JPH01183827A - Method and device for applying paste in die bonder - Google Patents

Method and device for applying paste in die bonder

Info

Publication number
JPH01183827A
JPH01183827A JP896388A JP896388A JPH01183827A JP H01183827 A JPH01183827 A JP H01183827A JP 896388 A JP896388 A JP 896388A JP 896388 A JP896388 A JP 896388A JP H01183827 A JPH01183827 A JP H01183827A
Authority
JP
Japan
Prior art keywords
paste
transfer pad
recess
lead frame
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP896388A
Other languages
Japanese (ja)
Other versions
JPH0793336B2 (en
Inventor
Toru Takamura
徹 高村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP63008963A priority Critical patent/JPH0793336B2/en
Publication of JPH01183827A publication Critical patent/JPH01183827A/en
Publication of JPH0793336B2 publication Critical patent/JPH0793336B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L2224/743Apparatus for manufacturing layer connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE:To keep a coating thickness and shape of paste constant at all times by a method wherein a recessed trench is filled with paste, a transfer pad is contact-pressed to the paste in the recessed section, the paste is attached onto the underside of the transfer pad, and the paste is applied to a bonding section. CONSTITUTION:When a table 1 and a blade 2 are displaced relatively under the state in which the blade 2 is installed to a section upper than the base of a recessed section 1b in the table 1 by fixed height, the recessed section 1b is filled with paste 7 in specified thickness at all times. Since the paste 7 is attached onto the underside of a transfer pad 5, the paste 7 takes a constant shape by the form of the underside of the transfer pad 5. Paste 7a adhering on the underside of the transfer pad 5 is transferred to a lead frame 6, etc. Accordingly, the paste having fixed thickness and a fixed shape is applied onto the lead frame 6, etc.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はペーストをリードフレーム、基板等に塗布する
ダイボンダーにおけるペースト塗布方法及び塗布装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a paste coating method and a coating device in a die bonder for coating paste on lead frames, substrates, etc.

[従来の技術] 例えばダイをリードフレームにダイボンダーでボンディ
ングするには、その前工程でリードフレームにペースト
を塗布する必要がある。
[Prior Art] For example, in order to bond a die to a lead frame using a die bonder, it is necessary to apply a paste to the lead frame in a pre-process.

従来のペースト塗布方法は、例えば特開昭57−126
141号公報に示すように、デイスペンサー装置により
行っている。即ち、吐出用ニードルの付いたシリンジと
称する容器にペーストを入れ、シリンジ内のペーストに
空気圧をかけてペーストをニードルより定量吐出させ、
リードフレームの所定位置(ボンディング部)に付けて
いる。
The conventional paste application method is, for example, disclosed in Japanese Patent Application Laid-Open No. 57-126.
As shown in Japanese Patent No. 141, this is carried out using a dispenser device. That is, paste is placed in a container called a syringe equipped with a discharge needle, and air pressure is applied to the paste in the syringe to cause the paste to be discharged in a fixed amount from the needle.
It is attached to a predetermined position (bonding part) on the lead frame.

[発明が解決しようとする課題] 上記従来技術は、ペーストにかける空気圧等によって吐
出量が変るので、吐出量を一定にすることが困難であっ
た。またニードルより吐出されたペーストは吐出部分に
集中するので、吐出されたペーストの形状をコントロー
ルすることが困難であった。更に吐出時のニードルの高
さがペーストの吐出状態に微妙に影響する。即ち、ニー
ドルの高さが高すぎる場合は、リードフレームに吐出さ
れたペーストとニードル先端部の間のペーストの糸ひき
が長くなり、この糸ひきがリードフレームのボンディン
グ部分以外に付着する。またニードルの高さが低すぎる
場合は、リードフレームに吐出されたペースト間にニー
ドルの先端が入り、ニードルの周囲を汚す。
[Problems to be Solved by the Invention] In the above-mentioned conventional technology, the discharge amount changes depending on the air pressure applied to the paste, etc., so it is difficult to keep the discharge amount constant. Further, since the paste discharged from the needle concentrates on the discharge portion, it is difficult to control the shape of the discharged paste. Furthermore, the height of the needle during discharge slightly affects the state of paste discharge. That is, if the height of the needle is too high, the strings of paste between the paste discharged onto the lead frame and the tip of the needle become long, and these strings adhere to areas other than the bonding portion of the lead frame. Furthermore, if the height of the needle is too low, the tip of the needle will get stuck between the paste discharged onto the lead frame, contaminating the area around the needle.

