JPH0639042B2 - Table drive - Google Patents
Table driveInfo
- Publication number
- JPH0639042B2 JPH0639042B2 JP4189785A JP4189785A JPH0639042B2 JP H0639042 B2 JPH0639042 B2 JP H0639042B2 JP 4189785 A JP4189785 A JP 4189785A JP 4189785 A JP4189785 A JP 4189785A JP H0639042 B2 JPH0639042 B2 JP H0639042B2
- Authority
- JP
- Japan
- Prior art keywords
- feed screw
- travel
- displacement
- drive device
- traveling direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 4
- 238000012937 correction Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 8
- 238000012935 Averaging Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 101100459518 Bacillus subtilis (strain 168) nadE gene Proteins 0.000 description 1
- 101100393826 Dickeya dadantii (strain 3937) outB gene Proteins 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q23/00—Arrangements for compensating for irregularities or wear, e.g. of ways, of setting mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は旋盤，マシニングセンタなどの工作機械におい
て、被削材または工具を搭載したテーブルが進行方向に
対して垂直な方向に運動誤差を発生するのを排除可能に
したテーブル駆動装置に関するものである。Description: FIELD OF THE INVENTION The present invention relates to a machine tool such as a lathe and a machining center in which a table on which a work material or a tool is mounted causes a motion error in a direction perpendicular to a traveling direction. The present invention relates to a table drive device capable of eliminating the above.
従来のテーブル駆動装置においては、１軸または多軸制
御により単純または複雑な形状をした被削物を面加工す
る場合、被削材または工具を搭載して送りねじにより駆
動されるテーブルが、前記送りねじの振回りに起因して
その進行方向に対して垂直な方向によたり現象を発生
し、これによつて被削材の加工面にうねりを生じて加工
精度を劣化させる問題が発生している。そこで、この対
策として、従来たとえば特開昭58−72761 号公報に記載
されている如く、機構的に送りねじの振回りを吸収する
手段が出願されている。しかるに前記の手段において
は、目的の機能を達成するために油静圧軸受を利用して
いるので、この油静圧軸受に高圧力の油を供給するため
の機器が必要となつて構成が複雑になる。またこれに加
えて前記の圧油供給機器は一般に高価であるので、製作
費が高価になる欠点を有する。In the conventional table drive device, when a simple or complex shape work piece is surface-machined by single-axis or multi-axis control, a table driven by a feed screw with a work material or a tool mounted thereon is Due to the swing of the feed screw, a phenomenon occurs in the direction perpendicular to the traveling direction, which causes undulation on the machined surface of the work material and deteriorates the machining accuracy. ing. Therefore, as a countermeasure against this, a means for mechanically absorbing the swing of the feed screw has been filed as disclosed in, for example, Japanese Patent Laid-Open No. 58-72761. However, in the above-mentioned means, since the hydrostatic bearing is used to achieve the intended function, a device for supplying high-pressure oil to the hydrostatic bearing is required, and the structure is complicated. become. In addition to this, since the pressure oil supply device is generally expensive, it has a drawback that the manufacturing cost is high.
本発明は、テーブルを送りねじで駆動するときに発生す
るテーブルの進行方向と垂直な方向への運動誤差を排除
し、高精度な運動精度を有するテーブル駆動装置を提供
することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to eliminate a movement error in a direction perpendicular to a traveling direction of a table, which occurs when the table is driven by a feed screw, and to provide a table drive device having a highly accurate movement accuracy.
