JPH01178112A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01178112A JPH01178112A JP133988A JP133988A JPH01178112A JP H01178112 A JPH01178112 A JP H01178112A JP 133988 A JP133988 A JP 133988A JP 133988 A JP133988 A JP 133988A JP H01178112 A JPH01178112 A JP H01178112A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- magnetic
- protective film
- recording medium
- sliding surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 28
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 17
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- 229910052796 boron Inorganic materials 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052580 B4C Inorganic materials 0.000 claims 1
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims 1
- 150000001247 metal acetylides Chemical class 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 230000035699 permeability Effects 0.000 abstract description 3
- 229910000808 amorphous metal alloy Inorganic materials 0.000 abstract description 2
- 230000002035 prolonged effect Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 239000000314 lubricant Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- -1 SL carbide Chemical class 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000002184 metal Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 235000003441 saturated fatty acids Nutrition 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ヘッドに係り、特にヘッド摺動面に耐摩耗
性の保護膜を設けた耐久性ならびに信頼性に優れた磁気
ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head, and more particularly to a magnetic head with excellent durability and reliability in which a wear-resistant protective film is provided on the sliding surface of the head.
情報社会の高度な発展と共に、より高密度の記録が要求
されるに至り、磁気記録、光記録、半導体メモリなど１
種々の情報記録方式が検討されている。中でも、磁気記
録方式は記録−再生の簡便さ、コスト面からも有利な点
があって、長い間、情報の記録分野において重要な地位
を占め、中心的な役割を果たしてきた。しかし、磁気記
録方式には欠点がない訳ではなく、特に磁気ヘッドと磁
気記録媒体とを近接させて高速で相対運動をさせるため
に、どちらかが傷付き易いという問題があった・
また、一方、磁気記録方式における記録密度の向上をは
かるために、連続薄膜型の磁気記録媒体の研究開発が盛
んに行われているが、この種の磁気記録媒体においては
磁気記録層（磁性層）自体の耐摩耗性が劣るため、通常
の場合は磁性層上に硬質の材料からなる保護膜を設けて
いる。しかし、このような硬質の保護膜を設けることに
より磁気記録媒体の磁性層の損傷を防止することができ
ても、逆に磁気ヘッドに著しいダメージを与えるという
問題がしばしば発生した。この問題を解決するために、
種々の潤滑剤を磁気ヘッドと媒体との間に介在させる試
みがなされてきた１例えば、潤滑剤として直鎖型飽和脂
肪酸またはこれらの金属塩からなる単分子膜もしくは累
積膜を磁性層上に設けること（特公昭５６−３０６０９
号公報）や、パーフルオロアルキルポリエーテルを磁性
層上に塗布すること（特開昭６０−６１９１８号公報）
など、数多くの提案がなされている。しかし、この潤滑
剤層の膜厚は記録再生特性の損失抑制の観点から、でき
るだけ潤滑剤層を薄くすることが要求されているため、
実際には磁気ヘッドと磁気記録媒体との直接接触を十分
に防ぐことが戴しく、その結果、磁気ヘッドが損傷を被
り、その使用寿命が極めて短いという問題があった。With the advanced development of the information society, higher density recording is required, and magnetic recording, optical recording, semiconductor memory, etc.1
Various information recording methods are being considered. Among these, the magnetic recording method has advantages in terms of ease of recording and reproduction and cost, and has long occupied an important position and played a central role in the field of information recording. However, the magnetic recording method is not without its drawbacks; in particular, because the magnetic head and magnetic recording medium are brought close together and moved relative to each other at high speed, one of them is easily damaged. In order to improve the recording density in magnetic recording systems, research and development of continuous thin film magnetic recording media is actively being carried out, but in this type of magnetic recording media, the magnetic recording layer (magnetic layer) itself Since wear resistance is poor, a protective film made of a hard material is usually provided on the magnetic layer. However, even if it is possible to prevent damage to the magnetic layer of a magnetic recording medium by providing such a hard protective film, the problem often arises that conversely, significant damage is caused to the magnetic head. to solve this problem,
Attempts have been made to interpose various lubricants between the magnetic head and the medium.1 For example, a monomolecular film or a cumulative film made of linear saturated fatty acids or metal salts thereof is provided on the magnetic layer as a lubricant. Koto (Tokuko Sho 56-30609
(Japanese Unexamined Patent Publication No. 60-61918) or coating perfluoroalkyl polyether on the magnetic layer (Japanese Patent Application Laid-open No. 60-61918).
Many other proposals have been made. However, the film thickness of this lubricant layer is required to be as thin as possible from the perspective of suppressing loss of recording and reproducing characteristics.
In practice, it is difficult to sufficiently prevent direct contact between the magnetic head and the magnetic recording medium, and as a result, the magnetic head is damaged and its service life is extremely short.
