetization behaves in multiple ways, resulting in a reproduction output. There was a problem in that it caused a decrease in signal strength and waveform distortion. In particular, the magnetic domain structure at the boundary between the magnetic pole tip and the rear core that extends from there is most unstable due to the influence of shape and magnetostriction, and has a large effect on both recording characteristics. The objective is to design a magnetic core shape that has a magnetically stable magnetic structure and whose magnetization behaves simply during head operation.
上記目的は、後部コアの平面形状を、磁極先端とのなす
角θをほぼ90″、望ましくは80°から90°の範囲
とすることにより、達成される。The above object is achieved by making the planar shape of the rear core such that the angle θ it makes with the tip of the magnetic pole is approximately 90″, preferably in the range of 80° to 90°.
磁気コアの磁区構造は、磁気的に安定な状態として第2
図に模式的に示すような還流磁区構造をとる0図中の太
線は磁壁を示し、このような磁区構造はビッタ法やカー
効果観察装置などによって求められる0図のように、磁
極先端と後部領域との境界近傍では、先端領域となす角
がほぼ90゜のすなわち媒体にほぼ平行な外形に沿って
安定な180@磁壁Wができ、不安定な三角状磁区Sは
先端部から遠い部分にできるので全体として安定な磁区
構造となる。これによって、磁化は複雑な挙動をとらな
いので、波形歪をおさえ、再生出力もあがる。The magnetic domain structure of the magnetic core is in a second magnetically stable state.
The thick lines in the diagram indicate the domain walls, and such a magnetic domain structure is obtained by the Bitter method or the Kerr effect observation device, as shown in the diagram, where the magnetic pole tip and rear part are formed. In the vicinity of the boundary with the region, a stable 180@ domain wall W is formed along the outer shape with an angle of approximately 90° with the tip region, that is, approximately parallel to the medium, and an unstable triangular magnetic domain S is formed in a portion far from the tip. This results in an overall stable magnetic domain structure. As a result, magnetization does not behave in a complicated manner, suppressing waveform distortion and increasing reproduction output.
以下、本発明の実施例を図面を用いて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第1図は本発明の1実施例を示す薄膜磁気ヘッドの平面
図である。10はスパッタリング法等で基板上に形成し
たパーマロイ、アモルファス等の磁性膜を、ホトレジス
トをマスクとしたイオンミリング法等を用いてバターニ
ングした磁気コアで、20は導体コイルである。この例
では上部と下部の磁性層はほぼ同一寸法で、磁気コアの
上部磁性層と下部磁性層はCにおいて接触してヨーク構
造をなし、この空間に設けられた導体フィル20は。FIG. 1 is a plan view of a thin film magnetic head showing one embodiment of the present invention. 10 is a magnetic core obtained by patterning a magnetic film of permalloy, amorphous, etc. formed on a substrate by sputtering or the like using ion milling or the like using a photoresist as a mask, and 20 is a conductor coil. In this example, the upper and lower magnetic layers have approximately the same size, and the upper and lower magnetic layers of the magnetic core are in contact at C to form a yoke structure, and the conductor fill 20 is provided in this space.
絶縁層により絶縁されている。第2図に第1図の磁気コ
ア10を示す。本実施例においては、磁極をパーマロイ
合金とし、その平面形状は、磁極先端と後部領域のなす
角θが90″となるようにした。磁気コアの寸法は、Q
、=100pm、Q2=80μmとした。Insulated by an insulating layer. FIG. 2 shows the magnetic core 10 of FIG. 1. In this example, the magnetic pole is made of permalloy alloy, and its planar shape is such that the angle θ between the magnetic pole tip and the rear region is 90''.The dimensions of the magnetic core are Q
, = 100 pm, and Q2 = 80 μm.
磁気コアの磁区構造は第2図に示すような均一な還流磁
区構造となり、磁化は複雑な挙動をとらないので、波形
歪をおさえ、再生出力が増加する。The magnetic domain structure of the magnetic core is a uniform reflux magnetic domain structure as shown in FIG. 2, and the magnetization does not behave in a complicated manner, suppressing waveform distortion and increasing reproduction output.
膜厚0.4μmのγ−Fe203塗布媒体を用いてスペ
ーシング0.3μmで記録再生を行ったところ、高記録
密度領域(20kPCI)での再生出力が第3図に示し
た従来のコア形状の薄膜ヘッドに比べて約20%増加し
、さらに波形歪を小さくすることができた。角度θが8
0〜90度の範囲では同様の効果がみられたが、θを8
0度より小さくすると急激に波形歪が増大した。これは
、先端部と後部コア接続部の近傍に三角磁区が発生する
ためである。When recording and reproduction was performed using a γ-Fe203 coated medium with a film thickness of 0.4 μm and a spacing of 0.3 μm, the reproduction output in the high recording density region (20 kPCI) was as high as that of the conventional core shape shown in Figure 3. This was approximately 20% higher than the thin-film head, and it was possible to further reduce waveform distortion. Angle θ is 8
A similar effect was seen in the range of 0 to 90 degrees, but when θ was changed to 8
When the angle was made smaller than 0 degrees, waveform distortion increased rapidly. This is because a triangular magnetic domain is generated in the vicinity of the tip and rear core connection portion.
