JPH01177938A - Accurate positioning device - Google Patents
Accurate positioning deviceInfo
- Publication number
- JPH01177938A JPH01177938A JP63002896A JP289688A JPH01177938A JP H01177938 A JPH01177938 A JP H01177938A JP 63002896 A JP63002896 A JP 63002896A JP 289688 A JP289688 A JP 289688A JP H01177938 A JPH01177938 A JP H01177938A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- feed screw
- axial direction
- drive shaft
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000831 Steel Inorganic materials 0.000 abstract description 4
- 239000010959 steel Substances 0.000 abstract description 4
- 235000013290 Sagittaria latifolia Nutrition 0.000 abstract 3
- 235000015246 common arrowhead Nutrition 0.000 abstract 3
- 238000010586 diagram Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
- B23Q5/404—Screw bearings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、精密測定機及び精密加工機等の精密位置決め
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to precision positioning devices for precision measuring machines, precision processing machines, and the like.
従来の技術
第３図は従来の精密位置決め装置の一例を示す側面図で
あり、１は本体、２は送りネジ、３は軸継手４を介して
送りネジ２を回転させるパルスモータ、５は送りネジナ
ツトを有し送りネジ２に沿って一軸方向に移動する支持
部材、６は支持部材５上に設けられたテーブル、７はテ
ーブル６上に設けられた圧電素子、８は圧電素子７によ
って、少なくともパルスモータ３の１パルスの回転に対
するテーブル６の移動量と同等の移動量を示すサブテー
ブル、９はサブテーブル８下部に設けられたガイドレー
ルである。BACKGROUND ART FIG. 3 is a side view showing an example of a conventional precision positioning device, in which 1 is a main body, 2 is a feed screw, 3 is a pulse motor that rotates the feed screw 2 via a shaft coupling 4, and 5 is a feed screw. A support member having a screw nut and moving in a uniaxial direction along the feed screw 2, 6 a table provided on the support member 5, 7 a piezoelectric element provided on the table 6, 8 a piezoelectric element 7 that moves at least Reference numeral 9 designates a guide rail provided at the bottom of the sub-table 8, which exhibits a movement amount equivalent to that of the table 6 per rotation of one pulse of the pulse motor 3.
第４図は圧電素子７の動作原理を示す模式図、第５図は
圧電素子７の特性を示す特性グラフであり、圧電素子７
の両端部に電極を設は電圧を印加することにより圧電素
子７自身に歪が生じ、圧電素子７の長さがΔを分だけ伸
びる。更に第５図に示すように圧電素子７に電圧を印加
した場合の電圧と圧電素子７の長さ方向の変位量とは比
例関係に有る。FIG. 4 is a schematic diagram showing the operating principle of the piezoelectric element 7, and FIG. 5 is a characteristic graph showing the characteristics of the piezoelectric element 7.
When electrodes are provided at both ends of the piezoelectric element 7 and a voltage is applied, distortion occurs in the piezoelectric element 7 itself, and the length of the piezoelectric element 7 is extended by Δ. Furthermore, as shown in FIG. 5, there is a proportional relationship between the voltage when a voltage is applied to the piezoelectric element 7 and the amount of displacement in the length direction of the piezoelectric element 7.
以上のように構成された精密位置決め装置について、以
下その動作を説明する。The operation of the precision positioning device configured as described above will be explained below.
先ずパルスモータ３により、軸継手４を介して送りネジ
２が回転する。それに伴って支持部材５が矢印Ａ方向に
移動する為、テーブル６が矢印Ａ方向に移動し位置決め
される。その際パルスモータ３の最小回転角度に相当す
る角度で送りネジ２が回転し、テーブル６は送りネジ２
のピッチに回転角度を乗じた移動量、即ち１パルス当た
りのテーブル６の移動量を最小変位量として移動する。First, the feed screw 2 is rotated by the pulse motor 3 via the shaft joint 4 . As the support member 5 moves in the direction of arrow A, the table 6 moves in the direction of arrow A and is positioned. At that time, the feed screw 2 rotates at an angle corresponding to the minimum rotation angle of the pulse motor 3, and the table 6
The minimum displacement amount is the amount of movement obtained by multiplying the pitch of the table 6 by the rotation angle, that is, the amount of movement of the table 6 per one pulse.