上述したごとく、従来技術においては磁気ヘッドと磁気
記録媒体との直接接触により、磁気ヘッドが損傷を受は
易く、そのため使用寿命が短いという問題があった。As described above, in the prior art, there is a problem that the magnetic head is easily damaged due to direct contact between the magnetic head and the magnetic recording medium, resulting in a short service life.
本発明の目的は、上記従来技術の問題点を解消し、磁気
記録媒体と摺接しても耐摩耗性を有する耐久性に優れた
使用寿命の長い磁気ヘッドを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a magnetic head with excellent durability and a long service life, which has wear resistance even when in sliding contact with a magnetic recording medium.
上記本発明の目的は、磁気ヘッドの磁気記録媒体に対す
る摺動面に、ホウ素（Ｂ）、Ｂの炭化物。The object of the present invention is to provide a carbide of boron (B) and B on the sliding surface of a magnetic head against a magnetic recording medium.
Ｂの窒化物、ケイ素（Ｓｉ）、ＳＬの炭化物、ＳＬの窒
化物および炭素（Ｃ）のうちより選択される少なくとも
１種の元素または化合物からなる耐摩耗性の薄膜によっ
て構成される保護膜を設けることにより、達成される。A protective film composed of a wear-resistant thin film made of at least one element or compound selected from B nitride, silicon (Si), SL carbide, SL nitride, and carbon (C). This can be achieved by providing
すなわち、上記耐摩耗性のＢ、Ｓｉ、またはＣからなる
薄膜、Ｂ、Ｓｉの炭化物あるいは窒化物からなる耐摩耗
性の薄い保護膜を、磁気ヘッド摺動面の全面に形成させ
ることにより、磁気記録媒体と摺接しても、磁気ヘッド
の磁性層を構成している摩耗され易い高透磁率アモルフ
ァス合金層などが摩耗し損傷を受けることがなくなるの
で、磁気ヘッドの耐久性が著しく向上し、その使用寿命
が一段と延長される。That is, the magnetic Even when it comes into sliding contact with the recording medium, the easily abraded high-permeability amorphous alloy layer that makes up the magnetic layer of the magnetic head will not be worn out or damaged, so the durability of the magnetic head will be significantly improved. The service life is further extended.
本発明の磁気ヘッドの構成について、図面に基づき、さ
らに具体的に説明する。第１図は、本発明の磁気ヘッド
の構成の一例を示すものであって、磁気記録媒体に接す
る摺動面が全面にわたって保護膜１によって被覆されて
いるため、高透磁率アモルファス層２およびフェライト
コア部３は、直接的に磁気記録媒体に接触することがな
い、また、磁気ヘッドの接合部に用いられているボンデ
ィングガラス４も、媒体との摺接により欠落し易いが、
保護膜１によりカバーされているので、これが剥脱され
るという問題を避けることができる。なお、当然のこと
ながら上記第１図に示すバルク型磁気ヘッドは、本発明
の一つのケースを例示したに過ぎず、他の構造の異なる
バルク型磁気ヘッドおよび薄膜型磁気ヘッドなどにも本
発明が適用できることは言うまでもない。The configuration of the magnetic head of the present invention will be explained in more detail based on the drawings. FIG. 1 shows an example of the configuration of the magnetic head of the present invention, in which the sliding surface in contact with the magnetic recording medium is entirely covered with a protective film 1, so that the high magnetic permeability amorphous layer 2 and the ferrite The core portion 3 does not come into direct contact with the magnetic recording medium, and the bonding glass 4 used in the bonding portion of the magnetic head is also likely to break due to sliding contact with the medium.
Since it is covered with the protective film 1, the problem of this being peeled off can be avoided. It should be noted that the bulk type magnetic head shown in FIG. Needless to say, it can be applied.
本発明の磁気ヘッドに適用する保護膜の構成材料として
は、Ｂ、ＳＬ、Ｃ，Ｂ炭化物、Ｂ窒化物。The constituent materials of the protective film applied to the magnetic head of the present invention include B, SL, C, B carbide, and B nitride.
Ｓｉ炭化物、Ｓｉ窒化物、もしくはこれらの混合物から
なる薄膜が、磁気ヘッド摺動面の保護効果を得る点で好
適に用いられる材料であり、これらの中でも、特にＢあ
るいはＢ炭化物、Ｂ窒化物などのＢ化合物が最も耐摩耗
性に優れ、著しい保護効果を示すものである。なお、上
記の炭化物または窒化物によって構成される保護膜を用
いる場合には、炭素および窒素の含有量が、それぞれ５
０原子％未満であることが好ましく、この範囲を超える
と保護膜としての薄膜の強度が低下するので好ましくな
い。A thin film made of Si carbide, Si nitride, or a mixture thereof is a material that is preferably used in terms of protecting the sliding surface of the magnetic head. Among these, B, B carbide, B nitride, etc. Compound B has the best wear resistance and exhibits a remarkable protective effect. In addition, when using a protective film composed of the above-mentioned carbide or nitride, the content of carbon and nitrogen is 5% each.