本発明は前記の目的を達成するため、送りねじの回転に
より該送りねじと螺合するナットを介してテーブルを直
進移動させるテーブル駆動装置において、上面に前記テ
ーブルをその進行方向と垂直な方向に微小移動可能な隙
間を設けて搭載し、下面に前記送りねじと螺合するナッ
トを固着してテーブルとともに直進移動するテーブルベ
ースと、テーブルの進行方向と平行な仕上げ面を有する
基準器と、該基準器に対するテーブルの進行方向と垂直
な方向へのテーブルの変位を常時検出する前記テーブル
の進行方向前後位置に設けられた少なくとも２個の微小
変位計からなる検出手段と、前記テーブルを該テーブル
の進行方向に対して垂直な方向に微小移動させて位置補
正する前記テーブルベースとテーブルとの隙間に設置さ
れた２対４個のピエゾ素子からなる補正手段と、該補正
手段の２対４個のピエゾ素子を前記検出手段から得られ
る検出値に基づいて２対同時または１対ずつ個別に電圧
制御可能な制御回路とから構成したものである。In order to achieve the above-mentioned object, the present invention provides a table drive device for moving a table straight through a nut screwed with the feed screw by rotation of the feed screw, wherein the table is placed on a top surface in a direction perpendicular to the traveling direction. A table base that is mounted with a minutely movable gap provided, a nut that is screwed with the feed screw is fixed to the lower surface, and moves straight along with the table; a reference unit that has a finished surface parallel to the traveling direction of the table; Detecting means including at least two minute displacement gauges provided at the front and rear positions of the table in the traveling direction of the table for constantly detecting the displacement of the table in the direction perpendicular to the traveling direction of the table with respect to the reference device; Two to four pins installed in the gap between the table base and the table for finely moving the position in the direction perpendicular to the traveling direction to correct the position. And a control circuit capable of individually controlling the voltage of two pairs of piezoelectric elements of the correction means based on the detection value obtained from the detection means. It is a thing.
以下、本発明の実施例を図に基づいて具体的に説明す
る。Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
〔実施例１〕 第１図および第２図は、本実施例に係るテーブル駆動装
置の概略図で、第１図はその側面図、また第２図はその
上面図である。また第３図及び第４図は、夫々第１図及
び第２図における電圧分圧回路及びピエゾ素子の機能を
補足するための説明図である。[Embodiment 1] FIGS. 1 and 2 are schematic views of a table drive device according to this embodiment, FIG. 1 is a side view thereof, and FIG. 2 is a top view thereof. 3 and 4 are explanatory diagrams for supplementing the functions of the voltage dividing circuit and the piezo element in FIGS. 1 and 2, respectively.
第１図及び第２図において、テーブルベース１はその一
部にナツト２を具備し、該ナツト２と接合された送りね
じ３の回転運動によつてＦ−Ｂ方向に直線的に駆動せし
められるようになつている。なお、前記送りねじ３は減
速機（図示せず）等を介して駆動モータ４に結合され、
該駆動モータ４により回転せしめられるようになつてい
る。また上記駆動モータ４には、モータ制御回路５と該
モータ制御回路５へ指令パルスを供給するための制御指
令回路６とが接続されている。In FIGS. 1 and 2, the table base 1 is provided with a nut 2 in a part thereof, and is driven linearly in the FB direction by the rotational movement of the feed screw 3 joined to the nut 2. It is becoming like this. The feed screw 3 is connected to a drive motor 4 via a speed reducer (not shown),
It can be rotated by the drive motor 4. A motor control circuit 5 and a control command circuit 6 for supplying command pulses to the motor control circuit 5 are connected to the drive motor 4.
他方、前記テーブルベース１には、被削材または工具
（図示せず）と微小変位計７a，７bとを搭載したテーブ
ル８が具備されており、該テーブル８の進行方向Ｆ−Ｂ
と垂直な方向（第２図中Ｌ−Ｒ方向で、Ｆ−Ｂ方向と直
角な水平方向）の両端部を、前記テーブル８をＬ−Ｒ方
向に微小量だけ移動せしめるためのピエゾ素子９a〜９d
で挾込み、更に前記テーブルベース１に組込んでい
る。On the other hand, the table base 1 is provided with a table 8 on which a work material or a tool (not shown) and minute displacement gauges 7a and 7b are mounted, and a traveling direction FB of the table 8 is provided.
A piezoelectric element 9a for moving the table 8 by a small amount in the L-R direction at both end portions in the direction perpendicular to the direction (horizontal direction orthogonal to the F-B direction in the L-R direction in FIG. 2). 9d
And it is incorporated into the table base 1.