第4図、第5図は他の実施例である。第4図は磁極先端
と後部領域とのなす角が90°で、後部領域が媒体に対
して平行部をもった後、さらに垂直方向に除々に広力旬
をもつ磁気コアの平面形状である。これも、先端領域と
後部領域の境界部の磁区構造は安定で磁化が複数な挙動
をしめさないので、波形歪がおさえられると共に出力が
増す。FIGS. 4 and 5 show other embodiments. Figure 4 shows the planar shape of a magnetic core in which the angle between the magnetic pole tip and the rear region is 90°, and the rear region has a portion parallel to the medium, and then has a gradually wider force angle in the perpendicular direction. . Also, since the magnetic domain structure at the boundary between the tip region and the rear region is stable and the magnetization does not exhibit multiple behaviors, waveform distortion is suppressed and the output is increased.
媒体に平行に対向する辺の長さQ3をかえて実験を行っ
た結果、j23がトラック幅と同等以上の場合に最も効
果が大きいことがわかった。As a result of experiments conducted by changing the length Q3 of the side facing parallel to the medium, it was found that the effect is greatest when j23 is equal to or greater than the track width.
第5図は、後部領域の平面形状が後端に凸領域を有する
矩形で、上部磁性層と下部磁性層の接触部Cが前記の凸
領域T内にある磁気コアの平面形状である。これは、先
端領域と後部領域の境界部で安定な磁区構造をとるだけ
でなく、凸領域を除く後部コア全域で安定な磁区構造を
とるため、さらに優れた本発明の効果が得られ波形歪を
完全におさえ、出力を高めることができる。FIG. 5 shows a planar shape of a magnetic core in which the planar shape of the rear region is a rectangle with a convex region at the rear end, and the contact portion C between the upper magnetic layer and the lower magnetic layer is within the aforementioned convex region T. This not only has a stable magnetic domain structure at the boundary between the tip region and the rear region, but also has a stable magnetic domain structure throughout the rear core except for the convex region, which results in even better effects of the present invention and waveform distortion. can be completely suppressed and increase output.
第5図に示す磁極形状の薄膜磁気ヘッドについて波形歪
(ウィグル)の発生頻度をγFe2O3塗布ディスクを
用いて浮上高さ0.3μmでディスク装置により記録再
生を行なって調べた。外部磁場を変動させるなどの種々
の外部条件で、測定を行なったが、ディスク装置のエラ
ーに結びつくような波形歪は観察されなかった。一方第
3図に示す従来の薄膜磁気ヘッドにおいては、100回
の記録再生を行なったところ、38回エラーに結びつく
波形歪を生じた。なお、本発明に示した第4図に示す磁
極形状のヘッドでは、100回の記録再生で、3回の波
形歪が観察されたが、これはいずれもコレクション可能
で実用上問題にならない。The frequency of occurrence of waveform distortion (wiggle) in the thin film magnetic head having the magnetic pole shape shown in FIG. 5 was investigated by performing recording and reproduction using a disk device using a γFe2O3 coated disk at a flying height of 0.3 μm. Measurements were performed under various external conditions such as varying the external magnetic field, but no waveform distortion that would lead to errors in the disk device was observed. On the other hand, in the conventional thin film magnetic head shown in FIG. 3, when recording and reproducing were performed 100 times, waveform distortion resulting in errors occurred 38 times. In addition, in the head having the magnetic pole shape shown in FIG. 4 according to the present invention, waveform distortion was observed three times in 100 recording and reproducing operations, but all of these distortions can be corrected and do not pose a practical problem.
本発明の範囲をこえると、急激に波形歪が増大する。When the range of the present invention is exceeded, waveform distortion increases rapidly.
本発明の効果は一般の場合について言えるが、とくにト
ラック幅が狭くなった場合に顕著である。The effects of the present invention can be applied to general cases, but are particularly noticeable when the track width becomes narrow.
トラック幅20μmでは従来の磁極形状でも、出力がも
ともと大きいため大きな問題は生じないが、15μm以
下となると本発明の効果が顕著である。When the track width is 20 .mu.m, even the conventional magnetic pole shape does not cause any major problem because the output is originally large, but when the track width is 15 .mu.m or less, the effect of the present invention becomes remarkable.