The content is preferably less than 0 atomic %, and if it exceeds this range, the strength of the thin film as a protective film decreases, which is not preferred.
本発明の磁気ヘッド摺動面に設ける保護膜の膜厚は、３
０〜１０００人の範囲が好ましく、３０人未満では保護
効果が充分でなく、また１０００人を超えると記録再生
時のスペーシング損失が増加するので好ましくない。The thickness of the protective film provided on the sliding surface of the magnetic head of the present invention is 3.
The range of 0 to 1000 people is preferable, and if it is less than 30 people, the protective effect will not be sufficient, and if it exceeds 1000 people, spacing loss during recording and reproduction will increase, which is not preferable.
本発明の磁気ヘッドの摺動面に設ける保護膜の形成方法
は、通常行われているスパッタリング。The protective film provided on the sliding surface of the magnetic head of the present invention is formed by sputtering, which is commonly used.
イオンブレーティング、真空蒸着などの物理蒸着法、ま
たはプラズマ重合法などの化学蒸着（ＣｖＤ）法を好適
に用いることができる。Physical vapor deposition methods such as ion blasting and vacuum deposition, or chemical vapor deposition (CvD) methods such as plasma polymerization methods can be suitably used.
以下に本発明の一実施例を挙げ、図面を参照しながらさ
らに詳細に説明する。An embodiment of the present invention will be described below in more detail with reference to the drawings.
磁気ヘッドとして、第１図に示す構造のトラック幅Ｔが
４５Ｉ！ｍのバルク型磁気ヘッドであるアモルファス−
フェライト複合型リングヘッドを用いた。As a magnetic head, the track width T of the structure shown in FIG. 1 is 45I! Amorphous bulk type magnetic head
A ferrite composite ring head was used.
この磁気ヘッドの摺動面に、スパッタリング法によって
、Ｂ薄膜、Ｂ炭化物（Ｂ、、−Ｃ０，２）薄膜またはＳ
ｉ薄膜を、膜厚がそれぞれ１５０人となるように成膜し
、３種の磁気ヘッドを作製した。The sliding surface of this magnetic head is coated with a B thin film, a B carbide (B, -C0,2) thin film or an S thin film by sputtering.
Three types of magnetic heads were fabricated by forming i-thin films so that each film had a thickness of 150 layers.
また、比較例として、保護膜を設けない場合およびＴｉ
薄膜またはＳｉｎ、薄膜を保護膜として設けた３種の磁
気ヘッドを、上記実施例と同様にして作製した。In addition, as a comparative example, a case where no protective film is provided and a case where a Ti
Three types of magnetic heads with a thin film or a Sin film and a thin film provided as a protective film were manufactured in the same manner as in the above example.
磁気記録媒体としては、厚さが０．１５−のポリイミド
フィルム基板上に、膜厚が０．２５−のＣｏ、、、。As a magnetic recording medium, a 0.25-thick Co film was placed on a 0.15-thick polyimide film substrate.
Ｃｒ、、、からなる磁性層と、膜厚が０．０５−のＢ保
護層を積層し、さらに潤滑剤としてパーフロロポリエー
テルを塗布したものを用いた。A magnetic layer made of Cr, . . . and a B protective layer having a thickness of 0.05 mm were laminated, and perfluoropolyether was further applied as a lubricant.
上記の実施例および比較例において作製した磁気ヘッド
を用いて、上記の磁気記録媒体に対する走行テストを行
った。磁気ヘッドの耐久性の評価は、通常のドラム試験
機により行い、スチル再生で６０分後における出力が、
初期値の８０％以上であるものを合格（０印で示す）と
し、８０％未満のものを不合格（×印で示す）とした。A running test was conducted on the above magnetic recording medium using the magnetic heads manufactured in the above Examples and Comparative Examples. The durability of the magnetic head was evaluated using a regular drum tester, and the output after 60 minutes of still playback was:
Those that were 80% or more of the initial value were considered to be passed (indicated by a 0 mark), and those that were less than 80% were judged to be a failure (indicated by an x mark).