本発明の目的は、ペーストの塗布厚及び形状を常に一定
に保つことができるダイボンダーにおけるペースト塗布
方法及び装置を提供することにある。
An object of the present invention is to provide a method and apparatus for applying paste in a die bonder, which can always keep the applied thickness and shape of the paste constant.

[課題を解決するための手段] 上記目的は、次の手段により解決される。[Means to solve the problem] The above object is achieved by the following means.

ペースト塗布方法は、リードフレーム等のボンディング
部に塗布するペースト厚に相当する凹形状の溝にペース
トを充填させ、この凹部内のペーストに転写パッドを接
触加圧させてペーストを転写パッドの下面に付け、その
後転写パッドをリードフレーム等のボンディング部に押
付けてペーストをボンディング部に塗布することにより
解決される。
The paste application method involves filling a concave groove corresponding to the thickness of the paste to be applied to the bonding part of a lead frame, etc., and applying pressure to the transfer pad by contacting the paste in this concave area to apply paste to the bottom surface of the transfer pad. This problem can be solved by applying paste to the bonding part by pressing the transfer pad against the bonding part such as a lead frame.

ペースト塗布装置は、ペーストを充填させるための凹部
を有するテーブルと、前記凹部の底面より一定高さ上方
に設けられたブレードと、前記凹部にペーストを充填さ
せるように前記テーブルと前記ブレードとを相対的に移
動させる駆動手段と、上下動及び水平往復動可能で、前
記凹部に充填されたペーストに接触加圧して下面にペー
ストを付け、リードフレーム等のボンディング部にペー
ストを転写させる転写パッドとを備えた構成にすること
により解決される。
The paste application device includes a table having a recess for filling with paste, a blade provided at a certain height above the bottom surface of the recess, and the table and the blade relative to each other so as to fill the recess with paste. and a transfer pad which is movable vertically and horizontally and reciprocally and which contacts and presses the paste filled in the recess to apply the paste to the lower surface and transfer the paste to the bonding part of the lead frame or the like. This problem can be solved by creating a configuration with the following features.

[作用] ブレードをテーブルの凹部の底面より一定高さ上方に設
けた状態でテーブルとブレードとを相対的に移動させる
と、凹部には常に一定厚さのペーストが充填される。こ
のペーストを転写パッドの下面に付けるので、ペースト
の形状は転写パッドの下面形状によって一定形状となる
。この転写パッドの下面に付いたペーストをリードフレ
ーム等に転写するので、リードフレーム等には一定厚さ
及び一定形状のペーストが塗布される。
[Operation] When the table and the blade are moved relative to each other with the blade provided at a constant height above the bottom surface of the recess of the table, the recess is always filled with a constant thickness of paste. Since this paste is applied to the lower surface of the transfer pad, the shape of the paste becomes constant depending on the shape of the lower surface of the transfer pad. Since the paste attached to the lower surface of the transfer pad is transferred to a lead frame or the like, the paste of a constant thickness and shape is applied to the lead frame or the like.