また、一面Ａの真直度をサブミクロン・オーダに仕上げ
られた基準器10は、その面Ａが前記テーブル８の進行方
向Ｆ−Ｂと平行になるように機械本体（図示せず）に設
置されている。さらに上記面Ａは前記微小変位計７a，
７bで常時計測するように形成されかつ上記微小変位計
７a，７bの計測結果を増幅し、両者の計測結果の平均を
算出して結果を出力するための平均化回路11が前記微小
変位計７a 及び７b に接続されかつ上記平均化回路11か
ら出力された電圧値を前記ピエゾ素子９a〜９d に分圧
供給するための電圧分圧回路12が接続されている。な
お、前記平均化回路11は駆動直前に平均値が“０”にな
るように前記制御指令回路６によりリセツトされるよう
になつている。Further, the reference device 10 in which the straightness of one surface A is finished to the submicron order is installed on the machine body (not shown) so that the surface A is parallel to the traveling direction FB of the table 8. ing. Further, the surface A is the minute displacement gauge 7a,
The averaging circuit 11, which is formed to always measure with the 7b, amplifies the measurement results of the minute displacement gauges 7a and 7b, calculates the average of both measurement results and outputs the result, And 7b and a voltage dividing circuit 12 for dividing and supplying the voltage value output from the averaging circuit 11 to the piezo elements 9a to 9d. The averaging circuit 11 is reset by the control command circuit 6 so that the average value becomes "0" immediately before driving.
ここで、 前記基準器10は、面Ａの真円度の経年劣化の少ないSi
O2（ガラス），Al2O３（酸化アルミニウム）などのセラ
ミツク材とすることが望ましく、更に計測面に傷が付く
のを防止するため、前記基準器10の面Ａ部に金属物質を
コーテイングし、前記微小変位計７a，７bは静電容量型
あるいは渦電流型等の非接触変位計とすることが望まし
い。また、被削材または工具は、前記微小変位計７a と
７b の中間位置に配置するのが望ましい。これは、もし
両微小変位計７a 及び７b の計測値δa及びδbに差が生
じた場合、両計測値の平均値（(δa＋δb)／２）と前記
中間位置の変位量とがほぼ一致するから、他の算出手順
が不要となるためである。Here, the reference unit 10 is made of Si whose surface A has a circularity with little deterioration with age.
It is desirable to use a ceramic material such as O 2 (glass) or Al 2 O 3 (aluminum oxide), and in order to prevent the measurement surface from being scratched, a metal substance is coated on the surface A of the reference device 10. However, it is desirable that the minute displacement gauges 7a and 7b are non-contact displacement gauges of capacitance type or eddy current type. Further, it is desirable that the work material or the tool is arranged at an intermediate position between the minute displacement gauges 7a and 7b. This is because, if there is a difference between the measured values δa and δb of both the small displacement gauges 7a and 7b, the average value of both measured values ((δa + δb) / 2) and the displacement amount of the intermediate position are almost the same. This is because another calculation procedure is unnecessary.
前記電圧分圧回路12の機能を第３図により詳細に説明
する。前記平均化回路11からの入力電圧値ＶinがOVの
時、前記ピエゾ素子９a,b 及び9c，ｄへの出力電圧値Ｖ
out ab及びＶout cd、両者ともバイアスされた電圧値Ｖ
outBとなるよう調整されている。すなわち、 Ｖout ab＝Ｖout cd＝Ｖout B この点を基準に、前記入力電圧ＶinがOVより大きい場
合、前記出力電圧Ｖout ab 及びＶout cdは の関係が成立するように分圧する。また、逆に前記入力
電圧値ＶinがOVより小さい場合は次の関係が成立するよ
うに分圧する機能を有するものである。すなわち、 なぜなら、前述の如くテーブル８を微小量だけ移動せし
めるため前記テーブル８を第４図示する特性を有するピ
エゾ素子９ａ，９ｂと９ｃ，９ｄでサンドイツチする構
造としたため、例えば、前記ピエゾ素子９a 及び９b を
δだけ伸ばす場合は対向するピエゾ素子９c 及び９d を
δだけ縮める必要があるためである。The function of the voltage dividing circuit 12 will be described in detail with reference to FIG. When the input voltage value Vin from the averaging circuit 11 is OV, the output voltage value V to the piezo elements 9a, b and 9c, d
out ab and V out cd, both of which are biased voltage value V
It is adjusted to be outB. That is, Vout ab = Vout cd = Vout B With reference to this point, when the input voltage Vin is higher than OV, the output voltages Vout ab and Vout cd are The voltage is divided so that On the contrary, when the input voltage value Vin is smaller than OV, it has a function of dividing the voltage so that the following relationship is established. That is, This is because the table 8 has a structure in which the table 8 is moved by a small amount by the piezoelectric elements 9a, 9b and 9c, 9d having the characteristics shown in FIG. 4, so that, for example, the piezoelectric elements 9a and 9b are This is because it is necessary to shrink the opposing piezo elements 9c and 9d by δ when extending by δ.