また、耐久性の評価の後、磁気ヘッド摺動面の顕微鏡観
察によって磁気ヘッドの損傷度を評価した。磁気ヘッド
摺動面に傷の発生がほとんど無いものを合格（０印で示
す）とし、少しでも傷のあるものを不合格（Ｘ印で示す
）とした、なお、上記耐久性の評価での周速は５．８ｍ
／ｓとし、再生出力が最大になる磁気ヘッドの突き出し
条件で評価した。その結果を第１表に示す。After evaluating the durability, the degree of damage to the magnetic head was evaluated by microscopic observation of the sliding surface of the magnetic head. Those with almost no scratches on the sliding surface of the magnetic head were considered to be passed (indicated by a 0 mark), and those with even the slightest scratches were judged to be rejected (indicated by an X mark). Circumferential speed is 5.8m
/s, and the evaluation was made under the magnetic head protrusion condition that maximizes the reproduction output. The results are shown in Table 1.
第１表 第１表に示すごとく１本発明のＢ薄膜、Ｂ、、。Table 1 As shown in Table 1, 1 B thin film of the present invention, B...
Ｃ０，２薄膜、Ｓｉ薄膜を保護膜として摺動面に設けた
磁気ヘッドは、いずれもヘッドの損傷を受けることなく
長時間安定して使用できることが分かる。It can be seen that the magnetic heads in which the C0,2 thin film and the Si thin film are used as protective films on the sliding surfaces can be used stably for long periods of time without any damage to the heads.
なお、上記本発明の実施例において磁気ヘッド摺動面の
保護膜として、Ｂ、Ｂ、、、Ｇｏ、２およびＳｉ薄膜の
場合を例に挙げたが、Ｂ窒化物、ＳＬの炭化物および窒
化物、Ｃ薄膜などの場合においても上記実施例と同様の
効果があることを確認している。In the above embodiments of the present invention, the protective film on the sliding surface of the magnetic head was exemplified using B, B, , Go, 2, and Si thin films, but B nitride, SL carbide, and nitride , C thin film, etc., it has been confirmed that the same effects as in the above embodiments can be obtained.
以上詳細に説明したごとく、本発明の磁気ヘッド摺動面
に耐摩耗性の保護膜を設けた磁気ヘッドは、磁気記録媒
体との摺接によってほとんど損傷を被ることがなく、著
しく耐久性が向上し、その使用寿命が一段と長くなり信
頼性の高い磁気ヘッドが得られる。As explained in detail above, the magnetic head of the present invention, in which a wear-resistant protective film is provided on the magnetic head sliding surface, suffers almost no damage due to sliding contact with a magnetic recording medium, and has significantly improved durability. However, its service life is further extended, and a highly reliable magnetic head can be obtained.
第１図は本発明の実施例において例示した磁気ヘッドの
構造を示す斜視図である。
１・・・保護膜
２・・・高透磁率アモルファス層
３・・・フェライトコア部
４・・・ボンディングガラス
Ｔ・・・トラック幅
代理人弁理士 中 村 純之助FIG. 1 is a perspective view showing the structure of a magnetic head illustrated in an embodiment of the present invention. 1... Protective film 2... High magnetic permeability amorphous layer 3... Ferrite core portion 4... Bonding glass T... Track width Attorney Junnosuke Nakamura
Claims (1)
面上に、ホウ素、ケイ素、炭素、ホウ素の炭化物、ホウ
素の窒化物、ケイ素の炭化物、ケイ素の窒化物のうちよ
り選択される少なくとも１種の元素もしくは化合物から
なる薄膜を、保護膜として設けたことを特徴とする磁気
ヘッド。 ２、ホウ素、ケイ素の炭化物および窒化物に含まれる炭
素および窒素の含有量は、それぞれ原子％で５０％未満
であることを特徴とする特許請求の範囲第１項に記載の
磁気ヘッド。 ３、保護膜の膜厚が、３０〜１０００Åの範囲であるこ
とを特徴とする特許請求の範囲第１項または第２項に記
載の磁気ヘッド。[Claims] 1. Boron, silicon, carbon, boron carbide, boron nitride, silicon carbide, silicon nitride are coated on the sliding surface of the magnetic head that comes into sliding contact with the recording surface of the magnetic recording medium. A magnetic head characterized in that a thin film made of at least one element or compound selected from among these is provided as a protective film. 2. The magnetic head according to claim 1, wherein the content of carbon and nitrogen contained in the carbides and nitrides of boron and silicon is less than 50 atomic %, respectively. 3. The magnetic head according to claim 1 or 2, wherein the protective film has a thickness in the range of 30 to 1000 Å.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP133988A JPH01178112A (en) | 1988-01-08 | 1988-01-08 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP133988A JPH01178112A (en) | 1988-01-08 | 1988-01-08 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01178112A true JPH01178112A (en) | 1989-07-14 |
Family
ID=11498738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP133988A Pending JPH01178112A (en) | 1988-01-08 | 1988-01-08 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01178112A (en) |
-
1988
- 1988-01-08 JP JP133988A patent/JPH01178112A/en active Pending
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