[実施例] 以下、本発明の一実施例を第1図及び第2図により説明
する。回転テーブルlにはリング状に溝laが形成され
、この溝1aの底面には等間隔に複数個(実施例は8個
)の凹部1bが形成されている0回転テーブル1の溝l
a内には下面が回転テーブルlの凹部1bの上面に圧接
するようにブレード2が配設されており、ブレード2は
X、Y、Z及びθ方向に位置調整可能なブレードホルダ
ー3に取付けられている。前記回転テーブル1はモータ
4によって間欠的に回転駆動される。またブレード2と
干渉しない位置の任意の凹部1b(実施例はブレード2
と反対側に位置する凹部lb)の上方には転写パッド5
が配設されており、転写パッド5は図示しない上下動駆
動手段で上下動させられると共に、水平駆動手段で凹部
1bの上方とリードフレーム6の上方とを往復水平動さ
せられる。リードフレーム6は図示しないガイドレール
にガイドされ、図示しない移送手段で間欠的に送られる
ようになっている。
[Example] An example of the present invention will be described below with reference to FIGS. 1 and 2. A ring-shaped groove la is formed in the rotary table l, and a plurality of (eight in the embodiment) recesses 1b are formed at equal intervals on the bottom surface of the groove l of the rotary table 1.
A blade 2 is disposed in the inside a so that its lower surface is in pressure contact with the upper surface of the recess 1b of the rotary table l, and the blade 2 is attached to a blade holder 3 whose position can be adjusted in the X, Y, Z, and θ directions. ing. The rotary table 1 is intermittently rotated by a motor 4. Also, any recess 1b at a position that does not interfere with the blade 2 (in the embodiment, the blade 2
Above the recess lb) located on the opposite side is the transfer pad 5.
The transfer pad 5 is moved up and down by a vertical drive means (not shown), and is also moved horizontally in a reciprocating manner above the recess 1b and above the lead frame 6 by a horizontal drive means. The lead frame 6 is guided by a guide rail (not shown) and is intermittently fed by a transport means (not shown).

次に作用について説明する。ブレード2のX、Y、Z及
びθ方向の調整を行い、ブレード2の下面を凹部1bの
上面に圧接させておき、ブレード2の手前の溝1a部分
にペースト7を供給する。
Next, the effect will be explained. The blade 2 is adjusted in the X, Y, Z, and θ directions to bring the lower surface of the blade 2 into pressure contact with the upper surface of the recess 1b, and the paste 7 is supplied to the groove 1a in front of the blade 2.

そして、モータ4を駆動して回転テーブルlを間欠的に
回転させると、ブレード2の下面を通過した凹部1bに
は、該凹部1bの深さに相当する厚みのペースト7aが
充填される。ペース)7aが充填された凹部1bが転写
パッド、5の下方に位置して停止すると、転写パッド5
が下降して凹部1b内のペース)7aに接触加圧し、ペ
ースト7aは転写パッド5の下面に付く、その後、転写
パッド5は上昇、水平移動、下降させられてリードフレ
ーム6のボンディング部に接触加圧して、転写パッド5
の下面のペースト7aをリードフレーム6のボンディン
グ部に転写する。
When the motor 4 is driven to rotate the rotary table l intermittently, the recess 1b that has passed through the lower surface of the blade 2 is filled with paste 7a having a thickness corresponding to the depth of the recess 1b. When the concave portion 1b filled with the paste 7a is located below the transfer pad 5 and stops, the transfer pad 5
The paste 7a descends to contact and press the paste 7a in the recess 1b, and the paste 7a sticks to the lower surface of the transfer pad 5.Then, the transfer pad 5 is raised, moved horizontally, and lowered to come into contact with the bonding part of the lead frame 6. Apply pressure and transfer the transfer pad 5.
The paste 7a on the lower surface of is transferred to the bonding portion of the lead frame 6.

転写パッド5が凹部1bより上昇後、回転テブールlは
間欠回転する。また転写パッド5はリードフレーム6の
ボンディング部にペースト7aを転写後、上昇、水平移
動、下降させられて凹部1bの上方に位置する。またリ
ードフレーム6はペース)7aが塗布された後、次のボ
ンディング部が塗布位置に位置するように送られる。以
後、上記動作を繰返して順次リードフレーム6にペース
ト7aを塗布する。
After the transfer pad 5 rises from the recess 1b, the rotating table l rotates intermittently. Further, after transferring the paste 7a to the bonding portion of the lead frame 6, the transfer pad 5 is raised, horizontally moved, and lowered to be located above the recess 1b. Further, after the lead frame 6 is coated with the paste 7a, it is moved so that the next bonding part is located at the coating position. Thereafter, the above operation is repeated to sequentially apply the paste 7a to the lead frame 6.