なお、サンドイツチ構造とした理由は、前記テーブル８
の微小な移動を高剛性かつ高速に行わせるためである。
また、２対のピエゾ素子でテーブルを挾込むようにした
理由は、微小移動時のバランスを考慮したもので、バラ
ンスが取れれば１対でも十分であることは云う迄もな
い。In addition, the reason for adopting the San-Gerache structure is the table 8 above.
This is because the minute movement of the is performed with high rigidity and at high speed.
Further, the reason why the table is sandwiched by the two pairs of piezo elements is to consider the balance during minute movement, and it goes without saying that one pair will suffice if the balance is achieved.
今、テーブル８をＦ−Ｂ方向に移動すべく、制御指令回
路６から指令パルスが出力されると、モータ制御回路５
により駆動モータ４が駆動され、送りねじ３が回転する
と、前記ナツト２によつて前記送りねじ３の回転運動が
Ｆ−Ｂ方向への直線運動に変換され、結果として前記テ
ーブル８がＦ−Ｂ方向へ直線移動する。ところが、前記
送りねじ３の加工精度もしくは組立て精度によつて前記
送りねじ３の回転時に規則正しい振回り現象が生じる。
一般にこの種の動きを蛇行と云うが、その他の不規則な
動きを含めた によつて前記ナツト２，テーブルベース１，テーブル８
しいては被削材または工具をＬ−Ｒ方向に変位せしめら
れる。この時の変位量を前記基準器10との相対変位とし
て前記微小変位計７a 及び７b で計測し、前記平均化回
路11で両計測値の平均を算出し、前記電圧分圧回路12を
介して前記ピエゾ素子９a,９b 及び９c，９dが適切な方
向に相対して伸縮させて前記テーブル８を微小移動し、
前記よたり相当分が補正される。Now, when a command pulse is output from the control command circuit 6 to move the table 8 in the F-B direction, the motor control circuit 5
When the drive motor 4 is driven by and the feed screw 3 rotates, the nut 2 converts the rotational movement of the feed screw 3 into a linear movement in the F-B direction, and as a result, the table 8 moves in the F-B direction. Move straight in the direction. However, due to the processing accuracy or assembly accuracy of the feed screw 3, a regular whirling phenomenon occurs when the feed screw 3 rotates.
Generally, this kind of movement is called meandering, but it also includes other irregular movements. The nut 2, table base 1, table 8
Consequently, the work material or the tool can be displaced in the LR direction. The displacement amount at this time is measured as the relative displacement with respect to the reference device 10 by the minute displacement gauges 7a and 7b, the averaging circuit 11 calculates the average of both measured values, and the voltage dividing circuit 12 is used to calculate the average. The piezo elements 9a, 9b and 9c, 9d are relatively expanded and contracted in an appropriate direction to slightly move the table 8,
A considerable amount is corrected.
上記した様に、本実施例によれば、テーブルの進行方向
と垂直な方向の変位を進行方向と平行に設置された基準
器の面との相対変位として常時計測し、この結果をピエ
ゾ素子を利用してテーブルベースに組込んだテーブルを
微小量移動することにより補正するようにしたため、送
りねじの規則的な振回りや不規則な現象に起因する運動
誤差を排除でき、高精度な運動精度を得ることができ
る。As described above, according to the present embodiment, the displacement in the direction perpendicular to the traveling direction of the table is constantly measured as the relative displacement with respect to the surface of the reference device installed parallel to the traveling direction, and the result is measured by the piezo element. Since the table built into the table base is used to compensate by moving it by a small amount, it is possible to eliminate movement errors caused by regular swinging of the feed screw and irregular phenomena, and highly precise movement accuracy. Can be obtained.