(発明の効果〕
本発明によれば、薄膜磁気ヘッドの再生出力を増大し波
形歪を低減して、磁気記憶装置の性能を向上することが
できる。(Effects of the Invention) According to the present invention, the reproduction output of the thin film magnetic head can be increased and the waveform distortion can be reduced, thereby improving the performance of the magnetic storage device.
第1図は本発明の1実施例の誘導型薄膜磁気ヘッドの平
面図、第2図は第1図に示した磁気コアを拡大して示す
平面図、第3図は従来の磁気コアの例を示す平面図、第
4図および第5図は本発明の他の実施例を示す磁気コア
の平面図である。
10・・・磁気コア磁性膜、20・・・導体コイル、P
・・・磁極先端領域、B・・・後部領域、C・・・上下
磁性膜接触部、T・・・凸領域。
多7の
12回
14回
¥Jの
、!45回FIG. 1 is a plan view of an inductive thin film magnetic head according to an embodiment of the present invention, FIG. 2 is an enlarged plan view of the magnetic core shown in FIG. 1, and FIG. 3 is an example of a conventional magnetic core. FIGS. 4 and 5 are plan views of magnetic cores showing other embodiments of the present invention. 10... Magnetic core magnetic film, 20... Conductor coil, P
...Magnetic pole tip region, B...rear region, C...upper and lower magnetic film contact area, T...convex region. Multi 7 times 12 times 14 times ¥J's! 45 times
Claims (1)
つ矩形の磁極先端と、磁極先端の断面積より広い断面積
をもつ後部コアからなる磁気コアを有する誘導型薄膜磁
気ヘッドにおいて、上記磁気コアの平面形状は磁極先端
と後部コアのなす角度がおよそ90°に構成したことを
特徴とする誘導型薄膜磁気ヘッド。 2、特許請求の範囲第1項記載のヘッドにおいて、後部
磁気コアの、媒体にほぼ平行に対向する辺の長さがトラ
ック幅以上であることを特徴とする誘導型薄膜磁気ヘッ
ド。 3、特許請求の範囲の範囲第1項記載のヘッドにおいて
、後部領域の平面形状が後端に凸領域を有するもので、
上部磁性層と下部磁性層の接触部が、前記の凸領域内に
ある磁気コアを有することを特徴とする誘導型薄膜磁気
ヘッド。[Claims] 1. Inductive thin film magnetism having a magnetic core consisting of a rectangular magnetic pole tip with a width approximately equal to the track width facing the magnetic medium and a rear core with a cross-sectional area wider than the cross-sectional area of the magnetic pole tip. An inductive thin film magnetic head characterized in that the planar shape of the magnetic core is such that the angle between the tip of the magnetic pole and the rear core is about 90°. 2. An inductive thin film magnetic head according to claim 1, wherein the length of the side of the rear magnetic core that faces substantially parallel to the medium is longer than the track width. 3. Scope of Claims The head according to claim 1, wherein the planar shape of the rear region has a convex region at the rear end,
An inductive thin film magnetic head characterized in that a contact portion between an upper magnetic layer and a lower magnetic layer has a magnetic core located within the convex region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP371788A JPH01184611A (en) | 1988-01-13 | 1988-01-13 | Inductive thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP371788A JPH01184611A (en) | 1988-01-13 | 1988-01-13 | Inductive thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01184611A true JPH01184611A (en) | 1989-07-24 |
Family
ID=11565067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP371788A Pending JPH01184611A (en) | 1988-01-13 | 1988-01-13 | Inductive thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01184611A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111212A (en) * | 1990-08-31 | 1992-04-13 | Hitachi Ltd | Thin-film magnetic head |
US6430003B1 (en) | 1998-07-30 | 2002-08-06 | Tdk Corporation | Thin film magnetic head and method of manufacturing same |
US7881019B2 (en) * | 2006-03-28 | 2011-02-01 | Hitachi Global Storage Technologies Netherlands B.V. | Two step corner recess for secondary stray field reduction in a perpendicular magnetic recording head |
-
1988
- 1988-01-13 JP JP371788A patent/JPH01184611A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111212A (en) * | 1990-08-31 | 1992-04-13 | Hitachi Ltd | Thin-film magnetic head |
US6430003B1 (en) | 1998-07-30 | 2002-08-06 | Tdk Corporation | Thin film magnetic head and method of manufacturing same |
US6441995B1 (en) | 1998-07-30 | 2002-08-27 | Tdk Corporation | Thin film magnetic head and method of manufacturing same |
US7881019B2 (en) * | 2006-03-28 | 2011-02-01 | Hitachi Global Storage Technologies Netherlands B.V. | Two step corner recess for secondary stray field reduction in a perpendicular magnetic recording head |
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