このように、ブレード2を回転テーブル1の凹部1bに
圧接した状態で回転テーブルlを回転させると、凹部1
bには常に一定厚さのペースト7aが充填される。この
ペース)7aを転写パッド5の下面に付けるので、転写
パッド5の下面に付いたペース)7aの形状は転写パッ
ド5の下面形状によって一定形状となる。この転写パッ
ド5の下面に付いたペースト7aをリードフレーム6に
転写するので、リードフレーム6には一定厚さ及び一定
形状のペーストが塗布される。
In this way, when the rotary table l is rotated with the blade 2 in pressure contact with the recess 1b of the rotary table 1, the recess 1
b is always filled with a constant thickness of paste 7a. Since this paste 7a is attached to the lower surface of the transfer pad 5, the shape of the paste 7a attached to the lower surface of the transfer pad 5 becomes a constant shape depending on the shape of the lower surface of the transfer pad 5. Since the paste 7a attached to the lower surface of the transfer pad 5 is transferred to the lead frame 6, the paste is applied to the lead frame 6 with a constant thickness and a constant shape.

なお、上記実施例においては、ブレード2を回−転テー
ブル1の凹部1bに圧接させた場合について説明したが
、圧接させなく、凹部1bの底面より一定の高さに設け
てもよい。また凹部1bは回転テーブル1に設けたが、
四部1bの高さに合ったものを別個に製作し、これを回
転テーブルlに固定してもよい。
In the above embodiment, a case has been described in which the blade 2 is brought into pressure contact with the recess 1b of the rotary table 1, but the blade 2 may be placed at a constant height from the bottom surface of the recess 1b without being brought into contact with the recess 1b. Although the recess 1b was provided in the rotary table 1,
It is also possible to separately manufacture one that matches the height of the four parts 1b and fix it to the rotary table l.

第3図は本発明の他の実施例を示す、前記実施例は、回
転テーブル1に複数個の四部1bを形成したが、本実施
例は連続したリング状の四部1bよりなる。このように
形成しても前記実施例と同様の効果が得られる。
FIG. 3 shows another embodiment of the present invention. In the previous embodiment, a plurality of four parts 1b were formed on the rotary table 1, but in this embodiment, the rotary table 1 is composed of four continuous ring-shaped parts 1b. Even if formed in this way, the same effects as in the embodiment described above can be obtained.

[発明の効果] 以上の説明から明らかなように、本発明によれば、ペー
ストの塗布厚及び形状を常に一定に保つことができる。
[Effects of the Invention] As is clear from the above description, according to the present invention, the application thickness and shape of the paste can always be kept constant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す概略構成一部断面正面
図、第2図は回転テーブル部分の平面図、第3図は発明
の他の実施例を示す回転テーブル部分の平面図である。 l二回転テーブル、    1b:凹部、2ニブレード
、      4:モータ、5:転写パッド、    
 6:リードフレーム。 7.7a:ペースト。 第1図 2:フし一ト 4:干−フ 5−に写ハ0ソト 6:リードフレー^ 7.7a:ペースト 第2図     第3図
FIG. 1 is a partially cross-sectional front view of a schematic configuration showing one embodiment of the present invention, FIG. 2 is a plan view of a rotating table portion, and FIG. 3 is a plan view of a rotating table portion showing another embodiment of the invention. be. l Two rotary tables, 1b: recess, 2 blades, 4: motor, 5: transfer pad,
6: Lead frame. 7.7a: Paste. Fig. 1 2: Frame 4: Copy 0 to 5: Lead phrase ^ 7.7a: Paste Fig. 2 Fig. 3

Claims (3)