テーブル６は位置決めしようとする目標位置に停止しな
い場合が出て（る為、圧電素子７へ目標位置に達する迄
の距離に等しい変位を圧電素子７が生じるように電圧を
加えることにより、圧電素子７の形状が送りネジ２の軸
方向に変化しサブテしかしながら前記の従来の構成では
、ガイドレール９を有するサブテーブル８をテーブル６
上に組み付ける際の組み付は誤差により、第６図に示す
ようにガイドレール９がテーブル６に対して傾いて取り
付けられる場合がある。その場合テーブル６に対してサ
ブテーブル８が移動する際、第７図に示すようにサブテ
ーブル８はガイドレール９の延長方向に移動する為、テ
ーブル６の移動方向と同方向にサブテーブル８が進まな
い。There are cases where the table 6 does not stop at the target position to be positioned. However, in the above-mentioned conventional configuration, the sub-table 8 having the guide rail 9 is
Due to errors during assembly, the guide rail 9 may be attached at an angle with respect to the table 6, as shown in FIG. In that case, when the sub-table 8 moves relative to the table 6, the sub-table 8 moves in the direction of extension of the guide rail 9 as shown in FIG. Not proceed.
従って位置決めしようとする目標位置にサブテーブル８
が停止せず、サブテーブル８の正確な位本発明は前記問
題点を解決するため、駆動軸端部に圧電素子を有する微
少移動機構を備え、駆動軸の軸方向に圧電素子の形状を
変化させ駆動軸自体を軸方向に移動させるようにしたも
のである。Therefore, the sub-table 8 is placed at the target position to be positioned.
In order to solve the above-mentioned problem, the present invention is equipped with a minute movement mechanism having a piezoelectric element at the end of the drive shaft, and changes the shape of the piezoelectric element in the axial direction of the drive shaft. The drive shaft itself is moved in the axial direction.
作 用
この構成により、１つのテーブルだけで位置決めを行う
ものである。Function: With this configuration, positioning is performed using only one table.
実 施 例
第１図は本発明の一実施例における精密位置決め装置を
示す側面図、第２図は同要部斜視図であり、１は本体、
２は送りネジ、３はパルスモータ、５は支持部材、６は
テーブルであり、ここ迄は従来の精密位置決め装置の構
成と同じであるので詳細な説明は省略する。Embodiment FIG. 1 is a side view showing a precision positioning device according to an embodiment of the present invention, and FIG. 2 is a perspective view of the same essential parts.
2 is a feed screw, 3 is a pulse motor, 5 is a support member, and 6 is a table, and since the configuration up to this point is the same as that of a conventional precision positioning device, a detailed explanation will be omitted.
１０．１１は本体１に設けられ送りネジ２をスライド可
能にするためのベアリング、１２はパルスモータ３の回
転を送りネジ２に伝える可撓性軸継手、１３は送りネジ
２自体を移動させる微少移動機構であり、第２図に示す
ように１４は圧電素子、１５は圧電素子１４の先端に設
けられたスチールボール、１６はリング１７及びストッ
プリング１８を介して圧電素子１４を送りネジ２の軸方
向に予圧するスプリング、１９は送りネジ２の軸方向に
対する圧電素子１４の形状の変化をバックラッシ無しに
送りネジ２へ伝えるための組み合わせベアリングである
。10. 11 is a bearing provided on the main body 1 to enable the feed screw 2 to slide; 12 is a flexible shaft joint that transmits the rotation of the pulse motor 3 to the feed screw 2; and 13 is a minute bearing that moves the feed screw 2 itself. 2, 14 is a piezoelectric element, 15 is a steel ball provided at the tip of the piezoelectric element 14, and 16 is a moving mechanism that moves the piezoelectric element 14 to the feed screw 2 via a ring 17 and a stop ring 18. The spring 19 preloading in the axial direction is a combination bearing for transmitting a change in the shape of the piezoelectric element 14 in the axial direction of the feed screw 2 to the feed screw 2 without backlash.
