JPH01180957A - Exhaust gas treatment device for carburization furnace - Google Patents
Exhaust gas treatment device for carburization furnaceInfo
- Publication number
- JPH01180957A JPH01180957A JP332188A JP332188A JPH01180957A JP H01180957 A JPH01180957 A JP H01180957A JP 332188 A JP332188 A JP 332188A JP 332188 A JP332188 A JP 332188A JP H01180957 A JPH01180957 A JP H01180957A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- carbon
- finned tubes
- treatment device
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005192 partition Methods 0.000 claims abstract description 9
- 239000000498 cooling water Substances 0.000 claims abstract description 7
- 238000005255 carburizing Methods 0.000 claims description 17
- 238000004891 communication Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 abstract description 15
- 238000001816 cooling Methods 0.000 abstract description 8
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 241000972773 Aulopiformes Species 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000019515 salmon Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、浸炭炉の真空排気系におけるカーボンを含
んだ排気ガスの処理装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a treatment device for exhaust gas containing carbon in a vacuum exhaust system of a carburizing furnace.
第３図に示すように、プラズマ浸炭炉１においては、真
空ポンプ２によりチャンバー３内を真空にするとともに
ワークＷを陰極としてグロー放電を発生させ、チャンバ
ー３内に導入された浸炭ガスをイオン化し、高周波電流
が供給されるコイル４によりワークＷを９００〜１０４
０°Ｃ程度に加熱し、ワークＷにカーボンを侵入させて
浸炭を行なっている。As shown in FIG. 3, in the plasma carburizing furnace 1, the chamber 3 is evacuated by the vacuum pump 2, and a glow discharge is generated using the workpiece W as a cathode to ionize the carburizing gas introduced into the chamber 3. , the workpiece W is 900~104 by the coil 4 to which high frequency current is supplied.
Carburizing is performed by heating the workpiece W to about 0°C and infiltrating carbon into the workpiece W.
このような浸炭炉１において、浸炭操業中に過剰に存在
したカーボンにより固体カーボンが発生し、このカーボ
ンを含んだ排気ガスを真空ポンプ２に引き込むと、カー
ボンがポンプの翼を摩耗させ、また、排気ガスの温度が
高いためポンプの油の性能を悪化させ、ポンプの性能か
ダウンすることになる。In such a carburizing furnace 1, solid carbon is generated due to excess carbon during carburizing operation, and when exhaust gas containing this carbon is drawn into the vacuum pump 2, the carbon wears out the blades of the pump, and The high temperature of the exhaust gas deteriorates the performance of the pump oil, resulting in a drop in pump performance.
そのため、真空排気系に排気ガス中のカーボンを除去し
、排ガスを冷却する装置を設置する必要かあり、従来に
おいては、第４図に示すようなスートトラップＴが開発
されている。Therefore, it is necessary to install a device in the vacuum exhaust system to remove carbon from the exhaust gas and cool the exhaust gas, and conventionally, a soot trap T as shown in FIG. 4 has been developed.
この装置は、Ａから入った排気ガスをスチールウールＷ
を通過させることにより、カーボンをスチールウールＷ
に吸着させ、水冷シャケ。This device converts the exhaust gas entering from A into steel wool W.
By passing the carbon through steel wool W
Adsorb it to water-cooled salmon.
トＪにより冷却される円筒部Ｃの内側から外側へ通過さ
せることにより排気ガスを冷却させ、冷却された排ガス
をＢから排出するように構成されている。The exhaust gas is cooled by passing from the inside to the outside of the cylindrical portion C, which is cooled by the cylindrical portion C, and the cooled exhaust gas is discharged from the cylindrical portion B.
しかしながら、このような従来の装置の場合、カーボン
の吸着を行った後、ガスを冷却するようにしたため、吸
着効率か悪いという問題点かある。また、装置か大型化
するという問題点もある。However, in the case of such a conventional device, since the gas is cooled after adsorbing carbon, there is a problem in that the adsorption efficiency is poor. Another problem is that the device becomes larger.
この発明は、■ｉｊ述のような問題点を解消すべく創案
されたもので、その目的は、比較的小型の装置でカーボ
ンの吸着効率の向上をＨることのできる浸炭炉の排気ガ
ス処理装置を提供することにある。This invention was devised to solve the problems mentioned above, and its purpose is to treat the exhaust gas of a carburizing furnace, which can improve carbon adsorption efficiency with a relatively small device. The goal is to provide equipment.