【特許請求の範囲】[Claims] (1)リードフレーム等のボンディング部に塗布するペ
ースト厚に相当する凹形状の溝にペーストを充填させ、
この凹部内のペーストに転写パッドを接触加圧させてペ
ーストを転写パッドの下面に付け、その後転写パッドを
リードフレーム等のボンディング部に押付けてペースト
をボンディング部に塗布することを特徴とするダイボン
ダーにおけるペースト塗布方法。
(1) Fill a concave groove with paste corresponding to the thickness of the paste to be applied to the bonding part of the lead frame, etc.,
In a die bonder, the paste is applied to the lower surface of the transfer pad by contacting and pressurizing the paste in the recess, and then the transfer pad is pressed against a bonding part such as a lead frame to apply the paste to the bonding part. Paste application method.
(2)ペーストを充填させるための凹部を有するテーブ
ルと、前記凹部の底面より一定高さ上方に設けられたブ
レードと、前記凹部にペーストを充填させるように前記
テーブルと前記ブレードとを相対的に移動させる駆動手
段と、上下動及び水平往復動可能で、前記凹部に充填さ
れたペーストに接触加圧して下面にペーストを付け、リ
ードフレーム等のボンディング部にペーストを転写させ
る転写パッドとを備えていることを特徴とするダイボン
ダーにおけるペースト塗布装置。
(2) a table having a recess for filling the paste; a blade provided at a certain height above the bottom of the recess; and a relative position between the table and the blade so as to fill the recess with the paste. A transfer pad that is capable of vertical and horizontal reciprocating movement and that contacts and presses the paste filled in the recess to apply paste to the lower surface and transfer the paste to a bonding part of a lead frame or the like. A paste coating device for a die bonder, characterized in that:
(3)テーブルは回転テーブルよりなり、駆動手段は前
記回転テーブルを間欠的に回転駆動させるモータよりな
ることを特徴とする特許請求の範囲第2項記載のダイボ
ンダーにおけるペースト塗布装置。
(3) The paste coating device for a die bonder according to claim 2, wherein the table is a rotary table, and the drive means is a motor that rotates the rotary table intermittently.
JP63008963A 1988-01-18 1988-01-18 Paste application device in die bonder Expired - Lifetime JPH0793336B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63008963A JPH0793336B2 (en) 1988-01-18 1988-01-18 Paste application device in die bonder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63008963A JPH0793336B2 (en) 1988-01-18 1988-01-18 Paste application device in die bonder

Publications (2)

Publication Number Publication Date
JPH01183827A true JPH01183827A (en) 1989-07-21
JPH0793336B2 JPH0793336B2 (en) 1995-10-09

Family

ID=11707329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63008963A Expired - Lifetime JPH0793336B2 (en) 1988-01-18 1988-01-18 Paste application device in die bonder

Country Status (1)

Country Link
JP (1) JPH0793336B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002223063A (en) * 2001-01-24 2002-08-09 Juki Corp Flux holding device for electronic component mounting machine
JP2005347775A (en) * 2005-08-23 2005-12-15 Juki Corp Electronic component mounting apparatus and mounting method
KR20110047152A (en) 2009-10-29 2011-05-06 캐논 머시너리 가부시키가이샤 Coating device and coating method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031376U (en) * 1983-08-10 1985-03-02 関西日本電気株式会社 Conductive paste molding equipment
JPS6048166A (en) * 1983-08-29 1985-03-15 Fujitsu Ltd Adhesive agent coating device
JPS61107733A (en) * 1984-10-31 1986-05-26 New Japan Radio Co Ltd Adhesive supplying apparatus
JPS6327027A (en) * 1986-07-18 1988-02-04 Mitsubishi Electric Corp Resin bonding apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031376U (en) * 1983-08-10 1985-03-02 関西日本電気株式会社 Conductive paste molding equipment
JPS6048166A (en) * 1983-08-29 1985-03-15 Fujitsu Ltd Adhesive agent coating device
JPS61107733A (en) * 1984-10-31 1986-05-26 New Japan Radio Co Ltd Adhesive supplying apparatus
JPS6327027A (en) * 1986-07-18 1988-02-04 Mitsubishi Electric Corp Resin bonding apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002223063A (en) * 2001-01-24 2002-08-09 Juki Corp Flux holding device for electronic component mounting machine
JP4636700B2 (en) * 2001-01-24 2011-02-23 Juki株式会社 Flux holding device for electronic component mounting machine
JP2005347775A (en) * 2005-08-23 2005-12-15 Juki Corp Electronic component mounting apparatus and mounting method
KR20110047152A (en) 2009-10-29 2011-05-06 캐논 머시너리 가부시키가이샤 Coating device and coating method

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