〔実施例２〕 実施例１では、テーブル８と基準器10との相対的な変位
を計測するのに２個の微小変位計７a 及び７b を使用し
たが、このうち１個の微小変位計のみを使用し、被細材
または工具の近傍に配置して前記基準器１０との相対的
な変位を計測するようにすれば、より安価に構成できる
ばかりでなく、実施例１と同様の効果が得られる。[Embodiment 2] In Embodiment 1, two micro displacement gauges 7a and 7b are used to measure the relative displacement between the table 8 and the reference device 10, but only one of them is used. Is used, and the relative displacement with respect to the reference device 10 is measured by arranging it in the vicinity of the thin material or the tool, not only can it be constructed at a lower cost, but also the same effect as that of the first embodiment can be obtained. can get.
〔実施例３〕 第５図は、本発明の他の実施例を示したものである。実
施例１が２個の微小変位計７a，７bの計測値を平均し、
その結果を電圧分圧回路12により分圧して、ピエゾ素子
９a と９b また９c と９d を夫々同じ量だけ、かつ同じ
方向に同時に伸縮させていたのに対し、本実施例では微
小変位計７a 及び７b 毎の計測値を夫々第３図に示す機
能を有する電圧分圧回路12a 及び12b で分圧し、ピエゾ
素子９a〜９dを個別に伸縮するようにした。すなわち、
微小変位計７a の計測値は電圧分圧回路12a によりＶou
t a及びＶout cに分圧し、夫々ピエゾ素子９a 及び９c
と相反して駆動するようになつている。また、微小変位
計７b の計測値は電圧分圧回路12b によりＶout b及び
Ｖout dに分圧し、夫々ピエゾ素子９b 及び９d を相反
して駆動するように構成した。[Embodiment 3] FIG. 5 shows another embodiment of the present invention. Example 1 averages the measured values of the two small displacement gauges 7a and 7b,
The result is divided by the voltage dividing circuit 12 to expand / contract the piezoelectric elements 9a and 9b and 9c and 9d by the same amount and in the same direction at the same time. The measured values for each 7b are divided by the voltage dividing circuits 12a and 12b having the function shown in FIG. 3, respectively, so that the piezo elements 9a to 9d are individually expanded and contracted. That is,
The measured value of the micro displacement gauge 7a is Vou by the voltage dividing circuit 12a.
Piezo elements 9a and 9c are divided into ta and Vout c, respectively.
It is going to drive contrary to. Further, the measured value of the minute displacement gauge 7b is divided into Vout b and Vout d by the voltage dividing circuit 12b, and the piezo elements 9b and 9d are driven oppositely.
この様にすることにより、２個の微小変位計が異なつた
計測値を示すような複雑な運動誤差形態を示す場合で
も、テーブルに搭載した被削材または工具を常に進行方
向と平行になるように補正制御でき、高精度な運動精度
を得ることができる。By doing this, even if the two minute displacement gauges show complicated motion error forms that show different measurement values, the work material or tool mounted on the table is always parallel to the traveling direction. Correction control can be performed, and highly accurate motion accuracy can be obtained.
以上説明したように、送りねじの回転を利用してテーブ
ルを直線移動する駆動装置において、進行方向と平行に
設置された基準器の面に対するテーブルの相対的な変位
を計測し、この結果をピエゾ素子を利用してテーブルを
微小量移動するようにしたものであるから、送りねじの
振回り等に起因するテーブルのよたりを排除でき、高精
度な運動精度が得られる効果を有し、かつ装置を安価に
構成できる効果を有するものである。As described above, in the drive device that linearly moves the table by using the rotation of the feed screw, the relative displacement of the table with respect to the surface of the reference device installed parallel to the traveling direction is measured, and this result is measured by the piezo. Since the table is moved by a small amount by using the element, it is possible to eliminate the tilt of the table due to the swing of the feed screw, etc., and it is possible to obtain a highly accurate motion accuracy, and This has the effect that the device can be constructed at low cost.