本発明の排気ガス処理装置は、第１図に示すように、密
封された箱体６，７内に、冷却水によって冷却されるフ
ィン付チューブ９を多数配設し、箱体の一方側に排気ガ
ス導入口１０、他方側に排気ガス排出口１１を設けて構
成する。As shown in FIG. 1, the exhaust gas treatment device of the present invention has a large number of finned tubes 9 that are cooled by cooling water disposed inside sealed boxes 6 and 7, and one side of the box. It is configured by providing an exhaust gas inlet 10 and an exhaust gas outlet 11 on the other side.
さらに、箱体内を、その上下に連通間隙をもたせた仕切
板１３により、導入口側の給気側室１４と排気側の排気
側室１５に区画する。Further, the inside of the box is divided into an air supply side chamber 14 on the inlet side and an exhaust side chamber 15 on the exhaust side by a partition plate 13 having a communication gap above and below.
浸炭炉からのカーボンを含んだ排気ガスＧか導入口１０
より入り、フィン付チューブ９により排気ガスＧが冷却
されると同時に冷却されたフィン付チューブ９によりカ
ーボンが吸着除去される。冷却スペース全体がカーボン
吸着スペースであるため、カーボンの吸着効率か増大し
、また装置自体を小型化できる。Inlet port 10 for exhaust gas G containing carbon from the carburizing furnace
As the exhaust gas G is cooled by the finned tube 9, carbon is adsorbed and removed by the cooled finned tube 9. Since the entire cooling space is a carbon adsorption space, the carbon adsorption efficiency is increased and the device itself can be made smaller.
仕切板１３を投げると、排気ガスＧの流量、圧力か制御
され、フィン付チューブ９にガスＧが十分に当り、吸着
効率、冷却効率かより増大する。When the partition plate 13 is thrown, the flow rate and pressure of the exhaust gas G are controlled, the gas G sufficiently hits the finned tube 9, and the adsorption efficiency and cooling efficiency are further increased.
以下、この発明を図示する一実施例に基ついて説明する
。Hereinafter, a description will be given of an embodiment illustrating the present invention.
第１図に示すように、本発明の排気ガス処理装置５は、
上面か開口するとともに上部フランジ６Ａを有するケー
ス６と、シール部材８を介して開口を閉塞し、気密箱体
を形成する上蓋７と、ケース６内に二段で多数配設され
るフィン付チューブ９なとから構成され、上Ｍ７に距離
をおいて配設した排気ガス導入口１０、排気ガス排出口
１１により浸炭炉１からの排気ガスＧをケース６内に導
入し、真空ポンプ２側へ排出するようにされている。As shown in FIG. 1, the exhaust gas treatment device 5 of the present invention includes:
A case 6 having an open top surface and an upper flange 6A, a top lid 7 that closes the opening via a sealing member 8 to form an airtight box, and a large number of finned tubes arranged in two stages inside the case 6. The exhaust gas G from the carburizing furnace 1 is introduced into the case 6 through the exhaust gas inlet 10 and the exhaust gas outlet 11 arranged at a distance from the top M7, and then to the vacuum pump 2 side. It is designed to be discharged.
フィン付チューブ９は、第２図に示すようにし、ケース
６の側壁から両端部が突出する内管１２４こ挿入され、
内管１２内を流れる冷却水Ｗにより冷却される。冷却水
Ｗは、例えば排気ガス排出側端の一本の内管に供給され
、排気ガス導入側端の一本の内管から排出され、間にあ
る内管か適宜に接続される。なお、冷却水の流し方、配
管の接続は、これに限らずどのような方式でもよい。The finned tube 9 is inserted into the inner tube 124 whose both ends protrude from the side wall of the case 6, as shown in FIG.
It is cooled by the cooling water W flowing inside the inner tube 12. The cooling water W is supplied, for example, to one inner pipe at the exhaust gas discharge end, is discharged from one inner pipe at the exhaust gas introduction end, and is appropriately connected to an inner pipe located in between. Note that the method of flowing the cooling water and the connection of piping are not limited to this, and any method may be used.
このような構成において、浸炭炉１からのカーボンを含
んだガスＧが導入口１０より入り、排出口１１から出て
いくか、フィン付チューブ９により排気ガスＧが冷却さ
れ、これと同時に冷却されたフィン付チューブ９により
カーボンか吸着除去される。冷却スペース全体がカーボ
ン吸着スペースであるため、カーボンの吸着効率が増大
し、また装置自体を小型化できる。In such a configuration, carbon-containing gas G from the carburizing furnace 1 enters through the inlet 10 and exits through the outlet 11, or the exhaust gas G is cooled by the finned tube 9 and cooled at the same time. Carbon is adsorbed and removed by the finned tube 9. Since the entire cooling space is a carbon adsorption space, the carbon adsorption efficiency is increased and the device itself can be made smaller.