以上のように構成された本実施例についてその動作を説
明する。The operation of this embodiment configured as above will be explained.
先ずパルスモータ３により、可撓性軸継手１２を介して
送りネジ２が回転する。それに伴って支持部材５が矢印
Ｂ方向に移動する為、支持部材５上に設けられたテーブ
ル６が矢印Ｂ方向に移動する。First, the feed screw 2 is rotated by the pulse motor 3 via the flexible shaft joint 12 . As the support member 5 moves in the direction of arrow B, the table 6 provided on the support member 5 moves in the direction of arrow B.
この時テーブル６は位置決めしようとする目標位置に停
止しない場合が出て（る為、送りネジ２端部に設けられ
た微少移動機構１３の一部である圧電素子１４に電圧を
加えることにより、送りネジ２の軸方向に圧電素子１４
の形状が変化しスチールボール１５を介して送りネジ２
自体が矢印Ｃ方向に移動し、それに伴ってテーブル６が
目標位置迄移動する。At this time, there are cases where the table 6 does not stop at the target position to be positioned. A piezoelectric element 14 is placed in the axial direction of the feed screw 2.
The shape of the feed screw 2 changes through the steel ball 15.
itself moves in the direction of arrow C, and the table 6 moves accordingly to the target position.
以上のように本実施例によれば、圧電素子１４を有する
微少移動機構１３を送りネジ２端部に備え、送りネジ２
の軸方向に圧電素子１４の形状を変化させ送りネジ２自
体を軸方向に移動させることにより、支持部材５上には
テーブル６のみが設けられる為位置決めしようとする目
標位置にテーブル６を正確に停止させることができるも
のである。As described above, according to this embodiment, the minute movement mechanism 13 having the piezoelectric element 14 is provided at the end of the feed screw 2.
By changing the shape of the piezoelectric element 14 in the axial direction and moving the feed screw 2 itself in the axial direction, since only the table 6 is provided on the support member 5, the table 6 can be accurately positioned at the target position. It can be stopped.
発明の効果
本発明は駆動軸端部に圧電素子を有する微少移動機構を
備え、駆動軸の軸方向に圧電素子の形状を変化させ駆動
軸自体を軸方向に移動させることにより、１つのテーブ
ルのみで位置決めできる為、案内レールを下部に有する
テーブルを他のテ−プル上に組み付ける際の組み付は誤
差が無くなり、テーブルを正確に位置決めすることがで
きる。Effects of the Invention The present invention is equipped with a minute movement mechanism having a piezoelectric element at the end of the drive shaft, and by changing the shape of the piezoelectric element in the axial direction of the drive shaft and moving the drive shaft itself in the axial direction, only one table can be moved. Since the table having the guide rail at the bottom can be positioned on another table, there is no error when assembling the table, and the table can be positioned accurately.
図、第４図は圧電素子の動作原理を示す模式図、第５図
は圧電素子の特性を示す特性図、第６図。
第７図は従来の精密位置決め装置の一例を示す上面図で
ある。
１・・・・本 体 ２・・・・送りネジ６・・・・テ
ーブル １２・・・・可撓性継手１３・・・・微少移
動機構 １４・・・・圧電素子１５・・・・スチール
ボール
代理人の氏名 弁理士 中尾敏男 ほか１名１−−一苓
１苓
５−−（搏舒碕
Ｃ−°−チー１ル
ｆＯ，ｌｌ−−−イアリンク゛
第４図
７−万電紮）
第５図
９−−−ブイｙし一ル
第７図4 is a schematic diagram showing the operating principle of the piezoelectric element, FIG. 5 is a characteristic diagram showing the characteristics of the piezoelectric element, and FIG. 6 is a diagram showing the characteristics of the piezoelectric element. FIG. 7 is a top view showing an example of a conventional precision positioning device. 1...Body 2...Feed screw 6...Table 12...Flexible joint 13...Minute movement mechanism 14...Piezoelectric element 15...Steel Name of Ball's agent Patent attorney Toshio Nakao and 1 other person 1--Ichirei 1Rei5-- 5 Figure 9 --- Buoy Ichiru Figure 7
Claims (1)
動軸に連結し一軸方向に移動するテーブルと、前記駆動
軸端部に圧電素子を有する微少移動機構を備え、前記駆
動軸の軸方向に前記圧電素子の形状を変化させ前記駆動
軸自体を軸方向に移動させるようにしたことを特徴とす