第１図及び第２図は、本発明の一実施例であるテーブル
駆動装置の概略図であり、第３図及び第４図は、夫々第
１図及び第２図における電圧分圧回路の機能説明図（第
３図）及びピエゾ素子の機能説明図（第４図）である。 第５図は、本発明の他の実施例におけるテーブル駆動装
置の概略である。 １……テーブルベース、２……ナツト、３……送りね
じ、４……駆動モータ、５……モータ制御回路、６……
制御指令回路、７a，７b……微小変位計、８……テーブ
ル、９a〜９d……ピエゾ素子、10……基準器、11……平
均化回路、１２，１２ａ，１２ｂ……電圧分圧回路。1 and 2 are schematic diagrams of a table drive device according to an embodiment of the present invention, and FIGS. 3 and 4 are functions of the voltage dividing circuit in FIGS. 1 and 2, respectively. It is explanatory drawing (FIG. 3) and a function explanatory drawing (FIG. 4) of a piezo element. FIG. 5 is a schematic diagram of a table driving device according to another embodiment of the present invention. 1 ... Table base, 2 ... Nut, 3 ... Feed screw, 4 ... Drive motor, 5 ... Motor control circuit, 6 ...
Control command circuit, 7a, 7b ... Micro displacement meter, 8 ... Table, 9a-9d ... Piezo element, 10 ... Standard, 11 ... Averaging circuit, 12, 12a, 12b ... Voltage dividing circuit .
Claims (1)
るナットを介してテーブルを直進移動させるテーブルの
駆動装置において、上面に前記テーブルをその進行方向
と垂直な方向に微小移動可能な隙間を設けて搭載し、下
面に前記送りねじと螺合するナットを固着してテーブル
とともに直進移動するテーブルベースと、テーブルの進
行方向と平行な仕上げ面を有する基準器と、該基準器に
対するテーブルの進行方向と垂直な方向へのテーブルの
変位を常時検出する前記テーブルの進行方向前後位置に
設けられた少なくとも２個の微小変位計からなる検出手
段と、前記テーブルを該テーブルの進行方向に対して垂
直な方向に微小移動させて位置補正する前記テーブルベ
ースとテーブルとの隙間に設置された２対４個のピエゾ
素子からなる補正手段と、該補正手段の２対４個のピエ
ゾ素子を前記検出手段から得られる検出値に基づいて２
対同時または１対ずつ個別に電圧制御可能な制御回路と
から構成したことを特徴とするテーブルの駆動装置。1. A drive device for a table, wherein a table is linearly moved by a nut screwed with the feed screw by rotation of the feed screw, wherein a gap is formed on the upper surface of the table so that the table can be finely moved in a direction perpendicular to the moving direction. Is mounted and mounted, a table base that moves straight with the table by fixing a nut screwed with the feed screw to the lower surface, a reference device having a finishing surface parallel to the traveling direction of the table, and a table for the reference device. Detecting means including at least two minute displacement gauges provided at front and rear positions of the table in the direction of travel of the table for constantly detecting displacement of the table in a direction perpendicular to the direction of travel, and the table with respect to the direction of travel of the table. Compensation consisting of 2 to 4 piezo elements installed in a gap between the table base and the table for finely moving in the vertical direction to correct the position. And the step, based on two pairs of four piezoelectric elements of said correction means in the detection value obtained from the detection means 2
A table drive device comprising a control circuit capable of voltage control for pairwise simultaneous or individual pairwise control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189785A JPH0639042B2 (en) | 1985-03-05 | 1985-03-05 | Table drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189785A JPH0639042B2 (en) | 1985-03-05 | 1985-03-05 | Table drive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203253A JPS61203253A (en) | 1986-09-09 |
| JPH0639042B2 true JPH0639042B2 (en) | 1994-05-25 |
Family
ID=12621073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4189785A Expired - Lifetime JPH0639042B2 (en) | 1985-03-05 | 1985-03-05 | Table drive |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639042B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06105346B2 (en) | 1986-11-07 | 1994-12-21 | 富士写真フイルム株式会社 | Processing method of silver halide color photographic light-sensitive material |
| JPS63191559A (en) * | 1987-02-04 | 1988-08-09 | Mazda Motor Corp | Swivel device for grinding machine |
| JP2529379Y2 (en) * | 1989-09-07 | 1997-03-19 | 株式会社ユニシアジェックス | Throttle valve device |
| JPH0811354B2 (en) * | 1989-11-27 | 1996-02-07 | オ−クマ株式会社 | Straightness correction device for feed unit |
-
1985
- 1985-03-05 JP JP4189785A patent/JPH0639042B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61203253A (en) | 1986-09-09 |
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