さらに、ケース６の中央にフィン付チューブ９と平行に
仕切板１３を設け、ケース６内を、導入口側の給気側室
１４と排出口側の排気側室１５に区画する。この仕切板
１３は上下に間隙か生ずるように配設され、室１４と１
５とが上下で連通ずるようにする。Furthermore, a partition plate 13 is provided in the center of the case 6 in parallel with the finned tube 9, and the inside of the case 6 is divided into an air supply side chamber 14 on the inlet side and an exhaust side chamber 15 on the outlet side. This partition plate 13 is arranged so that there is a gap between the upper and lower sides, and the chamber 14 and the
5 so that they communicate at the top and bottom.
このような仕切板１３を設けることにより、排気ガスＧ
の流量、圧力か制御され、フィン付チューブ９にガスＧ
か十分に当り、吸着効率、冷却効率がより増大する。By providing such a partition plate 13, exhaust gas G
The flow rate and pressure of gas G are controlled, and gas G is supplied to the finned tube 9.
The adsorption efficiency and cooling efficiency are further increased.
なお、この排気ガス処理装置５は、第３図に示すように
、浸炭炉１の真空排気系のバイパス排管１６に設置され
、浸炭ガスが導入されている時には、本管のバルブ１７
を閉とし、バイパス排管１６のバルブ１８を開いて操業
する。本発明の排気ガス処理装置５であれば、排気ガス
Ｇ中のカーボンの吸着、排気ガスＧの冷却が十分に行な
われ、カーボンによる真空ポンプ２の翼の摩耗、ポンプ
２中の油性能の悪化が防止され、真空ポンプ２の性能を
下げることはない。As shown in FIG. 3, this exhaust gas treatment device 5 is installed in a bypass exhaust pipe 16 of the vacuum exhaust system of the carburizing furnace 1, and when carburizing gas is introduced, a valve 17 of the main pipe is installed.
is closed, and the valve 18 of the bypass drain pipe 16 is opened for operation. With the exhaust gas treatment device 5 of the present invention, carbon in the exhaust gas G is adsorbed and the exhaust gas G is sufficiently cooled, and the carbon causes wear of the blades of the vacuum pump 2 and deterioration of oil performance in the pump 2. This prevents the performance of the vacuum pump 2 from deteriorating.
前述のとおり、この発明に係る排気ガス処理装置は、密
封された箱体内に、多数のフィン付チューブを配設し、
カーボンの吸着と、排気ガス冷却を同時に行なえるよう
にしたため、冷却スペース全体が吸着スペースとなり、
従来よりも吸着効率か増大する。また、装置自体を従来
よりも小型化し得る。As mentioned above, the exhaust gas treatment device according to the present invention includes a large number of finned tubes arranged in a sealed box,
Since carbon adsorption and exhaust gas cooling can be performed at the same time, the entire cooling space becomes an adsorption space.
Adsorption efficiency is increased compared to conventional methods. Furthermore, the device itself can be made smaller than before.
さらに、仕切板を設けることにより吸着効率、冷却効率
がより増大する。Furthermore, by providing a partition plate, the adsorption efficiency and cooling efficiency are further increased.
これにより真空ポンプの性能を低下させることなく、浸
炭を行ない得る。Thereby, carburization can be performed without reducing the performance of the vacuum pump.
第１図、第２図は、この発明に係る排気ガス処理装置を
示す分解斜視間、部分拡大断面図、第３図はプラズマ浸
炭炉を示す概略断面図、第４図は従来の排気ガス処理装
置を示す断面図である。
１・・・・・・浸炭炉、２・・・・・・真空ポンプ、３
・・・・・・チャンバー、４・・・・・・コイル、５・
・・・・・排ガス処理装置、６・・・・・ケース、６Ａ
・・・・・・−ヒ部フランジ、７・・・・・・上蓋、計
・・・・・シール部材、９・・・・・・フィン付チュー
ブ、１０・・・・・排気ガス導入口、１１・・・・・・
排気ガス排出口、１２・・・・・・内管、１３・・・・
・・仕切板、１４・・・・・・給気側室、１５・・・・
・・排気側室、１６・・・・・バイパス排管、１７．１
８・・・・・・バルブ、Ｗ・・・・・・ワーク、Ｗ・・
・・・・冷却水、Ｇ・・・・・・排気ガス。1 and 2 are exploded perspective and partially enlarged sectional views showing an exhaust gas treatment apparatus according to the present invention, FIG. 3 is a schematic sectional view showing a plasma carburizing furnace, and FIG. 4 is a conventional exhaust gas treatment device. FIG. 2 is a sectional view showing the device. 1...Carburizing furnace, 2...Vacuum pump, 3
...Chamber, 4...Coil, 5.
...Exhaust gas treatment device, 6...Case, 6A
・・・・・・－H flange, 7・・・Top lid, Meter・・・Sealing member, 9・・・Finned tube, 10・・・Exhaust gas inlet , 11...
Exhaust gas outlet, 12... Inner pipe, 13...
...Partition plate, 14...Air supply side chamber, 15...
...Exhaust side chamber, 16...Bypass exhaust pipe, 17.1
8... Valve, W... Work, W...
...Cooling water, G...Exhaust gas.
Claims (2)
ーボンの吸着除去と、排気ガスの冷却を行なう排ガス処
理装置において、 密封された箱体内に、冷却水によって冷却されるフィン
付チューブを多数配設し、前記箱体の一方側に排気ガス
導入口、他方側に排気ガス排出口を設けたことを特徴と
する浸炭炉の排気ガス処理装置。(1) In an exhaust gas treatment device that is installed in the vacuum exhaust system of a carburizing furnace to adsorb and remove carbon in the exhaust gas and cool the exhaust gas, a finned tube that is cooled by cooling water is placed inside a sealed box. An exhaust gas treatment device for a carburizing furnace, characterized in that a large number of these are arranged, an exhaust gas inlet is provided on one side of the box, and an exhaust gas outlet is provided on the other side of the box.
により、排気ガス導入口に連通する給気側室と、排気ガ
ス排出口に連通する排気側室に区画したことを特徴とす
る請求項（１）項記載の浸炭炉の排気ガス処理装置。(2) A claim characterized in that the inside of the box is divided into an air supply side chamber communicating with the exhaust gas inlet and an exhaust side chamber communicating with the exhaust gas outlet by a partition plate having a communication gap above and below the box. An exhaust gas treatment device for a carburizing furnace according to item (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP332188A JPH01180957A (en) | 1988-01-11 | 1988-01-11 | Exhaust gas treatment device for carburization furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP332188A JPH01180957A (en) | 1988-01-11 | 1988-01-11 | Exhaust gas treatment device for carburization furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01180957A true JPH01180957A (en) | 1989-07-18 |
Family
ID=11554090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP332188A Pending JPH01180957A (en) | 1988-01-11 | 1988-01-11 | Exhaust gas treatment device for carburization furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01180957A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005206895A (en) * | 2004-01-23 | 2005-08-04 | Koyo Thermo System Kk | Vacuum carburizing furnace |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579863B2 (en) * | 1977-09-22 | 1982-02-23 |
-
1988
- 1988-01-11 JP JP332188A patent/JPH01180957A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS579863B2 (en) * | 1977-09-22 | 1982-02-23 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005206895A (en) * | 2004-01-23 | 2005-08-04 | Koyo Thermo System Kk | Vacuum carburizing furnace |
| JP4539904B2 (en) * | 2004-01-23 | 2010-09-08 | 光洋サーモシステム株式会社 | Vacuum carburizing furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4303886B2 (en) | Cryopump with discharge filter | |
| JP3544604B2 (en) | Switchable trap device | |
| GB1216448A (en) | Improvements in or relating to cryopumps | |
| US3095494A (en) | Ultra high vacuum device | |
| JPH01180957A (en) | Exhaust gas treatment device for carburization furnace | |
| JP3238099B2 (en) | Evacuation system | |
| JP3227105B2 (en) | Evacuation system | |
| JP4796688B2 (en) | Rare gas recovery method and rare gas recovery device | |
| EP1391253A4 (en) | Device and method for removal of harmful substance | |
| JPH03106432A (en) | Method and device for degassing vacuum apparatus | |
| JP3630518B2 (en) | Trap device | |
| US5043148A (en) | Transfer device | |
| JPS5791719A (en) | Adsorbing device for exhaust gas | |
| JP2005015820A (en) | Sputtering apparatus | |
| JPH04187873A (en) | Evacuation device | |
| JPS6130608B2 (en) | ||
| KR20010077233A (en) | Exhausting apparatus for fabricating semiconductor | |
| KR20000051830A (en) | Powder trap device of semiconductor equipment | |
| RU2226622C1 (en) | Vacuum cryo-adsorption system for chemical oxygen-iodine laser | |
| JPS5471776A (en) | Vacuum exhaust system in ion nitriding apparatus | |
| CN2577935Y (en) | Squirrel-cage absorption pots | |
| JPS62233679A (en) | Heat treating furnace | |
| RU2099598C1 (en) | Method of creation of oil-free vacuum | |
| JPS61178406A (en) | Method of regenerating adsorbent for nitrogen generator | |
| RU2031245C1 (en) | Method of protecting adsorbent in cryostat and cryogenic pump |