る精密位置決め装置。A drive shaft, a drive means for rotating the drive shaft, a table connected to the drive shaft and movable in one axial direction, and a minute movement mechanism having a piezoelectric element at an end of the drive shaft; A precision positioning device characterized in that the drive shaft itself is moved in the axial direction by changing the shape of the piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63002896A JP2782715B2 (en) | 1988-01-08 | 1988-01-08 | Precision positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63002896A JP2782715B2 (en) | 1988-01-08 | 1988-01-08 | Precision positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01177938A true JPH01177938A (en) | 1989-07-14 |
| JP2782715B2 JP2782715B2 (en) | 1998-08-06 |
Family
ID=11542118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63002896A Expired - Fee Related JP2782715B2 (en) | 1988-01-08 | 1988-01-08 | Precision positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2782715B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03113737U (en) * | 1990-03-08 | 1991-11-21 | ||
| US5644951A (en) * | 1991-11-15 | 1997-07-08 | Hatamura; Yotaro | Feed screw apparatus and precise positioning and fine feed system |
| KR100725990B1 (en) * | 2007-02-06 | 2007-06-08 | 한국생산기술연구원 | Nano stage comprised of dual servo mechanism |
| DE102007035346A1 (en) * | 2007-07-27 | 2009-01-29 | Feinmess Dresden Gmbh | Positioning system for a micro stage |
| KR100904720B1 (en) * | 2007-10-04 | 2009-06-25 | 국민대학교산학협력단 | Redendantly actuated 3 degree of freedom nano positioning stage using 4 precision transfer mechanism |
| KR100957190B1 (en) * | 2007-08-29 | 2010-05-11 | (주)피에조테크놀리지 | Stage apparatus using a Piezoelectric linear motor |
| KR100975137B1 (en) * | 2008-05-02 | 2010-08-11 | 한국생산기술연구원 | High-Rigidity Dual Servo Nano Stage |
| WO2019219176A1 (en) * | 2018-05-15 | 2019-11-21 | Universitaet Stuttgart | Apparatus and method for creating a relative movement between a tool and a workpiece |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939884A (en) * | 1972-08-25 | 1974-04-13 |
-
1988
- 1988-01-08 JP JP63002896A patent/JP2782715B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939884A (en) * | 1972-08-25 | 1974-04-13 |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03113737U (en) * | 1990-03-08 | 1991-11-21 | ||
| JPH0810501Y2 (en) * | 1990-03-08 | 1996-03-29 | 株式会社明電舎 | Reversing device |
| US5644951A (en) * | 1991-11-15 | 1997-07-08 | Hatamura; Yotaro | Feed screw apparatus and precise positioning and fine feed system |
| KR100725990B1 (en) * | 2007-02-06 | 2007-06-08 | 한국생산기술연구원 | Nano stage comprised of dual servo mechanism |
| DE102007035346A1 (en) * | 2007-07-27 | 2009-01-29 | Feinmess Dresden Gmbh | Positioning system for a micro stage |
| KR100957190B1 (en) * | 2007-08-29 | 2010-05-11 | (주)피에조테크놀리지 | Stage apparatus using a Piezoelectric linear motor |
| KR100904720B1 (en) * | 2007-10-04 | 2009-06-25 | 국민대학교산학협력단 | Redendantly actuated 3 degree of freedom nano positioning stage using 4 precision transfer mechanism |
| KR100975137B1 (en) * | 2008-05-02 | 2010-08-11 | 한국생산기술연구원 | High-Rigidity Dual Servo Nano Stage |
| WO2019219176A1 (en) * | 2018-05-15 | 2019-11-21 | Universitaet Stuttgart | Apparatus and method for creating a relative movement between a tool and a workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2782715B2 (en) | 1998-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |